Ulvac GR60 User manual

YK09-0023-DI-003-02
Instructions Manual
Multiple Roots Type Dry Pump
GR60
GR90
GR180
※IE3 motor adoption
ULVAC, INC.
Components Division
http://www.ulvac.co.jp/
Be sure to read the manual before using this
product. In addition, keep it in a safe and readily
available place.

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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i
0. Before Use
We are sincerely appreciate your decision to purchase our product.
Upon receipt of the product, please confirm the contents included are the same as you ordered and
check the product for any damage attributed to transportation etc. just in case.
This manual describes appropriate ways to handle and maintain the product for the safe use and
effective performance. Before using the product, read this instructions manual for the correct use of
the pump.
Install and operate this product according to the local and national safety laws and regulations (such
as fire laws and electric wiring code). Accordingly, you are required to take classes for general safety
that are valid in the country and the local area at the site. No one who hasn't take the classes can
handle the product. The operator is required to have taken such trainings. In addition, the operator
has expertise, skills, qualifications in electrics, mechanics, cargo handling, vacuum, etc.
This product is designed to follow the current regulations as of the preparation of this manual. If the
criteria of the regulations are changed in the future, the compliance is not guaranteed.
If the device with this product built-in doesn't follow the same regulations, or if any changes are
made to the product itself, it may not be guaranteed to have its performance and safety. We don't
guarantee (have no responsibility for) such performance and safety. Any product modifications you
have done are not covered by our warranty and we are not responsible for them.
Before installing/removing this product, keep the product from all the energy sources (such as
electricity).
All the parts of this product are not intended for permanent use with the performance at the delivery.
Even under the conditions of use expected in light of common sense, the performance inevitably
deteriorates with time, which tends to cause trouble on the product. We would like to ask you to
grasp your conditions of use and cooperate to provide preventive maintenance to avoid any trouble.
If you cooperate to make preventive maintenance measures, the likelihood of the trouble on this
product attributed to malfunctions caused by worn parts will decrease and that of the risk, such as
downtime, fire, and influence on other processes, attributed to the trouble on this product will also
decrease.
In addition, from the viewpoint of preventive maintenance, you are asked to prepare a maintenance
and inspection plan and conduct parts replacement and overhaul accordingly.
If you have any unclear points, please contact the closest sales office, agency, or our
Components Division.
In no case, all or part of this instructions manual may be copied for any
third party without our permission.
CAUTION

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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0.1 Safety Symbol Mark
This instructions manual and the product warning labels indicate safety symbol marks for the
understanding of compliance rules. The signs for the symbols are classified as follows.
0.2 Definition of Safety Symbol Mark
This indicates an imminently hazardous situation which, if the product
is misused, will result in operator's death or serious injury.
This indicates a potentially hazardous situation which, if the product is
misused, could result in operator's death or serious injury.
This indicates a potentially hazardous situation which, if the product is
misused, may result in operator's moderate injury or serious damage
to the machinery. This indicates a potentially hazardous situation
which could result in damage to the machinery or malfunctions.
IMPORTANT
"IMPORTANT" is indicated if there is information or content which
needs to be known especially for operation and maintenance work of
this system.
Work that needs training on electrical safety due to the risk of an
electric shock.
Work that is done after checking that the pump temperature
decreases because that part is high in temperature immediately after
the pump stops.
CAUTION
WARNING
DANGER

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0.3 Safety Precautions
This section describes a way to avoid dangers and dangerous behavior to be avoided for each work.
About this product and this instructions manual
To use this product for many years, be sure to read this instructions
manual before installation, operation, inspection, or maintenance of this
product and fully understand the safety precautions, specifications, and
operation method of this product.
This product is supposed to exhaust inactive gas (air, nitrogen, argon)
so exhaust of other gas (toxic gas, combustion gas, flammable gas,
corrosive gas, explosive gas) is extremely dangerous. Do not exhaust
any gas with these properties.
If combustion/flammable/explosive gas is sucked in the vacuum pump, it
is extremely dangerous because the residual gas or products may cause
ignition/explosion not only in operation but also after a stop. Do not
exhaust any gas with these properties.
If toxic gas is sucked in the vacuum pump, it goes without saying that
not only the pump body but also the pump oil will be toxic. Take care
during the maintenance work.
If the details on the hazardous substances you have used are not
disclosed, or if substances that are hard to detoxify are exhausted, we
may refuse maintenance and other operations at your site.
Note that the specifications, prices, etc. of the product and the
description of the instructions manual are subject to change without
prior notice for improvement. When any changes are made, the
document number at the upper right of the front cover of the
instructions manual is updated and the document is released as a
revised version.
Be sure to give this instructions manual to the end user of the product.
Please let us know if you export this product and take necessary
procedures according to provisions of export-related laws and
regulations.
If there are any unclear points, please contact the sale office where you
purchased the product.
DANGER
DANGER
DANGER
DANGER
WARNING
WARNING
WARNING
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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iv
Storage/Installation
(1) This product is paced in a wooden crate. Please ask a professional
contractor to dismantle it. During the work, there is the risk of cutting
your hands by nails or wooden chips used to fix the wooden crate.
Therefore, instruct the person who dismantle the crate to wear
leather gloves and use an appropriate dismantling tool, such as a
crowbar.
(2) If the product needs to be taken out from the crate or the pump
needs to be lifted, instruct the operator to use cargo handling
equipment, such as a crane, and the eye bolts on the pump to lift for
transportation. Check the eye bolts for any error.
(3) Any person other than those having technical qualifications shall
not perform cargo handling operation and operate cargo handling
equipment.
(4) Unreasonable operation or insufficient maintenance of
equipment may cause the pump to fall or turn over. Never get
under the pump.
Transportation
(1) This product has casters. But do not transport it on casters over a
long distance.
(2) The mass of each product is as follows:
GR60: 128kg
GR90: 188kg
GR180: 268kg
A load over the safety standard value is required for transportation,
and therefore you may strain your back. Transport it by hanging with
cargo handling equipment (such as a mobile crane), or put and fix it
on a pallet and transport it on a pallet track.
(3) This product uses vinyl tubes as nitrogen gas and cooling water
pipes. Transport the product with care not to have it in contact with
posts and walls.
Seismic countermeasure
If not securely fixed, it may turn over or move, damaging the peripheral
equipment. Vacuum pipes and electric wires shall be structured not to
rapture, not to be disconnected, and to absorb vibration by a specified
vibration.
WARNING
WARNING
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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Intake and exhaust piping <Mounting>
Before starting work, check that all dangerous energies are shut out.
Nitrogen Gas Piping <Mounting>
(1) Before starting work, check that all dangerous energies are shut
out.
(2) It is designed to prevent leakage under specified conditions and a
leak test is performed. However, any abnormal conditions outside
the range of the specifications (such as an abnormal pressure
increase) may cause leakage.
(3) Nitrogen gas is used as the shaft seal gas. Install in a ventilated
room.
(4) Attach a feed valve to stop the supply of Nitrogen gas.
Cooling Water Piping <Mounting>
(1) If the operation is continued under the conditions where the cooling
water flow is lower than the specified value, the pump may be
broken. Using a flow sensor etc, make a system that shuts out the
supply of electricity to the pump in the event that the cooling water
stops.
(2) Before starting work, check that all dangerous energies are shut out.
(3) It is designed to prevent leakage under specified conditions and a
leak test is performed. However, any abnormal conditions outside
the range of the specifications (such as an abnormal pressure
increase, condensation etc.) may cause leakage. In such a case,
water continues to leak until the supply from the device stops. Do
not install electric equipment or wires on the bottom of or the floor
surface in the proximity of the pump.
(4) During the operation of this product, the vacuum pump body needs
to be cooled at all times by supplying a specified amount of flowing
water. Install a flow meter that can visually recognize the flow (such
as a flow sight) to check that cooling water flows.
(5) Install a water leakage sensor on the floor under the pump. If any
water leakage is detected, immediately close the feed valve of the
cooling water and set up a system to shut out electricity to the pump.
(6) Attach a feed valve to stop the supply of cooling water.
WARNING
WARNING
WARNING

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Power Cable <Mounting>
(1) Before starting work, check that all dangerous energies are shut out.
(2) Wiring work shall be performed only by qualified personnel. Wrong
wiring work may trigger fire.
(3) Wiring work shall be performed correctly according to the safety
laws and regulations (such as fire laws, electric wiring codes, and
indoor wiring regulations) of the country and the local area where
you use this product.
(4) Securely connect to ground.
(5) We recommend installing a dedicated earth leakage breaker. There
is a risk of an electric shock.
(6) Be sure to attach an overload protective device. If not, it may result
in a motor burnout or fire.
Operation
(1) During the operation, do not touch the vacuum pump body, motor,
and pipes since they are subjected to high temperature. If your body
comes into contact with them, you may get burned.
(2) Do not operate the vacuum pump with any devices that cause
clogging of the exhaust attached on the exhaust port side in such a
way that they disturb the gas flow. Otherwise the inner pressure of
the vacuum pump may increase and cause a rupture of the casing
and the oil level gauge, resulting in oil leakage and an overload of
the electric motor.
(3) During the operation of this product, the vacuum pump body needs
to be cooled at all times by supplying a specified amount of flowing
water. Install a flow meter that can visually recognize the flow (such
as a flow sight) to check that cooling water flows.
(1) Do not use in a hazardous area (where a hazardous atmosphere may
occur by explosive gas). Otherwise injury or fire may occur.
(2) Do not put your fingers or any objects in the opening of the motor.
Otherwise an electric shock, injury, fire, etc. may occur.
(3) Never place any flammable object in the area within 1m from the
motor or the vacuum pump. Otherwise fire may occur.
(4) Do not place walls and obstacles within 0.3m from the ventilator of
the motor (from the ends of the electric motor). Otherwise you may
get burned or fire may occur.
CAUTION
WARNING
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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Stop
For a while after the operation stops, do not touch the vacuum pump,
motor, and pipes since they are subjected to high temperature. If your
body comes into contact with them, you may get burned. Supply cooling
water until the pump temperature becomes low.
Inspection/Repair
(1) Before inspection/repair, be sure to turn off the power switch.
Otherwise the vacuum pump suddenly starts to operate and you may
get injured.
(2) Any person other than service engineers is not allowed to
disassemble or repair/modify at all. Otherwise ignition or abnormal
action may occur and you may get burned or an electric shock.
(3) If the product does not work or there is an error, immediately turn off
the power switch to prevent any accidents and please always ask the
shop you purchased it or the nearest service center to inspect/repair.
Power Cable <Removal>
Before removal, be sure to disconnect it from the power supply.
Cooling Water Piping <Removal>
(1) For during operation, and for some time after the operation stops, do
not touch the vacuum pump, motor, and pipes since they are
subjected to high temperature. If your body comes into contact with
them, you may get burned. Supply cooling water until the pump
temperature becomes low.
(2) When removing the cooling water joints immediately after the pump
operation stops for a model with hermetically sealed connections,
the cooling water remaining in the pump may boil with an inner
pressure increase, causing damage to the cooling water pipes.
Supply cooling water until the pump temperature becomes low.
(3) Before removal of the cooling water pipes, close the feed valve of
cooling water.
(4) This product uses vinyl tubes as cooling water pipes. If the cooling
water inlet or outlet is sealed and compressed air is supplied from
the non-sealed port, the cooling water pipes may not be able to
withstand the load of the compressed air and be broken. When
supplying compressed air into the cooling water pipes, be sure to do
that with one port open.
WARNING
WARNING
WARNING
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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Nitrogen Gas Piping <Removal>
(1) Before removal of the nitrogen gas pipes, close the feed valve of
nitrogen gas.
(2) The pipe on the device side has residual pressure. Install a pressure
gauge in the nitrogen supply source of the device (on the way to the
pump in the pipe) and check that the pressure decreases down to the
atmospheric pressure, before removing the nitrogen gas pipes. If the
inner pressure is high during the work, there is a risk that the pipes
may be disconnected with force and you may get injured.
Intake and exhaust piping <Removal>
(1) Remove according to the installation manual of the device.
(2) For a while after the operation stops, do not touch the intake and
exhaust pipes since they are subjected to high temperature.
Remove after the pump temperature becomes low.
(3) Fully seal the intake and exhaust ports using shutoff flanges etc.
Transportation
(1) This product has casters. But do not transport it on casters over a
long distance.
(2) The mass of each product is as follows:
GR60: 128kg
GR90: 188kg
GR180: 268kg
A load over the safety standard value is required for transportation,
and therefore you may strain your back. Transport it by hanging with
cargo handling equipment (such as a mobile crane), or put and fix it
on a pallet and transport it on a pallet track.
(3) This product uses vinyl tubes as nitrogen gas and cooling water
pipes. Transport the product with care not to have it in contact with
posts and walls.
WARNING
WARNING
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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0.4 Type/Description and position of warning label on this machine
On this machine, warning labels are attached to the points to warn. Be sure to check before
operating the pump.
Before use, read through the instruction manual and fully understand
its contents.
There is a risk of an electric shock in the area around a point with this
warning label. Before the wiring and maintenance work, be sure to turn
off the power supply.
Be sure to close the cover of the terminal box.
For during operation, and for some time after the operation stops, do not
touch the vacuum pump, motor, and pipes since they are subjected to
high temperature. If your body comes into contact with them, you may
get burned.
If the vacuum pump is not operated and stored for a long period of time,
rust formation etc. may cause problems in operation. If it has not been
used for a long time, please ask the nearest service center to inspect.

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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GR60
GR90
GR180

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0.5 Acceptance and storage of pump
0.5.1 Acceptance of unpacked pump
(1) This product is paced in a wooden crate. Please ask a professional
contractor to dismantle it. During the work, there is the risk of cutting
your hands by nails or wooden chips used to fix the wooden crate.
Therefore, instruct the person who dismantle the crate to wear
leather gloves and use an appropriate dismantling tool, such as a
crowbar.
(2) If the product needs to be taken out from the crate or the pump
needs to be lifted, instruct the operator to use cargo handling
equipment, such as a crane, and the eye bolts on the pump to lift for
transportation. Check the eye bolts for any error.
(3) Any person other than those having technical qualifications shall
not perform cargo handling operation and operate cargo handling
equipment.
(4) Unreasonable operation or insufficient maintenance of
equipment may cause the pump to fall or turn over. Never get
under the pump.
Upon receipt of the product, please confirm first the contents included are the same as you ordered
and check the product for any damage attributed to transportation etc. If you notify us after the
product is used, it may be charged.
The product is shipped with due care but, after you unpacked, please check the following just in
case.
IMPORTANT
(1) Is the product as you have ordered?
(2) Are the accessories (instructions manual and option parts)
included?
(3) Are there any damaged parts during the transportation?
(4) Are screws and nuts loosened during the transportation? Are there
any screws and nuts dropped?
If there are any defects, please contact our sales department or the
distributors you deal with.
Standard Accessories List
Item Name Specifications Quantity Remarks
Instructions
Manual English One copy －
WARNING

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0.5.2 Transportation (Carry-in/out)
(1) This product has casters. But do not transport it on casters over a
long distance.
(2) The mass of each product is as follows:
GR60: 128kg
GR90: 188kg
GR180: 268kg
A load over the safety standard value is required for transportation,
and therefore you may strain your back. Transport it by hanging with
cargo handling equipment (such as a mobile crane), or put and fix it
on a pallet and transport it on a pallet track.
(3) This product uses vinyl tubes as nitrogen gas and cooling water
pipes. Transport the product with care not to have it in contact with
posts and walls.
WARNING

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xiii
0.5.3 Ambient conditions during storage, installation, and operation
This product is a machine with precision clearances. Therefore satisfy the following conditions during
the storage, installation, and operation.
Installation of Pump
Do not give a shock to, tilt, turn over, or stand the pump, or make it
upside down. Otherwise it affects the pump operation. With the intake
port facing upward, install the pump body horizontally.
(1) Ambient
temperature and
humidity
[During
storage] ：
-30 to 60 ﾟC, 95%RH or lower (No freeze and condensation)
[During
operation]
：
5 to 40 ﾟC, 90%RH or lower (No condensation)
(2) Altitude [During storage･
During operation]
：
Altitude: 1,000m or lower
(3) External
vibration
[During storage ･
During operation]
：
Vibration acceleration: 0.5G (114 dB) or lower
(4) Others [During storage ･
During operation]
：
a. Corrosive and explosive gas are not allowed.
b. Freeze and condensation is not allowed.
c. Dust is not allowed.
d. The room shall be ventilated.
e. The pump is not allowed to double stack and turn over, and
the motor and the oil level gauge are not allowed to stand
with their ends facing down.
f. Direct sunlight shall be avoided.
g. Keep away from heat sources.
h. At the time of storage, be sure to drain.
(At 0 ﾟC or lower, water is frozen, damaging the cooling
water pipes etc.)
i. After moving to the installation site, adjust the jacks at the
four points within the range from 0 to 10 mm to install the
pump body horizontally.
j. Use cushioning materials, such as vibration-proof rubbers,
on the installation surface.
Cushioning material
Fix with nuts.
Within the range
from 0 to 10 mm
CAUTION

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0.6 Protective Equipment
This machine is equipped with a three-phase AC motor.
The motor does not have a protective equipment. When connecting the motor to the power supply,
set it up via overload protective equipment according to the national and local safety laws and
regulations at the site.
When selecting overload protective equipment, see "3.7 Electric Connection."
We recommend installing protective equipment (such as an earth leakage breaker) in addition to
overload protective equipment.
Be sure to attach overload protective equipment.
If not, it may result in a motor burnout or fire.
CAUTION

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
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Contents 1
Table of Contents
0. Before Use··························································································· i
0.1 Safety Symbol Mark····························································································ii
0.2 Definition of Safety Symbol Mark···········································································ii
0.3 Safety Precautions ·····························································································iii
0.4 Type/Description and position of warning label on this machine ···································ix
0.5 Acceptance and storage of pump ··········································································xi
0.5.1 Acceptance of unpacked pump······································································xi
0.5.2 Transportation (Carry-in/out) ·········································································xii
0.5.3 Ambient conditions during storage, installation, and operation ·····························xiii
0.6 Protective Equipment··························································································xiv
1. For safe use ························································································· 1
1.1 Product-specific Risk and Safety Measure·······························································1
1.1.1 Intake and Exhaust of Hazardous Gas/Substance ································1
1.1.2 Transportation of heavy load items ····················································1
1.1.3 Electric shock················································································2
1.1.4 High temperature···········································································2
1.1.5 Rupture ·······················································································2
1.2 Material Safety Data Sheet···················································································3
2. Overview of Pump ················································································ 4
2.1 Feature ············································································································4
2.2 System Flow ·····································································································5
2.3 Specifications ····································································································6
2.4 External Dimensional Drawing ··············································································8
3. Mounting ····························································································· 11
3.1 Installation ········································································································11
3.2 Oil filling ···········································································································12
3.3 Intake port pipe··································································································15
3.4 Exhaust port pipe ·······························································································16
3.5 Nitrogen gas pipe ·······························································································17
3.6 Cooling water pipe······························································································18
3.7 Electric Connection·····························································································20
4. Operation····························································································· 23
4.1 Operational Precautions ······················································································23
4.2 Operation Start ··································································································24
4.3 Operation Stop ··································································································25
4.4 Installation of Silencer ·························································································25
5. Pump Performance ··············································································· 26
5.1 Exhaust velocity·································································································26
DANGER
WARNING
WARNING
CAUTION
CAUTION

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Contents 2
6. Removal ······························································································ 27
6.1 Electric connection ·····························································································27
6.2 Cooling water pipe······························································································27
6.3 Nitrogen gas pipe ·······························································································28
6.4 Intake and exhaust pipe·······················································································28
7. Maintenance ························································································ 29
7.1 Inspection·········································································································29
7.2 Operation after long-term storage ··········································································29
7.3 Overhaul ··········································································································29
7.4 Trouble Check List······························································································31
8. Disposal ······························································································ 33
9. Warranty Clause ··················································································· 34
9.1 Warranty Product ·······························································································34
9.2 Warranty Period ·································································································34
9.3 Warranty Coverage·····························································································34
9.4 How to Respond ································································································34
9.5 Others··············································································································35

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
1
1. For safe use
1.1 Product-specific Risk and Safety Measure
1.1.1 Intake and Exhaust of Hazardous Gas/Substance
Factor How to avoid / Measure
Intake and Exhaust of
Hazardous Gas/Substance
Exhaust of toxic gas, combustion gas, flammable gas,
corrosive gas, and explosive gas is extremely
dangerous. Do not exhaust any gas with these
properties.
You get injured by touching
pump oil, pump, products, and
aspiration materials which have
become toxic at the time of
inspection/disposal.
(1) Wear protective equipment to toxic materials you
use, before starting work, such as inspection.
(2) At the time of overhaul/disposal, please ask a
professional contractor for the waste disposal to
detoxify.
(3) Ask a waste disposal company with an
administrative approval to dispose of the product.
You get injured by
ignition/explosion due to residual
gas or products.
If combustion/flammable/explosive gas is sucked in
the vacuum pump, it is extremely dangerous because
the residual gas or products may cause
ignition/explosion not only in operation but also after a
stop. Do not exhaust any gas with these properties.
1.1.2 Transportation of heavy load items
Factor How to avoid / Measure
Injury during the pump
transportation.
Mass of the pump
GR 60 ：128kg
GR 90 ：188kg
GR180：268kg
(1) Any person other than those having technical
qualifications shall not perform cargo handling
operation and operate cargo handling equipment.
(2) Unreasonable operation or insufficient
maintenance of equipment may cause the pump to
fall or turn over. Never get under the pump.
DANGER
WARNING

Instructions Manual －Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
2
1.1.3 Electric shock
Factor How to avoid / Measure
You get an electric shock by
touching a live part of the motor.
(1) Before establishing electrical connections, be sure
to turn off the power. Be sure to connect to ground.
(2) Be sure to close the cover of the motor terminal
box first and then operate the pump. Do not open
the cover during the operation.
(3) Before inspection/relocation, be sure to turn off the
power.
(4) Do not put your hands, any thin rods, etc. in the
opening of the motor.
The motor terminal burns out.
Securely tighten the terminal. Check the tightened
conditions once a month. (See 3.7 Electric
Connection.)
1.1.4 High temperature
Factor How to avoid / Measure
Getting burned at high
temperature part
(1) During the operation, do not touch the vacuum
pump body, motor, and pipes since they are
subjected to high temperature.
(2) For a while after the operation stops, do not touch
the vacuum pump, motor, and pipes since they are
subjected to high temperature. Supply cooling
water until the pump temperature becomes low.
1.1.5 Rupture
Factor How to avoid / Measure
The inner pressure in the cooling
water pipes increases and the
pipes rupture.
(2) When removing the cooling water joints
immediately after the pump operation stops for a
model with hermetically sealed connections, the
cooling water remaining in the pump may boil with
an inner pressure increase, causing damage to the
cooling water pipes. Supply cooling water until the
pump temperature becomes low.
(4) This product uses vinyl tubes as cooling water
pipes. If the cooling water inlet or outlet is sealed
and compressed air is supplied from the
non-sealed port, the cooling water pipes may not
be able to withstand the load of the compressed air
and be broken. When supplying compressed air
into the cooling water pipes, be sure to do that with
one port open.
WARNING
CAUTION
CAUTION