Aerotech PRO165LM Series User manual

Revision 2.00
PRO165LMMechanical Bearing,
Direct-Drive Linear Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2009-2023, Aerotech, Inc., All rights reserved.

Table of Contents
PRO165LMMechanical Bearing, Direct-Drive Linear Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
UKCADeclaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Magnetic Hazards 13
Handling and Storage 14
Chapter 1: Overview 17
1.1. Environmental Specifications 19
1.2. Accuracy and Temperature Effects 20
1.3. Basic Specifications 21
1.4. Vacuum Operation 23
Chapter 2: Installation 25
2.1. Dimensions 25
2.2. Securing the Stage to the Mounting Surface 27
2.3. Attaching the Payload to the Stage 28
2.3.1. Speed Capability 30
Chapter 3: Electrical Installation 31
3.1. Motor and Feedback Connectors 32
3.2. Motor and Feedback Wiring 37
3.3. Motor and Feedback Specifications 39
3.4. Limits, Marker, and Machine Direction 41
3.5. Motor and Feedback Phasing 42
Chapter 4: Maintenance 45
4.1. Service and Inspection Schedule 45
4.2. Cleaning and Lubrication 46
4.3. Troubleshooting 50
Appendix A: Warranty and Field Service 51
Appendix B: Revision History 53
Index 55
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List of Figures
Figure 2-1: PRO165LM Dimensions 25
Figure 2-2: PRO165LM Tabletop Dimensions (-TT2/-TT3 Option) 26
Figure 2-3: Stage Orientations 29
Figure 2-4: Cantilevered Load Capability 29
Figure 3-1: Ground Connection Points for the -CMS0 Option 32
Figure 3-2: Motor and Feedback Wiring 37
Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 38
Figure 3-4: Machine Direction 41
Figure 3-5: Hall Phasing Diagram 42
Figure 3-6: Encoder Phasing Reference Diagram (Standard/Square Wave) 43
Figure 3-7: Digital Encoder Phasing Reference Diagram (Sine Wave) 43
Figure 4-1: Hardcover Rear End Plate Removal 48
Figure 4-2: Hardcover Screw Removal 48
Figure 4-3: Hardcover Removal 49
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List of Tables
Table 1-1: Model Numbers and Ordering Options 17
Table 1-2: Environmental Specifications 19
Table 1-3: PRO165LM Series Specifications (-0100 to -0300) 21
Table 1-4: PRO165LM Series Specifications (-0400 to -1000) 22
Table 2-1: Stage Mounting Surface Flatness Requirement 27
Table 2-2: Stage to Mounting Surface Hardware 27
Table 2-3: Payload Mounting Surface Flatness Requirement 28
Table 3-1: Motor Connector Pinout 33
Table 3-2: General Motor Connector Pinout (for Z or T Axes) 33
Table 3-3: Mating Connector Part Numbers for the Motor Connector 33
Table 3-4: Feedback Connector Pinout 34
Table 3-5: Mating Connector Part Numbers for the Brushless Motor Feedback Connector 34
Table 3-6: Feedback Connector Pinout (-E3 Option) 35
Table 3-7: Mating Connector Part Numbers for the Encoder Connector 35
Table 3-8: General Feedback Connector Pinout (for Z or T Axes) 36
Table 3-9: Mating Connector Part Numbers for the Encoder Connector 36
Table 3-10: Hall-Effect Sensor Specifications 39
Table 3-11: Thermistor Specifications 39
Table 3-12: Encoder Specifications 39
Table 3-13: Linear Encoder Resolution Specifications 39
Table 3-14: Limit Switch Specifications 39
Table 3-15: PRO165LM Motor Specifications (BLMC-142-A) 40
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO165LM stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended; and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements
of the following directive(s):
EU 2015/863 Directive, Restricted Substances (RoHS 3)
Authorized
Representative: / Norbert Ludwig
Managing Director
Aerotech GmbH
Gustav-Weißkopf-Str.18
90768 Fürth
Germany
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 5/5/2023
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UKCADeclaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO165LM stage
To which this declaration relates, meets the essential health and safety requirements and is in
conformity with the relevant UK Legislation listed below:
Supply of Machinery (Safety) Regulations 2008
Hazardous Substances in Electrical and Electronic Equipment Regulations
2012
Using the relevant section of the following UK Designated Standards and other normative
documents when installed in accordance with the installation instructions supplied by the
manufacturer.
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and furthermore declares that it is not allowed to put the product into service until the machinery
into which it is to be incorporated or of which it is to be a component has been found and declared
to be in conformity with the provisions of the Supply of Machinery (Safety) Regulations 2008 UK
Legislation and with national implementing legislation, for example, as a whole, including the
equipment referred to in this Declaration.
Authorized
Representative: / Simon Smith
Managing Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 5/5/2023
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard
General/Conditional Awareness Rotational Machinery Hazard
Hot Surface Hazard Pinch/Entanglement Hazard
Magnetic Field Hazard Trip Hazard
Heavy, Bulky Lifting Hazard Appropriate Equipment Required
Pressure/Explosive Atmosphere
Hazard Electrostatic Discharge Hazard
A blue circle symbol is an action or tip that you should obey. Some examples include:
General tip Read the manual/section
Wear personal protective equipment
(PPE): Safety Glasses If applicable, do not lift unassisted
Wear personal protective equipment
(PPE): Gloves
Wear personal protective equipment
(PPE): Hearing Protection
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lMake sure that all pneumatic lines are securely connected.
lUse care when you move the PRO165LM or you could negatively affect the per-
formance of it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
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Motor-Related Warnings
Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all
applicable codes and standards when you operate a system that incorporates Aerotech motors.
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
lWhen the system is not electrically energized (disabled), linear stage/motors can still
allow a stage carriage to move freely. This can create mechanical hazards such as
pinch or crush points.
lUnintentional manual movement into the stage "end-of-travel" stops, could damage
the stage or undo precision alignments.
lStage movement could create pinch points, entanglement hazards, or rotational
mechanical hazards.
DANGER: Hot Surface Hazard!
lThe stage/motor frame temperature could exceed 70°C in some applications.
lDo not touch the stage/motor frame while it is in operation.
lWait until the stage/motor has cooled before you touch it.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as airborne dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
DANGER: Magnetic Field Hazard!
Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.
lDo not disassemble a stage motor under any circumstances.
lStrong magnetic fields could interfere with external/internal medical devices.
lStrong magnetic fields could present mechanical hazards such as pinch points.
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Pinch Points
A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or
system that can move. For example, the travel of a stage tabletop could expose the user to a pinch
point between the tabletop and the stage housing. The images that follow will show you typical
external and internal pinch point locations.
DANGER: Mechanical Hazard!
lSystem travel can cause crush, shear, or pinch injuries.
lOnly trained operators should operate this equipment.
lDo not put yourself in the travel path of machinery.
lRestrict access to all motor and stage parts
owhen the system moves under power (during normal operation, for example).
owhen the system is moved manually (during the installation process or when you
do maintenance, for example).
lMotors are capable of very high speeds and acceleration rates.
Figure 1: Typical Pinch Point Locations
DANGER:Mechanical Hazards!
lPinch Point! The stage tabletop is a potential pinch hazard.
lEntanglement Hazard!The side belts are a potential entanglement hazard.
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Magnetic Hazards
The magnet track will be exposed when you do maintenance to the system.
DANGER: Magnetic Field Hazard!
lOnly qualified, trained personnel should be allowed to have access to exposed mag-
net tracks during setup or when you do maintenance.
lStrong magnetic fields are present near and inside the magnet track assembly.
lDo no disassemble the magnet track components. If you do so, you will expose your-
self to mechanical crush, pinch, or impact hazards.
lMagnetic fields could interfere with external or internal medical devices (pace-
makers, for example).
lMagnetic fields can create mechanical hazards (crush, impact, or pinch points, for
example).
lLoose items such as metallic tools, watches, or keys could get drawn into and dam-
age the magnet track assembly.
IMPORTANT: Use non-magnetic tools when you install or do service to the stage.
Figure 2: Exposed Magnet Locations
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Handling and Storage
IMPORTANT: It is the responsibility of the customer to safely and carefully lift and
move the stage.
lBe careful when you move or transport the stage.
lRetain the shipping materials for future use.
lTransport or store the stage in its protective packaging.
WARNING: Electrostatic Discharge (ESD) Sensitive Components!
Wear an ESDwrist strap when you handle, install, or do service to the system assembly.
You could damage the power supply or drives if you fail to observe the correct
ESDpractices.
Inspect the shipping container for any evidence of shipping damage. If any damage exists, notify the
shipping carrier immediately.
Remove the packing list from the shipping container. Make sure that all the items specified on the
packing list are contained within the package.
The documentation for the stage is on the included installation device. The documents include
manuals, interconnection drawings, and other documentation pertaining to the system. Save this
information for future reference.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Unpacking and Handling
It is the responsibility of the customer to safely and carefully lift and move the stage.
IMPORTANT: All electronic equipment and instrumentation is wrapped in antistatic
material and packaged with desiccant. Ensure that the antistatic material is not
damaged during unpacking.
DANGER:Lifting Hazard! Use care when you move the PRO165LM or you could
negatively affect the performance of it.
lUse the correct lifting techniques, mechanical assistance, or additional help to lift or
move this product.
lDo not use the cables or the connectors to lift or move this product.
lMake sure that all moving parts are secure before you move the stage. Unsecured
moving parts could shift and cause injury or damage to the equipment.
lIf the stage is heavy, a single person lift could cause injury. Use assistance when you
lift or move it.
oRefer to Section 2.1. Dimensions for dimensions
Carefully remove the stagefrom its protective shipping container.
lLift this product only by the base.
lUse lifting hardware if it has been provided (refer to ).
lFor multi-axis assemblies, always lift the system by the lower axis.
lUse a cart, dolly, or similar device to move the stage to a new location.
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Gently set the stage on a smooth, flat, and clean surface. Use compressed nitrogen or clean, dry, oil-
free air to remove any dust or debris that has collected during shipping.
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will
ensure that all of the alignments, preloads, and tolerances are the same as they were when they
were tested at Aerotech.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Figure 3: Shipping Brackets
Lifting Features
The lifting kit includes four eyebolts and four standoffs. Thread the eyebolts onto the standoffs and
thread the standoffs into the stage base. Remove the lifting hardware by turning a wrench on the
flats of the standoffs (see ). If the stage is part of a multi-axis system, the lifting hardware should be
attached to the lower axis. The lifting hardware must be removed before the stage can be operated.
Storage
Store the stage in the original shipping container. If the original packaging included ESDprotective
packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of
vibrations, and flat.
Refer to Section 1.1. Environmental Specifications
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Chapter 1: Overview
Table 1-1: Model Numbers and Ordering Options
PRO165LM Linear Motor Stage
Travel (Required)
-0100 100 mm travel stage
-0150 150 mm travel stage
-0200 200 mm travel stage
-0250 250 mm travel stage
-0300 300 mm travel stage
-0400 400 mm travel stage
-0500 500 mm travel stage
-0600 600 mm travel stage
-0800 800 mm travel stage
-1000 1000 mm travel stage
Mounting Orientation (Required)
Normal mounting orientation
-MT1 Side mounted or vertical orientation
-MT2 Inverted mounting orientation
Tabletop (Required)
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting pattern for select rotary stages
-TT4 Tabletop with metric dimension mounting and wiper brushes
-TT5 Tabletop with English dimension mounting and wiper brushes
-TT6 Accessory tabletop with mounting for select rotary stages and wipers
NOTE:-TT1 option required for lower axis of XY
Feedback (Required)
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 μm digital TTL output
-E3 Absolute linear encoder; EnDat 2.2
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PRO165LM Linear Motor Stage (continued)
Cable Management (Required)
-CMS0 No external CMS, motor/feedback connector bracket on carriage
-CMS1 External CMS for single axis
-CMS2 External CMS for lower-axis of two-axis PRO XY assembly
-CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS4 External CMS for upper-axis of two-axis PRO XY assembly
-CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly
-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7 External CMS for lower-axis of three-axis (XZT) assembly
Lifting Hardware (Optional)
-LF Lifting hardware
NOTE:Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper axis of an
XY set (only order on the lower axis).
ThermoComp™ (Optional)
-TCMP ThermoComp™ integrated temperature compensation, single or lower axis
NOTE: An A3200 controller must be used with the -TCMP option
Metrology (Required)
-PL0 No Metrology performance plots
-PL1 Uncalibrated with performance plots
-PL2 Calibrated with performance plots
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for
short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality. Alignment to within 10 µm
orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for short
travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5 µm
orthogonality for short travel stages.
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1.1. Environmental Specifications
WARNING:General Hazard Warning! Do not expose this product to environments or
conditions outside of the listed specifications. You could damage the equipment if you
exceed the environmental or operating specifications.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as airborne dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
The stage should be packaged with desiccant if it is to be stored for an extended
time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration Use the system in a low vibration environment. Floor or acoustical vibration can
affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
These stages have limited protection against dust, but not water. This equates to
an ingress protection rating of IP50.
Use Indoor use only
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1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes
could cause a decrease in performance or permanent damage to the stage. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, which include how the
stage is mounted. Contact the factory for more details.
The accuracy specification of stage is measured 25 mm above the table with the stage in an
unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.2.
The accuracy specifications listed in Section 1.3. assume a 20°C operating environment. If the
temperature of the stage differs from 20°C, the encoder scale in the stage will expand or contract at
the rate of 3.25 ppm per °C for -E1 and -E2 options, or 10 ppm per °C for the -E3 option.
The ThermoComp™ option is a hardware and software solution that uses the functionality of the
Automation1 or A3200 controller to mitigate the effects of changing temperature by detecting and
compensating for thermal changes. ThermoComp™ is effective at compensating for both self-
heating and environmental temperature changes.
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