VAT 616 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
893179ED.DOCX Edition 2020-01-22
Butterfly position control & isolation valve
with position controller
with Logic interface
Series 616
DN 40 - 50mm (I.D. 1.5"- 2”)
This manual is valid for the following product ordering numbers:
61632-K.M1-….-….
61634-K.M1-….-….
Configured with firmware: F02.0B.02.01, F02.0B.02.02
Sample picture

Series
616
2/56 Edition 2020-01-22 893179ED.DOCX
Imprint
Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag, Switzerland
Copyright
©
VAT Vakuumventile AG
2020
No part of these instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

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Contents
1 Description of product........................................................................5
1.1 Identification of product ...................................................................................................5
1.2 Use of product.................................................................................................................5
1.3 Used abbreviations..........................................................................................................5
1.4 Related documents..........................................................................................................5
1.5 Important information.......................................................................................................5
1.6 Technical data.................................................................................................................6
1.6.1 Control and actuating unit.................................................................................6
1.6.2 Valve unit..........................................................................................................6
2 Safety ...................................................................................................8
2.1 Compulsory reading material...........................................................................................8
2.2 Danger levels ..................................................................................................................8
2.3 Personnel qualifications...................................................................................................9
2.4 Safety labels....................................................................................................................9
3 Design and Function.........................................................................10
3.1 Design...........................................................................................................................10
3.2 Function.........................................................................................................................11
4 Installation.........................................................................................12
4.1 Unpacking .....................................................................................................................12
4.2 Installation into the system............................................................................................13
4.2.1 Installation space condition.............................................................................14
4.2.2 Connection overview.......................................................................................14
4.2.3 Installation procedure......................................................................................15
4.3 Tightening torque ..........................................................................................................15
4.3.1 Mounting with ISO-KF flanges ........................................................................15
4.4 Admissible forces..........................................................................................................16
4.4.1 Admissible forces at controller........................................................................17
4.5 Electrical connection......................................................................................................18
4.5.1 Ground connection..........................................................................................18
4.5.2 Service port connection...................................................................................19
4.5.3 Functions and Wiring ......................................................................................20
4.5.4 Remote control modes....................................................................................22
4.6 Initial operation..............................................................................................................23
4.6.1 Setup procedure .............................................................................................23
4.6.2 Logic Interface configuration...........................................................................23
4.6.3 Valve configuration .........................................................................................23
5 Operation...........................................................................................24
5.1 Normal operation...........................................................................................................24
5.1.1 Local operation ...............................................................................................25
5.1.2 Remote operation ...........................................................................................26
5.2 Close valve....................................................................................................................27
5.3 Open valve....................................................................................................................27
5.4 Position control..............................................................................................................27
5.5 Display information........................................................................................................27
5.5.1 Power up.........................................................................................................28
5.5.2 Operation........................................................................................................28
5.5.3 Fatal error .......................................................................................................28
5.5.4 Service indication............................................................................................28
5.6 Operation during power up............................................................................................28
5.7 Behavior in case of power failure ..................................................................................28
5.8 Operation under increased temperature........................................................................29

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6 Trouble shooting .............................................................................. 30
7 Maintenance...................................................................................... 31
7.1 Maintenance intervals....................................................................................................31
7.2 Maintenance procedures...............................................................................................32
7.2.1 Replacement of plate o-ring............................................................................33
7.2.2 Replacement of shaft feed through seals and valve cleaning .........................37
8 Repairs .............................................................................................. 44
9 Dismounting and Storage................................................................ 45
9.1 Dismounting...................................................................................................................45
9.2 Storage..........................................................................................................................46
10 Packaging and Transport................................................................. 47
10.1 Packaging......................................................................................................................47
10.2 Transport .......................................................................................................................48
11 Disposal............................................................................................. 49
12 Spare parts........................................................................................ 50
12.1 Drawing .........................................................................................................................51
12.1.1 ISO-KF valve unit – aluminum hard anodized, without heating.......................52
12.1.2 ISO-KF valve unit – stainless steel, without heating........................................52
12.1.3 Seals and grease ............................................................................................53
12.1.4 Control and actuating unit ...............................................................................53
12.1.5 Accessories.....................................................................................................53
13 Appendix........................................................................................... 55

Series 616 DESCRIPTION OF PRODUCT
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1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .


Fabrication number
Order number
1.2 Use of product
This product is a Butterfly position control valve with isolation functionality for downstream pressure
control in vacuum systems.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer Software
1.4 Related documents
• Product Data Sheet
• Dimensional Drawing
• IOMI Heating device (if valve with heater)
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example
:
Refer to chapter: «Technical data» for detailed information.

DESCRIPTION OF PRODUCT Series
616
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1.6 Technical data
1.6.1 Control and actuating unit
Description
Power supply input
1)
+24 VDC (±10%) @ 0.5 V pk-pk max.
Power consumption 40 W max.
Ambient temperature 0 °C to +50 °C max. (<35 °C recommended)
humidity 0 to 95% RH, non-condensing
Interface remote Logic
local service port USB-B
Analog input / output position control 0…10V; Resolution 2.5 mV
Digital inputs:
2)
- Input 1
- Input 2
open valve
close valve
adjustable with CPA 4.0
adjustable with CPA 4.0
Digital outputs:
2)
- Output 1
- Output 2
valve closed
valve open
adjustable with CPA 4.0
adjustable with CPA 4.0
Position resolution 4000 (full stroke)
Actuator backlash < 0.1°
Closing / Opening time throttling only 380 ms
throttling & isolation 390 ms
Protective system IP 40
Utilizable valve torque 2.5 Nm
1)
Internal overcurrent protection by a PTC device.
2)
Refer to chapter «Functions and Wiring» for details, function depending on configuration.

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1.6.2 Valve unit
Description
Pressure range (unheated on delivery)
•Stainless steel
•Aluminum, hard anodized
1 × 10E-8 mbar to 1.2 bar (abs)
1 × 10E-6 mbar to 1.2 bar (abs)
Leak rate valve seat (unheated on delivery)
•Stainless steel
•Aluminum, hard anodized
1 × 10E-9 mbar ls-1
1 × 10E-4 mbar ls-1
Leak rate valve body (unheated on delivery)
•Stainless steel
•Aluminum, hard anodized
1 × 10E-9 mbar ls-1
1 × 10E-5 mbar ls-1
Cycles until first service:
•Isolation cycles (open – closed – open) 250’000 (Viton
®
seals, under clean and unheated cond.)
•Throttling cycles (open - max. throttle - open) 2’000’000 (Viton
®
seals, under clean and unheated cond.)
Admissible operating temperature
•Valve body
•Ambient
+10°C to +120°C
10°C to 50°C
Mounting position Valve seat must face chamber side.
Wetted materials
•
Body, plate (616 . . - . H. . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized
•
Body, plate (616 . . - . E. . - . . . . ) Stainless steel 316L (1.4404 or 1.4435)
•Shaft Stainless steel 316L (1.4404 or 1.4435)
•Plate screws Stainless steel 316L (A4)
•Shaft seal (rotary feedthrough)
•Plate seal Viton
®
Viton
®
•Slide bearing for shaft iglidur
®
X
Max. differential pressure on plate during isolation
and opening and throttling 1000 mbar
DN (nominal I. D.) [mm]
[inch] 40
1½
50
2
Min. controllable conductance [N
2
molecular flow] 0.05 l/s 0.1 l/s
Conductance in open position [N
2
molecular flow] 60 l/s 120 l/s
Weight about
•Stainless steel [kg]
•Aluminum hard anodized [kg]
3.3 kg
2.4 kg
3.6 kg
2.7 kg
Dimensions Refer to dimensional drawing of specific valve ordering
number (available on request)

SAFETY Series
616
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2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-156 On protective foil covering of
valve opening

DESIGN AND FUNCTION Series
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3 Design and Function
3.1 Design
Sample picture
XY: Double excentric bearing: prevents wearing of the o-ring and particle generation
1 Controller 4 Double seal
2 Coupling 5 Plate
3 Bearing 6 Body

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3.2 Function
The valve plate acts as a throttling element and varies the conductance of the valve opening. The
integrated controller calculates the required plate position to achieve the setpoint pressure. Actuation
is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and
accurate process pressure control even in demanding contaminating processes. The seal which is
attached to the plate reduces the minimum controllable conductance and allows leak tight closing of
the valve. In closed position, the seal is pressed on the body.
Open
Closed
Position control

INSTALLATION Series
616
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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller.
NOTICE
Physical overstraining at pedestal
Inappropriate handling with the valve may cause in damage of pedestal.
Lift valve at valve body out of transport case.
• Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

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4.2 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

INSTALLATION Series
616
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4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below.
Sample picture
4.2.2 Connection overview
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Cable to power supply / Interface
5 Position controller
6 Pump
M
3
4
2
1
6
5

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Position Controller:
4.2.3 Installation procedure
All numbers in brackets refer to chapter: «Connection overview».
1. Install valve [1] into the vacuum system.
2. Remove protective covers from body flanges.
3. Connect controller (connector: POWER / INTERFACE) to power supply and Interface [4]. Refer to
chapter «Functions and Wiring» for correct wiring.
Perform in chapter: «Setup procedure» to prepare valve for operation.
4.3 Tightening torque
4.3.1 Mounting with ISO-KF flanges
Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow
recommendations of seal manufacturer.
•Do not tighten the flange screws stronger than indicated under «Tightening
torque».
•Do not admit higher forces to the valve than indicated under «Admissible forces».
•Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
•Control unit of valves with ISO-KF flanges (615 . . – K . . . ) needs support when
mounted on horizontal piping and control unit does not hang.

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4.4 Admissible forces
NOTICE
Force at valve body
Forces from the weight of other components can lead to deformation of the valve body
and to malfunction of the valve.
Do not higher force the valve body as specified.
The following forces are admissible.
Axial tensile or compressive
force «F
A
» Bending moment «M»
N lb. Nm Lbf.
100 22 6 4.5
M FA

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4.4.1 Admissible forces at controller
NOTICE
Force at pedestal
In case higher force is applied, the pedestal could be permanently damaged.
– Do not pushing, shocking load, or stressing the valve controller
– Do not deposit anything at valve controller
The admissible force at valve controller in regards to the pedestal is shown in table
below
Admissible force
«F»
Overview
F= Force
a = middle of aluminium part of controller (b / 2)
400 N
pedestal
b
a a
F
pedestal b
a a
F

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4.5 Electrical connection
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
4.5.1 Ground connection
Recommendation for ground connection between controller and system chassis.
Recommendation for ground connection cable: AWG 12 (4 mm
2
)
The connection point at chassis (FE) must be blank metal (not coated).
Controller bottom side
Recommended torque: 1,3…1,7Nm
Chassis (FE)
(Functional Earth)

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4.5.2 Service port connection
The service port (connector: SERVICE, USB - B) allows to connect the valve to a USB - A port of a
computer. This requires a USB A–B cable male-male. The ‘Service port is used for ‘Local operation’ and
setup.
You can use our Software 'Control Performance Analyzer' 4.0 for Local operation, which is integrated in
the Controller. Refer to chapter: ‘Local operation’ for detail information.

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4.5.3 Functions and Wiring
Logic interface allows for remote operation by means of digital input / output and
analog input / output signals. Digital inputs may be operated either by switches or by
voltage sources.
a) Configuration with switches for digital inputs:
• VAT fuse recommendation: (a) 2 AF
• Connect all pins exact as shown in the schematics above!
• Use only screws with 4-40UNC thread for fastening the DB-15 connector!