Ulvac UTM300B User manual

SK00-2200-AI-144-01(263-43163A)
INSTRUCTION MANUAL
TURBO MOLECULAR PUMP
Model
UTM300B
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/
Before using this product, be sure to read this operation
manual. Keep this manual with care to use at any time.

i
Introduction
Thank you for choosing the Turbo Molecular Pump.
Please read the instruction manual carefully before using turbo molecular pump, and save the
instruction manual for future reference.
Copyrights and Disclaimers
This document is copyrighted by ULVAC,Inc. Please refrain from reproducing or
copying part or all of this document without permission from ULVAC.
In an effort to improve the product, this document may be revised in the future without notice.
Every effort has been made to prepare an accurate and complete manual, but if an error or
omission should be discovered, revisions might not be possible immediately.
ULVAC does not take responsibility for any effects that may result from the use of this manual.
Copyright © 2014 ULVAC,Inc.All rights reserved.

ii
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injuly or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injuly or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by ULVAC may do service of
products.
Neither overhaul nor modify the pump proper and the controller without admission.
Doing so would impair safety of the pump proper.
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
WARNING
CAUTION
NOTICE
WARNING
WARNING
WARNING

iii
Do not operate the turbo molecular pump until safety is confirmed.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・Fix the pump to host equipment according to 5.1.2.2. The method to fix the pump is different
depending on the pump model and the size of inlet flange of the pump.
・Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
Do not remove or do maintenance the turbo molecular pump, before safety has been
confirmed.
・Please take an adequate safety precaution based on the result of risk assessment of
explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.
・Please execute the maintenance task of the turbo molecular pump after shutting power off by
following proper procedure and confirming that the rotor has stopped completely
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid erosion trouble of the pump internals.
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
WARNING
WARNING
WARNING
WARNING

iv
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock /
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere. Do not use flammable gas and
explosive gas.
The standard power input voltage is 24 VDC ± 5 %. Connection to the incorrect input voltage
can cause damage to the equipment.
CAUTION
CAUTION

v
The following "CAUTIONS" are to prevent operation anomalies.
○ Operating Precautions
(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
(2) Protect the pump from any and all types of impact during operation. Impacts can also be
transmitted via the flange, so be careful of impacts near the pump as well.
(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces
electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo
molecular pumping system.
(4) This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.) except for the pumps corresponded to
use of gallium.
(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
(6) When using the variable speed function to change the pump rotation rate, use a rotation
rate that does not cause resonance with other devices installed at the site.
(7) Be careful to prevent a rapid pressure rise or air rush during operation.
(8) Avoid repeating acceleration and deceleration in short term. Doing so can result in high
pump temperature.
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1G/50
Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.
CAUTION
NOTICE

vi
○Explanation of label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) Pump Securement Label
If the pump is not secured properly, it could
become detached and cause injury or damage to
surrounding equipment. Be sure to secure the
pump according to 5.1.2 "Installation of the Pump".
(3) Do Not Remove Label
Do not remove cover, or else it may cause
somechanges inside and it is failed.
(4) SECURITY seal
This label certificates that the product was made
or maintenanced by ULVAC or by ULVAC
authorized facility. In case "this label is removed"
or "there is a mark showing once this label has
been removed", ULVAC warranty shall not be
applied to the product.
(5) Name plate
(6) Direction of rotation Label
The direction of rotation of rotor inside the pump.

vii
○ Location of label
ラベル貼付位相

viii
○ Warranty Clauses
This product was shipped after strict company inspection. However, in case any failure
occurs under ULVAC’s responsibility, such as defect in manufacturing and damage during
transportation, buyer shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC
will repair or exchange it at free of charge.
○ Warrantable Items
(1) Turbo molecular pump UTM300B
○ Warranty period
(1) Domestic business in Japan: one year after shipping date from ULVAC.
(2) Direct export transaction: one year after date of B/L
○ Warrantee scope
(1) Scope and exclusion of warranty
The scope of warranty is limited to the Pump only. ULVAC will repair this pump free of
charge for a period of twelve (12) months from the date of delivery in case it failed due to
defects in design or manufacturing during pumping down of air or nitrogen gas.
Troubles caused by the following are excluded from warranty.
・ Troubles that occurred during pumping a gas other than air and nitrogen gas.
・ Troubles caused by consumable parts.
・ Troubles caused by different power supply from voltage and frequency specified when
ordering.
・ Because of acts of God or force majored such as earthquake, fire, flood, war, etc.
・ Because of operating conditions not given in this instruction manual
・ Because of modification, disassembly and repair not authorized by ULVAC
・ Used under special environment (strong electromagnetic field, radiation, high
temperature, high humidity, flammable gas ambience, corrosive gas ambience, dust,
etc)
・ Because of noise
・ Loss or damage attributed to secondary troubles and indemnification against
infringement on right
・ In case ULVAC concluded that troubles occurred because of condition which does not
meet use condition of this product.

ix
○ Response procedure
(1) Domestic business in Japan:
ULVAC sends a replacement or Buyer returns the defective items to ULVAC, Inc. or to
the local ULVAC representatives for repair. If field service is required, Buyer shall ask
ULVAC, Inc. or the local ULVAC representatives.
(2) Direct export transaction:
ULVAC sends a replacement or Buyer return the defective items to ULVAC, Inc. or to
the local ULVAC representatives for repair. Return charge shall be paid by Buyer.
○ Others
(1) In case, special agreement or memorandum for specifications is made individually, it
comes in first.
(2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime,
Buyer shall take necessary procedures according to Foreign Exchange and Foreign
Trade Law.
(3) As for the question and consultation, Buyer shall check the model and serial number and
ask the local representative or ULVAC, Inc.
http://www.ulvac.co.jp/eng/support/index.html
(4) The contents of this document is subject to change without notice in future.

x
This page is intentionally left blank.

xi
Table of contents
Table of contents
Introduction
Copyrights and Disclaimers ……………………………i
Precautions for Safe Operation ……………………………ii
○ Operating Precautions ……………………………………v
○ Explanation of label ………………………………………………vi
○ Location of label ………………………………………………vii
○ Warranty period ……………………………………viii
○ Conditional warranty ……………………………………viii
○ Scope of the warranty ……………………………………viii
○ Warranty of repaired or replacement parts …………………viii
○ Exemption from the warranty ……………………………viii
○ Disposal of Products and Parts ……………………………viii
○ LIMITATION OF LIABILITY ……………………………ix
Table of contents ………………………………………………xi
Section 1 OUTLINE AND DESCRIPTIONS
1.1 Outline …………………………………………………………2
1.2 Descriptions ………………………………………………3
1.2.1 Outside drawing ……………………3
1.2.2 Standard Accessories ……………………4
1.2.3 Option Accessories ……………………4
Section 2 IDENTIFICATION AND FUNCTION
2.1 Pump Main Unit ………………………………………6
2.2 Local Control Panel ………………………………………7
2.2.1 Oparational Status ………………………………………8
2.2.2 Operation Modes ………………………………………8
2.3 Interface Connector ………………………………………9
2.4 Optional Accessories ………………………………………10

xii
Table of contents
2.4.1 Venting Valve ……………………………10
2.4.1.1 General Description ……………………………10
2.4.1.2 Installation of Venting valve
………10
2.4.1.3 Delay Venting Mode ……………………………11
2.4.2 Cooling Fan ………………………………………12
Section 3 CONSTRUCTION AND PRINCIPLE
3.1 Pump Construction…………………………………………………14
3.2 Principle of Turbo Molecular Pumping ……………………14
3.3 Control system ………………………………………………16
Section 4 SPECIFICATIONS
4.1 Specification ………………………………………………18
4.1.1 Pump Main Unit ……………………………18
4.1.2 Power Supply Unit ………………………………………19
4.2 Maximum inlet pressure ………………………………………20
4.3 Maximum continuous backing pressure ……………………20
4.4 Maximum allowable flow rate ……………………………21
4.5 Environmental Conditions ………………………………………22
4.6 Standards Fulfilled ………………………………………………22
Section 5 INSTALLATION
5.1 Installation …………………………………………………………24
5.1.1 Pump Mounting Direction ……………………24
5.1.2 Installation of the Pump ……………………25
5.1.2.1 Instruction and Lifting Method
……………………26
5.1.2.2 Installation ……………………27
5.1.3 Example of piping connection ……………………29
5.1.3.1 Connection of exhaust line
…………29
5.2 Connection of electrical supply ……………………………30
5.2.1 Connection of electrical supply ……………………30
5.2.2 Connection I/F connector with Interface Cable (Option) …32
5.3 Interlock for Vacuum System ……………………………33
5.4 Notes on transportation ………………………………………33

xiii
Table of contents
Section 6 OPERATION
6.1 Overview …………………………………………………………36
6.1.1 Introduction : Operation Modes ……………………36
6.2 Startup Preparation ………………………………………38
6.2.1 Start-up Preparation Sequence in LOCAL Mode …………38
6.2.2 Start-up Preparation Sequence in logic interface
…………38
6.2.3 Start-up Preparation Sequence in RS-485 communication …38
6.3 Start-up …………………………………………………………39
6.3.1 Start-up Sequence in LOCAL Mode ……………………39
6.3.2 Start-up Sequence in logic interface ……………………39
6.3.3 Start-up Sequence in RS-485 communication …………39
6.4 Shutting Down ………………………………………………40
6.4.1 Preparations Prior to Shutting Down Operation …………40
6.4.2 Shutting Down Sequence in LOCAL Mode
…………40
6.4.3 Shutting Down Sequence in logic interface
…………40
6.4.4 Shutting Down Sequence in RS-485 communication ………41
6.5 Variable Speed Operation ………………………………………42
6.5.1 Outline ………………………………………42
6.5.2 Operation from Start-up to Low Speed Rotation
…………43
6.5.2.1 Logic interface Operation ……………………43
6.5.2.2 RS-485 interface Operation ……………………43
6.5.3 Operation From Rated Speed Rotation to Low Speed Rotation 44
6.5.3.1 Remote Control Startup Procedure
…………44
6.5.3.2 RS-485 interface Operation ……………………44
6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation 45
6.5.4.1 REMOTE Operation ……………………45
6.5.4.2 RS-485 interface Operation ……………………45
6.6 Software Operation ………………………………………………46
6.7 Interface Connector ………………………………………………47
6.7.1 Specification ………………………………………47
6.7.2 Pin Assignment ………………………………………49
6.7.3 Connector ………………………………………50
6.7.4 Setting for Interface Connector Operation …………………50
6.7.5 Delay Venting Mode ………………………………………50
6.8 RS-485 Communication Specifications …………………51
6.8.1 Transfer Specifications …………………51
6.8.2 CABLE ………………………………………51

xiv
Table of contents
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1 Recommended maintenance intervals ……………………56
8.2 Turbo Molecular Pump Decontamination ……………………57
8.3 Bearing Replacement ………………………………………57
8.4 Check of the rotor blades ………………………………………57
8.5 Controller Replacement ………………………………………58
8.6 Turbo Molecular Pump Return Request ……………………59
Section 9 TROUBLESHOOTING
9.1 Vacuum Pressure Rise ………………………………………62
9.2 Abnormal Noise and/or Vibration ……………………………62
9.3 Nothing Happens After an Operation is Made …………63
9.4 Power Failures ………………………………………………64
9.5 Alarm Detection Capabilities ……………………………65
9.5.1 Movement in Alarm Detection Capabilities (ALARM) ………65
9.5.2 Movement in Alarm Detection Capabilities (WARNING) ……65
9.5.3 Reset Procedure ………………………………………65

xv
Table of contents
Appendix A COMMUNICATIONS
A1 GENERAL SPECIFICATION ……………………………A-2
A2 PUMP TO COMPUTER CONNECTION …………………A-3
A2.1 Communication Cable Connection ……………………A-3
A2.2 RS-485 Multi-drop Settings ……………………A-3
A2.3 ON-LINE request ………………………………………A-3
A3 SERIAL COMMUNICATIONS PROTOCOL ……………………A-4
A3.1 Basic Message Structure ……………………A-4
A3.2 Character to Character Time-out : 0.1 sec.
…………A-4
A3.3 Command to Answer Time-out : 1 sec. ……………………A-5
A3.4 Command Transmission Specification ……………………A-5
A3.5 Receiving Sequence ………………………………………A-5
A3.6 Using the Checksum Byte ……………………A-5
A4 TABLE OF COMMANDS ………………………………………A-6
A5 COMMAND DESCRIPTION…………………………………… A-14
A5.1 Operation Mode ………………………… A-14
A5.2 Operation …………………………………… A-15
A5.3 Run Status …………………………………… A-16
A5.4 Parameters …………………………………… A-17
A5.5 Timer …………………………………… A-17
A5.6 History …………………………………… A-18
A5.7 Settings …………………………………… A-19
A5.8 Shared Answer …………………………………… A-19
A5.9 RS-485 Settings …………………………………… A-20
A6 RS-485 COMMANDS / ANSWERS (SEND AND RECEIVE
Examples) ……………………………………………………… A-21
A7 RELATION OF LOCAL MODE TO REMOTE MODE
OPERATIONS …………………………………… A-24
A8 TROUBLESHOOTING …………………………………… A-25
A8.1 No Message can Transmit and Receive ……… A-25
A8.2 Sending and Receiving are Done, But Receivable Messages are
Invalid …………………………………… A-25
A8.3 Characters Get Disordered from Time to Time, Then Resulting in
CHECKSUM Error …………………………………… A-25

xvi
Table of contents
This page is intentionally left blank.

OUTLINE AND
DESCRIPTIONS
1.1 Outline
1.2 Descriptions
1.2.1 Outside drawing
1.2.2 Standard Accessories
1.2.3 Option Accessories
●●●●●●●●●●●●●●●●●●●●●●●●
●
●
●
●
●
●
●
●
●
1

2
SECTION 1 OUTLINE AND DESCRIPTIONS
1.1 Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
This pump is not suitable for pumping aggressive or corrosive gases.
Typical Applications ; Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・Pump 1
・Standard Accessories 1 Set

3
1.2 Descriptions
1.2 Descriptions
1.2.1 Outside drawing
Model Inlet flange φA B C D E P.C.D n-φd
UTM300B-AC ICF152 φ152.4 19.5 122 186 207 φ130.3 16-φ8.5
UTM300B-AV VG100 φ185 12 110 164 195 φ160 8-φ12
UTM300B-AK ISO100-K φ130 12 110 164 195
－－
Fig1-1 Outside drawing