Aerotech ANT130LZS Series User manual

Revision: 1.01.00
ANT130LZS Hardware Manual

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Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015-2017, Aerotech, Inc., All rights reserved.

ANT130LZS Hardware Manual Table of Contents
Table of Contents
ANT130LZS Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Air Requirements 13
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 17
2.3.1. Setting up the Pneumatic Counterbalance 20
2.4. Attaching the Payload to the Stage 22
Chapter 3: Electrical Specifications and Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 30
3.3. Motor and Feedback Specifications 32
3.4. Limits, Marker, and Machine Direction 34
3.5. Motor and Feedback Phasing 35
Chapter 4: Maintenance 37
4.1. Service and Inspection Schedule 37
4.2. Cleaning and Lubrication 38
4.3. Troubleshooting 39
Appendix A: Warranty and Field Service 41
Appendix B: Revision History 43
Index 45
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Table of Contents ANT130LZS Hardware Manual
List of Figures
Figure 1-1: ANT130LZS 9
Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure 13
Figure 2-1: Shipping Clamps 15
Figure 2-2: ANT130LZS Dimensions 16
Figure 2-3: Mounting Hole Pattern 18
Figure 2-4: Mounting Pattern 19
Figure 2-5: Counterbalance Pressure vs. External Payload 20
Figure 2-6: Load Orientations 23
Figure 2-7: Cantilevered Load Capabilities 24
Figure 3-1: Motor and Feedback Wiring [-CN1 option] 30
Figure 3-2: Motor and Feedback Wiring [-CN2option] 31
Figure 3-3: Machine Direction 34
Figure 3-4: Hall Phasing 35
Figure 3-5: Analog Encoder Phasing Reference Diagram 36
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ANT130LZS Hardware Manual Table of Contents
List of Tables
Table 1-1: ANT130LZS Model Numbering System 9
Table 1-2: Environmental Specifications 10
Table 1-3: ANT130LZS Series Specifications (-035 and -060) 11
Table 1-4: ANT130LZS Series Specifications (-110 and -160) 12
Table 3-1: Motor and Feedback Pinouts (-CN1option) 27
Table 3-2: Motor Pinouts (-CN2 option) 28
Table 3-3: Feedback Pinouts (-CN2 option) 29
Table 3-4: Feedback Specifications 32
Table 3-5: Motor Specifications 33
Table 3-6: Encoder Specifications 33
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Table of Contents ANT130LZS Hardware Manual
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ANT130LZS and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ANT130LZS stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the ANT130LZS stage. Lifting or transporting the ANT130LZS
stage improperly can result in injury or damage to the ANT130LZS.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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ANT130LZS Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT130LZS
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which
it is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e., as a whole, including the equipment
referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln
Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
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Table of Contents ANT130LZS Hardware Manual
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ANT130LZS Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT130LZS Model Numbering System
ANT Series Linear Motor Stage
Travel (Required)
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel
Connectors (Required)
-CN1 Integral cable with a 25-pin D-style motor and feedback connector
-CN2 Integral Y cable with 4-pin high-powered D-style motor and 25-pin D-style
feedback connectors
Note: -CN1 option not valid for systems using bus voltages greater than 80 V
Mounting Plate (Optional)
-MP Mounting plate
Performance Grade (Required)
-PL1 Base performance
-PL2 High-accuracy performance, PLUS
Figure 1-1: ANT130LZS
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Overview ANT130LZS Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ANT130LZS stages are not suited for dusty or wet environments. This equates to
an ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ANT130LZS. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ANT130LZS
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ANT130LZS is
mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale is 3.25 ppm/°C. Travel will increase or decrease at
this rate as the temperature of the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of ANT130LZS series stages is measured 25 mm above the table with the stage
in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
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ANT130LZS Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZS Series Specifications (-035 and -060)
-035 -060
Travel 35 mm 60 mm
Accuracy(1) Base (-PL1) ±2.5 µm ±2.5 µm
PLUS(5)
(-PL2) ±275 nm ±275 nm
Resolution (Minimum Incremental Motion) 2 nm 2 nm
Bidirectional
Repeatability(1)
Base (-PL1) ±100 nm ±100 nm
PLUS(5)
(-PL2) ±75 nm ±75 nm
Unidirectional Repeatability ±35 nm ±35 nm
Straightness(1) ±1.5 µm ±1.5 µm
Flatness(1) ±1.5 µm ±1.5 µm
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 200 mm/s 200 mm/s
Maximum Acceleration (No Load) 1 g 1 g
In-Position Stability (2) <2 nm <2 nm
Maximum Force (continuous) 23 N 23 N
Load Capacity (Vertical)(4) 14.0 kg 14.0 kg
Moving Mass 1.3 kg 1.5 kg
Stage Mass 2.5 kg 2.9 kg
Material Aluminum Body/Black Hardcoat Finish
Mean Time BetweenFailure 30,000 Hours
1. Certified with each stage.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. In-Position Jitter listing is 3 sigma value.
4. Axis orientation for on-axis loading is listed (refer to Section 2.4. for offset loading behavior).
5. Requires the use of an Aerotech controller.
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Overview ANT130LZS Hardware Manual
Table 1-4: ANT130LZS Series Specifications (-110 and -160)
-110 -160
Travel 110 mm 160 mm
Accuracy(1) Base (-PL1) ±3 µm ±4 µm
PLUS(5)
(-PL2) ±325 nm ±325 nm
Resolution (Minimum Incremental Motion) 2 nm 2 nm
Bidirectional
Repeatability(1)
Base (-PL1) ±100 nm ±100 nm
PLUS(5)
(-PL2) ±75 nm ±75 nm
Repeatability (Unidirectional) ±35 nm ±35 nm
Straightness(1) ±1.5 µm ±2 µm
Flatness(1) ±1.5 µm ±2 µm
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed(2) 200 mm/s 200 mm/s
Maximum Acceleration(2) 1 g (No Load) 1 g (No Load)
In-Position Stability(3) <2 nm <2 nm
Maximum Force (Continuous) 23 N 23 N
Load Capacity (Vertical)(4) 14.0 kg 14.0 kg
Moving Mass 2.1 kg 2.5 kg
Stage Mass 3.9 kg 4.6 kg
Material Aluminum Body/Black Hardcoat Finish
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. In-Position Jitter listing is 3 sigma value.
4. Axis orientation for on-axis loading is listed (refer to Section 2.4. for offset loading behavior).
5. Requires the use of an Aerotech controller.
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ANT130LZS Hardware Manual Overview
1.4. Air Requirements
It is important to the operation of the ANT130LZS that the air supply meets Aerotech specifications. The air
must be filtered to 0.25 microns, dry to 0°F dew point, and oil free (nitrogen at 99.99% purity is
recommended). Filtration is required to prevent particles from clogging internal components of the
ANT130LZS.
The low friction air cylinder consumes air as described in Figure 1-2.
Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure
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Overview ANT130LZS Hardware Manual
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ANT130LZS Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ANT130LZS installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ANT130LZS. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ANT130LZS. Use care
when moving the ANT130LZS.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ANT130LZSfrom its protective shipping container. Gently set the ANT130LZS on a
smooth, flat, and clean surface.
Before operating the ANT130LZS, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each ANT130LZS has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Figure 2-1: Shipping Clamps
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Mechanical Specifications and Installation ANT130LZS Hardware Manual
2.2. Dimensions
Figure 2-2: ANT130LZS Dimensions
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ANT130LZS Hardware Manual Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ANT130LZS must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ANT130LZS stage. When it is mounted to a non-flat surface, the stage can be
distorted as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments
to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
N O T E : The ANT130LZS is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT130LZS. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
1. Remove the shipping brackets mounted to the sides of the stage with M3 screws. Retain the shipping
brackets for future use.
2. With the stage laying horizontal, push the carriage to the bottom of travel such that the cylinder rods are
mostly hidden in the cylinder bodies as shown in Figure 2-4. Insert one M6 socket head cap screw
through an access hole in the stage (refer to Figure 2-4).
3. Two man step: Slowly lift the stage upright, using the cylinder mounting brackets as a lifting point. Be
careful to not dislodge the loose screw that you inserted in the mounting hole in step 4. Do not lift the
stage by the cylinders, carriage assembly, or cabling.
4. Two man step: Lift the stage to the mounting surface and line the stage up with the mounting holes.
Use a wrench to engage the previously inserted mounting screw. Make sure the screw is fully engaged
in the threaded hole, but do not tighten it at this time. Rotate the stage to align the second hole, insert
another screw, and thread it in without fully tightening. The screw heads should be recessed in the
counter-bored holes.
5. Two man step: Lift the carriage by hand, and hold it up to expose the bottom mounting holes. Insert the
remaining mounting screws. Align the stage per your application, and then fully tighten the mounting
screws.
a. Tightening torque values are dependent on the properties of the surface on which the stage is being
mounted. Typical tightening torque for an M6 x 1.0 socket head cap screw is 7.0 N·m.
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Mechanical Specifications and Installation ANT130LZS Hardware Manual
Figure 2-3: Mounting Hole Pattern
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ANT130LZS Hardware Manual Mechanical Specifications and Installation
Figure 2-4: Mounting Pattern
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Mechanical Specifications and Installation ANT130LZS Hardware Manual
2.3.1. Setting up the Pneumatic Counterbalance
W A R N I N G : Failure to adjust the counterbalance per the following instructions could result in
bodily injury as well as stage and payload damage.
W A R N I N G : Sudden loss of pressure to the pneumatic counterbalance will cause the
carriage to drop rapidly. This could result in bodily injury as well as stage and payload damage.
By default, the ANT130LZS pneumatic counterbalances are factory set to operate in the as-shipped
condition. For stages that are shipped unloaded, the counterbalance is set for the mass of the carriage only.
For stages that ship with payloads or other axes attached, the counterbalance is set for the mass of the
carriage plus the additional mass. Any adjustment to the mass that is carried by the counterbalance
cylinders, either adding or subtracting payload, necessitates an adjustment to the counterbalance pressure
supplied to the pneumatic cylinders.
Standard ANT130LZS stages have two counterbalance cylinders with a combined piston area of =3.96x10-4
m2, and the moving mass of a standard ANT130LZS carriage assembly is 1.4 kg (3.1 lb). An estimate of the
counterbalance pressure required to support additional load is given by the following:
Pc = ((mp + 1.4) * 9.81) / (3.96x10-4) / 1x106{MPa}
where
Pc = Required counterbalance pressure in MPa (maximum 0.6 MPa allowed)
mp = mass of external payload in kg.
This relationship is shown graphically in Figure 2-5.
Figure 2-5: Counterbalance Pressure vs. External Payload
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