Teledyne 452 User manual

Copyright 2017 02852F DCN7659
Teledyne API 21 November 2017
MODEL 452
PROCESS OZONE SENSOR
User Manual
©2017Teledyne API (TAPI)
www.teledyne-api.com
9970 Carroll Canyon Road
San Diego, CA 92131-1106
Toll free:
800-324-5190
Phone:
[phone]
Fax:
[phone]
mail:
api-[email protected]

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
i
SAFETY MESSAGES
NOTE
The only user-serviceable part in the Model 452 is the lamp, which can
be adjusted or replaced; however, the cautionary safety measures
provided in this manual must be followed. For all other service, call
TAPI Technical Support.
CAUTION
There is risk of dangerous UV exposure when the cover is removed from
the sensor. Take necessary precautions to avoid exposure.
WARNING
High voltages exist inside the sensor. Please use caution when sensor
cover is removed.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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TABLE OF CONTENTS
SAFETY MESSAGES..................................................................................................................................... I
TABLE OF CONTENTS...............................................................................................................................II
LIST OF FIGURES........................................................................................................................................II
LIST OF TABLES........................................................................................................................................ III
WARRANTY POLICY................................................................................................................................ IV
1 PRODUCT DESCRIPTIONS.................................................................................................................. 1-1
1.1 M452 PROCESS OZONE SENSOR ......................................................................................................... 1-1
1.2 M452 HIGH PURITY PROCESS OZONE SENSOR ................................................................................... 1-1
2 SPECIFICATIONS .................................................................................................................................. 2-1
2.1 MECHANICAL SPECIFICATIONS............................................................................................................ 2-1
2.2 PERFORMANCE SPECIFICATIONS ......................................................................................................... 2-2
2.3 OPERATING LIMITS ............................................................................................................................. 2-2
2.4 ELECTRICAL SPECIFICATIONS.............................................................................................................. 2-2
2.5 CALIBRATION REFERENCE .................................................................................................................. 2-2
2.6 PRESSURE DROP ................................................................................................................................. 2-3
2.7 OPTIONS ............................................................................................................................................. 2-3
2.7.1 AC Power Adapter................................................................................................................... 2-3
2.7.2 Ozone Destructor (1/4” Tube Fittings).................................................................................... 2-3
3 THEORY OF OPERATION................................................................................................................... 3-1
4 INSTALLATION...................................................................................................................................... 4-1
4.1 UNPACKING ........................................................................................................................................ 4-1
4.2 MECHANICAL INSTALLATION.............................................................................................................. 4-1
4.3 ELECTRICAL CONNECTIONS ................................................................................................................ 4-1
4.3.1 Power Supply........................................................................................................................... 4-2
4.3.2 Analog Output ......................................................................................................................... 4-2
4.3.3 Zero Calibration Input............................................................................................................. 4-2
4.3.4 Status Outputs.......................................................................................................................... 4-3
4.3.5 RS232/485 Interface................................................................................................................ 4-3
4.4 GAS CONNECTIONS............................................................................................................................. 4-4
4.5 START-UP AND CALIBRATION PROCEDURE......................................................................................... 4-4
5 MAINTENANCE ..................................................................................................................................... 5-1
5.1 UV LAMP ADJUSTMENT AND REPLACEMENT ..................................................................................... 5-1
5.1.1 Measuring and Adjusting UV Lamp Reference and Measurement Voltages........................... 5-4
5.1.2 Adjusting the Lamp.................................................................................................................. 5-4
5.1.3 Replacing the Lamp................................................................................................................. 5-5
6 SENSOR AND SYSTEM TROUBLESHOOTING ............................................................................... 6-2
6.1 STATUS LED’S................................................................................................................................... 6-2
6.2 STATUS OUTPUTS ............................................................................................................................... 6-2
6.3 SENSOR O.K....................................................................................................................................... 6-3
6.4 INVALID READING............................................................................................................................... 6-3
6.5 LAMP LOW.......................................................................................................................................... 6-3
6.6 CELL DIRTY ........................................................................................................................................ 6-4
6.7 STATUS OUTPUT SUMMARY TABLE .................................................................................................... 6-4
LIST OF FIGURES
FIGURE 2-1: M452A HIGH PURITY OZONE SENSOR......................................................................................... 2-1
FIGURE 2-2: PRESSURE DROP VS.FLOW (HIGH PURITY VERSION)................................................................... 2-3

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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FIGURE 4-1: ELECTRICAL CONNECTIONS..........................................................................................................4-1
FIGURE 4-2: DIGITAL OUTPUT CONNECTIONS...................................................................................................4-3
FIGURE 5-1. COVER ASSEMBLY SCREWS..........................................................................................................5-2
FIGURE 5-2. UV LAMP ORIENTATION...............................................................................................................5-2
FIGURE 5-3. VOLTAGE ADJUSTMENT LOCATIONS.............................................................................................5-3
LIST OF TABLES
TABLE 6-1: STATUS OUTPUTS ..........................................................................................................................6-2
TABLE 6-2: STATUS OUTPUT TRUTH TABLE.....................................................................................................6-4

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
iv
WARRANTY POLICY
(02024J)
Teledyne API (TAPI), a business unit of Teledyne Instruments, Inc., provides that:
Prior to shipment, TAPI equipment is thoroughly inspected and tested. Should equipment failure occur, TAPI
assures its customers that prompt service and support will be available. (For the instrument-specific warranty
period, please refer to the “Limited Warranty” section in the Terms and Conditions of Sale on our website at
the following link: http://www.teledyne-api.com/terms_and_conditions.asp).
COVERAGE
After the warranty period and throughout the equipment lifetime, TAPI stands ready to provide on-site or in-
plant service at reasonable rates similar to those of other manufacturers in the industry. All maintenance and the
first level of field troubleshooting are to be performed by the customer.
NON-TAPI MANUFACTURED EQUIPMENT
Equipment provided but not manufactured by TAPI is warranted and will be repaired to the extent and
according to the current terms and conditions of the respective equipment manufacturer’s warranty.
Product Return
All units or components returned to Teledyne API should be properly packed for handling and returned freight
prepaid to the nearest designated Service Center. After the repair, the equipment will be returned, freight
prepaid.
The complete Terms and Conditions of Sale can be reviewed at http://www.teledyne-
api.com/terms_and_conditions.asp
CAUTION – Avoid Warranty Invalidation
Failure to comply with proper anti-Electro-Static Discharge (ESD) handling
and packing instructions and Return Merchandise Authorization (RMA)
procedures when returning parts for repair or calibration may void your
warranty. For anti-ESD handling and packing instructions please refer to the
manual, Fundamentals of ESD, PN 04786, in its “Packing Components for
Return to Teledyne API’s Customer Service” section. The manual can be
downloaded from our website at http://www.teledyne-api.com. RMA
procedures can also be found on our website.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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1 Product Descriptions
1.1 M452 Process Ozone Sensor
The Teledyne API M452 is a microprocessor-based sensor for measuring the concentration of
gaseous ozone in processes such as semiconductor wafer fabrication, water treatment, and ozone
research. The M452 can be used as a full flow process sensor or as a sensor to monitor a small
flow of gas diverted from a process stream.
The M452 features a standard 0-5 volt analog signal for reporting process concentration as well as
4 digital status outputs for sensor diagnostics. A bi-directional serial interface is also provided for
computer control.
The M452 operates from an external +15 vdc power source.
1.2 M452 High Purity Process Ozone Sensor
The M452A High Purity Process Ozone Sensor includes a 316L manifold with a 10Ra finish. ¼”
VCRface seal fittings are standard.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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2 Specifications
Note: All specifications contained herein are subject to change without notice. Please contact
Teledyne API to obtain the current specifications.
2.1 Mechanical Specifications
Figure 2-1: M452A High Purity Ozone Sensor
Weight:
2.8 lbs. (1.27 kg)
Surface Finish:
M452 - 32 µinch Ra
M452A – 10 µinch Ra
Fittings:
M452 – ¼” Gyrolok
M452A – ¼” VCR
Wetted
Materials:
316L Stainless Steel, Sapphire,
Virgin PTFE

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
2-2
2.2 Performance Specifications
Accuracy:
Repeatability:
±1% of Full Scale.
1% of Full Scale
Response Time:
2 sec. To 95%
Zero Drift:
1% Full Scale/month (non –
cumulative)
2.3 Operating Limits
Measurement Range:
5, 10, 15, 20% w/w
25, 50, 100, 200, 400 g/Nm3
Proof pressure:
115 psia
Flow:
0.1-5.0 LPM (See Figure 2-2)
Temperature range:
5 to 45 °C
Warm-Up Period:
15 minutes
2.4 Electrical Specifications
Power Input:
+15 volts ±1.0 volt (1.0A maximum)
Analog Output:
0-5V Full Scale
Zero Cal:
Contact Closure Input
Digital Outputs:
Sensor OK, Invalid Reading, Lamp Low, Cell Dirty
Serial Data
Interface:
RS232 or RS485, Half-Duplex, 9600 Baud
2.5 Calibration Reference
Span Calibration:
Traceable to Buffered KI laboratory calibration
Standard
Temperature and
Pressure (g/Nm3
only):
0°C and 760 mmHg

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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2.6 Pressure Drop
Figure 2-2 below shows the approximate pressure drop from the inlet fitting to the outlet fitting as
a function of volumetric flow rate.
Pressure Drop vs. Flow
y = 0.0008x
2
+ 0.0048x
0.000
0.200
0.400
0.600
0.800
1.000
0 5 10 15 20 25
Flow (LPM)
∆P (psi)
Figure 2-2: Pressure Drop vs. Flow (High Purity Version)
2.7 Options
The M452 is available with an AC Power Adapter option and an Ozone Destructor option.
2.7.1 AC Power Adapter
This option consists of a Universal Input (100-240 VAC, 50-60Hz) Power Adapter with a
standard IEC320 modular AC receptacle. A North American standard 3-prong power cord is also
provided.
2.7.2 Ozone Destructor (1/4” Tube Fittings)
This option consists of an external catalytic Ozone Destructor for connecting to the gas outlet of
the M452. The Ozone Destructor is provided with ¼” compression tube fittings. When the Ozone
Descructor is used in conjunction with the M452, the gas flow rate must be limited to a maximum
of 1.0 L/min.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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3 Theory of Operation
The detection of ozone molecules is based on absorption of 254 nm UV light due to an internal
electronic resonance of the O3molecule. The Model 452 uses a mercury lamp constructed so that
a large majority of the light emitted is at the 254 nm wavelength. Light from the lamp shines
through an absorption cell through which the sample gas being measured is passed. The ratio of
the intensity of light passing through the gas to a reference measurement, which does not pass
through the gas, forms the ratio I/Io. This ratio forms the basis for the calculation of the ozone
concentration.
The Beer-Lambert equation, shown below, calculates the concentration of ozone from the ratio of
light intensities.
o
o
Opsi
CΙ
Ι
×
Ρ
×
Κ
Τ
×
×
−= ln
695.14
273
1
3
α
Where:
I
= Intensity of light passed through the sample
Io
= Intensity of light through sample free of ozone
α
= Absorption coefficient

= Path length
C
O
3
= Concentration of ozone
T
= Sample temperature in degrees Kelvin
P
= Pressure in pounds per square inch (absolute)
As can be seen the concentration of ozone depends on more than the intensity ratio. Temperature
and pressure influence the density of the sample. The density changes the number of ozone
molecules in the absorption cell, which impacts the amount of light, removed from the light beam.
These effects are addressed by directly measuring temperature and pressure and including their
actual values in the calculation. The absorption coefficient is a number that reflects the inherent
ability of ozone to absorb 254 nm light. Lastly, the absorption path length determines how many
molecules are present in the column of gas in the absorption cell.
The intensity of light is converted into a voltage by the detector/preamp module. The voltage is
converted into a number by a voltage-to-frequency (V/F) converter capable of 80,000 count
resolution. The digitized signal, along with the other variables, is used by the CPU to compute the
concentration of ozone using the above formula.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
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4 Installation
4.1 Unpacking
Upon receiving the M452 please verify that no apparent shipping damage has occurred. If damage
has occurred please advise shipper first, then Teledyne API.
4.2 Mechanical Installation
Mount the M452 to a stable platform using four #8-32UNC screws. See Figure 2-1 for mounting
hole dimensions.
NOTE
If the mounting platform is non-conductive or not connected to earth ground, then a
separate connection to earth ground should be made using one of the mounting
screws. Failure to provide a proper earth gro
und connection may make the M452
susceptible to electrical interference from external sources.
4.3 Electrical Connections
Electrical connections are made to the M452 using the 15 pin D-Sub connector on the top of the
device. Figure 4-4-1 shows the pin-out of the 15-pin connector and typical connections.
Analog Out -
Analog Out +
Power Common
+15 Volt Supply
+15 Volt Supply
Digital In #1
Digital In #2
Digital Out #1
RS485-A
Power Common
RS485-B
Digital Out Common
Digital Out #4
Digital Out #3
Digital Out #2
Power Supply
Common
+15V
- +
Ozone Concentration
Meter
(0-5 VDC)
or Data Acqusition Device
Status Display
or
PLC
Zero Cal = Closed
Figure 4-1: Electrical Connections

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
4-2
4.3.1 Power Supply
The M452 requires a +15 VDC power source capable of supplying 1.0 A. DC power can be
connected through the male DB-15 connector or through the coaxial power jack. The coaxial
power jack is configured so that the ground connection is on the outside (shield) and the +15V
connection is on the center pin.
If power is to be supplied through the DB-15 connector, the positive terminal of the power supply
should be connected to pins 4 and 5 on the 15-pin connector and the common terminal should be
connected to pins 3 and 15.
If the optional AC Power Adapter is used to provide power, it should be connected to the coaxial
power connector adjacent to the DB-15 connector on the top of the M452. Use only the approved
AC Power Adapter provided by Teledyne API.
4.3.2 Analog Output
The analog output is a 0-5 volt signal representing the ozone concentration measured by the
sensor. The output is scaled to the concentration range that the sensor has been set to measure.
Check the serial number label on the M452 to determine the concentration range.
For best performance, the analog output should be connected to a voltmeter or A/D converter with
a differential input and a minimum input impedance of 2KΩ.
4.3.3 Zero Calibration Input
The zero calibration input is located on Digital Input #1. To zero the M452, Digital Input #1
should be connected to the power common for at least 1 second. This can be accomplished using a
Normally Open switch or relay.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
4-3
4.3.4 Status Outputs
The M452 has four digital status outputs for indicating error status and when operational
parameters have moved out of normal limits. These outputs are in the form of opto-isolated open-
collector transistors. They can be used to drive status LED’s on a display panel or interface to a
digital device such as a Programmable Logic Controller (PLC).
Figure 4-4-2 below shows the most common way of connecting the digital outputs to an external
device such as PLC. Note: Most devices, such as PLC’s, have internal provision for limiting the
current that the input will draw from an external device. When connecting to a unit that does not
have this feature, external dropping resistors must be used to limit the current through the
transistor output to 50mA or less.
See Section 1 for details on using the Status Outputs for diagnosing sensor and system-level
malfunctions.
Opto-Isolator
Digital Output #1-4 (Collector)
Digital Output Common (Emmiter)
Ground Provided
by PLC
Programmable Logic
Controller or other device
M452
Digital
Input
+5V
Figure 4-2: Digital Output Connections
4.3.5 RS232/485 Interface
The M452 features a bi-directional digital serial interface that can be used for sensor control and
data acquisition. Please contact Teledyne API for documentation on the use of the RS232/485
interface.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
4-4
4.4 Gas Connections
Gas connections to the M452 are made using ¼” compression tube fittings (M452) or ¼” VCR
face seal fittings (M452A.) The ¼” compression fittings can be used with ¼” O.D. Stainless Steel
or Teflontubing. The M452 is not sensitive to flow direction; it does not matter which of the
two fittings is used as the gas inlet.
To avoid contamination of the optical cell in the M452, ensure that all tubing upstream of the
M452 is properly cleaned and purged before the M452 is installed.
In order to achieve an acceptable response time and to avoid sample degradation, the system
should be set up so that a minimum flow rate of 0.1 LPM is established through the M452. If long
tubing runs are used between the measurement point and the M452, then higher flow rates should
be used to avoid sample degredation. Appropriate tests should be conducted to determine
minimum flow requirements.
4.5 Start-Up and Calibration Procedure
1. Verify that the proper electrical connections have been made (See Section 4.3) and apply power to the
M452. Allow the M452 to warm up for at least 15 minutes.
2. Purge the M452 with zero gas (usually oxygen) at a minimum flow rate of 0.1 LPM for at least 2
minutes.
3. Check that the Status Outputs (See Section 4.3.4) are in their normal states and no errors are indicated.
4. Close the zero calibration input (See Section 4.3.3) for a minimum of 1 second to perform the automatic
zero calibration.
5. Re-check the Status Outputs to ensure that no errors are indicated.
6. Check the voltage on the analog output (See Section 4.3.2) and verify that it reads 0.000 ±0.010 volts.
7. The M452 is now ready for operation.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
5-1
5 Maintenance
The only user-serviceable part in the Model 452 is the lamp, which can be adjusted or replaced.
For all other service, contact TAPI Technical Support.
WARNING
High voltages exist inside the sensor. Use caution when sensor cover is removed.
CAUTION – Avoid Warranty Invalidation
Failure to comply with proper anti-Electro-
Static Discharge (ESD) handling
instructions may void your warranty. Refer to the manual, Fundamentals of
ESD, PN 047
86, which can be downloaded from our website at
http://www.teledyne-api.com.
CAUTION
There is risk of dangerous UV exposure when the cover is removed from the
sensor. Take necessary precautions to avoid exposure and to protect eyes.
5.1 UV Lamp Adjustment and Replacement
The electronics used in TAPI analyzers are sensitive to Electrostatic Discharge (ESD). When
working on any TAPI device, please ensure that you are properly grounded prior to handling or
touching any electronic circuitry in the analyzers. For more information on how to protect
sensitive components from ESD during handling, please refer to the manual, Fundamentals of
ESD, PN 04786, which can be downloaded from our website at http://www.teledyne-api.com
NOTE
Use only distilled or de-ionized water with clean,lint-free towels and swabs when
cleaning any components in TAPI equipment unless otherwise instructed.
For the procedures in this section, refer to Figure 5-1, Figure 5-2, and Figure 5-3.

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
5-2
Figure 5-1. Cover Assembly Screws
Figure 5-2. UV Lamp Orientation

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
5-3
Figure 5-3. Voltage Adjustment Locations

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
5-4
5.1.1 Measuring and Adjusting UV Lamp Reference and Measurement Voltages
1. Flush the analyzer with zero gas to exhaust any possible residual high concentration of O3.
2. Remove the analyzer from the equipment (if necessary) to access the cover screws and the
internal components of the analyzer.
3. Remove the three screws shown in Figure 5-1.
4. Carefully slide cover up and off of instrument.
5. Apply +15VDC Power to J10 (+15 VDC Power Jack) or through DB-15 connector (Figure
5-3).
6. Allow the analyzer to warm up for at least 15 minutes (the lamp output changes during warm
up.
7. Measure and record the Reference voltage.
a. Measure the DC Voltage from GND J9 pin 1 to TP REF (Figure 5-3).
b. Adjust R43 as high as possible within range of 3500-4600mv.
8. Measure and record the Measure voltage.
a. Measure the DC Voltage from GND J9 pin 1 to TP MEAS (Figure 5-3).
b. Adjust R36 as high as possible within range of 3500-4600mv.
9. If the minimum voltage of 3500mV cannot be attained for the REF or MEAS, the lamp must
be adjusted or replaced.
10. If the voltages are correct, reinstall and perform a zero calibration on the analyzer.
5.1.2 Adjusting the Lamp
The object of the adjustment procedure is to get the voltage above 3500mV and below 4600mV
by either “peaking” the lamp to increase the voltage or “de-tuning” the lamp to decrease the
voltage. A new lamp should easily be able to get up to 4600mV. Over time, the lamp may need
positional adjustments and adjustments to the potentiometers to get maximum usage from a lamp.
At peak, a new lamp may put out so much power that the detectors may become saturated even
with the detector amplifier gain potentiometers turned all of the way down. If the lamp generates
more than 4600mV on the REF and MEAS test points at “peak” (with the potentiometers turned
all of the way down), then the lamp will have to be “de-tuned” to “off peak” by rotating it until its
output does not exceed 4600mV on the REF and MEAS test points.
Conversely, if an older lamp is only putting out 3500mV or below with the lamp peaked (for
instance a lamp that is near the end of its life), make sure the lamp is peaked and that both REF
and MEAS potentiometers are adjusted all of the way up to get the voltages above 3500mV. If
3500mV is not attainable at peak (with the potentiometers turned all of the way up), the lamp
must be replaced.
1. Monitor the DC Voltage from GND J9 pin 1 to TP 5 (Figure 5-3). This voltage must read
between –0.8 and –1.8 Vdc. If the voltage does not read correctly, loosen the two UV lamp
retaining screws (Figure 5-2) and rotate the UV lamp (avoid touching the transformer on the
UV lamp power supply) until this voltage (-.8 to -1.8 Vdc) is reached and then tighten the
screws back down again. If unable to get the voltage below -.8Vdc (-.8V to -1.8V), the lamp

Teledyne API M452 Ozone Sensor Instruction Manual, 02852F DCN7659
5-5
must be replaced. If a positional adjustment lowers TP5 voltage to below -.8V, adjust the
Reference and Measure voltages as follows.
2. Measure and record the Reference voltage.
a. Measure the DC Voltage from GND J9 pin 1 to TP REF (Figure 5-3).
b. Adjust R43 as high as possible within range of 3500-4600mv.
3. Measure and record the Measure voltage.
a. Measure the DC Voltage from GND J9 pin 1 to TP MEAS (Figure 5-3).
b. Adjust R36 as high as possible within range of 3500-4600mv.
4. If the Reference and Measure readings are above 3500mV and below 4600mV, no further
adjustment is necessary. Proceed to reinstall the analyzer and perform a zero calibration.
5. If the minimum voltage of 3500mV cannot be attained, the lamp must be replaced.
5.1.3 Replacing the Lamp
NOTE
Be careful to keep the lamp free from contaminants such as fingerprints. If the
lamp becomes contaminated, clean the lamp’s optical surface with alcohol first, then
with distilled or deionizedwater. Do NOT allow any liquid to infiltrate the analyzer
1. Remove +15VDC Power to J10 (+15 VDC Power Jack) or DB-15 connector (Figure 5-3).
2. Loosen two UV Lamp Retaining screws (Figure 5-2) approximately one turn counter-
clockwise.
3. Press in on the UV lamp connector (Figure 5-2) and pull up on connector to disconnect
lamp.
4. Slide the UV lamp up and out of UV Lamp Block.
5. Install the new UV lamp, make sure that the UV lamp is all the way down in the UV lamp
block and the index mark or inverted “V” notch is aligned as shown in Figure 5-2.
6. Tighten the UV Lamp retaining screws very carefully. They only need to be torqued to
about 6 in/lbs (8 in/lbs Maximum).
7. Apply +15VDC Power to J10 (+15 VDC Power Jack) or through DB-15 connector (Figure
5-3).
8. Allow the new lamp and analyzer to warm up for at least 15 minutes.
9. Check the DC Voltage from GND J9 pin 1 to TP 5 (Figure 5-3). This voltage must read
between –0.8 and –1.8Vdc. If the voltage does not read correctly then loosen the two UV