Ulvac GHD-031A User manual

No．1000310-2-01-14
Instruction Manual
For
Oil Sealed Rotary Vacuum Pump
Original Instructions
Model
ＧＨＤ－０３１Ａ
ＧＨＤ－０３１Ｂ
Request to Users
Please read this manual thoroughly to ensure safe and effective use of the equipment.
Keep this manual in a place where it can be referred to at any time and look after it
carefully.
The contents of this instruction manual are subject to change without prior notice due
to improvements in performance and the functions of the product.
ULVAC KIKO, Inc.

Contents－01
Contents
0．Introduction ・・・・・・・・・・01
0.1 Before using the vacuum pump ・・・・・・・・・・01
0.2 Safety symbols ・・・・・・・・・・03
1．For safe operation ・・・・・・・・・・ 1
1.1 Hazards peculiar to the pump and safety measures ・・・・・・・・・・ 1
1.1.1 Leakage of dangerous gas and material ・・・・・・・・・・ 1
1.1.2 Electric shock ・・・・・・・・・・ 1
1.1.3 Explosion ・・・・・・・・・・ 2
1.1.4 High temperature ・・・・・・・・・・ 3
1.2 Safety Data Sheet (SDS) ・・・・・・・・・・ 4
2．Outline of the Pump ・・・・・・・・・・ 5
2.1 Specification ・・・・・・・・・・ 5
2.2 Dimensional drawing ・・・・・・・・・・ 6
3．Measures before it starts ・・・・・・・・・・ 7
3.1 Securing of exhaust vent ・・・・・・・・・・ 7
3.2 Installation ・・・・・・・・・・ 9
3.3 Vacuum piping ・・・・・・・・・・10
3.4 Electric wiring ・・・・・・・・・・12
a) Power cable selection standards ・・・・・・・・・・13
b) Precautions ・・・・・・・・・・13
b-1) Unplug-preventive hardware(Option) ・・・・・・・・・・13
b-2) How to install unplug-preventive hardware ・・・・・・・・・・14
3.5 Fluctuation in the power voltage and frequency ・・・・・・・・・・15
Danger
Warning
Warning
Caution

Contents－02
4．Operation ・・・・・・・・・・16
4.1 Cautions for operation ・・・・・・・・・・16
4.2 Start of operation ・・・・・・・・・・16
4.3 Stopping the operation ・・・・・・・・・・17
4.4 Operation in cold climates ・・・・・・・・・・17
4.5 Thermal protector ・・・・・・・・・・17
4.6 Magnet coupling ・・・・・・・・・・18
4.7 Oil mist trap (Option) ・・・・・・・・・・18
4.8 Restriction on operation when the oil mist trap is installed ・・・・・・・・・・18
5．Pump performance ・・・・・・・・・・19
5.1 Ultimate pressure ・・・・・・・・・・19
5.2 Pumping speed ・・・・・・・・・・20
5.3 Power requirement ・・・・・・・・・・21
6．Maintenance, Inspection and Repair ・・・・・・・・・・22
6.1 Maintenance ・・・・・・・・・・22
6.2 Periodic inspection ・・・・・・・・・・22
6.3 Replacement of the pump oil ・・・・・・・・・・25
6.4 Trouble check list ・・・・・・・・・・28
7．Disposal ・・・・・・・・・・31
8．Maintenance parts ・・・・・・・・・・32
8.1 Maintenance parts list ・・・・・・・・・・32
8.2 Disassembly drawing ・・・・・・・・・・33
Warranty
Safety Data Sheet (SDS) for Vacuum Pump Oil R-2
Pump usage check sheet (Use this sheet for requesting an overhaul.)
Sales, service agency, and the where to make contact

Contents－03
Figures and Tables
Figure1. Dimensional drawing of GHD-031 oil sealed rotary vacuum pump・・・・・・・・・ 6
Figure2. Basic piping diagram to the vacuum chamber ・・・・・・・・・・10
Figure3. Electric wiring diagram ・・・・・・・・・・12
Figure4. Inlet (EN60320-1) ・・・・・・・・・・12
Figure5. Change region of the voltage and frequency ・・・・・・・・・・15
Figure6. Pumping speed curve ・・・・・・・・・・20
Figure7. Characteristics of motor power ・・・・・・・・・・21
Figure8. Lubrication of the oil sealed rotary vacuum pump ・・・・・・・・・・27
Figure9. Disassembly drawing of GHD-031 oil sealed rotary vacuum pump ・・・・・・33
Table1. Specification ・・・・・・・・・・ 5
Table2. Power cable selection standards ・・・・・・・・・ 13
Table3. Characteristics of the thermal protector ・・・・・・・・・ 17
Table4. Periodic inspection table ・・・・・・・・・ 24
Table5. Trouble check list ・・・・・・・・・ 28
Table6. GHD-031 Maintenance parts list ・・・・・・・・・ 32
Attached table: Safety Data Sheet (SDS) for Vacuum Pump Oil R-2

－01－
０.Introduction
0.1 Before using the vacuum pump
Thank you for purchasing this product. Your custom is very much appreciated.
This pump is only for vacuum pumping, and may malfunction or cause accidents if not
handled appropriately. Please use instruction manuals after attention enough for
check / maintenance / security sides after a reading well.
Personnel handling the equipment
Only persons who have read this manual thoroughly, and have sufficient
understanding of safety, pump specifications, and method of operation, can operate
this pump.
Read the manual thoroughly
Please completely read a manual well to use this product definitely. Please read
the section on “introduction in the security” “use for safe operation” by all
means.
Keep this manual in a safe place
Keep the instruction manual carefully. After reading this manual, be sure to keep
it in a safe place, which is readily accessible to others needing to use it.
Copying this manual is prohibited
This instruction manual can copy no part for sale without our permission.
Statutory requirements for disposal
Follow all statutory and local authority regulations when disposing of this pump.

－02－
Safety during repair
When it is asked us for repair, please inform the use situation of having hazardous
substance or not in particular for the safe management of the repair worker.
The use situation declines repair in the case of lack of foresight.
Confirmation at the time of the unpacking
Although the pump is delivered with great care, check the following after unpacking.
(1) Confirm whether it is the model of the pump of the order.
(2) The specified accessories have been provided.
(3) No parts have been damaged in transportation.
(4) Neither screws nor nuts have become loose nor were lost in transportation.
If there are any problems, contact the company from which you purchased the pump or
the sales department of the manufacturer.

－03－
0.2 Safety symbols
In this instruction manual and on warning labels attached to the pump, the following
symbols are used so that matters which must be strictly adhered to can be readily
understood.
These symbols are divided as shown below.
When mishandled, there is an imminent danger of the operator suffering a fatal
accident or serious injury.
When mishandled, there is a possibility of the operator suffering a fatal accident
or serious injury.
When mishandled, there is a possibility of the operator suffering an injury (light
or medium injury) or of damage occurring to property.
When mishandled, there is a possibility of the pump being damaged or malfunctioning.
Some parts of the pump may reach temperatures of 60°C or more during operation.
Touching such components may result in burns.
Danger
Warning
Caution
Note
High temperature

－04－
Always switch off the main power supply before installing electrical wiring
or performing any electrical work on the pump. Failure to do so may result in
electric shock.
The inlet port of the pump
The outlet port of the pump
Various label putting positional externals
Electric shock

－05－
Table for various labels
No. Label name Label
① Rotation
② Burn caution
③ Electric shock caution
④ Installation caution
⑤ Transportation caution
⑥ Pump
ＧＨＤ－０３１Ａ ＧＨＤ－０３１Ｂ

－06－
No. Label name Label
⑦ Inlet
⑧ Position
⑨ High temperature caution
⑩ Outlet
⑪ Pump oil（R-2）
⑫ Passed
⑬ Warning explosion

－1－
１．For safe operation
1.1 Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully understand
potential hazards and prevention methods.
The pump is not to be used with toxic of flammable gases.
1.1.1 Leakage of dangerous gas and material
Cause Prevention method and measures
Injury due to touching toxic pump
oil in the pump or harmful
substances attached to the pump
during inspection or disposal.
① Before overhauling and disposing of the
pump, ask a waste disposal specialist to
make it safe.
② Ask an authorized waste disposal
specialist to carry out disposal.
This pump is for dry air or dry nitrogen absorption of the inert gas. This pump
cannot absorb poisonousness and flammable gas. Leak from the main body of pump
and, as well as the vent of the pump, is very in danger.
1.1.2
Cause Prevention method and measures
① When connecting electric wires, always
turn off the power and be sure to connect
the earth wire.
The energized part of the motor was
touched.
②When inspecting and transferring the pump,
always turn off the power.
Arrange wires correctly in accordance with the “Electrical Equipment Technical
Standard” and “Wiring Regulations.” Incorrect wiring may result in fire.
Danger
Danger
Warning
Caution
Electric shock

－2－
1.1.3
Cause Prevention method and measures
Pump inside pressure rises, and the
level gauge of the pump ejects.
The maximum internal pump pressure is 0.03
MPa (gauge pressure).
Measure the pressure at the outlet side and,
if the pressure is 0.03 MPa or more (gauge
pressure); remove objects which block the
passage of gas from the outlet side. When an
oil mist trap is adopted, replace or clean
it so that it will not block the passage of
gas.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas. Otherwise,
the internal pump pressure increases causing the pump to explode, the oil level gauge
to protrude or the motor to be overloaded. This pump is not resistant to pressure.
The internal pump pressure is limited to 0.03 MPa (gauge pressure).
Warning
Warning
Explosion

－3－
1.1.4
Cause Prevention method and measures
High temperatures caused burns. ①The pump reaches a high temperature during
operation.
（Temperature increasing）
Pump main unit during non-load operation
→30K
Motor during non-load operation
→35K
Pump main unit during high-load operation
→35K
Motor during high-load operation
→40K
(High-load operation: Operation at a pressure
of 1kPa ～ 10kPa)
②Please be sure to protect and cool surface
of vacuum pump and away from human body. Use
this pump as built-in type.
③Since the surface temperature is hot,
touching the surface accidentally may result
in burns. Never touch the pump during
operation.
When carrying out inspection, wait for 10
minutes until the pump has cooled down
completely after it stops.
Never place combustible materials around the motor or pump. There is a risk of fire.
Also, do not place objects which block ventilation around the motor. Abnormal heat
generation may result in burns or fire.
Caution
High temperature
Caution

－4－
1.2 Safety Data Sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be used or
touched when operating the pump. Read the SDS carefully in order to understand the harmful
properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those mentioned
in this instruction manual.
SDS is submitted as reference information to ensure safe handling of hazardous and
harmful materials. Personnel handling the pump oil should be aware that proper
measures must be taken depending on the conditions of use as their responsibility.
Keep in mind that the SDS itself is not a warranty for safety. Newest SDS shall
be used when the safety of material is investigated
Caution

－5－
２．Outline of the pump
2.1 Specification
This oil sealed rotary vacuum pump is a rotary vane pump (hereinafter called Gaede type
pump) in which the pump is directly driven by the motor. Since the pump is small, light,
and quite simply constructed, it is easily maintained and repaired.
Table 1.Specification
GHD-031A GHD-031B
Model Unit 50Hz 60Hz 50Hz 60Hz
Type - Rotary vane (2 vanes)
Pumping speed L/min 30 36 30 36
Ultimate Pressure Pa 6.7×10-1
Type - 1φ.100W.2P.Capacitor Run
Voltage V 100-110 100-120 200-240
Motor Thermal
Class - Ｅ
Full-load current A 1.85(100V)
1.80(110V)
1.89(100V)
1.71(120V)
0.94(200V)
0.84(240V)
1.02(200V)
1.03(240V)
Motor speed r/min 2500(100V)
2600(110V)
3100(100V)
3300(120V)
2400(200V)
2600(240V)
2900(200V)
3100(240V)
Standard
oil - R-2
Oil Oil
amount mL 370
Weight ｋg 9.3
Ambient temperature
range ℃ 7～40
Installation features - Indoor
Noise level dB(A) 50or less (Ultimate pressure at 1m. With OMT-050A)
Inlet port diameter - KF-16(NW-16)
Max. size mm 120(W)×288.5(L)×163(H)
Leak rate Pa･m3
/sec 1×10-6
IP Class - 20
Note 1: The ultimate pressure values in the above table are indicated by a Pirani gauge
Note 2: The vacuum pump oil please uses our designated oil turn vacuum pump oil. (designated
oil： R-2)
Note3: If the oil temperature is lower than 7 °C, operation start-up may be difficult. Operation
start-up may be difficult.

－6－
2.2 Dimensional drawing
Figure1. Dimensional drawing of GHD-031 oil sealed rotary vacuum pump.

－7－
３．Measures before it starts
3.1 Securing of exhaust vent
Please remove the oil cap for transportation without fail before starting the pump, and
exchange it for the attached exhaust entrance cap.
At the unpacking Detaching of oil cap
Installation of exhaust entrance cap

－8－
This product closes the exhaust vent with the oil cap so that the vacuum pump oil
should not leak while transporting it because it ships it by injecting the vacuum
pump oil in a regulated amount. Please remove the oil cap for transportation without
fail before starting the pump, and exchange it for the attached exhaust entrance
cap.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas. Otherwise,
the internal pump pressure increases causing the pump to explode, the oil level
gauge to protrude or the motor to be overloaded. This pump is not resistant to
pressure. The internal pump pressure is limited to 0.03 MPa (gauge pressure).
Warning

－9－
3.2 Installation
The pump should be installed on a level surface in a location with minimal dust, dirt
and humidity and be arranged with consideration given to ease of installation, removal,
inspection and cleaning. Particular attention should be paid to the ambient temperature
when building the pump into equipment. Use a rubber vibration isolator to separate the
pump from other equipment and to isolate the pump from the vibrations of other equipment.
Environmental conditions for storage, installation and operation
Since this pump is precisely engineered, ensure that the following conditions be
satisfied during storage, installation and operation.
① Ambient temperature, relative humidity: 7°C ～ 40°C 85% RH or less
② Height above sea level during storage and installation 1000 m or less
③ Minimum required distances from the wall 100mm or more
④ Other conditions for storage and operation
ａ．Free from corrosive and explosive gases.
ｂ．No condensation.
ｃ．Dust-free environment.
ｄ．Indoors.
ｅ．Do not place pumps on top of each other or place a pump on its side.
ｆ．Not subject to direct sunlight.
ｇ．Far from heat sources.
ｈ．When you keep it for a long period of time, put pump oil into a pump and
seal a inlet port with a cap.
ｉ．Don't keep it, where moisture is attracted.
Do not use the pump in an explosive atmosphere. Failure to do so will result in injury
or fire.
If the pump is operated whilst it is tilted, placed on its side or upside-down, the
pump will be damaged. Install the pump level with the inlet facing up as shown in
Figure1.
Caution
Warning
Note

－10－
3.3 Vacuum piping
(1) Before connecting the pipe to the pump, clean the inner walls of the vacuum chamber,
piping and vacuum valve to completely eliminate moisture, fine particles, dust, dirt
and rust.
(2) Show general exhaust system in figure 2.
Between vacuum chamber and the pump, figure 2 please attach , stop valve (A) and leak
valve (B).
(3) Backflow preventer
A backflow preventer is incorporated into the pump to prevent the oil from flowing back
while the pump is stopped.
The countercurrent prevention mechanism of the oil is taken in in this pump. As of a pump
stop, it is effective for the prevention of the countercurrent of the oil. （It is not
countercurrent prevention mechanism of the gas.）
The countercurrent prevention valve opens and closes a countercurrent prevention valve
with the oil pressure of a hydraulic pump taken in to a vacuum pump under an air inlet.
As of a pump stop, the check valve closes. The vacuum pump oil prevents an inflow to the
upper part than an inlet port. Besides, the vacuum pump becomes the atmospheric pressure.
But it is not a thing to guarantee the 100% of movement.
Figure 2. Basic piping diagram to the vacuum chamber
Vacuum Chamber
Leak valve (B)
Stop valve (A) Pump