VAT 62714-XE64-3 Series User manual

1126117EA (2022-02) 1
Control Valve
62714-XE64-...3
Operating Manual

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Product Identification
In all communications with VAT please specify the information on the
product nameplate. For convenient reference copy that information
into the space provided below:
Validity
This document applies to products (basic valves without optional
flange) with part numbers
62714-XE64-ABG3 (100 sccm)
62714-XE64-ABH3 (500 sccm)
62714-XE64-ABI3 (1000 sccm)
62714-XE64-ABJ3 (5000 sccm)
The part number (PN) can be taken from the product nameplate.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
made in Switzerland
Fabrication No.:
.....-....-..../....
A-......

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Intended Use
The 62714-XE64-.... Control Valve is used in conjunction with the
627PM-16GV-000. Controller or another control device for controlling
gas flows and thus maintaining a desired pressure in a vacuum
system.
It must not be used for controlling liquid gases.
Functional Principle
The 62714-XE64-.... Control Valve opens and closes as a function of
the control voltage.
It will close or remain closed in the event of a power loss.
Example of a control loop:
VDM005A-X
Control Valve
Controller
(e.g. VCC500)
Vacuum pump
Pressure
sensor
Gas inlet Vacuum
system

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1. Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental
damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary
experience or who have been instructed by the end-user of the
product.

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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions between the materials and the
process media.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated
parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
VAT assumes no liability and the warranty becomes null and void if
the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on
the product
•use the product with accessories not listed in the corresponding
product documentation.
The end-user assumes the responsibility in conjunction with the
process media used.

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2. Technical Data
Vacuum connection M14×1
Adapters (accessories)
flange fitting
tube fitting
DN 10 ISO-KF
OD ¼", OD 6 mm
Installation angle any, preferably perpendicular
Pressure range 1×10-8 … 2 bar (absolute)
Tightness 1×10-9 mbar l/s
Gas flow
1)
62714-XE64-ABG3
62714-XE64-ABH3
62714-XE64-ABI3
62714-XE64-ABJ3
100 sccm F.S.
500 sccm F.S.
1000 sccm F.S.
5000 sccm F.S.
Response time <30 ms
Supply voltage
Control range
Power
Duty cycle
0 … 24 VDC
20 … 70 mA, 1 … 100% F.S.
2.5 W
100%
Degree of protection IP51
Temperature
Ambiance
Bakeout
5 °C … 50 °C
80 °C (with idle coil)
Materials
Housing
Armature
Guiding tube
Springs
Seals
stainless steel 1.4301
stainless steel 1.4105 IL
stainless steel 1.4305, 1.4105 IL
stainless steel 1.4310
FPM
Weight 96 g
1
) For air at a pressure difference ∆p = 1 bar
Note!
Basic valves
without optional
flange.

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Dimensions [mm]

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Flow rate curve
Example of a flow rate curve (mean values 500 sccm F.S) at a
pressure difference ∆ p = 1 bar
Current (solenoid coil) [mA]
Gas flow [sccm]
Control valve closed
Control valve open
0
100
200
300
400
500
600
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80

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3. Installation
3.1 Vacuum Connection
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.