Aerotech ABRX User manual

Revision: 1.00.00
ABRX Hardware Manual

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Copyright © 2020-2021, Aerotech, Inc., All rights reserved.

Table of Contents
ABRX Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Air Requirements 12
1.5. Vacuum Operation 12
Chapter 2: Installation 13
2.1. Unpacking and Handling the Stage 13
2.2. Dimensions 15
2.3. Securing the Stage to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 20
Chapter 3: Electrical Installation 21
3.1. Motor and Feedback Connectors 22
3.2. Motor and Feedback Wiring 25
3.3. Motor and Feedback Specifications 26
3.4. Limits, Marker, and Machine Direction 30
3.5. Motor and Feedback Phasing 31
Chapter 4: Maintenance 33
4.1. Service and Inspection Schedule 33
4.2. Cleaning and Lubrication 34
4.3. Troubleshooting 35
Appendix A: Warranty and Field Service 37
Appendix B: Revision History 39
Index 41
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ABRX Hardware Manual Table of Contents

List of Figures
Figure 1-1: ABRXSeries Rotary Air-Bearing Stage 9
Figure 2-1: ABRX250 with Shipping Clamps and Hoist Rings 14
Figure 2-2: ABRX100 Dimensions 15
Figure 2-3: ABRX150 Dimensions 16
Figure 2-4: ABRX250 Dimensions 17
Figure 2-5: Top View of an ABRX250 Stage Showing Mounting Holes 19
Figure 3-1: Motor and Feedback Wiring 25
Figure 3-2: Machine Direction 30
Figure 3-3: Hall Phasing 31
Figure 3-4: Analog Encoder Phasing Reference Diagram (-E1 Encoder Option) 32
Figure 3-5: Digital Encoder Phasing Reference Diagram (-E2 Encoder Option) 32
List of Figures ABRX Hardware Manual
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List of Tables
Table 1-1: Model Options 9
Table 1-2: Environmental Specifications 10
Table 1-3: ABRX Series Specifications 11
Table 2-1: Stage to Mounting Surface Hardware 18
Table 3-1: 4-Pin Motor ConnectorPinout 23
Table 3-2: Mating Connector Part Numbers for the 4-Pin Motor Connector 23
Table 3-3: 25-Pin Feedback Connector Pinout 24
Table 3-4: Mating Connector Part Numbers for the 25-Pin Feedback Connector 24
Table 3-5: Feedback Specifications 26
Table 3-6: Encoder Resolution Specifications 26
Table 3-7: Maximum Speed (rpm) Per Encoder Option 26
Table 3-8: ABRX100 Series Motor Specifications 27
Table 3-9: ABRX150 Series Motor Specifications 28
Table 3-10: ABRX250 Series Motor Specifications 29
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ABRX Hardware Manual List of Tables

Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the ABRX.
lRead all parts of this manual before you install or operate the ABRX or before you do maintenance to
your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this manual.
lAerotech continually improves its product offerings; listed options may be superseded at any time. All
drawings and illustrations are for reference only and were complete and accurate as of this manual’s
release. Refer to www.aerotech.com for the most up-to-date information.
If you do not understand the information in this manual, contact Aerotech Global Technical Support.
N O T E : This product has been designed for light industrial manufacturing or laboratory environments. If
the product is used in a manner not specified by the manufacturer: The protection provided by the
equipment could be impaired.The life expectancy of the product could be decreased.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ABRX and component parts must be restricted while connected to a power
source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the following
precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed specifications.
Exceeding environmental or operating specifications can cause damage to the equipment.
4. The ABRX must be mounted securely. Improper mounting can result in injury and damage
to the equipment.
5. Use care when moving the ABRX. Lifting or transporting the ABRX improperly can result in
injury or damage to the ABRX.
6. If the product is used in a manner not specified by the manufacturer, the protection provided
by the product can be impaired and result in damage, shock, injury, or death.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
Safety Procedures and Warnings ABRX Hardware Manual
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EU Declaration of Incorporation
Manufacturer:
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ABRX Air-Bearing Direct Drive Rotary Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in conformity
with the provisions of the Directive 2006/42/EC and with national implementing legislation, for
example, as a whole, including the equipment referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized Representative:
/ Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 10/8/2021
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ABRX Hardware Manual EU Declaration of Incorporation

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EU Declaration of Incorporation ABRX Hardware Manual
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Chapter 1: Overview
Table 1-1: Model Options
ABRX Series Air-Bearing Direct-Drive Rotary Stage
ABRX100 100 mm wide air-bearing rotary stage
ABRX150 150 mm wide air-bearing rotary stage
ABRX250 250 mm wide air-bearing rotary stage
Feedback (Required)
-E1 Incremental analog sinewave encoder, 1Vp-p
-E2 Incremental analog sinewave encoder, 1Vp-p, high performance
-E3 Incremental encoder, digital RS422, 0.13 arc sec electrical resolution
Accessories (To be Ordered as a Separate Line Item)
-ABF Air bearing filtration kit
Figure 1-1: ABRXSeries Rotary Air-Bearing Stage
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ABRX Hardware Manual Chapter 1: Overview

1.1. Environmental Specifications
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ABRX stages are not suited for dusty or wet environments. This equates to an ingress
protection rating of IP00.
Use Light industrial, laboratory indoor environments only.
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ABRX. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ABRX
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ABRX is mounted.
Contact the factory for more details.
1.1. Environmental Specifications ABRX Hardware Manual
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1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent upon the encoder resolution and the controller interpolation.
Table 1-3: ABRX Series Specifications
ABRX Series ABRX100 ABRX150 ABRX250
Travel 360° Continuous
Accuracy (1) Standard ± 1 arc sec
High-Performance ± 0.5 arc sec
Bidirectional Repeatability (1) ± 0.2 arc sec
Resolution (Minimum Incremental Motion) (2) 0.05 arc sec 0.03 arc sec 0.02 arc sec
Total Tilt Error Motion (1, 3) 0.2 arc sec 0.2 arc sec 0.1 arc sec
Total Axial Error Motion (1, 3) 25 nm 25 nm 30 nm
Total Radial Error Motion (1, 3) 25 nm 25 nm 30 nm
Maximum Speed (4) 1500 rpm 1200 rpm 800 rpm
Maximum Torque Peak 1.16 N·m 2.84 N·m 9.35 N·m
Continuous 0.19 N·m 0.44 N·m 2.34 N·m
Load Capacity (5)
Axial 17 kg 40 kg 110 kg
Radial 7 kg 14 kg 72 kg
Tilt 3.8 N·m 10 N·m 110 N·m
Operating Pressure(6, 7) 80 psig
Air Consumption(7) 18 SLPM 25 SLPM 30 SLPM
Rotor Inertia 0.0005 kg·m20.0022 kg·m20.0308 kg·m2
Stage Mass 3.2 kg 6.7 kg 25.4 kg
Material Aluminum
1. Certified with each stage. Requires the use of an Aerotech controller.
2. With the -E2 feedback option
3. All error motion specifications are measured at 60 rpm.
4. Maximum speed based on stage capability assuming 340 VDC bus and balanced loading conditions. Maximum application
speed could be limited by the system resolution and data rate. Consult the factory for more information.
5. Maximum loads are mutually exclusive.
6. To monitor the air-bearing supply, use an under-pressure switch that is interfaced to the stage controller I/O (refer to Section 1.4.
Air Requirements).
7. Air supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.
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ABRX Hardware Manual 1.3. Basic Specifications

1.4. Air Requirements
W A R N I N G : Wear eye protection when you are close to compressed air components.
W A R N I N G : Do not attempt to rotate the stage table until the air supply has been installed.
Moving the stage table without air supplied can cause permanent damage to the stage.
Connect the air supply hose to the air inlet fitting. The location of the air inlet is shown in the dimensional
drawings (Section 2.2.).
It is important to the operation of the ABRX that the air supply meets Aerotech specifications.
lFor nitrogen (preferred), the nitrogen must be 99.99% pure and filtered to 0.25 microns. Filtration is
required to prevent particles from clogging the air bearing orifices and other parts.
lFor compressed air, the air must be filtered to 0.25 microns, dry to 0°F dew point, and oil free.
Air pressure must be in the range of 551 kPa ± 34 kPa (80 psi ± 5 psi) with an airflow rate of 56 SLPM
(standard liters per minute) at 551 kPa for a single axis. Aerotech recommends that you connect the air
supply with a polyurethane air hose.
Aerotech also recommends that you install a pressure switch (Aerotech P/N: MCA03094) tied to the
emergency stop (ESTOP) of the motion controller that will remove power to the air bearing if pressure drops
below 40 psi. A drop in pressure could result in contact between bearing surfaces which could cause
damage to the surfaces. Aerotech’s ABF accessory kit incorporates air filtration plus a pressure monitoring
switch.
1.5. Vacuum Operation
The ABRX is an air-bearing stage and is not compatible with operation in a vacuum environment. Contact
Aerotech for alternate solutions.
1.4. Air Requirements ABRX Hardware Manual
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Chapter 2: Installation
W A R N I N G : ABRX installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could
result in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Do not attempt to manually lift a stage that is too heavy (in excess of
18 kg). Refer to Section 1.3. for stage mass specifications.
lDo not attempt to manually lift heavy loads single handed.
lUse a fork lift or cart to transport the stage.
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ABRX. Unsecured moving
parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ABRX. Use care when
moving the ABRX.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ABRX stagefrom its protective shipping container.
lLift only from the base or, for the ABRX250, use the hoist rings (Figure 2-1)
lDo not use any of the cables as lifting points.
lDo not use the tabletop as a lifting point.
W A R N I N G : Do not attempt to rotate the stage table until the air supply, detailed in Section
1.4., has been installed. Moving the stage table without air supplied can cause permanent
damage to the stage.
Gently set the ABRX stage on a smooth, flat, and clean surface.
Allow the stage to stabilize at room temperature for at least 12 hours before you attempt to operate it. A
stabilized stage will ensure that all of the alignments, preloads, and tolerances are the same as they were
when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or debris
that has collected during shipping.
Each ABRX has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
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ABRX Hardware Manual Chapter 2: Installation

Shipping Clamps
Shipping clamps (typically red, anodized aluminum) have been installed to secure the system prior to
shipment.
W A R N I N G : Make sure that you install the air supply before you remove the shipping
clamps (refer to Section 1.4.).
Remove the shipping clamps prior to machine start up.
Figure 2-1: ABRX250 with Shipping Clamps and Hoist Rings
2.1. Unpacking and Handling the Stage ABRX Hardware Manual
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2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Figure 2-2: ABRX100 Dimensions
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ABRX Hardware Manual 2.2. Dimensions

Figure 2-3: ABRX150 Dimensions
2.2. Dimensions ABRX Hardware Manual
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Figure 2-4: ABRX250 Dimensions
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ABRX Hardware Manual 2.2. Dimensions

2.3. Securing the Stage to the Mounting Surface
W A R N I N G : Make sure that all moving parts are secure before moving the ABRX.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : Do not attempt to manually move the ABRX if it is connected to a power source.
W A R N I N G : The ABRX must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ABRX stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 2 µm TIR.
N O T E : The stage base is precision machined and verified for flatness prior to stage assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the stage base. Shimming should be avoided if possible. If shimming is required, it
should be minimized to improve the rigidity of the system.
ABRX series stages have a fixed mounting pattern (as shown in Figure 2-5).
The ABRX should be mounted with the axis of rotation in the vertical direction using the counterbored
mounting holes shown in Figure 2-5. Mounting the stage with the axis of rotation in a horizontal orientation
is not recommended because this orientation can have a negative effect on performance. Consult Aerotech
for more information if your application requires a horizontal axis of rotation configuration.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for
your mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque (1)
ABRX100 M4 SHCS 2 N·m
ABRX150, ABRX250 M6 SHCS 6.9 N·m
(1) The screw torque specification assumes an aluminum mounting surface.
2.3. Securing the Stage to the Mounting Surface ABRX Hardware Manual
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Figure 2-5: Top View of an ABRX250 Stage Showing Mounting Holes
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ABRX Hardware Manual 2.3. Securing the Stage to the Mounting Surface

2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3 and the documentation delivered with the stage.
IMPORTANT: If your ABRX was purchased with Aerotech controls, it might have been tuned
with a representative payload based on the information provided at the time of order. If the
ABRX is started up without a payload, the servo gains provided by Aerotech with the
shipment may not be appropriate and servo instability can occur. Refer to the controller help
file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
Additionally, the payload must be reasonably balanced in order to maintain stage accuracy. Consult
Aerotech to determine if the payload may potentially result in any deterioration of stage performance.
Refer to Section 2.2. Dimensions for the location of the mounting holes on the stage tabletop to mount
payloads. The payload mounting holes have reinforced threads to allow frequent removal and installation of
mounting screws.
N O T E : For valid system performance, the mounting interface should be flat within 2 µm TIR.
W A R N I N G : Refer to the dimensions in Section 2.2. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage.
The ABRX rotary stage loading specifications are shown in Section 1.3. Basic Specifications.
2.4. Attaching the Payload to the Stage ABRX Hardware Manual
20 www.aerotech.com