Pfeiffer Vacuum GSD 350 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
GSD 350 OMNISTAR/THERMOSTAR
Gas analysis system

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new gas analysis system is
designed to support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. From this
extensive, practical experience we have gained a large volume of information that can
contribute to efficient deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 10
1.1 Validity 10
1.1.1 Applicable documents 10
1.1.2 Variants 11
1.2 Target group 11
1.3 Conventions 12
1.3.1 Instructions in the text 12
1.3.2 Pictographs 12
1.3.3 Stickers on the product 12
1.3.4 Abbreviations 13
1.4 Trademark proof 14
2 Safety 15
2.1 General safety information 15
2.2 Safety instructions 15
2.3 Safety precautions 18
2.4 Proper use 19
2.5 Foreseeable improper use 19
2.6 Responsibilities and warranty 19
2.7 Owner requirements 19
2.8 Personnel qualification 20
2.8.1 Ensuring personnel qualification 20
2.8.2 Personnel qualification for maintenance and repair 20
2.8.3 Advanced training with Pfeiffer Vacuum 21
2.9 Operator requirements 21
3 Product description 22
3.1 Functional description 22
3.2 Controls and indicators 23
3.3 Layout of the unit 24
3.3.1 Basic unit 24
3.3.2 Terminal area 25
3.3.3 Gas inlet system 25
3.3.4 Calibration unit 27
3.3.5 High vacuum system 27
3.3.6 Fore-vacuum system 28
3.3.7 Sealing gas system 28
3.3.8 Gas analysis unit 29
3.3.9 Heating and insulation 30
3.3.10Electronic components 32
3.4 Interfaces and connections 33
3.4.1 Mains power supply 33
3.4.2 Ground terminal 33
3.4.3 "USER IO" connection 34
3.4.4 "AUX IO" connection 35
3.4.5 "Ethernet" (LAN) connection 36
3.5 Identifying the product 36
3.6 Scope of delivery 37
4 Transport and storage 38
4.1 Transporting the product 38
4.2 Storing the product 38
5 Installation 40
5.1 Ensuring venting of the unit 40
5.2 Establishing mains connection 41
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5.3 Establishing the Ethernet connection 41
5.4 Connecting the exhaust duct 41
5.4.1 Trimming the exhaust gas hose 41
5.4.2 Connecting/disconnecting the exhaust gas hose 42
5.5 Connecting the sealing gas line 43
5.5.1 Trimming the sealing gas hose 43
5.5.2 Connecting/disconnecting the sealing gas line 43
5.6 Connecting the capillary 44
5.6.1 Connecting the stainless steel capillary 45
5.6.2 Connecting the quartz capillary 45
5.7 Adjusting the position of the capillary hose 45
5.8 Establishing a network connection 46
5.8.1 IP addresses 46
5.8.2 Sub-networks 47
5.8.3 Changing the IP address of the unit 47
5.8.4 Changing the host computer IP address 48
5.9 Installing the PV MassSpec software 48
6 Commissioning 49
6.1 Switching on the device 49
6.2 Starting the pumping system 49
7 Operation via the display 51
7.1 "Dashboard" screen 51
7.2 "Info" menu 53
7.3 "Settings" menu 53
7.3.1 Creating and editing measurement recipes 55
7.3.2 Adjusting the heating units 56
7.3.3 Adjusting the sensors 57
7.3.4 Setting the language 58
7.3.5 Setting autostart functions 58
7.3.6 Setting the network parameters 59
7.3.7 Adjusting the GSD system parameters 59
7.3.8 Resetting the unit to the factory settings 60
7.3.9 Service 60
7.4 "Messages" menu 60
7.5 "Control" menu 60
7.5.1 Pumping down the vacuum system 61
7.5.2 Venting the vacuum system 61
7.5.3 Switching the heating units on and off 62
7.5.4 Opening and closing the gas inlet (OmniStar) 62
7.5.5 Baking out the vacuum chamber 62
7.5.6 Switching emission on and off 63
7.5.7 Switching the electron multiplier on and off 63
7.5.8 Opening and closing the calibration valve 64
7.6 "Measurement" menu 64
8 Decommissioning 65
9 Maintenance 66
9.1 Maintenance work and intervals 66
9.2 Maintaining the basic unit 68
9.2.1 Removing/attaching the gas inlet cover 69
9.2.2 Removing/attaching the side covers 69
9.2.3 Removing/attaching the housing cover 70
9.2.4 Cleaning housing parts 71
9.2.5 Cleaning the protection screens on the fans 72
9.3 Maintaining the high vacuum system 73
9.3.1 Replace operating fluid reservoir on turbopump 73
9.3.2 Replace venting valve 73
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9.4 Maintaining the fore-vacuum system 75
9.4.1 Replacing the diaphragm pump 75
9.4.2 Replace diaphragm pump diaphragms 76
9.5 Maintaining the gas analysis unit 77
9.5.1 Maintaining the QMA 250 M analyzer 77
9.5.2 Maintaining the total pressure gauge 79
9.6 Maintaining the gas inlet system of the OmniStar 80
9.6.1 Removing the gas inlet flange 81
9.6.2 Replacing the screen 82
9.6.3 Replacing the interior gas guide and screen 82
9.6.4 Installing the gas inlet flange 82
9.7 Maintaining the gas inlet system of the ThermoStar 83
9.7.1 Removing the gas inlet flange 84
9.7.2 Replacing the screen 85
9.7.3 Replacing the interior gas guide and screen 85
9.7.4 Installing the gas inlet flange 85
9.8 Servicing the capillary 86
9.8.1 Shorten the stainless steel capillary 86
9.8.2 Replace the stainless steel capillary 87
9.8.3 Trimming the quartz capillary 88
9.8.4 Replace the quartz capillary 89
9.9 Maintaining the heating units 90
9.9.1 Replacing the capillary hose 91
9.9.2 Maintaining the gas inlet heating 91
9.9.3 Servicing the vacuum chamber heating 91
9.10 Maintaining the electronic components 91
9.10.1Replacing the display 91
9.10.2Replacing the PoE injector 92
9.10.3Replacing the mainboard 92
9.10.4Replacing the power supply pack 92
9.10.5Replacing the QME 250 electronic unit 92
9.10.6Replacing the TC 110 electronic drive unit on the turbopump 92
9.11 Maintaining the calibration unit 93
9.11.1Refilling with calibration medium 93
9.11.2Replacing the calibration valve 93
9.12 Additional maintenance work for the corrosive gas version 94
9.12.1Replacing the sealing gas valve 94
9.12.2Replacing the manual pressure regulator 95
9.12.3Replacing the digital pressure regulator 95
10 Troubleshooting 96
11 Shipping 100
12 Recycling and disposal 101
12.1 General disposal information 101
12.2 Dispose of a gas analysis system 101
13 Service solutions by Pfeiffer Vacuum 102
14 Spare parts 104
15 Special tool 105
16 Accessories 106
16.1 Accessory information 106
16.2 Ordering accessories 106
17 Technical data and dimensions 107
17.1 General 107
17.2 Technical data 107
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17.3 Dimensions 111
Certification 112
Declaration of conformity 113
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List of tables
Tbl. 1: Applicable documents 10
Tbl. 2: Variants 11
Tbl. 3: Features of variants 11
Tbl. 4: Abbreviations used 14
Tbl. 5: Symbols and colors of the status and components icons 24
Tbl. 6: Status LEDs and their meanings 24
Tbl. 7: Heating units on the unit 30
Tbl. 8: Status of the Ethernet connection 36
Tbl. 9: Examples for Sub-networks 47
Tbl. 10: Menu structure with functions 53
Tbl. 11: Maintenance work and intervals 68
Tbl. 12: Determined sensitivity of the PrismaPro 78
Tbl. 13: Troubleshooting 99
Tbl. 14: Spare parts 104
Tbl. 15: Special tool 105
Tbl. 16: Accessories 106
Tbl. 17: Conversion table: Pressure units 107
Tbl. 18: Conversion table: Units for gas throughput 107
Tbl. 19: Technical data OmniStar 109
Tbl. 20: Technical data ThermoStar 111
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 13
Fig. 2: Vacuum diagram of the OmniStar 22
Fig. 3: Vacuum diagram of the ThermoStar 22
Fig. 4: Additionally sealing gas supply in corrosive gas version 23
Fig. 5: Display with operator keys 23
Fig. 6: Housing parts 24
Fig. 7: Terminal area with interfaces and connections 25
Fig. 8: Gas inlet systems 26
Fig. 9: Calibration unit at the gas inlet 27
Fig. 10: Diaphragm Pump 28
Fig. 11: Sealing gas system 29
Fig. 12: Gas analysis unit components 30
Fig. 13: Vacuum chamber heating and insulation 31
Fig. 14: Gas inlet heating 31
Fig. 15: Capillary heating 32
Fig. 16: Electronic components 32
Fig. 17: Mains connection with main switch and fuse 33
Fig. 18: Mains cable with cold-device plug C13 33
Fig. 19: Connection for functional earth 34
Fig. 20: "USER IO" connection 35
Fig. 21: "AUX IO" connection 36
Fig. 22: "Ethernet" (LAN) connection 36
Fig. 23: Assembly aid for QMA 250 Analyzer 37
Fig. 24: Venting openings on the sides of the unit 40
Fig. 25: Mains connection with IEC 320 C13 socket 41
Fig. 26: Trimming the exhaust gas hose 42
Fig. 27: Connecting and disconnecting the exhaust gas hose 42
Fig. 28: Trimming the sealing gas hose 43
Fig. 29: Connecting/disconnecting the sealing gas line 44
Fig. 30: Connecting the capillary 45
Fig. 31: Capillary hose as-delivered position 46
Fig. 32: "Dashboard" screen after starting the program 49
Fig. 33: "Control" screen 50
Fig. 34: "Dashboard" screen 51
Fig. 35: Example of parameter setting 54
Fig. 36: "Measurement recipes" submenu 55
Fig. 37: Measurement recipe for "Spectrum Scan" measuring mode 55
Fig. 38: Measurement recipe for " Selected Masses" measuring mode 56
Fig. 39: Tempering mode of the vacuum chamber 57
Fig. 40: "Language" submenu 58
Fig. 41: "Autostart" submenu 58
Fig. 42: "Network" submenu 59
Fig. 43: "GSD system parameters" submenu 59
Fig. 44: "Factory settings" submenu 60
Fig. 45: "Control" menu 61
Fig. 46: Removing/attaching the gas inlet cover 69
Fig. 47: Removing/attaching the side covers 70
Fig. 48: Removing/attaching the housing cover 71
Fig. 49: Unit underside 73
Fig. 50: Venting valve on the turbopump 74
Fig. 51: Replacing the diaphragm pump 75
Fig. 52: Connect the exhaust gas and intake hose, and draw off 75
Fig. 53: PrismaPro Quadrupole mass spectrometer 77
Fig. 54: Groove on analyzer 78
Fig. 55: Total pressure gauge on the gas analysis unit 79
Fig. 56: Parts of the internal gas guide on OmniStar 80
List of figures
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Fig. 57: Disassemble the valve block 81
Fig. 58: Part of the internal gas guide 83
Fig. 59: Removing the gas inlet flange 84
Fig. 60: Length of stainless steel capillary with clamping collar fitting 86
Fig. 61: Notch and snap off the stainless steel capillary 87
Fig. 62: Clamp collar fitting for the stainless steel capillary 88
Fig. 63: Notching and snapping off the quartz capillary 89
Fig. 64: Front fitting of the quartz capillary 90
Fig. 65: Replacing the display 92
Fig. 66: Calibration unit 93
Fig. 67: Sealing gas valve on the turbopump 94
Fig. 68: Wrench PV M40 813 for housing cover of turbopump 105
Fig. 69: Capillary hose adapter 106
Fig. 70: Dimensions 111
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"GSD 350 OmniStar/ThermoStar" operating instructions
Operation via web interface and PV MassSpec
DA 0106
"Quadrupole mass spectrometer" operating instructions
QMG 250 PrismaPro
BG 6001
"Quadrupole mass spectrometer" quick start guide
QMG 250 PrismaPro
BG 6003
"Diaphragm pump" operating instructions
MVP 010-3 DC
PU 0071
"Turbopump" operating instructions
HiPace 80
PT 0208
"Turbopump" supplementary information
SplitFlow 80
PT 0635
“Electronic drive unit” operating instructions
TC 110
PT 0204
"Total pressure gauge" operating instructions
DigiLine Pirani/ Cold cathode gauge MPT 200 AR
PG 0025
"Analog Relay" supplementary information
DigiLine Gauge
PG 0029
"Mini angle valve" operating instructions 1)
EVI 005 M
BP 5120
“Venting valve” operating instructions PT 0228
"Sealing gas valve" operating instructions 2) PT 0229
Software documentation
PV MassSpec
(Part of the software)
Safety data sheet 3)
Perfluorotributylamine (PFTBA)
-
"Pressure monitoring" operating instructions 4) -
Declaration of conformity (Component of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1) only for version with calibration unit
2) only for corrosive gas version
3) only for version with calibration unit
4) only for corrosive gas version
About this manual
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