Pfeiffer Vacuum PBR 360 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
PBR 360
Pirani/Bayard-Alpert gauge

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support
you in your individual application with maximum performance and without malfunctions. The
name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on product 8
1.3.4 Abbreviations 8
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 12
2.4 Proper use 13
2.5 Foreseeable improper use 13
2.6 Responsibilities and warranty 13
3 Product description 14
3.1 Function 14
3.1.1 Measurement systems 14
3.1.2 Gauge mode of operation 14
3.1.3 Measuring range 14
3.1.4 Bayard-Alpert measurement system 15
3.1.5 Pirani measurement system 15
3.2 Identifying the product 16
3.3 Scope of delivery 16
4 Transport and storage 17
4.1 Transporting the product 17
4.2 Storing the product 17
5 Installation 18
5.1 Establishing vacuum connection 18
5.2 Electronic unit 19
5.3 Establishing electric connection 21
6 Operation 23
6.1 Monitoring operating condition 23
6.2 Selecting switch-on and switch-off range 23
6.3 Converting measuring signal and pressure 24
6.4 Determining effective pressure with correction factors 25
6.5 Performing degassing 27
6.6 Baking out gauge 28
7 Dismantling 29
8 Maintenance 31
8.1 Cleaning components 31
8.2 Calibrating gauge 32
8.3 Replacing measurement system 34
9 Malfunctions 35
10 Shipping 36
Table of contents
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11 Recycling and disposal 37
11.1 General disposal information 37
11.2 Dispose of gauges 37
12 Service solutions by Pfeiffer Vacuum 38
13 Spare parts 40
14 Accessories 41
14.1 Accessory information 41
14.2 Ordering accessories 41
15 Technical data and dimensions 42
15.1 General 42
15.2 Technical data 42
15.3 Dimensions 45
EC Declaration of Conformity 47
UK Declaration of Conformity 48
Table of contents
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List of tables
Tbl. 1: Applicable documents 7
Tbl. 2: Variants 7
Tbl. 3: Abbreviations used 9
Tbl. 4: Status display 23
Tbl. 5: Constants for converting measuring signal and pressure 25
Tbl. 6: Conversion table 25
Tbl. 7: Correction factor for Pirani-only operation 26
Tbl. 8: Correction factors for HIMS 27
Tbl. 9: Status display 33
Tbl. 10: Troubleshooting 35
Tbl. 11: Conversion table: Pressure units 42
Tbl. 12: Conversion table: Units for gas throughput 42
Tbl. 13: Measured and pressure values 42
Tbl. 14: Calibration 43
Tbl. 15: Degas 43
Tbl. 16: Electrical data 43
Tbl. 17: Internal volume and weight 44
Tbl. 18: Ambient conditions 44
Tbl. 19: Temperatures 44
Tbl. 20: Substances in contact with the media 44
List of tables
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List of figures
Fig. 1: Design of the transmitter 14
Fig. 2: Measuring configuration 15
Fig. 3: Design of the Bayard-Alpert measurement system 15
Fig. 4: Establishing vacuum connection 19
Fig. 5: Electronic unit 20
Fig. 6: Connection diagram 21
Fig. 7: Measurement cable and Hirschmann cable socket 22
Fig. 8: Selecting switch-on and switch-off range 24
Fig. 9: Relation between measuring signal and pressure 24
Fig. 10: Measurement curve for Pirani-only operation and when using the correction
factors
26
Fig. 11: Removing gauge 30
Fig. 12: Calibrating gauge 33
Fig. 13: Replacing measurement system 34
Fig. 14: Dimensions of DN 25 ISO-KF 45
Fig. 15: Dimensions of DN 40 ISO-KF 45
Fig. 16: Dimensions of DN 40 CF-R 46
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
OmniControl “Control unit” operating instructions PT 0670
TPG 366 “Total Pressure Measuring and Control Unit” operating in-
structions
BG 5501
Declaration of conformity A component of these in-
structions
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following article numbers:
Article number Designation
PT R27 010 PBR 360, DN 25 ISO-KF
PT R27 011 PBR 360, DN 40 ISO-KF
PT R27 012 PBR 360, DN 40 CF-R
Tbl. 2: Variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
Information that relates to only one of the products is indicated accordingly.
The figures in this document are not to scale.
Graphics without a caption reflect the product featuring a DN 25 ISO-KF vacuum connection, however,
they also apply for the other vacuum connections accordingly.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
About this manual
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1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on product
This section describes all the stickers on the product along with their meanings.
D-35614 Asslar
Mod.
P/N
S/N
Input
PBR 360
PT R27 01x
12345678
20...30 V DC 9.0 W
Made in Germany 2022/11
Range - 1000 hPa5.0x10-10
Rating plate
The rating plate is located on the back of the
device.
1.3.4 Abbreviations
Abbreviation Explanation
ATM Atmosphere
BA Bayard-Alpert
c Constant for converting measuring signal and pressure
C Correction factor for calculating the pressure of gases other than air
Sensitivity of the Bayard-Alpert measurement system for nitrogen
About this manual
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Abbreviation Explanation
EC Electron collector
EMI Emission
F Filament
FPM Fluoropolymer rubber
HIMS Hot cathode ionization measurement system
HV High vacuum
IC Ion collector
LED Light emitting diode
LPS Limited power source
MSL Mean sea level
p Pressure
P Pirani
PELV Protective extra low voltage
PLC Programmable logical controller
U Measuring signal [V] (output voltage)
Tbl. 3: Abbreviations used
1.4 Trademark proof
●FullRange® is a trademark of Pfeiffer Vacuum GmbH.
●Hirschmann® is a registered trademark of Hirschmann Electronics GmbH.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during installation
DANGER
Danger to life due to electric shock
An improperly grounded product is potentially fatal in the event of a fault.
►Connect the product galvanically with the grounded vacuum chambers.
►Ensure that the connection complies with the requirements of a protective connection according
to EN 61010. (CF and VCR connections comply with this requirement.)
►Use electrically conductive centering and clamping rings for KF connections.
Safety
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DANGER
Danger to life due to dangerous contact voltage
Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If
you come into contact with dangerous contact voltage, this can result in injury through electric shocks
or even death.
►Only connect the product to devices which meet the following criteria:
●Requirements of the earthed protective extra-low voltage (PELV)
●Limited power source (LPS) Class 2
►Secure the line to the product.
–Pfeiffer Vacuum measuring and control equipment complies with this requirement.
Risks during operation
DANGER
Danger to life from electric shock caused by moisture ingress
Water that has entered the unit will result in personal injury through electric shocks.
►Only operate the unit in a dry environment.
►Operate the unit away from fluids and sources of moisture.
►Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service.
►Always disconnect the power supply before cleaning the unit.
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure > 1000 hPa in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures > 2500 hPa. This
could prove harmful to health due to escaping process medium.
►Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
►Use suitable tensioning pieces for overpressure.
►Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
►Use sealing rings with an outer centering ring.
Risks during maintenance
DANGER
Danger to life from electric shock caused by moisture ingress
Water that has entered the unit will result in personal injury through electric shocks.
►Only operate the unit in a dry environment.
►Operate the unit away from fluids and sources of moisture.
►Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service.
►Always disconnect the power supply before cleaning the unit.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
Safety
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WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
Safety
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►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Proper use
The FullRange gauge is used to measure the vacuum of gases within the range of
5 × 10-10 to 1000 hPa.
Use the product according to its intended purpose
►Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an
evaluation unit provided by the customer.
►Install, operate and maintain the gauge exclusively as prescribed in these operating instructions.
►Observe the limits of use according to the technical data.
►Observe the technical data.
2.5 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
●Use outside the mechanical and electrical limits of use
●Use with corrosive or explosive media, if this is not explicitly permitted
●Use for the measurement of highly flammable or combustible gases mixed with an oxidizing agent
(e.g. atmospheric oxygen) within the explosion limits
●Use outdoors
●Use after technical changes (inside or outside on the product)
●Use with replacement or accessory parts that are not suitable or not approved
2.6 Responsibilities and warranty
Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party:
●disregards this document
●does not use the product for its intended purpose
●carries out any modifications to the product (conversions, changes, etc.) that are not listed in the
corresponding product documentation
●operates the product with accessories that are not listed in the corresponding product documenta-
tion
The operator is responsible for the process media used.
Safety
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3 Product description
3.1 Function
emi on
P BA
high
low
hard
adj
1
3 2
Fig. 1: Design of the transmitter
1 LED "emi on" (emission / hot cathode) 3 Switch for switchover point between Pi-
rani and hot cathode
2 Button "adj" for atmospheric and zero point calibration
3.1.1 Measurement systems
The gauge has two measurement systems:
●Pirani measurement system (control area)
●Hot cathode ionization measurement system (HIMS) according to Bayard-Alpert (BA)
3.1.2 Gauge mode of operation
The Pirani measurement signal is always switched on. It is used to switch the HIMS on and off, thus
protecting the HIMS from burning out or excessive contamination. You can choose between 3 different
switch-on/off configurations. If the measured pressure is higher than the switch-on threshold pon, the
HIMS remains switched off and the Pirani measured value appears as an output signal. The gauge acti-
vates the HIMS controlled by the Pirani measurement system only when the value falls below the
switch-on threshold pon. The hot cathode is ready for operation after a few seconds start-up time. The
"emi on" LED is lit continuously and the hot cathode measured value is present at the output. If the
pressure increases above the switch-off threshold poff, the gauge switches off the HIMS and the "emi
on" LED is unlit. The Pirani measured value appears again at the output.
3.1.3 Measuring range
The gauge covers the measuring range from 5 × 10-10 to 1000 hPa.
The gauge has a continuous characteristic throughout the entire range. The measuring signal is loga-
rithmically dependent on the pressure across the entire range. In a defined overlapping range, the
gauge outputs a mixed signal of the two measurement systems. Above this range the gauge outputs the
Pirani signal only, below it the hot cathode signal only. The gauge applies the optimum measuring con-
figuration to the respective pressure range.
Product description
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5 × 10-10 hPa
Plower
1000 hPa
Pirani
Pon
Poff
Pupper
Hot cathode
Fig. 2: Measuring configuration
The switching point Pon is the point at which the HIMS switches on when the pressure decreases. The
switching point Poff is the point at which the HIMS switches off when the pressure increases. The transi-
tion area between Pupper and Plower is the pressure area in which the gauge proportionally uses both the
Pirani measurement system and the HIMS to determine the pressure. The Pirani proportion decreases
as the pressure decreases. In the "hard" switch position, the switchover between Pirani and HIMS is
immediate, without a transition.
3.1.4 Bayard-Alpert measurement system
The electrode system according to Bayard-Alpert is designed for a low X-ray limit. Electrons emitted by
the filament (F1 or F2) ionize a number of molecules that is proportional to the pressure in the measuring
chamber. The ion collector (IC) acquires the ion current I+ generated in this way and feeds it to the elec-
trometer amplifier of the gauge electronics. The ion current depends on the emission current Ie, the gas
type and the gas pressure p according to the relationship:
I+ = Ie × p × C
Factor C is referred to as the sensitivity of the gauge. It is determined for nitrogen (N2) and is taken into
account for the output signal that is logarithmically dependent on the pressure. The lower measurement
limit is 5 × 10-10 hPa. In order for the entire range of 5 × 10-10 to 1 × 10-2 hPa to be covered in a mean-
ingful way, the emission current and signal amplification are adapted to the pressure range. In the high-
pressure range, low emission currents are used, while high emission currents are used in the low-pres-
sure range. After the switchover, the pressure value stays at the same value for a short time, until the
new condition has stabilized.
The gauge is equipped with two filaments. If the first filament fails, an automatic switchover to the sec-
ond filament occurs.
ECIC
F
V FIL V AN
F!
EC
IC
F F!
Fig. 3: Design of the Bayard-Alpert measurement system
F1 und F2Filament 1 and 2 (hot cathodes) VFIL Filament reference voltage
IC Ion collector (collector) VAN Anode voltage
EC Electron collector (anode grid)
3.1.5 Pirani measurement system
The heat conductivity of gases is pressure-dependent within certain limits. This physical phenomenon is
utilized in the Pirani thermal conductivity vacuum gauge to measure the pressure. A self-calibrating
bridge circuit is used as the measuring circuit. A thin tungsten wire is the actual measuring element.
With a suitable control circuit, the resistance of the wire and thus its temperature are kept constant. The
Product description
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electrical power that is fed to the wire is a measure for the power dissipated in the gas through heat
conduction and therefore a measure for the gas pressure. As the pressure increases, convection and
other effects are increasingly superimposed on the heat transmission. This means that, in the range of
>100 hPa, accurate pressure measurements can no longer be performed with the Pirani measurement
system.
3.2 Identifying the product
You will need all the data from the rating plate to safely identify the product when communicating with
Pfeiffer Vacuum.
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
3.3 Scope of delivery
●Gauge
●Operating instructions
Unpacking the product and checking completeness of the shipment
1. Unpack the product.
2. Remove the transport fasteners, transport protection etc.
3. Store the transport fasteners, transport protection etc. in a safe place.
4. Check that the shipment is complete.
5. Ensure that no parts are damaged.
Product description
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4 Transport and storage
4.1 Transporting the product
NOTICE
Damage caused by incorrect transport
Transport in unsuitable packaging or failure to install all transport locks can result in damage to the
product.
►Comply with the instructions for safe transport.
Packing
We recommend keeping the transport packaging and original protective cover.
Transport product safely
►Observe the weight specified on the transport packaging.
►Where possible, always transport or ship the product in the original transport packaging.
►Always use dense and impact-proof transport packaging for the product.
►Remove the existing protective cover and transport protections only immediately prior to installa-
tion.
►Reattach transport locks and transport protections prior to each transport.
4.2 Storing the product
NOTICE
Damage caused by improper storage
Improper storage will lead to damage to the product.
Static charging, moisture, etc. will lead to defects on the electronic components.
►Comply with the instructions for safe storage.
Packing
We recommend storing the product in its original packaging.
Store product safely
►Store the product in a cool, dry, dust-free place, where it is protected against impacts and me-
chanical vibration.
►Always use dense and impact-proof packaging for the product.
►Where possible, store the product in its original packaging.
►Store electronic components in antistatic packaging.
►Maintain the permissible storage temperature.
►Avoid extreme fluctuations of the ambient temperature.
►Avoid high air humidity.
►Seal connections with the original protective caps.
►Protect the product with the original transport protection (where available).
Transport and storage
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5 Installation
5.1 Establishing vacuum connection
DANGER
Danger to life due to electric shock
An improperly grounded product is potentially fatal in the event of a fault.
►Connect the product galvanically with the grounded vacuum chambers.
►Ensure that the connection complies with the requirements of a protective connection according
to EN 61010. (CF and VCR connections comply with this requirement.)
►Use electrically conductive centering and clamping rings for KF connections.
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure > 1000 hPa in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures > 2500 hPa. This
could prove harmful to health due to escaping process medium.
►Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
►Use suitable tensioning pieces for overpressure.
►Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
►Use sealing rings with an outer centering ring.
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
Prerequisites
●Appropriate ambient conditions
●Operating temperature within permissible range
●Adequate room available for electrical connection (e.g. permissible bending radii for cables)
Installation
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5
1
4
3
2
Fig. 4: Establishing vacuum connection
1 Seal with centering ring 4 Seal with centering ring and filter
2 Gauge 5 Tensioning piece
3 Protective cap
Recommendations
1. If possible, make sure that the gauge is not exposed to any vibrations during operation, as vibra-
tions will lead to deviations in the measured values.
2. Ensure that the button and the switch for the switch-on/off range of the gauge can be easily ac-
cessed once fitted.
3. Mount the gauge in a horizontal to upright mounting orientation (flange facing downwards).
–This prevents condensate and particles from accumulating in the measurement chamber.
4. Use a metal seal as the vacuum flange seal; plastic seals (e.g. FPM) can already impair the
measurement accuracy in the range of 10-6 hPa due to gas emission.
5. Remove the electronic unit of the gauge temporarily wherever installation is only possible with the
electronic unit removed.
–This will facilitate assembly of the CF flange connection.
Procedure
1. Remove the protective cap and store in a safe place.
2. Assemble the gauge with vacuum components from the Pfeiffer Vacuum Components Shop on
the vacuum system.
5.2 Electronic unit
DANGER
Danger to life due to electric shock
An improperly grounded product is potentially fatal in the event of a fault.
►Connect the product galvanically with the grounded vacuum chambers.
►Ensure that the connection complies with the requirements of a protective connection according
to EN 61010. (CF and VCR connections comply with this requirement.)
►Use electrically conductive centering and clamping rings for KF connections.
Installation
19/50

NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
Remove the electronic unit to facilitate installation and bake out the gauge.
12
3
5
4
Fig. 5: Electronic unit
1 Knurled nuts 4 Seal
2 Sealing washers 5 Electronic unit
3 Measurement system
Removing the electronic unit
1. Loosen the knurled nuts on the electronic unit.
2. Remove the electronic unit without any rotary movement of the measuring system.
Installing the electronic unit
1. Carefully fit the electronic unit onto the measurement system.
2. Note the arrangement of the pins and the groove.
3. Push the electronic unit as far as the limit stop.
4. Fasten the knurled nuts to the electronic unit.
Installation
20/50