Pfeiffer Vacuum GSD 350 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
GSD 350 OMNISTAR/THERMOSTAR
Gas analysis system

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new gas analysis system is
designed to support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. From this
extensive, practical experience we have gained a large volume of information that can
contribute to efficient deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 10
1.1 Validity 10
1.1.1 Applicable documents 10
1.1.2 Variants 11
1.2 Target group 11
1.3 Conventions 12
1.3.1 Instructions in the text 12
1.3.2 Pictographs 12
1.3.3 Stickers on the product 12
1.3.4 Abbreviations 13
1.4 Trademark proof 14
2 Safety 15
2.1 General safety information 15
2.2 Safety instructions 15
2.3 Safety precautions 18
2.4 Proper use 19
2.5 Foreseeable improper use 19
2.6 Responsibilities and warranty 19
2.7 Owner requirements 19
2.8 Personnel qualification 20
2.8.1 Ensuring personnel qualification 20
2.8.2 Personnel qualification for maintenance and repair 20
2.8.3 Advanced training with Pfeiffer Vacuum 21
2.9 Operator requirements 21
3 Product description 22
3.1 Functional description 22
3.2 Controls and indicators 23
3.3 Layout of the unit 24
3.3.1 Basic unit 24
3.3.2 Terminal area 25
3.3.3 Gas inlet system 25
3.3.4 Calibration unit 27
3.3.5 High vacuum system 27
3.3.6 Fore-vacuum system 28
3.3.7 Sealing gas system 28
3.3.8 Gas analysis unit 29
3.3.9 Heating and insulation 30
3.3.10Electronic components 32
3.4 Interfaces and connections 33
3.4.1 Mains power supply 33
3.4.2 Ground terminal 33
3.4.3 "USER IO" connection 34
3.4.4 "AUX IO" connection 35
3.4.5 "Ethernet" (LAN) connection 36
3.5 Identifying the product 36
3.6 Scope of delivery 37
4 Transport and storage 38
4.1 Transporting the product 38
4.2 Storing the product 38
5 Installation 40
5.1 Ensuring venting of the unit 40
5.2 Establishing mains connection 41
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5.3 Establishing the Ethernet connection 41
5.4 Connecting the exhaust duct 41
5.4.1 Trimming the exhaust gas hose 41
5.4.2 Connecting/disconnecting the exhaust gas hose 42
5.5 Connecting the sealing gas line 43
5.5.1 Trimming the sealing gas hose 43
5.5.2 Connecting/disconnecting the sealing gas line 43
5.6 Connecting the capillary 44
5.6.1 Connecting the stainless steel capillary 45
5.6.2 Connecting the quartz capillary 45
5.7 Adjusting the position of the capillary hose 45
5.8 Establishing a network connection 46
5.8.1 IP addresses 46
5.8.2 Sub-networks 47
5.8.3 Changing the IP address of the unit 47
5.8.4 Changing the host computer IP address 48
5.9 Installing the PV MassSpec software 48
6 Commissioning 49
6.1 Switching on the device 49
6.2 Starting the pumping system 49
7 Operation via the display 51
7.1 "Dashboard" screen 51
7.2 "Info" menu 53
7.3 "Settings" menu 53
7.3.1 Creating and editing measurement recipes 55
7.3.2 Adjusting the heating units 56
7.3.3 Adjusting the sensors 57
7.3.4 Setting the language 58
7.3.5 Setting autostart functions 58
7.3.6 Setting the network parameters 59
7.3.7 Adjusting the GSD system parameters 59
7.3.8 Resetting the unit to the factory settings 60
7.3.9 Service 60
7.4 "Messages" menu 60
7.5 "Control" menu 60
7.5.1 Pumping down the vacuum system 61
7.5.2 Venting the vacuum system 61
7.5.3 Switching the heating units on and off 62
7.5.4 Opening and closing the gas inlet (OmniStar) 62
7.5.5 Baking out the vacuum chamber 62
7.5.6 Switching emission on and off 63
7.5.7 Switching the electron multiplier on and off 63
7.5.8 Opening and closing the calibration valve 64
7.6 "Measurement" menu 64
8 Decommissioning 65
9 Maintenance 66
9.1 Maintenance work and intervals 66
9.2 Maintaining the basic unit 68
9.2.1 Removing/attaching the gas inlet cover 69
9.2.2 Removing/attaching the side covers 69
9.2.3 Removing/attaching the housing cover 70
9.2.4 Cleaning housing parts 71
9.2.5 Cleaning the protection screens on the fans 72
9.3 Maintaining the high vacuum system 73
9.3.1 Replace operating fluid reservoir on turbopump 73
9.3.2 Replace venting valve 73
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9.4 Maintaining the fore-vacuum system 75
9.4.1 Replacing the diaphragm pump 75
9.4.2 Replace diaphragm pump diaphragms 76
9.5 Maintaining the gas analysis unit 77
9.5.1 Maintaining the QMA 250 M analyzer 77
9.5.2 Maintaining the total pressure gauge 79
9.6 Maintaining the gas inlet system of the OmniStar 80
9.6.1 Removing the gas inlet flange 81
9.6.2 Replacing the screen 82
9.6.3 Replacing the interior gas guide and screen 82
9.6.4 Installing the gas inlet flange 82
9.7 Maintaining the gas inlet system of the ThermoStar 83
9.7.1 Removing the gas inlet flange 84
9.7.2 Replacing the screen 85
9.7.3 Replacing the interior gas guide and screen 85
9.7.4 Installing the gas inlet flange 85
9.8 Servicing the capillary 86
9.8.1 Shorten the stainless steel capillary 86
9.8.2 Replace the stainless steel capillary 87
9.8.3 Trimming the quartz capillary 88
9.8.4 Replace the quartz capillary 89
9.9 Maintaining the heating units 90
9.9.1 Replacing the capillary hose 91
9.9.2 Maintaining the gas inlet heating 91
9.9.3 Servicing the vacuum chamber heating 91
9.10 Maintaining the electronic components 91
9.10.1Replacing the display 91
9.10.2Replacing the PoE injector 92
9.10.3Replacing the mainboard 92
9.10.4Replacing the power supply pack 92
9.10.5Replacing the QME 250 electronic unit 92
9.10.6Replacing the TC 110 electronic drive unit on the turbopump 92
9.11 Maintaining the calibration unit 93
9.11.1Refilling with calibration medium 93
9.11.2Replacing the calibration valve 93
9.12 Additional maintenance work for the corrosive gas version 94
9.12.1Replacing the sealing gas valve 94
9.12.2Replacing the manual pressure regulator 95
9.12.3Replacing the digital pressure regulator 95
10 Troubleshooting 96
11 Shipping 100
12 Recycling and disposal 101
12.1 General disposal information 101
12.2 Dispose of a gas analysis system 101
13 Service solutions by Pfeiffer Vacuum 102
14 Spare parts 104
15 Special tool 105
16 Accessories 106
16.1 Accessory information 106
16.2 Ordering accessories 106
17 Technical data and dimensions 107
17.1 General 107
17.2 Technical data 107
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17.3 Dimensions 111
Certification 112
Declaration of conformity 113
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List of tables
Tbl. 1: Applicable documents 10
Tbl. 2: Variants 11
Tbl. 3: Features of variants 11
Tbl. 4: Abbreviations used 14
Tbl. 5: Symbols and colors of the status and components icons 24
Tbl. 6: Status LEDs and their meanings 24
Tbl. 7: Heating units on the unit 30
Tbl. 8: Status of the Ethernet connection 36
Tbl. 9: Examples for Sub-networks 47
Tbl. 10: Menu structure with functions 53
Tbl. 11: Maintenance work and intervals 68
Tbl. 12: Determined sensitivity of the PrismaPro 78
Tbl. 13: Troubleshooting 99
Tbl. 14: Spare parts 104
Tbl. 15: Special tool 105
Tbl. 16: Accessories 106
Tbl. 17: Conversion table: Pressure units 107
Tbl. 18: Conversion table: Units for gas throughput 107
Tbl. 19: Technical data OmniStar 109
Tbl. 20: Technical data ThermoStar 111
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 13
Fig. 2: Vacuum diagram of the OmniStar 22
Fig. 3: Vacuum diagram of the ThermoStar 22
Fig. 4: Additionally sealing gas supply in corrosive gas version 23
Fig. 5: Display with operator keys 23
Fig. 6: Housing parts 24
Fig. 7: Terminal area with interfaces and connections 25
Fig. 8: Gas inlet systems 26
Fig. 9: Calibration unit at the gas inlet 27
Fig. 10: Diaphragm Pump 28
Fig. 11: Sealing gas system 29
Fig. 12: Gas analysis unit components 30
Fig. 13: Vacuum chamber heating and insulation 31
Fig. 14: Gas inlet heating 31
Fig. 15: Capillary heating 32
Fig. 16: Electronic components 32
Fig. 17: Mains connection with main switch and fuse 33
Fig. 18: Mains cable with cold-device plug C13 33
Fig. 19: Connection for functional earth 34
Fig. 20: "USER IO" connection 35
Fig. 21: "AUX IO" connection 36
Fig. 22: "Ethernet" (LAN) connection 36
Fig. 23: Assembly aid for QMA 250 Analyzer 37
Fig. 24: Venting openings on the sides of the unit 40
Fig. 25: Mains connection with IEC 320 C13 socket 41
Fig. 26: Trimming the exhaust gas hose 42
Fig. 27: Connecting and disconnecting the exhaust gas hose 42
Fig. 28: Trimming the sealing gas hose 43
Fig. 29: Connecting/disconnecting the sealing gas line 44
Fig. 30: Connecting the capillary 45
Fig. 31: Capillary hose as-delivered position 46
Fig. 32: "Dashboard" screen after starting the program 49
Fig. 33: "Control" screen 50
Fig. 34: "Dashboard" screen 51
Fig. 35: Example of parameter setting 54
Fig. 36: "Measurement recipes" submenu 55
Fig. 37: Measurement recipe for "Spectrum Scan" measuring mode 55
Fig. 38: Measurement recipe for " Selected Masses" measuring mode 56
Fig. 39: Tempering mode of the vacuum chamber 57
Fig. 40: "Language" submenu 58
Fig. 41: "Autostart" submenu 58
Fig. 42: "Network" submenu 59
Fig. 43: "GSD system parameters" submenu 59
Fig. 44: "Factory settings" submenu 60
Fig. 45: "Control" menu 61
Fig. 46: Removing/attaching the gas inlet cover 69
Fig. 47: Removing/attaching the side covers 70
Fig. 48: Removing/attaching the housing cover 71
Fig. 49: Unit underside 73
Fig. 50: Venting valve on the turbopump 74
Fig. 51: Replacing the diaphragm pump 75
Fig. 52: Connect the exhaust gas and intake hose, and draw off 75
Fig. 53: PrismaPro Quadrupole mass spectrometer 77
Fig. 54: Groove on analyzer 78
Fig. 55: Total pressure gauge on the gas analysis unit 79
Fig. 56: Parts of the internal gas guide on OmniStar 80
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Fig. 57: Disassemble the valve block 81
Fig. 58: Part of the internal gas guide 83
Fig. 59: Removing the gas inlet flange 84
Fig. 60: Length of stainless steel capillary with clamping collar fitting 86
Fig. 61: Notch and snap off the stainless steel capillary 87
Fig. 62: Clamp collar fitting for the stainless steel capillary 88
Fig. 63: Notching and snapping off the quartz capillary 89
Fig. 64: Front fitting of the quartz capillary 90
Fig. 65: Replacing the display 92
Fig. 66: Calibration unit 93
Fig. 67: Sealing gas valve on the turbopump 94
Fig. 68: Wrench PV M40 813 for housing cover of turbopump 105
Fig. 69: Capillary hose adapter 106
Fig. 70: Dimensions 111
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"GSD 350 OmniStar/ThermoStar" operating instructions
Operation via web interface and PV MassSpec
DA 0106
"Quadrupole mass spectrometer" operating instructions
QMG 250 PrismaPro
BG 6001
"Quadrupole mass spectrometer" quick start guide
QMG 250 PrismaPro
BG 6003
"Diaphragm pump" operating instructions
MVP 010-3 DC
PU 0071
"Turbopump" operating instructions
HiPace 80
PT 0208
"Turbopump" supplementary information
SplitFlow 80
PT 0635
“Electronic drive unit” operating instructions
TC 110
PT 0204
"Total pressure gauge" operating instructions
DigiLine Pirani/ Cold cathode gauge MPT 200 AR
PG 0025
"Analog Relay" supplementary information
DigiLine Gauge
PG 0029
"Mini angle valve" operating instructions 1)
EVI 005 M
BP 5120
“Venting valve” operating instructions PT 0228
"Sealing gas valve" operating instructions 2) PT 0229
Software documentation
PV MassSpec
(Part of the software)
Safety data sheet 3)
Perfluorotributylamine (PFTBA)
-
"Pressure monitoring" operating instructions 4) -
Declaration of conformity (Component of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1) only for version with calibration unit
2) only for corrosive gas version
3) only for version with calibration unit
4) only for corrosive gas version
About this manual
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1.1.2 Variants
This document applies to products with the following part numbers:
Variant Version Analyzer with filament Gas inlet Mass range Display
PT Q8 = OmniS-
tar
0 = Standard
GSD 350 O
1 = Corrosive gas
GSD 350 O C
1 = Ir-Y2O3 (calibration unit)
2 = Ir-Y2O3
5 = W (calibration unit)
6 = W
161 = Stainless steel /
without capillary tube
1 = 100 u
2 = 200 u
3 = 300 u
0 = yes
1 = no
171 = Stainless steel /
1 m / heating 200 °C
172 = Stainless steel /
2 m / heating 200 °C
173 = Stainless steel /
1 m / heating 350 °C
PT Q9 = Thermo-
Star
0 = Standard
GSD 350 T
1 = Corrosive gas
GSD 350 T C
1 = Ir-Y2O3 (calibration unit)
2 = Ir-Y2O3
5 = W (calibration unit)
6 = W
101 = Quartz / without ca-
pillary tube
1 = 100 u
2 = 200 u
3 = 300 u
0 = yes
1 = no
111 = Quartz / 1 m / heat-
ing 200 °C
112 = Quartz / 2 m / heat-
ing 200 °C
113 = Quartz / 1 m / heat-
ing 350 °C
Tbl. 2: Variants
Breakdown based on the example of part number PT Q80 217 110
●OmniStar version
●Standard version
●Analyzer with filament made of Ir-Y2O3, without calibration unit
●Gas inlet with 1 m stainless steel capillary and heating up to 200 °C
●Mass range up to 100 u
●Version with display
Feature OmniStar ThermoStar
Capillary Stainless steel
(OD = 1/16", ID = 0.15 mm)
Quartz
(OD 0.23 mm, ID = 0.15 mm)
Gas inlet screen Platinum/Iridium Platinum/Iridium
Gas inlet Controlled by 2 valves Continuously open
Options ● Heating to 200 °C or 350 °C
● Corrosive gas version with sealing gas connection
● Calibration unit for calibrating the mass scale
(Calibration medium for mass calibration: PFTBA)
Tbl. 3: Features of variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
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The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
D-35614 Asslar
Mod.
P/N
S/N
Input
GSD 350
PT Q80 ...
...
... Made in Germany 2020/02
Rating plate (example)
Rating plate of the unit.
Warning hot surface
This sticker warns of injuries caused by high temperatures
in case of touching without protection during operation.
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1
2
Fig. 1: Position of the stickers on the product
1 "Warning hot surface" sticker 2 Rating plate
1.3.4 Abbreviations
Abbreviation Explanation
AD External diameter
AI Analog input
AO Analog output
ATEX Areas with a risk of explosive atmosphere (atmosphères explosibles)
C/B Cross beam (ion source type)
DCU Display and Control Unit
DHCP Communication protocol for assigning the network configuration (Dynamic Host
Communication Protocol)
DI Digital input
DO Digital output
EM Electron multiplier
EPDM Ethylenepropylene diene-monomer rubber, M group
FIL Filament
FKM Fluorinated rubber
ID Internal diameter
IP Intenet Protocol
IQS Standard for plug-and-socket connections in vacuum technology
Ir-Y2O3Yttrium oxide (Y2O3) coated iridium (Ir)
NBR Nitrile butadiene rubber
MSL Mean sea level
PA Polyamide
PE Polyethylene
PID Proportional-integral derivative
PV Pfeiffer Vacuum
PVC Polyvinyl chloride (PVC)
PFTBA Colorless liquid for mass calibration (perfluortributylamine)
PoE Power over Ethernet
About this manual
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Abbreviation Explanation
PWM Type of modulation (pulse width modulation) in which one technical variable, e.g. the
electrical voltage, changes between 2 values.
PTFE Polymer of fluorine and carbon (polytetrafluorethylene)
RJ-45 Standardized plug-and-socket connection for telecommunication cabling (registered
jack)
sccm Standard cubic centimeters per minute as a unit of a defined gas volume flow per
unit of time under standard conditions
slpm Standard liters per minute as a unit of a defined gas volume flow per unit of time un-
der standard conditions
VLAN Virtual local area network
W Tungsten
Tbl. 4: Abbreviations used
1.4 Trademark proof
●Windows® and Internet Explorer® are trademarks of Microsoft Corporation.
●OmniStar®, ThermoStar® and PrismaPro® are trademarks of Pfeiffer Vacuum GmbH.
●Swagelok® is a registered trade name of Swagelok Company.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
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WARNING
Danger of injury due to lifting heavy loads
The product is heavy; it weighs up to 26 kg depending on the version. If one person lifts the product
incorrectly without help, this will lead to injuries.
►Always use 2 persons to lift the product with two hands.
►Take all necessary safety precautions (e.g. wear work gloves).
►Observe local regulations.
►Comply with the instructions for safe transport.
Risks during installation
DANGER
Danger to life from electric shock
Inadequate or incorrect grounding of the unit leads to contact-sensitive voltage on the housing. When
making contact, increased leakage currents will cause a life-threatening electric shock.
►Before the installation, check that the connection leads are voltage-free.
►Conduct the electrical connection in accordance with locally applicable regulations.
►Make sure that the local mains voltage and frequency match rating plate specifications.
►Make sure that the mains cable and extension cable meet the requirements for double isolation
between input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►Use only a 3-pin mains cable and extension cable with properly connected protective earthing
(earthed conductor).
►Plug the mains plug into a socket with earthing contact only.
►Always connect the mains cable prior to all other cables, to ensure continuous protective earth-
ing.
DANGER
Electric shock due to missing internal earthed conductor
The internal earthed conductor is fastened to the housing. A device without an internal earthed con-
ductor attached can be life-threatening in the event of a malfunction.
►Do not rotate or loosen the internal earthed conductor.
Risks during operation
DANGER
Electric shocks due to moisture penetrating into the device
Moisture that has penetrated into the device results in personal injury through electric shocks.
►Only operate the device in a dry environment.
►Operate the device away from fluids and humidity sources.
►Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv-
ice.
►Always disconnect the current supply before cleaning the device.
WARNING
Danger of burns on hot surfaces
During operation high temperatures (> 50 °C) occur on touchable surfaces of the heating compo-
nents and the gas inlet. There is a risk of burning.
►Secure hot parts against inadvertent touching.
►Display warning signs.
►Make sure that the product has cooled down before performing work.
►Wear protective gloves (in accordance with EN 420).
Safety
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WARNING
Danger of poisoning due to toxic process media escaping from the exhaust pipe
During operation with no exhaust line, the vacuum pump allows exhaust gases and vapors to escape
freely into the air. There is a risk of injury and fatality due to poisoning in processes with toxic process
media.
►Observe the pertinent regulations for handling toxic process media.
►Safely purge toxic process media via an exhaust line.
►Use appropriate filter equipment to separate toxic process media.
CAUTION
Health risks and environmental damage due to the process gases used
Gases used (process gases) represent a health risk and damage to the environment.
►Check the leak tightness of the connections before introducing the process gas.
►Make sure that the exhaust gas system is suitable for the gases supplied.
►Consider potential interactions between the materials and process gases.
►When handling the gases used, observe the applicable guidelines.
►Observe the protective measures.
Risks during maintenance
DANGER
Danger to life due to electric voltage
High voltages are present inside the device. When touching parts that are live, there is a risk of
death. If there is visible damage, there is a risk of death when commissioning the device.
►Work on the open device must only be carried out by trained specialist personnel.
►Before carrying out any installation and maintenance work, switch the device off and disconnect
it from the current supply.
►Never open the device with the current supply connected.
►Secure the current supply against unauthorized or unintentional reactivation.
►Never operate an open or defective device.
►Secure a defective device against accidental operation.
►Protect the device against moisture.
WARNING
Danger of burns on hot surfaces
During operation high temperatures (> 50 °C) occur on touchable surfaces of the heating compo-
nents and the gas inlet. There is a risk of burning.
►Secure hot parts against inadvertent touching.
►Display warning signs.
►Make sure that the product has cooled down before performing work.
►Wear protective gloves (in accordance with EN 420).
WARNING
Health hazards due to cleaning agent
The cleaning agents used cause health hazards.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Safety
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WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
CAUTION
Risk of injury due to splintering of the quartz capillary
Quartz capillaries splinter in case of unintended use. There is a risk of eye injuries due to splinters
being projected.
►Do not apply force when notching the quartz capillary.
►Wear safety goggles.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
safety of service personnel is at risk.
►Comply with the instructions for safe shipping.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
Safety
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General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Proper use
The gas analysis system is used for manually controlled or automatic analysis for non-corrosive and
non-flammable gases. The corrosive gas version of the gas analysis system is suitable for specific cor-
rosive gas applications. The gas analysis system is not explosion proof in the sense of ATEX.
►Install, operate and maintain the product only in accordance with these operating instructions.
►Comply with the application limits.
►Observe the technical data.
►Contact Pfeiffer Vacuum for advice on corrosive or flammable gases.
2.5 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Use outside the mechanical and electrical application limits in accordance with the technical data
●Use with corrosive or explosive media, if this is not explicitly permitted
●Use in environments where explosive gas mixes can occur.
●Use outdoors
●Use after technical changes (on the inside or the outside of the product)
●Use with replacement or accessory parts that are unsuitable or are not approved
2.6 Responsibilities and warranty
Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party:
●disregards this document
●does not use the product for its intended purpose
●carries out any modifications to the product (conversions, changes, etc.) that are not listed in the
corresponding product documentation
●operates the product with accessories that are not listed in the corresponding product documenta-
tion
The operator is responsible for the process media used.
2.7 Owner requirements
Safety-conscious working
1. Only operate the product in a technically flawless state.
2. Operate the product in line with its intended purpose, safety and hazard-conscious and only in
compliance with these operating instructions.
3. Fulfill the following instructions and monitor the observation of the following instructions:
–Proper use
–Generally applicable safety instructions and accident prevention regulations
–International, national and locally applicable standards and guidelines
–Additional product-related guidelines and regulations
4. Only use original parts or parts approved by Pfeiffer Vacuum.
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5. Keep the operating instructions available at the place of installation.
6. Ensure personnel qualification.
2.8 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.8.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.8.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
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