SMC Networks XGTP31-50336 Series User manual

Doc. No. XG*-OMW0069
PRODUCT NAME
Parallel Seal Type Slit Valve
MODEL / Series / Product Number
XGTP31＊-50336-＊＊＊

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Contents
Safety Instructions P2～3
1. Specifications P4
2. How to Order P5
3. Construction/Operation P6～8
4. Precautions P8～9
5. Spare Parts List P10
6. Maintenance P10
7. Troubleshooting P11
Attachment: Maintenance Procedure P12～16

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Slit Valve
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or
equipment damage. These instructions indicate the level of potential hazard with
the labels of “Caution,” “Warning” or “Danger.” They are all important notes for
safety and must be followed in addition to International Standards (ISO/IEC)∗1),
and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery-- Electrical equipment of machines (Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots-Safety
Caution
Caution indicates a hazard with a low level of risk which,
if not avoided, could result in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which,
if not avoided, could result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which,
if not avoided, will result in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the equipment or
decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific equipment
must be decided by the person who designs the equipment or decides its specifications based on necessary analysis
and test results. The expected performance and safety assurance of the equipment will be the responsibility of the
person who has determined its compatibility with the product. This person should also continuously review all
specifications of the product referring to its latest catalog information, with a view to giving due consideration to any
possibility of equipment failure when configuring the equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly. The assembly, operation and maintenance of
machines or equipment including our products must be performed by an operator who is appropriately trained and
experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1. The inspection and maintenance of machinery/equipment should only be performed after measures to prevent
falling or runaway of the driven objects have been confirmed.
2. When the product is to be removed, confirm that the safety measures as mentioned above are implemented and
the power from any appropriate source is cut, and read and understand the specific product precautions of all
relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to be
used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct
sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping, vehicles,
military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or other
applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical
protective function, and periodical checks to confirm proper operation.

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Slit Valve
Safety Instructions
Caution
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance
Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”. Read and accept them before using the product.
Limited warranty and Disclaimer
1. The warranty period of the product is 1 year in service or 1.5 years after the product is delivered,
whichever is first.
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our
responsibility, a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms
and disclaimers noted in the specified catalog for the particular products.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of
weapons of mass destruction (WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are
governed by the relevant security laws and regulations of the countries involved
in the transaction. Prior to the shipment of a SMC product to another country, assure that all local
rules governing that export are known and followed.
Safety Instructions Be sure to read the “Handling Precautions for SMC Products” (M-E03-3) and “Operation Manual”
before use.
当社の製品は､製造業向けとして提供しています｡
ここに掲載されている当社の製品は､主に製造業を目的とした平和利用向けに提供しています｡
製造業以外でのご使用を検討される場合には､当社にご相談いただき必要に応じて仕様書の取り
交わし､
契約などを行ってください｡
当社の製品は､製造業向けとして提供しています｡
ここに掲載されている当社の製品は､主に製造業を目的とした平和利用向けに提供しています｡
製造業以外でのご使用を検討される場合には､当社にご相談いただき必要に応じて仕様書の取り
交わし､
契約などを行ってください｡

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1. Specifications
Opening size
50mm×336mm
Operating pressure
Atmospheric pressure～10-6 Pa
Pilot pressure
0.45～0.6 MPa
Internal leakage *1
O-Ring Material : FKM
6.5×10-10 Pa･m3/sec
O-Ring Material : KalrezⓇ
6.5×10-9 Pa･m3/sec
Internal leakage at Back pressure
*1
〈Back pressure
0.1MPa(abs) or less〉
O-Ring Material : FKM
6.5×10-8 Pa･m3/sec
O-Ring Material : KalrezⓇ
6.5×10-7 Pa･m3/sec
External Leakage *1
6.5×10-11 Pa･m3/sec
Operating temperature
Gate Part：5～120℃(During bake-out：150℃)
Actuator part：5～90℃（Except Auto switch）
Fluid
Inert gas
Operating Time
1 sec or less *２
Auto switch
D-A93 （Operating temperature：20～60℃）
Main material of
vacuum part
Seal material
FKM
Mechanical
parts
Bellows ：AM350
Gate ：A6063
Body ：A5052
Bonnet ：A6061
Gate bolt ：SUS316
Others ：SUS304
Piping size
Rc1/8
Exhaust direction
Free
End-Lock ( End lock type)
With lock mechanism in opened or FULL sea position
Mounting Direction
Vertical
Cylinder Volume
0.2 ℓ
Mass
・Insert type：10kg
・Cassette type (Standard)：14.5kg
・Cassette type (Half MESC)：13.5kg
*1: At normal temperature. Gas permeation is not included.(SMC's inspection conditions)
*2: The period of time from gate open state to clamp after signals comes to solenoid
valve and from gate clam
＜Conditions＞
・Pressure: 0.5MPa ,
・Pipe length:1m,
・Gate Direction: Vertical Upper,
・Without Speed Controller,
・Solenoid Valve:SY5120-01 ,
・Tube:TU0604

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2. How to order
XGTP 3 1 2 - 50336 - 1 C N
Table 1. Auto switch and the connector
Symbol
Auto switch
Connector
Nil
-
-
A
D-A93
(2pcs)
Lead wire: 0.5m
C
Multiple connector(AMP)
*C016 30D006 100 12 made by AMP is
recommended for the connector (female type)
F
D-sub connector
*CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD.
is recommended for the connector (female type).
Auto switch and the
connector (See Table 1)
Gate seal material
1: FKM
2: KalrezⓇ4709
KalrezⓇis a registered trademark of E.
I .du Pont de Nemours and Company or
its affiliates.
50 x 336 mm
Valve type
1：Insert type (Without body)
2：Cassette type (Standard)
3：Cassette type (Half MESC)
Number of axes and seal type:
One axis bellows
Applicable water size:
For 300mm wafer
Parallel seal type slit valve
Opening window size:
End lock
Nil : OPEN/CLOSE
end lock
N: None

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3. Construction/Operation
Bonnet ASSY
Fig.1

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3-1 Operation
Figures 1 and 2B show the state in which Slit ①carrying the work piece is closed and Gate ③(Sealing
material ④) is not clamped (sealed) on Seal surface ②.
In Fig. 2A shows Slit valve opens and Slit ①of the body ⑤is released. So it is a state where the work
piece can be transported.
Figure 2C shows a state in which Gate ③is clamped and Seal surface ②is sealed by Sealing material
④of Gate ③.
3-2 Construction
In Figures 1 and 2, Piston rod ⑦integrated with Piston ⑥and Moving base ⑧are connected by a
displaceable mechanism. And Roller block ⑨is fixed to Moving base ⑧. In addition, Shaft ⑭fixed to
Lever ⑲is separated from each other by the force of Moving base ⑧and Spring ⑬. On the other hand,
since Lever ⑲is restricted by Roller block ⑨and Roller block ⑨that is guided by Cylinder tube ⑩and
Cam follower ⑪⑫ attached there. So Shaft ⑭and Roller block ⑨are mated by reacting force of Spring
⑬then it is possible to move up and down together. Also regarding the external seal, Shaft⑭moving
up and down is done with Bellows ASSY ⑰and O-ring ⑮⑯○
30 . And Static seal part of Bonnet ASSY
and Body ⑤is done with O-ring ⑱.
3-3 At the case Gate CLOSE (Fig2A⇒Fig2B)
By pressurizing to "CLOSE" side port (exhausting "OPEN" side), Moving base ⑧that is connected to
Piston rods ⑦are moving up. On the other hand, since Moving base ⑧pushes up Shaft ⑭integrated
with Lever ⑲by Spring ⑬, Lever ⑲, Shaft ⑭and Gate ③attached to it also go up at the same time,
then Cam follower C ○
21 comes into contact with Stopper ○ 20 and stop the up motion and Slit ①of Body
⑤is closed.
In FIG. 2B, the left and right positions of Roller block ⑨and Lever ⑲are restricted by Cam grooves ○
24
○
26 of Roller block ⑨and Cam followers A ○ 23 and B ○ 25 . Furthermore, the position of Roller block ⑨of
the left-right direction is fixed by Guide groove ○
22 of Roller block ⑨and Cam follower ⑪⑫ fixed to the
cylinder tube ⑩. The distance for the vertical direction between Lever ⑲and Roller block ⑨is constant
because Cam groove ○
24 of Roller block ⑨and Cam follower ○ 23 come in contact and are pressed by
Spring ⑬.Therefore, Shaft ⑭/Gate ③fixed by Lever ⑲move up stable when moving from Gate ③
OPEN position in Figure 2A to Gate ③CLOSE position in Figure 2B.
3-4 At the case Gate CLAMP (Seal) (Fig.2B⇒Fig.2C)
Cam follower C ○
21 comes into contact with Stopper ⑳then Lever ⑲/Shaft ⑭and ③stop. On the other
hand, Piston rod ⑦and Roller block ⑨are further going up with compressing Spring ⑬, so Cam
followers A ○
23 and B ○ 25 move to the left side following the cam groove ○ 24 ○ 26 of Roller block ⑨.And
along with that, Lever ⑲/ Shaft ⑭and Gate ③also move to the left side, and O ring ④of the gate ③is
clamped (sealed) to the seal surface ②.
3-5 Unclamp(Fig.2C⇒Fig.2B)
By pressurizing to "OPEN" port side (exhausting "CLOSE" side), Moving base ⑧and Roller block ⑨that
is connected to Piston rods ⑦moves down, so by following Cam groove ○
24 ○ 26 Cam follower ○ 23 and
Cam follower B ○
25 move to the right, along with which Shaft ⑭and Gate ③also move to the right side
and make unclamp of Gate ③.At that time, Cam follower B ○
25 fixed to the lever ⑲and Cam groove ○ 24
of Roller block ⑨come in contact with each other and are fixed vertically by the force of Spring ⑬.And
also Cam groove ○
26 of Roller block ⑨and Cam follower B ○ 25 are fixed for the left and right direction so
the left, and right directions movement are fixed.
When Roller block ⑨moves down a slight downward force acts from Cam follower A and ○
23 Cam
follower ○
25 to Lever ⑲, but because pushing up force by Spring ⑬is greater than the downward force,
Gate ③leaves at a right angle.
3-6 At the case Gate OPEN(Fig.2B⇒Fig.2A)
After unclamp (unseal), Gate ③/ Shaft ⑭/ Lever ⑲and Roller block ⑨moves down together, then Gate
③opens and Slit ①of Body ⑤is released.

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3-7 End lock（in case with End Lock）
When the air pressure suddenly disappears at the opening and closing position of Gate, End lock pin ○
27
protrudes and enters the end lock groove ○
26 ○ 28 of Roller block ⑨to regulate the operation of Roller block
⑨and the valve is maintain the location before the air is lost. However, if the air pressure gradually
disappears, there is a possibility that End lock will not operate properly.
4．Precautions
4-1. Air piping
Hold the speed controller on the piping port (Rc1/8) lightly and connect the tube. Please
confirm not to apply excessive external force to the fitting. Use a 2 positions 5 port valve for the
product operation.
The end lock may not operate correctly without using the 2 positions 5 port valve.
4-2．Installation
Tighten the bolt for connection gradually and diagonally by constant torque to avoid application of uneven
force to the bolts. When installing the bonnet assembly and gate, refer to the maintenance procedure for
tightening of the bolts.
※Please make OPEN conditions when Bonnet ASSY is installed.
※Please don't make scratch at Body's seal surface when installed
※The compression of the O-rings on the user's application should be 0.7 to 0.9mm.
Otherwise, it may cause potential leak path.
※Please tighten the bolts with proper torque when installed. Otherwise Bolt and Body's threads might
be damaged.
4-3．Disinstallation
Please make OPEN condition when Bonnet ASSY is removed from Body at maintenance. If Bonnet
ASSY is removed at CLOSE condition then Body's threads might be damaged.
4-4．End lock release
When unlocking the slit valve with no air pressure applied, first apply pressure to air port which can
remain current open or close position, and then release end lock and switch the solenoid valve. The
gate of the slit valve is closed before shipment, so apply pressure to the closed position first.
e.g.: If the gate is opened, apply pressure to the "open" side of air piping, and switch the valve after
releasing the end lock.
When Slit valve is shipped the condition of Gate is below,
1. Insert type: Gate is OPEN so please supply the pressure to OPEN port.
2. With Body type: Gate is CLOSE so please supply the pressure to CLOSE port.
Caution

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4-5．Speed control
Be sure to control speed to open and close the gage in meter out condition.
Otherwise, the slit valve life will be adversely affected. Improper use of speed controls can damage
end-lock mechanism as well as shorten life time of valve.
4-6．Exhaust piping
Please avoid to be influenced exhaust pressure from other solenoid valves to the slit valve. Such a
pressure may cause improper operation of end lock of the gate.
4-7．Operation of valve
(1) Please confirm in regulated difference pressure as 4kPa and do the opening and shutting operation
when you open and shut the valve.
(2) Incase Body(Chamber) and Gate is heated and cooling gradually from High Temperature to Room
temperature then please make OPEN condition. If it is cooling at CLOSE condition then Gate O-ring
will be stuck and when operate to OPEN condition then gate O-ring will be removed.
(3) Please keep within operating pressure range to slit valve.
If operating pressure is over the range then cylinder will be damaged and injury by
broken pieces.
(4) Do not put your hand into the slit of the body without confirming safety.
Injury and Bodily harm will occur with the valve operated when valve is operated valve.
(5) Do not remove the Cover （Fig.1○
29 ）on the actuating part. And if it is touched the
internal actuating parts while the slit valve is operating may result in injury.
(6) Remove the pneumatic piping for operation and make cylinder have no pressure inside for
maintenance otherwise cylinder is operating and makes dangerous. When tube is removed please shut
off the pressure and ensure that stored energy is removed. Otherwise tube is removed the tube will be
out of control and make loss of vision to employees or injury.
4-8．Replacement of O-ring
Use the parts shown on “4. Replacement parts list” when replacing bonnet assembly, Gate and O-rings
for a gate. Give sufficient cleaning to O-ring groove and mount O-ring in it so that it will not twist. Use a
plastic specific tool so as not to damage sealing faces of the O-ring groove. Refer to the maintenance
manual for details.
After replacement, please implement leak inspection.
4-9．Return of Product
If the product being returned is contaminated or possibly contaminated with substances that are harmful
to humans then please contact SMC in the first instance and get the product decontaminated and made
safe by a specialist cleaning company. After the decontamination prescribed in the sentence before,
submit Product Return Request Sheet or Detoxification/Decontamination certificate to SMC and await
return contact from SMC before returning the item to SMC.
Please refer to International Chemical Safety Cards (ICSC) for a list of the harmful substances.
If you have any questions, please contact your SMC sales representative.
Caution
Warning
Warning

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5．Spare Parts List
For XGTP312-50336-***
For XGTP313-50336-***
Common Spare Parts List
How to order for Bonnet ASSY
XGTP311 - 50336A1 - 1 ※ ※
Connected connector of Auto witch (female type)
6. Maintenance
Please refer to the attached “Procedure for maintenance”.
Description
Orderable Part No
Applicable Part No
Note
Body ASSY
XGT300-1-1AS
XGTP312-50336-※※※
－
Description
Orderable Part No
Applicable Part No
Note
Body ASSY
XGT300-1-1-3AS
XGTP313-50336-※※※
－
Description
Orderable Part No
Applicable Part No
Note
Bonnet ASSY
XGTP311-50336A1-1※
XGTP31※-50336-1※※
or
XGTP31※-50336-2※※
-
XGTP311-50336A1-1A※
XGTP31※-50336-※A※
-
XGTP311-50336A1-1C※
XGTP31※-50336-※C※
-
XGTP311-50336A1-1F※
XGTP31※-50336-※F※
-
Gate ASSY
XGTP300-2-1S
XGTP31※-50336-※※※
-
Bellows ASSY
XGTP300-20AS
↑
-
O-ring(Body
opening side)
FKM
XGT300-9-10S
↑
AS568-273
O-ring(Gate)
FKM
XGT300-9-9S
XGTP31※-50336-1※※
AS568-271
Kalrez○
R4079
XGT300-9-11S
XGTP31※-50336-2※※
O-ring(Bonnet
assembly)
FKM
XGT300-9-7S
XGTP31※-50336-※※※
AS568-177
Gate Bolt
XGT300-2-5S
↑
-
Description
Orderable Part No
Applicable Part No
Note
Straight plug
XGT0402-9-12S
For XGTP31※-50336-※C※
C016 30D006 100 12(AMP)
Nil : OPEN/CLOSE end lock
N: None
Auto switch and the connector
Without Gate
Warning
End lock
(See Table 1)

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7．Troubleshooting
Status
Possible cause
Countermeasure
Gate
Internal leakage
Operating pressure is too low
Increase pressure to 0.45MPa or more.
Foreign materials of
Seal surface
Cleaning to Seal Surface
Scratches on the seal surface
of Gate
Replace Gate
Scratches on the seal
surface of Body
Replace Body
Deterioration of O-ring by
processing
Replace with new O-ring whose material is
changed to have compatibility with processing
Twist of O-ring
Re-install O-ring
Come off of O-ring
Re-install O-ring
Peeling off of O-ring
Replace O-ring
Concave/ Convex of end of
O-ring
Put the convex part into the groove to make
the O-ring height the same.
Deterioration of Bonnet
Assembly
Replace Bonnet ASSY
External Leakage
Damage of Bellow ASSY
Replace Bellows ASSY
Deterioration of O-ring by
processing
Replace with new O-ring whose material is
changed to have compatibility with processing
Scratches on the seal surface
Polishing of seal surface
Gate is not
possible to CLOSE
Wrong End lock operation
Please refer 4-4
Operating pressure is too low
Increase pressure to 0.45MPa or more.
Deterioration of Bonnet
assembly
Replace Bonnet ASSY
Gate is not
possible to OPEN
Wrong End lock operation
Please refer 4-4
Operating pressure is too low
Increase pressure to 0.45MPa or more.
Deterioration of Bonnet
assembly
Replace Bonnet ASSY
Doesn't work
Auto-switch
Displacement of
Auto-switch
Adjust the location to detect range
Failure of Auto-switch
Replace Auto-switch
Operating pressure is too low
Increase pressure to 0.45MPa or more.
Air Leakage of
Bonnet ASSY
Loosening of connection
Replace Bonnet ASSY
Wear of piston sea
Replace Bonnet ASSY

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Revision history
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: [phone]
URL http://www.smcworld.com
Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
©2011 SMC Corporation All Rights Reserved