Ulvac VPC-051 User manual

No.30320-2-03-2
User’s Manual
Vacuum Pump Unit
VPC-051
Please read this manual thoroughly to ensure safe and effective
operation of this equipment. Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.
Ulvac Kiko, Inc.

Table of Contents
Items with shade include description on safety.
To Safely Use This Equipment
(1) Before Using.............................................................................1
1. Target Users .....................................................................1
2. Read the Manual Thoroughly ............................................1
3. Keep This Manual in a Safe Place ....................................1
4. Warranty............................................................................1
5. Statutory Requirements for Disposal.................................1
6. Safety during Repair .........................................................1
(2) Product Overview .....................................................................2
1. Purpose of This Product and Actions that are Prohibited..2
2. Safety Device and its Purpose and Functions...................2
3. Product Specifications.......................................................3
4. Individual Unit Specifications ............................................3
5. Standard Accessories .......................................................4
6. How to Use Switches, Handles, and Operation Levers.....4
7. Layout of Switches, Handles, and Operation Levers ........5
Evacuation system drawing
Electrical system drawing
(3) Opening the Package and Installation ......................................6
1. General Cautions ..............................................................6
2. Package upon Delivery .....................................................6
3. Installation Site..................................................................6
4. Power Supply....................................................................7
5. Necessary Tool List ..........................................................8
(4) Operations................................................................................8
1. Risks and Safety Measures upon Operations ...................8
2. Device Operation Procedure.............................................9
2-1 Preparation................................................................9
2-2 Operations.................................................................9
2-3 Stop ...........................................................................9
3. Measures upon Abnormal Conditions .............................10
3-1 Instantaneous power outage ...................................10
3-2 Long power outage..................................................10
3-3 Operation after power recovery ...............................10

(5) Maintenance and Repair ........................................................11
1. Risks and Safety Measure upon Maintenance and Repair ..11
2. Maintenance and Repair that Can be Made by User ......11
3. Removal, Maintenance, and Installation of Devices........12
3-1 Oil sealed rotary vacuum pump...............................12
3-2 Oil diffusion pump....................................................12
3-3 Oil mist trap .............................................................13
4. Maintenance and Inspection Points ................................13
5. Troubleshooting ..............................................................14
6. Storage of Equipment .....................................................14
7. Consumable List .............................................................15
(6) Disposal..................................................................................16
1. Cautions upon Disposal ..................................................16
(7) Optional Parts.........................................................................16
1. Standard Optional Parts List ...........................................16

A
To Safely Use This Equipment
Thank you for purchasing our product. This pump is designed exclusively for
vacuum evacuation, and it may malfunction or cause accidents if operated
inappropriately. Please read the manual thoroughly, and pay specific attention to
inspection, maintenance and safety guidelines. Read and fully understand the
description of this manual to prevent serious accidents from occurring.
The copyright of this user’s manual and safety guides are reserved by Technical
Division of Ulvac Kiko. No part of this document, in whole or part may be
reproduced without permission of Ulvac Kiko Inc.
Read this section before using the VPC-051. Always follow the instructions below to
safely use the device and prevent personal injuries from occurring.
The symbols below have the following meaning.
Danger Incorrect handling of the equipment is very likely to
result in death or serious injury to the operator.
Warning Incorrect handling of the equipment may result in
death or serious injury to the operator.
Caution
Incorrect handling of the equipment may result in
light or medium injuries to the operator or damage
to the equipment.
This indicates action or practice that should be
made.
Always make connection with the earth.
This indicates the action or practice that should be
prohibited.
Do not disassemble.
Do not touch.

B
Warning Label
Warning
Check the
capacity
Primary power supply
Please prepare the following: Single-phase 100 V, 6.3 A
Smaller power supply capacity may cause the breaker to trip due to
overcurrent during the operation.
Do not share
For the primary power supply, a single power supply
should be provided for the device, and other equipment
should not be connected with it.
Breaker capacity shortage may cause the breaker to trip due to
overcurrent during the operation.
Ground the
grounding wire
Employ Level D grounding.
Use a plug with grounding wire for 100-V power supply.
If you use a plug adapter, connect the grounding wire
with a nearest grounding terminal.
If incorrect grounding is made, this may cause electrical shock in
case of failure or current leakage.
Check the
cable capacity
Avoid using an extension cable. However, if it must be
used by necessity, use the following cable.
For 100-V power supply: 1.25 mm2 or more
If a thinner cable is used, this may cause overheating, ignition, or
fire.
Avoid this
action
Do not place any object on the cable for the primary side.
Otherwise, such action may cause electrical shock or fire.
Avoid electrical
shock
Do not touch the terminal block or other connectors if the
primary cable plug is being inserted in a socket.
Otherwise, the operator may suffer electrical shock.
Caution
Check labels
The warning labels are pasted on the following parts.
1) Left back of the rack (PL004)
2) Main valve handle (PL008)
3) Around the oil diffusion pump (D. P) (PL007)
When accompanied by a liquid nitrogen trap.
4) Liquid nitrogen trap (PL006)
Contact us if the label is contaminated or peeling off.
Power Supply