Ulvac UTM3400 Series User manual

Model
UTM3400 Series
YK17-0012-103-00 (263-43458)
INSTRUCTION MANUAL
Turbo Molecular Pump
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.

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i
Introduction
Thank you for choosing the ULVAC Turbo Molecular Pump.
Please read the instruction manual carefully before using turbo molecular pump, and save the
instruction manual for future reference.
Copyrights and Disclaimers
This document is copyrighted by ULVAC, Inc. Please refrain from reproducing or copying part or
all of this document without permission from ULVAC.
In an effort to improve the product, this document may be revised in the future without notice.
Every effort has been made to prepare an accurate and complete manual, but if an error or
omission should be discovered, revisions might not be possible immediately.
ULVAC does not take responsibility for any effects that may result from the use of this manual.
Copyright 2017 ULVAC, Inc.All rights reserved.
©

ii
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
WARNING
CAUTION
NOTICE
WARNING
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by ULVAC may do service of
products.
WARNING
Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper, or cause injury by
electrical shock.
WARNING
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injury or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injury or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.

iii
WARNING
Do not operate the turbo molecular pump until safety is confirmed.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・Fix the pump to host equipment according to Section 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
WARNING
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
WARNING
Do not remove or do maintenance the turbo molecular pump, before safety has been
confirmed.
・Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by ULVAC. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular
pump with an inert gas and/or apparel are recommended when the turbo molecular pump has
been used in applications that required the use of corrosive, reactive, stimulative, or toxic
gasses.
・Please take an adequate safety precaution based on the result of risk assessment of
explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.
・Please execute the maintenance task of the turbo molecular pump after shutting power off by
following proper procedure and confirming that the rotor has stopped completely.
WARNING
If the equipment is used in a manner not specified by the manufacturer, the protection provided
by the equipment may be impaired.