Agilent Technologies 16034H User manual

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Caution
Take care to avoid rough handling and never allow any mechanical
shock to the Agilent 16034H, especially against the contact pins from
the sides or any to the parts mounted on top of the fixture.
注意
注意注意
注意
Agilent
AgilentAgilent
Agilent16034
1603416034
16034H
HH
Hを破損する可能性がありますので、衝撃を与えないように
を破損する可能性がありますので、衝撃を与えないようにを破損する可能性がありますので、衝撃を与えないように
を破損する可能性がありますので、衝撃を与えないように
取扱いには注意してください。特に、試料を載せる上面側および突起物の
取扱いには注意してください。特に、試料を載せる上面側および突起物の取扱いには注意してください。特に、試料を載せる上面側および突起物の
取扱いには注意してください。特に、試料を載せる上面側および突起物の
ある左右側面には
ある左右側面にはある左右側面には
ある左右側面には

絶対に衝撃を与えないで下さい。
絶対に衝撃を与えないで下さい。絶対に衝撃を与えないで下さい。
絶対に衝撃を与えないで下さい。
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Agilent 16034H Test Fixture
Operation Manual
Fourth Edition
Agilent Part No. 16034-90012
January 2001
Printed in Japan
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2
Notices
The information contained in this document is subject to change without notice.
This document contains proprietary information that is protected by copyright. All
rights are reserved. No part of this document may be photocopied, reproduced, or
translated to another language without the prior written consent of the Agilent
Technologies.
Agilent Technologies Japan, Ltd.
Component Test PGU-Kobe
1-3-2, Murotani, Nishi-Ku, Kobe-shi, Hyogo, 651-2241 Japan
© Copyright Agilent Technologies Japan, Ltd. 1999, 2001
Manual Printing History
The manual’s printing date and part number indicate its current edition. The
printing date changes when a new edition is printed. (Minor corrections and
updates incorporated in reprints do not necessitate a new printing date.) The
manual part number changes when extensive technical changes are incorporated.
January 1999 First Edition (part number: 16034-90002)
April 1999 Second Edition (part number: 16034-90012)
December 1999 Third Edition (part number: 16034-90012)
January 2001 Fourth Edition (part number: 16034-90012)
Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific WARNINGS elsewhere in this manual may impair the
protection provided by the equipment. Such noncompliance would also violate
safety standards of design, manufacture, and intended use of the instrument.
The Agilent Technologies assumes no liability for the customer’s failure to comply
with these requirements.
• Ground the instrument
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3
To avoid electric shock hazard, the instrument chassis and cabinet must be
grounded by using the supplied power cable’s grounding prong.
• DO NOT operate in an explosive atmosphere
Do not operate the instrument in the presence of flammable gasses or fumes.
Operation of any electrical instrument in such an environment clearly
constitutes a safety hazard.
• Keep away from live circuits
Operators must not remove instrument covers. Component replacement and
internal adjustments must be made by qualified maintenance personnel. Do not
replace components with the power cable connected. Under certain conditions,
dangerous voltages may exist even with the power cable removed. To avoid
injuries, always disconnect power and discharge circuits before touching them.
• DO NOT service or adjust alone
Do not attempt internal service or adjustment unless another person, capable of
rendering first aid and resuscitation, is present.
• DO NOT substitute parts or modify instrument
To avoid the danger of introducing additional hazards, do not install substitute
parts or perform unauthorized modifications to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for service and
repair to ensure that safety features are maintained in operational condition.
• Dangerous Procedure Warnings
Warnings, such as the example below, precede potentially dangerous
procedures throughout this manual. Instructions contained in the warnings must
be followed.
WARNING Dangerous voltages, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, or adjusting this instrument.
Certification
Agilent Technologies certifies that this product met its published specifications at
the time of shipment from the factory. Agilent Technologies further certifies that
its calibration measurements are traceable to the United States National Institute of
Standards and Technology, to the extent allowed by the Institution’s calibration
facility, or to the calibration facilities of other International Standards
Organization members.
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4
Warranty
This Agilent Technologies instrument product is warranted against defects in
material and workmanship for a period corresponding to the individual warranty
periods of its component products. Instruments are warranted for a period of one
year. Fixtures and adapters are warranted for a period of 90 days. During the
warranty period, Agilent Technologies will, at its option, either repair or replace
products that prove to be defective.
For warranty service or repair, this product must be returned to a service facility
designated by Agilent Technologies. Buyer shall prepay shipping charges to
Agilent Technologies and Agilent Technologies shall pay shipping charges to
return the product to Buyer. However, Buyer shall pay all shipping charges, duties,
and taxes for products returned to Agilent Technologies from another country.
Agilent Technologies warrants that its software and firmware designated by
Agilent Technologies for use with an instrument will execute its programming
instruction when property installed on that instrument. Agilent Technologies does
not warrant that the operation of the instrument, or software, or firmware will be
uninterrupted or error free.
Limitation Of Warranty
The foregoing warranty shall not apply to defects resulting from improper or
inadequate maintenance by Buyer, Buyer-supplied software or interfacing,
unauthorized modification or misuse, operation outside the environmental
specifications for the product, or improper site preparation or maintenance.
IMPORTANT No other warranty is expressed or implied. Agilent Technologies specifically
disclaims the implied warranties of merchantability and fitness for a particular
purpose.
Exclusive Remedies
The remedies provided herein are buyer’s sole and exclusive remedies. Agilent
Technologies shall not be liable for any direct, indirect, special, incidental, or
consequential damages, whether based on contract, tort, or any other legal theory.
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5
Assistance
Product maintenance agreements and other customer assistance agreements are
available for Agilent Technologies products.
For any assistance, contact your nearest Agilent Technologies Sales and Service
Office. Addresses are provided at the back of this manual.
Safety Symbol
General definitions of safety symbols used on the instrument or in its manuals are
listed below.
Instruction Manual symbol: the product is marked with this symbol when it is
necessary for the user to refer to the instrument manual.
Alternating Current
Direct Current
On (Supply)
Off (Supply)
In position of push-button switch
Out position of push-button switch
Frame (or chassis) terminal: A connection to the frame (chassis) of the equipment,
which normally includes all exposed metal structure.
WARNING This warning sign denotes a hazard. It calls attention to a procedure, practice,
or condition which, if not correctly performed or adhered to, could result in
injury or death to personnel.
CAUTION This Caution sign denotes a hazard. It calls attention to a procedure, practice, or
condition which, if not correctly performed or adhered to, could result in damage
to or destruction of part or all of the product.
NOTE This Note sign denotes important information. It calls attention to a procedure,
practice, or condition which is essential for the user to understand.
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6
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Contents
7
1. Overview
Product Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Incoming Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2. Operation
Performing Open and Short Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Connecting the 16034H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Performing Short Correction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Performing Open Correction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
DUT Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
DUT measurement over 3 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3. Specifications and Supplemental Performance Characteristics
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Supplemental Performance Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Frequency Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Additional Error (With OPEN/SHORT correction) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Contact Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
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8
Contents
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9
1Overview
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10 Chapter1
Overview
Product Overview
Product Overview
The 16034H is designed for chip type components. This test fixture can take
measurements of the chip type L,C,R. The 16034H has a flat measuring stage so
that the DUT can easily slide on it. This mechanism enables measurement of an
array type component.
Figure 1-1 Product Overview
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Chapter 1 11
Overview
Incoming Inspection
Incoming Inspection
Inspect the shipping container for damage. If the shipping container or cushioning
material is damaged, it should be kept until the contents of the shipment have been
checked for completeness and the 16034H has been checked mechanically and
electrically. The contents of the shipment should be as listed in Table 1-1. If the
contents are incomplete, if there is mechanical damage or defect, notify the nearest
Hewlett-Packard office. If the shipping container is damaged, or the cushioning
material shows signs of unusual stress, notify the carrier as well as the
Hewlett-Packard office. Keep the shipping materials for the carrier’s inspection.
Table 1-1 Contents
Description Part Number Qty.
16034H - 1
100 Ω SMD Resistance 0699-2488 10
Case for 100 Ω SMD Resistance 1540-0692 1
Operation Manual 16034-90012 1
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12 Chapter1
Overview
Functions
Functions
Figure 1-2 16034H Parts
No. Part FUNCTION
1 Contact Pin Contact for DUT electrode.
LOW side Contact Pin connected to a instrument’s LCUR,
LPOT and HIGH side Contact Pin connected to a
instrument’s HCUR,HPOT.
2 Knob For lateral adjustment of HIGH side Contact Pin.
3 Contact Pin
Locking Screw For securing HIGH side Contact Pin’s position by turning clockwise.
4 Measuring Stage Where DUT is mounted.
5 Lever For pulling back Low side Contact Pin before placing DUT
between contact pins.
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13
2Operation
This chapter describes the proper methods for open and short correction and DUT
measurement.
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14 Chapter2
Operation
Performing Open and Short Correction
Performing Open and Short Correction
To enhance measurement accuracy, open and short correction should be done before DUT
measurement. The following procedure shows correction and measurement by the 16034H.
CAUTION Take care to avoid rough handling and never allow any mechanical shock to the 16034H,
especially against the contact pins from the sides or any to the parts mounted on top of the
fixture.
Connecting the 16034H
1. Set the cable length to 0 m in the instrument.
2. Connect the 16034H directly to the UNKNOWN terminals as shown in Figure 2-1.
Figure 2-1 Connecting the 16034H
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Chapter 2 15
Operation
Performing Open and Short Correction
Performing Short Correction
The short correction procedure is as follows.
1. Push the HIGH side contact pin’s knob to the left to make firm contact with the LOW
side contact pin (Figure 2-2). Tighten the contact pin locking screw to secure the HIGH
side contact pin.
Figure 2-2 Contact pin position for short correction
2. Perform the short correction as described in the specific instrument’s manual.
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16 Chapter2
Operation
Performing Open and Short Correction
Performing Open Correction
The open correction procedure is as follows.
1. Push the HIGH side contact pin so that the distance between the HIGH and the LOW
contact pins matches the DUT’s width (Figure 2-3).
It is recommended that you place the DUT on the measuring stage and precisely
position the HIGH side contact pin to actual DUT width.
NOTE Before performing open correction, remove the DUT used for positioning by pulling back
the lever to release the LOW side contact pin.
2. Tighten the contact pin locking screw to secure the HIGH side contact pin.
Figure 2-3 Contact pin position for open correction
3. Perform the open correction as described in the specific instrument’s manual.
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Chapter 2 17
Operation
DUT Measurement
DUT Measurement
Before performing DUT measurement, open and short correction should be done as
described in the previous sections. If measurement frequency is over 3 MHz, perform load
correction before the DUT measurement described later onwards.
1. Adjust the HIGH side contact pin so that the DUT is positioned on the center of the
measuring stage and secure the contact pin with the contact pin locking screw.
2. Release the LOW side contact pin with the lever and set the DUT on the measuring
stage
3. Ease back slowly on the lever until the LOW side contact pin makes gentle contact with
the DUT.
Figure 2-4 Contact pin position for DUT measurement
4. Perform the measurement as described in the specific instrument’s manual.
5. To measure the same size DUT repeatedly, simply release the LOW side contact pin
with the lever when to changing the DUT without moving the HIGH side contact pin.
To measure an array type DUT, take measurements at each electrode by sliding the
DUT on the stage after releasing the LOW side contact pin with the lever.
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