Ulvac VS1501 User manual

SK00-4390-DI-002-11
INSTRUCTION MANUAL
OIL SEALED ROTARY VACUUM PUMP
VS1501
VS2401
Before using this product, be sure to read this operation
manual. Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is
exactly what you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the
product in safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations
relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country
and region you use the product. Consequently you shall be requested to attend general safety
lectures officially effective in the area, such as electrical safety, Cargo handling safety and so on.
Note that any person not attended such lectures shall be restricted from handling the product.
Operators shall need to attend such kind of training and have special knowledge, skill and title
regarding the electricity, machinery, cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together
did not conform to same regulations or the product itself was modified. ULVAC shall be not liable
to guarantee performance and safety in such cases above. Any modification of the product by the
user is out of the scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before
installing or removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of
the shipment but shall not survive eternally. Any of the parts cannot, under any application
supposed under socially-accepted idea, help but inevitably deteriorate its performance and get
easily result in causing trouble of the product. You are kindly requested consequently to take your
application situation into consideration and help yourself to implement the protective maintenance
so as to avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble
due to wear and/or failure of the part and bring reducing the occurrence of the downtime caused
by the product trouble and fire as well as a risk of affecting the another process.
We would like to ask you again to establish the protective maintenance plan as well as conduct
the part replacement and overhaul in accordance with such a plan.
Please do not hesitate to contact our sales office or agency closest to you or the Components
Division if you had any question or unclear on the use.

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IMPORTANT
Author's copyright of th
is instruction manual belongs to Components
Division of ULVAC, Inc.
It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
It is prohibited to use this instruction manual except for explanatio
n
when using the VS1501, VS2401
and other purpose Components Division
of ULVAC, Inc. agreed.
It is prohibited to hand over and disclose this instruction manual to third parties
without agreement by Components Division of ULVAC, Inc.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
If
the user makes a mistake in handling, it indicates an imminent
possibility that the user is subject to death or heavy injury.
If the user makes a mistake in handling, it indicates a possibility that the
user is subject to death or heavy injury.
IMPORTANT
[IMPORTANT] description shall be given where there
is particular
information to notice for the operation or maintenance work of the
product.
Training for the electrical safety is required as there is a risk of electrical
shock.
Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.
If the user makes a mistake in handling, it indicates a possibility
that
the user is subject to moderate injury or it leads to significant damage
of the machine. It indicates a possibility that damage of the machine is
caused and the normal operation is impaired.
WARNING
CAUTION

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0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be
restricted on the use of the product.
Use of this product and this Instruction Manual.
IMPORTANT
Please read this Instruction Manual before starting installation, operation
check or maintenance of this product to use it in long term. You are
requested to fully understand the safety precautions, specifications and
operation methods of this product.
DANGER
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from the
Pump unit if it was exhausted by the vacuum pump.
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas was
sucked in the vacuum pump. Pay attention to execute maintenance work.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by the
vacuum pump.
We would be
obliged to refrain from handling and/or executing
maintenance of the product if the detail of used hazardous substance was
not disclosed or the product has exhausted such substance that the
detoxification process is hardly conducted.
WARNING

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You a
re kindly requested to acknowledge that specifications and/or price
of the product and description of the Instruction Manual are subject to
change without prior notice for improvement.
Any change shall update the version number at the top right of the
Instruction Manual cover and issue the revised version.
If you need the latest manual, please feel free to contact our Components
Division.
This Instruction Manual shall absolutely need to be delivered to the last
user that uses the product.
To export this product abroad, you have to clear the examination in
accordance with the Foreign Exchange law, Foreign Trade law and
relevant decree, ordinance and order.
Please feel free to contact our sales office or agency closest to you or our
Components Division.
Any part of this Instruction Manual shall be in no manner reproduced for
the third party without our approval.
WARNING
WARNING
WARNING
CAUTION

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Installation and storage
This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by n
ail or
chip.
Give the instruction them further to use the unloading machinery such as
crane to take out the product of the wooded frame, lift it up with its top
eyebolt and transfer it on lifting. Check the eyebolt whether it has no error
before use.
Only the technically entitled person should
be in charge of conducting the
unloading operation and operating the unloading machinery.
There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup was not suffic
ient. You are
strictly restricted to enter beneath the Pump.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
Transfer
You have a risk of
giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
VS1501 ：232kg
VS2401 ：271kg
Be sure to use the loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix
it with Jack and run the Pallet truck for its
transfer.
Countermeasure to the earthquake
There is a risk that the Pump lays down or slides and breaks peripheral
units if it was not correctly fixed. Be sure to give allowances to the vacuum
piping, coolant piping,
and electric cables so that they absorber vibrations
to prevent them from breaking and/or dismantling.
Inlet piping <Mounting>
Check and ensure that any of hazardous energy is blocked before starting
the operation.
WARNING
WARNING
WARNING
WARNING

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Coolant piping <Mounting>
Check and ensure that any of hazardous energy is blocked before starting
the operation.
Power Supply wiring <Mounting>
Check and ensure that any of hazardous energy is blocked before starting
the operation.
Entitled staff should conduct the wiring operation. Erroneous wiring work
might cause a fire.
Conduct the wiring operation correctly in compliance with laws and rules
concerning the safety (e.g. Fire Defense Law, Electric Equipment
Technology
standard, Internal line cord) in the country and region you use
the product.
Ensure to have a correct grounding.
You are recommended further to install a dedicated Leak breaker. You
have a risk of getting electrical shock in case of failure or electric leakage.
It is imperative to put the Overload protection device. Otherwise it would
cause the motor burn out and/or fire.
Wire size, please determined by considering the voltage drop of the wire.
Typically, the voltage drop, please to be within 2% of the r
ated voltage of
the motor.
Voltage drop calculation：
√3 × wire resistance (Ω / km)×Wiring length (m) × motor rated current (A) × 10
-3
※motor rated current, refer to "Table 2".
Operation
Do not run the Pump on blocking the exhaust outlet or putting any device
that might hamper gas passage onto the outlet. There is a risk that the
pressure inside the Vacuum pump rises up to cause break or oil leak of
the casing or Oil level gauge resulting in overload of the motor.
This product is not made as the withstand pressure structure. Ensured
pressure value of the Pump shall be 0.03MPaG (0.3kg/cm2G) (Gauge
pressure).
WARNING
WARNING
WARNING

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Be sure to turn OFF the Power Supply to execute check and
repair. You
have a risk of getting electrical shock or injury by accidental sudden
move.
Person other than Repair technician should not be in charge of
dismantling, repairing or remodeling the product.
You have a risk of getting injured or electrical sho
ck by a fire or erroneous
move.
Do not touch the Motor, vacuum pump or piping during the pump
operation and just after stopped it while the pump unit keeps high
temperature. You have a risk of getting burned.
Should you found any malfunction or error, just turn OFF the Power
Supply to prevent accident and ask the agency or closest Service Center
for check and repair.
Do
not attempt to put your hand or article in the opening of the motor; you
have a risk of getting electrical shock, injury or casing a fire.
Do not touch any rotary section such as the motor, main spindle or spindle
joint during operation of the Vacuum pump; it shall bring in injuries.
Strictly refrain from putting any combustible substance in and around 1m
of the motor and Vacuum pump; there is a risk of getting a fire.
Do not put a wall or obstacle in and around 0.3m of the air outlet of the
motor (Motor edge face). You
have a risk of getting burned or fire caused
by over heat.
Be sure to lubricate the machine.
If the lubrication oil came down lower than limit level during operation, it
might give damage on the bearing, gear and shaft
sealing and result in
leak, noise, motor overload and operation stop.
WARNING
CAUTION
CAUTION

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Ensure to flow the Coolant during operation. Required Coolant volumes
hall be;
Coolant volume VS1501 : 4~6 L/min
VS2401 : 5~7 L/min
Water pressure:0.5 MPaG (Gauge pressure)
Outlet/inlet differential pressure: 0.1MPaG (Gauge pressure) or more
Coolant temperature : 5°C ~ 30°C
The water included little impurities
(ex. Industrial Water) is recommended
for cooling water.
Depending on the water quality, the inside wall of cooling water tube is
covered with water scale (CaCO3
etc.) and cooling water flow rate may be
decreased. Cooling water tube is corroded by Chlorine ion (Cl-
) and
cooling water leak may be caused. In case of using pure water, cooling
water leak may be caused by metal component dissolution, too.
In these cases, the repair service may be for a fee.
［Reference］Standard Water Quality of Industrial Water
Establishment: Japan Industrial Water Association
Do not operate the Pump in hazardous area (where there is a risk of
creating hazardous
atmosphere by explosive gas). It might cause injury
and/or fire.
CAUTION
CAUTION
WARNING

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Power Supply wiring <Dismantling>
Be sure to cut off the electricity before starting install or dismantling
operation.
Coolant piping <Dismantling>
Should you remove the Coolant joint immediately after having stopped
the Pump, there is a risk that the coolant remained inside the Pump
comes to a boil and jets out. Keep flowing the Coolant as far as the
Pump temperature cools down.
The Pump is and remains very hot during and while after having stopped
operation. You have a risk of getting burned if a part of the body touched
it.Keep flowing the Coolant as far as the Pump temperature cools down.
Use a flow meter (HWFM: for example Flow sight) applicable to visually
check the Coolant supply source that no water is flowing.
Inlet piping <Dismantling>
Take off the piping following the Install Manual of the system.
The Inlet piping remains very hot wile after having stopped the Pump. Be
sure to take it off after the Pump has sufficiently cooled down.
Make airtight completely the Pump exhaust outlet with a blank flange.
Transfer
You have a risk of giving damage to your back as the
load larger than
safety standard shall be required to transfer the product.
VS1501 ：232kg
VS2401 ：271kg
Be sure to use the loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix it with Jack and run the Pallet
truck
for its transfer.
WARNING
WARNING
WARNING
WARNING

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0.4 Types and Descriptions of Warning Labels Displayed on This
Machine and Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・
You may get an electric shock in the area around a portion
with this warning label. Before maintenance or wiring, be
sure to turn off the primary power supply.
・Be
sure to close the lid of the terminal box before operating
this unit. Never open it during operation.
3
During operation or for a while after operation stops, do not
touch the unit as each portion is at a very high temperature.
- If a human body touches the unit, it may get burned.
4
・
This product is not made as the withstand pressure
structure. Ensured pressure value of the Pump shall be
0.03MPaG (0.3kg/cm2G) (Gauge pressure).
・
Do not run the Pump on blocking the Exhaust outlet or
putting any
device that might hamper gas passage onto the
outlet. There is a risk that the pressure inside the vacuum
pump rises up to cause break the casing or Oil level gauge
resulting in overload of the motor.
・Following gases cannot be evacuated because these gase
s
may cause the
pump inner pressure to increase due to internal combustion.
1) explosive gas
2) flammable gas
3) gas which increases the susceptibility of substances to
burn.
Long term storage of the Vacuum pump without operation
might possibly cause trouble in operation caused by rust i
f
you kept the Pump long time without operating it, ask a
closest Service Center for the check.
Indoor Use Only
Mount at least 100mm from side walls.
5
Before wiring, please confirm the power-
supply voltage you
use.
Please confirm the power-
supply voltage you'll use and
change crossline in the terminal box.
Refer to “3.5 Electrical Connection”.

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Fig. 1 Warning Label display position

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0.5 Acceptance and Storage of The Pump
0.5.1 Unpacking/Acceptance of The Pump
This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk
of cutting the hand by nail or
chip.
Give the instruction them further to use the unloading machinery such as
crane to take out the product of the wooded frame, lift it up with its top
eyebolt and transfer it on lifting. Check the eyebolt whether it has
no error
before use.
Only the technically entitled person should
be in charge of conducting the
unloading operation and operating the unloading machinery.
There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup
was not sufficient. You are
strictly restricted to enter beneath the Pump.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
Upon delivery of the product, check first that the delivered is exactly what you have ordered
and there is no break or damage through transport or the like. Claim after use of the product
might be resolved with a charge.
Although we pay full attention on shipping, you are kindly requested to check the following
upon unpacked the product.
IMPORTANT
Whether the delivered is exactly the one you have ordered.
W
hether accessories (Pump oil for one lubrication, optional parts) are
attached or not.
Whether there is no break or damage through transport or not.
Whether any bolt or nut got loose or taken off through transport or not.
Should you found any trouble, please do not hesitate to contact our Sales
division or your agency.
WARNING

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Table. 1 standard accessories
Part name Specification
Quantit
y
Remarks
Oil one time portion ULVOIL R-72 1 set For the consumed amount,
refer to the specification table.
Instruction manual English 1 copy －
0.5.2 Transfer
You have a risk of giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
VS1501 ：232kg
VS2401 ：271kg
Be sure to use the
loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix it with Jack and run the Pallet truck
for its transfer.
0.5.3 Ambient Condition for Storage, Install and Operation
As precise clearances are provided with this machine, be sure to fulfill the following for its
storage, install and operation;
(1) Ambient temperature and humidity for storage : -30°C to 60°C, less than 95%RH
(2) Ambient temperature and humidity for
operation
: 10°C to 40°C, less than 80%RH
(3) Height (for both storage and operation) : Lower than el. 1,000m.
(4) External vibration (for both storage and
operation)
: Vibration acceleration less
than114dB (0.5G)
(5) Miscellaneous (for both storage and operation) :
a. There shall be no corrosion behavior or explosive gas.
b. There shall be no freeze or dew formation.
c. There shall be no dust.
d. It shall be in house.
e. Another pump shall not be put on the Pump.
The Pump shall not be laid down nor put touching its motor edge face or oil gauge
edge face with the ground.
f. There shall be no direct sun beam.
g. Heat source shall be put away from the Pump.
WARNING

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Do not give the Pump a shock or lay it down. It might impair the Pump
operation.
Strictly refrain from putting any combustible substance in and around 1m
of the motor and Vacuum pump;there is a risk of getting a fire.
Do not put a wall or obstacle in and around 0.1m of the air inlet of the
motor (Motor edge face).
You have a risk of getting burned or fire caused by over heat.
Indoor use only
Install the machine horizontal to a place where there are less dust and humidity.
In case you fix the Pump to floor, fix the Pump to the floor with bolts at four places.
Fix the Pump horizontally so that there is not a wobble.
Refer to “3.1 Storage/ Installation”, too.
Model Foot print Bolt Anti-vibration
Rubber mount
VS1501
VS2401
The Pump has four holes.
The Pump is fixed with four bolts.
More than
“M12 x 40mm”
Kurashiki Kako., Ltd.
Model：
KLB-8030
(Recommended)
* NOT included
The detail of the holes position: Refer to the Fig. 2,3
0.6 Protective Device
This machine is equipped with the Three-phase AC motor.
This motor is not equipped with the protective device. Put an overload protective device to
connect through the motor with the Power Supply. It is imperative to put the overload protective
device under direction of the Electrical Installation Technical Standard (1965, Department of
Trade and Industry decree No. 61). Refer to “3. 6 Electric connection” to select the overload
protective device. It is recommended to put together another protective device such as a
leakage breaker.
CAUTION

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It is imperative to put the Overload protection device.
Otherwise it would cause the motor burn out and/or fire.
WARNING

SK00-4390-DI-002-11
Contents-1
Table of Contents
0. Before Using This Product..........................................................................................................................i
0.1 Safety Symbol Marks...........................................................................................................................ii
0.2 Meanings of Safety Symbol Marks ......................................................................................................ii
0.3 Safety Precautions.............................................................................................................................. iii
0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions .....x
0.5 Acceptance and Storage of The Pump.............................................................................................. xii
0.5.1 Unpacking/Acceptance of The Pump.......................................................................................... xii
0.5.2 Transfer ...................................................................................................................................... xiii
0.5.3 Ambient Condition for Storage, Install and Operation................................................................ xiii
0.6 Protective Device.............................................................................................................................. xiv
Table of Contents...................................................................................................................................... 1
1. For Your Safety Use ................................................................................................................................. 1
1.1 This Product Intrinsic Hazardous Nature and Safety Measures......................................................... 1
1.1.1 Danger Leakage of dangerous gas and dangerous materials ........................................ 1
1.1.2 Warning Transfer of heavy material................................................................................. 1
1.1.3 Warning Electric shock....................................................................................................... 2
1.1.4 Warning Explosion ............................................................................................................... 2
1.1.5 Caution High temperature .................................................................................................. 3
1.1.6 Caution Leakage of hot coolant ........................................................................................... 3
1.2 Chemical Material Safety Data Sheet（SDS）..................................................................................... 4
2. Pump Outline............................................................................................................................................ 5
2.1 Characteristics .................................................................................................................................... 5
2.2 Performance Specifications................................................................................................................ 6
3. Mounting ................................................................................................................................................... 9
3.1 Storage/ Installation ............................................................................................................................ 9
3.2 Lubrication ........................................................................................................................................ 10
3.3 Water Piping ......................................................................................................................................11
3.4 Inlet port Piping................................................................................................................................. 13
3.5 Outlet port Piping .............................................................................................................................. 14
3.6 Electrical Connection ........................................................................................................................ 17
3.7 Miscellaneous Connection Port............................................................................................................ 20
4. Operation................................................................................................................................................ 21
4.1 Caution on Operation........................................................................................................................ 21
4.2 Operation Start ................................................................................................................................. 23
4.3 Operation Stop.................................................................................................................................. 25
4.4 Gas Ballast Function......................................................................................................................... 26
The.............................................................................................................................................................. 27

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Contents-2
4.5 Vacuum Pump Oil for Winter Season ............................................................................................... 27
5. Pump Performance................................................................................................................................. 28
5.1 Ultimate Pressure ............................................................................................................................. 28
5.2 Exhaust Speed ................................................................................................................................. 28
5.3 Required Motive Energy ................................................................................................................... 30
6. Maintenance and Check......................................................................................................................... 31
6.1 Maintenance ..................................................................................................................................... 31
6.2 Regular Check .................................................................................................................................. 31
6.2.1 Pump Oil Level Check................................................................................................................ 32
6.2.2 Vacuum Pump Oil Check ........................................................................................................... 32
6.2.3 Replace Vacuum Pump Oil...................................................................................................... 33
6.2.4 Oil Leak Check ........................................................................................................................... 34
6.2.5 Checking The Gas Ballast Function........................................................................................... 34
6.2.6 Checking The Metal Mesh at The Suction Inlet ......................................................................... 34
6.2.7 Checking The Noise and Abnormal Vibration ............................................................................ 34
6.2.8 Checking The Coupling and Spider ........................................................................................... 34
6.2.9 Checking The Oil Mist Trap........................................................................................................ 35
6.2.10 Adjusting The Slow Leak Valve................................................................................................ 36
6.2.11 Replacing The Exhaust Valve Vane ......................................................................................... 36
6.2.12 Cleaning The Coolant Jacket ................................................................................................... 40
6.2.13 Cleaning The Oil Tank ............................................................................................................. 40
6.2.14 Oil spray inside oil level gauge................................................................................................. 40
6.3 Checkup after storage for a long period ........................................................................................... 43
6.4 Overhaul ........................................................................................................................................... 43
6.5 Trouble Check List ............................................................................................................................ 44
7. Removal / transport ................................................................................................................................ 50
7.1 Operation procedure............................................................................................................................. 50
8. Disposal.................................................................................................................................................. 51
9. Warranty Clauses ................................................................................................................................... 52
9.1 Warrantable Items ............................................................................................................................ 52
9.2 Duration of guarantee ....................................................................................................................... 52
9.3 Warrantee scope .............................................................................................................................. 52
9.4 Response procedure ........................................................................................................................ 52
9.5 Disclaimer ......................................................................................................................................... 53
9.6 Others ............................................................................................................................................... 53
10. Main Displacement Parts ..................................................................................................................... 54
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER

SK00-4390-DI-002-11
Contents-3
Tables and Illustrations
Fig. 1 Warning Label display position ...................................................................................................xi
Fig. 2 VS1501 Dimensional drawing ..................................................................................................... 7
Fig. 3 VS2401 Dimensional drawing ..................................................................................................... 8
Fig. 4 Lubrication and water piping drawing ....................................................................................... 12
Fig. 5 Suction/Exhaust piping connection diagram ............................................................................. 16
Fig. 6 Recommended connection diagram ......................................................................................... 17
Fig. 7 Electrical wiring diagram ........................................................................................................... 17
Fig. 8 Show the relationship between the suction pressure and pumping speed - MODEL VS1501. 29
Fig. 9 Show the relationship between the suction pressure and pumping speed - MODEL VS2401. 29
Fig. 10 Replacement of coupling spider.............................................................................................. 35
Fig. 11 Slow leak valve adjustment ..................................................................................................... 36
Table. 1 standard accessories............................................................................................................. xiii
Table. 2 Performance specifications ..................................................................................................... 6
Table. 3 Rated current value of the VS series standard motor ........................................................... 20
Table. 4 Terminal box main dimension ................................................................................................ 20
Table. 5 Miscellaneous connection port .............................................................................................. 20
Table. 6 Recommended replacement cycle of the vacuum pump oil.................................................. 32
Table. 7 Trouble check list................................................................................................................... 44
Table. 8 Main displacement parts list (VS1501/VS2401 Common) .................................................... 54