Aerotech HexGen HEX500-350HL User manual

Revision 2.00
HexGen®HEX500-350HL Hexapod Six-DOF
Positioning System
HARDWAREMANUAL

GLOBALTECHNICALSUPPORT
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Aerotech, Inc. products. The website supplies software, product manuals, Help files,
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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2016-2021, Aerotech, Inc., All rights reserved.

Table of Contents
HexGen® HEX500-350HL Hexapod Six-DOF Positioning System 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.1.1. Accuracy and Temperature Effects 12
1.2. Basic Specifications 13
1.3. Understanding Basic HEX500-350HL Operation 14
1.3.1. Hexapod Axes 14
1.3.2. Strut Limits and Hexapod Range 14
1.3.3. Homing 15
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Hexapod 17
2.2. Dimensions 19
2.3. Securing the Hexapod to the Mounting Surface 20
2.4. Attaching the Payload to the HEX500-350HL 22
Chapter 3: Electrical Specifications and Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 29
3.3. Motor and Feedback Specifications 31
3.4. Machine Direction 33
3.5. Feedback Phasing 34
Chapter 4: Maintenance 37
4.1. Service and Inspection Schedule 37
4.2. Cleaning and Lubrication 37
4.3. Troubleshooting 38
Appendix A: Warranty and Field Service 39
Appendix B: Revision History 41
Index 43
HEX500-350HL Hardware Manual Table of Contents
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List of Figures
Figure 1-1: HEX500-350HL Callouts 11
Figure 1-2: Axis Orientation 14
Figure 2-1: Lifting and Shipping Brackets 18
Figure 2-2: HEX500-350HL Dimensions 19
Figure 2-3: Mounting Hole Locations 21
Figure 2-4: HEX500-350HL Vertical Load Capabilities 22
Figure 2-5: HEX500-350HL Horizontal Load Capabilities 23
Figure 2-6: HEX500-350HL Inverted Load Capabilities 23
Figure 3-1: Motor and Feedback Wiring (-E2 Connector) 29
Figure 3-2: Motor and Feedback Wiring (-E3 Connector) 30
Figure 3-3: Machine Direction 33
Figure 3-4: Hall Phasing 34
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 35
List of Figures HEX500-350HL Hardware Manual
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List of Tables
Table 1-1: Model Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: HEX500-350HL Series Specifications 13
Table 2-1: Stage to Mounting Surface Hardware 21
Table 3-1: -E2 Option Motor and Feedback Pinout 27
Table 3-2: Mating Connector Part Numbers 27
Table 3-3: -E3 Option Motor and Feedback Pinout 28
Table 3-4: Mating Connector Part Numbers 28
Table 3-5: Hall-Effect Sensor Specifications 31
Table 3-6: Thermistor Specifications 31
Table 3-7: Encoder Specifications 31
Table 3-8: Limit Switch Specifications 31
Table 3-9: HEX500-350HL Motor Specifications 32
Table 3-10: HEX500-350HL Rotary Encoder Specifications 32
Table 3-11: HEX500-350HL Linear Encoder Specifications (-E2 Option) 32
Table 4-1: Grease Specifications 37
Table 4-2: Troubleshooting 38
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List of Tables HEX500-350HL Hardware Manual
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
HEX500-350HL.
lRead all parts of this manual before you install or operate the hexapod or before you
do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
The voltage can cause shock, burn, or death.
You are at risk of physical injury.
You could damage the hexapod.
A surface can be hot enough to burn you.
Strong magnets and electromagnetic fields are present.
While the stage is in motion, you are in danger of receiving pinch, shear, or crush
injuries.
You could receive an injury if you do not lift the product safely.
You could damage the product if you do not lift and move the product safely.
Unsecured cables could cause you to:
ltrip and fall
ldrag the product off of its mounting location
ldamage the cable connections.
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
lIf applicable, do not lift unassisted
HEX500-350HL Hardware Manual Safety Procedures and Warnings
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DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the hexapod when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the HEX500-350HL
into a completed system.
DANGER:PINCHPOINT! Keep Hands Clear while the stage is in motion.
WARNING: To prevent damage to the equipment and decrease the risk of electrical
shock and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved in
this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
WARNING: Securely mount and position all system cables.
IMPORTANT: Carefully lift, move, and transport this product.
Safety Procedures and Warnings HEX500-350HL Hardware Manual
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
HEX500-350HL
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 12/21/2021
HEX500-350HL Hardware Manual EU Declaration of Incorporation
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Chapter 1: Overview
The base of a hexapod has a flat mounting surface on the bottom and holds electronics for the
hexapod. The base should be mounted to a flat, rigid mounting surface (refer to Section 2.3.). The
base joints allow the attached strut to pivot from the base.
The platform is the moving plate of a hexapod. The threaded holes on the top surface are designed
to hold customer equipment (refer to Section 2.4.). The platform joints allow the attached strut to
pivot from the platform.
The six struts of a hexapod change length in order to control the position of the platform. The struts
attach only to the joints of the base and platform.
The cables exit out of the back of the base. These six cables connect the hexapod to the controller
(refer to the Section 3.2.).
Figure 1-1: HEX500-350HL Callouts
Table 1-1: Model Options
HexGen®HEX500-350HL Hexapod 6-DOF Positioning System
HEX500-350HL Six degree-of-freedom hexapod positioning system; 500 mm diameter base;
300 mm height at mid-travel; high-load capacity version
Feedback (Required)
-E2 Incremental encoders
-E3 Absolute encoders
Performance Grade (Optional)
-PL3 Base performance
-PL4 Ultra high-accuracy performance
Customization
Additional customization may be available (Vacuum preparation, custom geometry, etc.). Contact
Aerotech for details.
HEX500-350HL Hardware Manual Chapter 1: Overview
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1.1. Environmental Specifications
WARNING: Use this product only in environments and operating conditions that are
approved in this manual.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
Deviation in temperature can result in performance degradation.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The machine
should be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
Not suited for dusty or wet environments (IP30 equivalent ingress protection
rating).
Use Indoor use only.
1.1.1. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C environment. Moderate temperature
changes will affect the accuracy while extreme temperature changes could cause damage to the
machine. At a minimum, the environmental temperature must be controlled to within 1°C per hour
to ensure the safety of the hexapod. The severity of temperature effects on all specifications
depends on many different environmental conditions, including how the hexapod is mounted.
Contact the factory for more details.
1.1. Environmental Specifications HEX500-350HL Hardware Manual
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1.2. Basic Specifications
Table 1-3: HEX500-350HL Series Specifications
X Y Z A (θx) B (θy) C (θz)
Travel (1) 100 mm 110 mm 54 mm 22° 22° 40°
Axis
Positioning
Accuracy
(2,3)
Full
Travel
Standard (-
PL3) ±4 μm ±4 μm ±3 μm
±50 μrad
(±10.3
arc-sec)
±50 μrad
(±10.3
arc-sec)
±25 μrad
(±5.2 arc-
sec)
ULTRA
(-PL4) ±1 μm ±1 μm ±0.75 μm
±10 μrad
(±2.1 arc-
sec)
±10 μrad
(±2.1 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
Limited
Travel
(7)
Standard (-
PL3) ±1.25 μm
±12.5
μrad
(±2.6 arc-
sec)
±12.5
μrad
(±2.6 arc-
sec)
±7.5 μrad
(±1.5 arc-
sec)
ULTRA
(-PL4) ±0.75 μm ±0.75 μm ±0.5 μm
±5 μrad
(±1.0 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
±2.5 μrad
(±0.5 arc-
sec)
Resolution
(Minimum Incremental Motion) 20 nm 0.2 μrad (0.04 arc sec)
Bidirectional
Repeatability, pk-pk(3) ±0.6 μm ±0.6 μm ±0.35 μm ±1 μrad (±0.2 arc sec)
Unidirectional
Repeatability, pk-pk ±0.25 μm ±0.25 μm ±0.15 μm ±0.5 μrad (±0.1 arc sec)
Maximum Speed (4) 50 mm/s 50 mm/s 25 mm/s 10 °/s 10 °/s 20 °/s
Load Capacity,
All Positions (5)
Vertical 200 kg (Push); 120 kg (Pull)
Horizontal 35 kg
Holding Capacity,
De-Energized (6) 165 kg
Stage Mass 49 kg
Material Anodized Aluminum Platform and Base;
Steel Used in Joints and Inside Struts
1. Travels are mutually-exclusive. Consult the HexGen®Hexapod Sizer on the Aerotech website for detailed workspace
sizing.
2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint
dependent.
3. X, Y, Z performance certified as standard. X, Y, Z, A, B, C performance certified with -PL4.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Centered loading (refer to Section 2.4.).
6. Horizontal base plate, centered loading (refer to Section 2.4.).
7. Over any 20 mm (X, Y, Z) or 5° (A, B, C)
HEX500-350HL Hardware Manual 1.2. Basic Specifications
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1.3. Understanding Basic HEX500-350HL Operation
1.3.1. Hexapod Axes
The hexapod platform can be actuated in six degrees of freedom by changing the lengths of the six
struts that connect the platform to the base. Since the axes of motion are not obvious from the
mechanics of the hexapod, the axis convention is outlined below. These axes can be used to orient
the hexapod in the global workspace. Refer to the HexGen®Programming Guide for more
information about controlling hexapod motion. To get a copy of this guide, go to the Resources
section of www.aerotech.com. Select the Manuals and Help Files tab. Then download Hexapod
Programming User Guide from the User Guides category.
The six axes include 3 translational axes, X, Y, and Z, and 3 rotational axes, A, B, and C. As shown in
the overview, the cables exit out of the back of the base. The positive direction of the X axis goes to
the right when looking at the front of the hexapod, and the Z axis goes up vertically. The Y axis goes
toward the back of the hexapod. Rotational axes are oriented in the same direction as the
translational axes, and positive rotation is clockwise when looking in the direction of the axis. The A
axis rotates about the X axis, B rotates about the Y axis, and C rotates about Z. The control software
enables the user to customize the coordinate system with certain restrictions. Please refer to the
HexGen Programming guide for details regarding coordinate system manipulation.
Figure 1-2: Axis Orientation
1.3.2. Strut Limits and Hexapod Range
Limits on the strut keep the strut within the useable travel range. When any strut has reached the
end of travel in either direction, an error will occur in the controller. Because the ranges of the
hexapod axes are interdependent, the limits of the hexapod axes are not constant, and the range of
motion of a hexapod cannot be concisely described. Refer to Section 1.2. for the independent travel
of each hexapod axis and the strut travel. If a strut limit is triggered, the hexapod is out of range. In
this case, follow the directions of the controller to return the hexapod to a position within the range
of motion. Refer to the HexGen®Programming Guide for more information.
1.3. Understanding Basic HEX500-350HL
Operation
HEX500-350HL Hardware
Manual
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1.3.3. Homing
When the incremental encoder option (-E3) is ordered, the struts must each be homed in order for
the hexapod to be controlled. Knowledge of the initial condition is necessary for the inverse
kinematic calculations to be accurate. The home sequence involves moving each strut to its shortest
position and then returning to the center of travel. Be sure that there are no crash conditions before
homing. Refer to the HexGen®Programming Guide for more information about initializing a
hexapod.
If the absolute encoder option (-E2) has been ordered, there is no need to home the hexapod.
HEX500-350HL Hardware Manual 1.3.3. Homing
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1.3.3. Homing HEX500-350HL Hardware Manual
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Chapter 2: Mechanical Specifications and Installation
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
HEX500-350HL.
lRead all parts of this manual before you install or operate the hexapod or before you
do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
2.1. Unpacking and Handling the Hexapod
If any damage has occurred during shipping, report it immediately.
WARNING: It is the responsibility of the customer to safely and carefully lift and move
the hexapod. If you are not careful, you could adversely affect the performance of the
HEX500-350HL.
lRefer to Section 1.2. for mass specifications.
lBe careful if or when you touch the struts and joints, Do not apply force or torque dir-
ectly to these components.
lDo NOT use the struts or joints as lift points.
lDo not manually lift and move the HEX500-350HL. Use lifting straps fed through the
lifting rings of the shipping brackets (refer to Figure 2-1).
lMake sure that all moving parts are secure before you move the HEX500-350HL.
Unsecured moving parts may shift and cause bodily injury.
lDo NOT use the struts or joints as lift points.
Carefully remove the HEX500-350HLfrom its protective shipping container. Gently set the hexapod
on a smooth, flat, and clean surface. Use compressed nitrogen or clean, dry, oil-free air to remove
any dust or debris that has collected during shipping.
Before you operate the hexapod, it is important to let it stabilize at room temperature for at least 12
hours. This will make sure that all of the alignments, preloads, and tolerances are the same as they
were when tested at Aerotech.
IMPORTANT: Each HEX500-350HL has a label that lists the system part number and
serial number. These numbers are necessary to maintain or update system hardware
and software. Locate this label and record the information for later reference.
HEX500-350HL Hardware
Manual
Chapter 2: Mechanical Specifications and
Installation
www.aerotech.com 17

Shipping Brackets
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion and
potential damage that could occur during shipment. You must remove the brackets before the
HEX500-350HL can be operated. Retain the brackets and hardware for future use.
Figure 2-1: Lifting and Shipping Brackets
2.1. Unpacking and Handling the Hexapod HEX500-350HL Hardware Manual
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2.2. Dimensions
Figure 2-2: HEX500-350HL Dimensions
HEX500-350HL Hardware Manual 2.2. Dimensions
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2.3. Securing the Hexapod to the Mounting Surface
WARNING: It is the responsibility of the customer to safely and carefully move and
mount the hexapod. If you are not careful, you could adversely affect the performance
of the HEX500-350HL.
The mounting surface must be flat and have adequate stiffness to achieve the maximum
performance from the HEX500-350HL stage. When it is mounted to a non-flat surface, the stage can
get distorted while the mounting screws are tightened. This distortion will decrease overall accuracy.
Adjustments to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision
flatstones on the mounting surface to remove any burrs or high spots. Clean the mounting surface
with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry. Gently place the stage on the mounting surface.
WARNING: The HEX500-350HL is precision machined and verified for flatness at the
factory.
lDo not machine the HEX500-350HL housing. If you must machine a surface to
achieve a required flatness, machine the mounting surface.
lKeep the use of shims to a minimum when you mount the HEX500-350HL to the
mounting surface. The use of shims could reduce the rigidity of the system.
IMPORTANT: To maintain accuracy, the mounting surface must be flat to within 10 µm
per 100 mm.
A minimum of six M8 mounting screws are required to mount the hexapod to the mounting surface.
Refer to Figure 2-3 or Section 2.2. Dimensions for mounting locations and Table 2-1 for tightening
torque values.
2.3. Securing the Hexapod to the Mounting
Surface
HEX500-350HL Hardware
Manual
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