Pfeiffer Vacuum OmniStar GSD 300 C Series User manual

Operating manual
Incl. Declaration of Conformity
BG 805 074 BE (9908) 1
GSD 300 C
Gas analysis system for reactive / explosive gases
OmniStar™

2Introduction BG 805 074 BE (9908) GSD300C.bet
When communicating with Pfeiffer Vacuum, the information given on the product
nameplate is required. Transfer that information to this manual therefore.
WEIGHT 45 kg
F3 F2 F1
2,5 AT 2,5 AT 0,8 AT
Typ:
No:
F-No:
VHzVA
Pfeiffer Vacuum, D - 35614 Asslar
Typ: No:
F-No:
V Hz VA
This manual applies to products with part number
PT M26 290 (GSD 300 C1, 230 V∼)
PT M26 291 (GSD 300 C1, 115 V∼)
PT M26 293 (GSD 300 C2, 230 V∼)
PT M26 294 (GSD 300 C2, 115 V∼)
PT M26 296 (GSD 300 C3, 230 V∼)
PT M26 297 (GSD 300 C3, 115 V∼)
The part number can be taken from the nameplate.
The functions described as well as the illustrations and data contained in this
manual are subject to change without notice.
The OmniStar™ GSD 300 C is intended for manually controlled as well as
automatic analysis of reactive, corrosive and explosive gases, subject to the
material compatibility, TLVs as well as the εx-limits1).
However the individual application has to be approved with Pfeiffer Vacuum. In
particular the gas composition has to be defined with the purchase order to
Pfeiffer Vacuum.
Any utilization except for the gases or gas mixtures and the concentrations
specified is considered to be non conforming and the manufacturer declines all
liability resulting form such use.
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please inquire at your local Pfeiffer Vacuum representa-
tive.
1) In case of questions please contact your nearest Pfeiffer Vacuum representa-
tive.
Product Identification
Validity
Intended Use
Courses

BG 805 074 BE (9908) GSD300C.bet Contents 3
Table of contents
Product Identification 2
Validity 2
Intended Use 2
Courses 2
1 Safety 5
1.1 Safety Information 5
1.2 Gases 6
1.3 Explanation of Symbols 7
1.4 Personnel Qualifications 7
1.5 Liability and warranty 7
2 Design 8
2.1 Status Indicators and Heater Controls 9
3 Installation 10
3.1 Unpacking 10
3.1.1 Carrying the Unit 10
3.1.2 Shock and Overturning Indicators 10
3.1.3 Transport Fixing Parts 12
3.2 Air Flow 12
3.3 Exhaust Gas Line 13
3.4 Purge Gas Connection 13
3.5 Process Gas Connection 13
3.6 Connecting the Interfaces 14
3.6.1 RS232C 14
3.6.2 ArcNet (LAN) 14
3.6.3 User Control 14
3.6.4 Removing the Hood 15
3.6.5 Connecting the Cables 16
3.6.6 Mounting the Hood 17
3.7 Power Connection 18
4 Initial Start up 19
4.1 First Turn on 19
4.2 Balzers Quadstar™ 422 Setup 19
4.3 Optimizing the Ion Source Parameters 21
4.3.1 Optimizing with Air or Process Gas 21
4.3.2 Optimizing with Argon 22
5 Operation 23
5.1 Switching on 23
5.2 Heaters 23
5.2.10 Capillary Heater 23
5.2.2 Inlet Housing Heater 23
5.2.3 Vacuum Chamber Heater 23
5.3 Interaction with Software 24
5.4 Switching Off 24
6 Technical Data 25
7 Maintenance and Care 27
7.1 Periodical Checks 27
7.2 External Cleaning 27

4Contents BG 805 074 BE (9908) GSD300C.bet
8 Troubleshooting 28
8.1 Safety Shut Off 28
8.2 Overtemperature 28
8.3 Clogged Gas Inlet 28
8.3.1 Shortening the Capillary 28
8.3.2 Replacing the Capillary 29
8.3.3 Replacing the Orifice 32
8.4 Fuses 33
8.5 Other Problems 34
8.6 Preparation for Transport 34
9 Accessories 35
10 Spare Parts 35
11 Decommissioning 36
Declaration of Contamination 37
Declaration of Conformity 38

BG 805 074 BE (9908) GSD300C.bet Safety 5
1 Safety
a) Technology
The GSD 300 is built according to the state of the art and is safe to operate.
b) Extension of the Conforming Utilization
Any utilization of this equipment beyond the intended use (→22) requires the
prior written approval by Pfeiffer Vacuum Asslar.
Any utilization beyond the (extended) conforming utilization is considered to be
non-conforming and the manufacturer declines all liability resulting from such use.
c) Manufacturer’s Instructions
Conforming utilization also includes the strict adherence to the manufacturer’s
installation, start-up, operating and maintenance instructions.
d) Personnel Training
The GSD 300 may only be operated and maintained by skilled and instructed
personnel. The personnel must be informed in particular on potential hazards.
e) Definition of the Responsibilities
The responsibility for commissioning, operation and maintenance work must be
clearly defined and strictly adhered to so that the competencies are clearly defined
under the aspect of safety.
f) Access by Unauthorized Persons
The owner shall ensure that only trained persons work on the GSD 300.
g) Improper Use
The equipment may must not be operated in any way that impairs the safety of the
users and the GSD 300.
h) Unauthorized Modifications to the System
The user may not at his own discretion make any changes or modifications that
impair the safety of the GSD 300. In any case they are made entirely at his own
risk.
i) Obligation to Report Changes to the System
The user is obligated to report to the owner any changes to the GSD 300 that
impair the safety of the system.
k) Maintenance Obligation
The owner of the system is obligated to maintain the GSD 300 in proper condition
at all times.
l) Proper Workplace Design
Through appropriate instructions and supervision, the owner shall ensure that the
workplaces at the GSD 300 are clean and not obstructed.
m) Shutdown and Disconnection from the AC Power
The GSD 300 must be switched off and disconnected from the power source be-
fore any maintenance work is performed. In particular the switch-off procedures in
this Operating manual must be strictly followed.
1.1 Safety Information

6Safety BG 805 074 BE (9908) GSD300C.bet
n) Removal of Protective Devices
Protective devices may only be removed when the GSD 300 is switched off and
disconnected from the power source.
o) Inspections After Maintenance or Repair Work
After maintenance or repair work it is important to check that all protective devices
have been installed and that they function correctly. Only then may the GSD 300
be put back into service.
p) Industry Specific Accident Prevention Regulations
The owner shall ensure that the process gases are handled in accordance with the
applicable regulations and protective measures. Possible reactions with the pro-
cess materials must also be taken into consideration. At operating temperatures
above 55 °C the operator must wear protective gloves.
In all cases the industry-specific and local accident prevention regulations are
applicable to the GSD 300.
q) Disposal of the Operating Media
The operating media must be disposed of in accordance with local regulations.
r) Maintenance or Repair
Products returned to Pfeiffer Vacuum for maintenance or repair should if at all
possible be free of harmful substances (e.g. radioactive, toxic, caustic or micro -
biological).
A completed and signed declaration of contamination (→
2 37) must be submitted
with each product returned for repair. Products that are not clearly declared as
"free of harmful substances" are decontaminated at the expense of the customer.
s) Operating Instructions
Based on this Operating manual, the owner shall prepare operating instructions
that describe the activities and specifications required for safe operation.
The operating instructions shall be posted in a suitable location of the workplace
and shall be observed by all persons working with the equipment.
a) Take into account the relevant regulations and safety measures for the gases
used.
Consider possible reactions with the materials
(→ 2 25).
b) Danger signs that conform to national and regional regulations shall be affixed
in the appropriate places.
c) If toxic or combustible gases are measured with the GSD 300, the exhaust
gases shall be treated and disposed of in conformance with the applicable
regulations.
1.2 Gases

BG 805 074 BE (9908) GSD300C.bet Safety 7
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Note
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Waiting, reaction time, duration of test
→2See page ...
→&See document ...
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.) to the product
• use the product with accessories not listed in the corresponding product
documentation.
1.300 Explanation of
Symbols
1.4 Personnel Qualifications
1.5 Liability and warranty

8Design BG 805 074 BE (9908) GSD300C.bet
2 Design
tune
control LAN
ready
24V
RS-232-C
frontans.ds4
WEIGHT 45 kg
F3 F2 F1
2,5 AT 2,5 AT 0,8 AT
Typ:
No:
F-No:
VHzVA
Exhaust gas
connection
Power switch
Power inlet
Fuses
Cover of
inlet housing
Capillary heater
RS232C
connector
LAN
connector
Status indicators
and heater controls
USER control
connector
Purge gas
connection

BG 805 074 BE (9908) GSD300C.bet Design 9
power
ready
valve
heater
baking
OMRON
OUT
Temperature of capillary
Set point of capillary temperature
Heater status
Set point entry keys
Not used
Green Mains and status o.k.
Red Safety shut off1)
Green Turbo speed >90 %
Off Purge gas pressure low
Flashing Starting up
Green Inlet valve open
Yellow Capillary / inlet heater on
Yellow Heating vacuum chamber
Flashing Overtemperature in the
system
1) Safety interlock: Turbo pump and diaphragm pump off, valves closed, system is
vented
2.1 Status Indicators and
Heater Controls

10 Installation BG 805 074 BE (9908) GSD300C.bet
3 Installation
→Information on packing.
Notify the forwarding company in case of visible external damage.
45 kg
4
DANGER
Caution: heavy product
Physical injury can result if the product is lifted and carried by only
one person.
Adhere to the local regulations and take the necessary precautions
when carrying the product.
Check the shock and overturning Indicators
è Unlock the cover using the
supplied Allen wrench
 Remove the cover...
3.1 Unpacking
3.1.1 Carrying the Unit
3.1.2 Shock and Overturning
Indicators
...and the insulation
cover

BG 805 074 BE (9908) GSD300C.bet Installation 11
Open the hinged cover
Check the indicators
Overturning indicator
No blue sand in the tip:
⇒o.k.
Blue sand in the tip:
⇒not o.k.
TIP-N-TELL
UP Shock indicator
Both arrows red:
⇒o.k.
One or both arrows blue:
⇒not o.k.
In case of a "not o.k." the unit may possibly be damaged. Notify the forwarding
company, if this is the case.
ò Carefully close and engage the
hinged cover
óMount the insulation cover
Do not bend
the capillary

12 Installation BG 805 074 BE (9908) GSD300C.bet
õ Mount the cover ...
ö... and lock it
Remove both knurled nuts on the bottom of the GSD 300 before starting
operation.
Transport fixing nuts
Store the nuts and
remount them if the
GSD 300 is to be
transported again.
Note
Caution: Free air flow required
Overtemperature can adversely affect the reliability of the equipment.
Make sure that neither the air inlet nor outlet louvers are obstructed.
3.1.3 Transport Fixing Parts
3.2 Air Flow
Do not bend
the capillary
Do not bend
the capillary

BG 805 074 BE (9908) GSD300C.bet Installation 13
DANGER
Caution: Exhaust gases
Exhaust gases can be detrimental to health.
If you measure toxic, explosive or combustible gases with the
GSD 300 C, the exhaust gas must be treated and disposed of in
accordance with the applicable regulations.
The exhaust line must never be operated at more than atmospheric
pressure. Otherwise the purge gas supply will not work correctly.
For the calculation of the toxicity of the exhaust gas you may assume that the inlet
gas is diluted by a factor of >100 by the purge gas.
Lead off the exhaust gases through a
suitable tube (ø¼") using appropriate
fittings.
Perform a leak test of the exhaust line
as required by your local regulations.
→225 for technical data of purge gas supply
Install an appropriate pressure reduction system if the pressure of the purge gas
exceeds the rating of the GSD 300 C.
Connect the
purge gas supply
using '" tubing.
There is no valve in the GSD 300 C to shut off the
purge gas.
Note
Caution: Treatment of the capillary and its heater
Mechanical or thermal stress can cause damage.
Minimum bending radius is 150 mm.
Do not additionally insulate or cover the heating tube.
3.3 Exhaust Gas Line
3.4 Purge Gas Connection
3.5 Process Gas
Connection
To exhaust duct

14 Installation BG 805 074 BE (9908) GSD300C.bet
ï Connect the capillary to your measurement point (Dimensions →225)
Clamp only the part of the
tube which contains a
metal bush.
Firmly connect the front tip of the
capillary to the measurement point.
The optional capillary adapter (→235) may be useful for making a reliable
connection.
DANGER
Caution: Dangerous gases
Process gases can be detrimental to health.
The connection has to be leak tested before admitting the process
gas.
The GSD 300 features three connectors for communication with customer
supplied peripheral devices:
• RS232C interface
• ArcNet LAN interface
• User control connection
Remove the hood for access to the RS232C connector (→section 3.6.4 ff).
Install the interface cable delivered with the software (9-pins, female at both ends)
and connect it to the PC. Use the enclosed extension cable or the 25 pin adapter if
required.
The ArcNet LAN interface cannot be used simultaneously with the RS232C
interface.
Install the interface board into the PC: →&of interface.
Remove the hood for access to the LAN connector (→section 3.6.4 ff).
Pin assignment→225
Remove the hood for access to the USER CONTROL connector
(→section 3.6.4 ff).
3.6 Connecting the
Interfaces
3.6.10RS232C
3.6.2 ArcNet (LAN)
3.6.30User Control
èRemove the tap

BG 805 074 BE (9908) GSD300C.bet Installation 15
DANGER
Caution: Dangerous voltages
Touching live parts is hazardous.
Unplug the power line before removing the hood.
èUnlock the cover...
... and remove it
DANGER
Caution: Hot surface
Touching the hot surface (>80 °C) can cause burns.
Put the product out of operation and allow it to cool down.
Open two locks on top...
.. ... and one at the backside
3.6.4 Removing the Hood

16 Installation BG 805 074 BE (9908) GSD300C.bet
Now you have access to the interface connectors
DANGER
Caution: Dangerous zones
There are hazardous zones and sensitive components in the equip-
ment.
Interventions inside the equipment may be performed only by mainte-
nance or service specialists.
WEIGHT 45 kg
F3 F2 F1
2,5 AT 2,5 AT 0,8 AT
Typ:
No:
F-No:
VHzVA
tune
control LAN
ready
24V
RS-232-C
èLead the cables behind this panel
Connect and secure the connector
3.6.5 Connecting the Cables
Remove the hood
Little space:
Watch your fingers

BG 805 074 BE (9908) GSD300C.bet Installation 17
èCarefully place the hood
Shut two locks on top...
... and one at the backside
Place the cover...
... and lock it
3.6.6 Mounting the Hood
Little space:
Watch your fingers

18 Installation BG 805 074 BE (9908) GSD300C.bet
ñ Turn off the power switch
 Check the ratings on the
nameplate
WEIGHT 45 kg
F3 F2 F1
2,5 AT 2,5 AT 0,8 AT
Typ:
No:
F-No:
VHzVA
Pfeiffer-
Vacuum If the ratings do not agree with your local line voltage, please
contact your Pfeiffer Vacuum representative.
DANGER
Caution: Mains voltage
Incorrectly grounded products can be extremely hazardous in the
event of a fault.
Use only a 3-conductor power cable with protective ground. The
power connector may only be plugged into a socket with a protective
ground. The protection must not be nullified by an extension cable
without protective ground.
Connect the unit
3.7 Power Connection

BG 805 074 BE (9908) GSD300C.bet Initial Start up 19
4 Initial Start up
DANGER
Caution: Possibly damaged equipment
Damaged equipment can be hazardous.
If for any reason you have to assume that the equipment is not safe,
shut it down and secure it so that it cannot be inadvertently turned on
again.
You should assume that the unit is unsafe for example when:
• it has sustained visible damage
• it does not work
• it has been stored for a longer period under unfavorable conditions
• it has been subjected to severe transport stress
Precondition: Installation completed and checked (→
2 10 ff)
ñ Turn on the mains switch
The lamp ⇒power lights green and ready flashes
ï Wait until ready goes to steady green, the turbo pump has then
attained 90% of its nominal speed
WARNING
Caution: Shocks and vibrations
Shocks and vibrations during operation can damage the turbo pump
Avoid shocks and vibrations during operation and up to 15 minutes
after power off
You have to configure Balzers Quadstar™ 422 to the GSD 300 C after installation.
Follow the instructions given below before performing any measurements.
Precondition: Balzers Quadstar™ 422 installed (→corresponding
& )
4.1 First Turn on
4.2 Balzers Quadstar™ 422
Setup

20 Initial Start up BG 805 074 BE (9908) GSD300C.bet
èDefine the QMS configuration:
• Start
• Choose Config in the menu bar
• Choose QMS...
• Enter the following configuration (set up the RF 20X in accordance with
the mass range of your GSD 300)
• Close this window with OK
Define the labels for the digital inputs/outputs
• Start
• Choose Config in the menu bar
• Choose DI/DO Identifications
• Define the following labels for DI00 and DO01:
• Close the window with OK
• Quit the parameter setup program
Define the switching threshold for SEM/Fil protection
The admissible maximum pressure for Filament and SEM is monitored by the
PKR 250 gauge. Its value is defined in the TuneUp program.
• Start
• In the menu bar choose Tune
• Choose Ion Source, the Tune Ion Source QMA 200 window is displayed