Agilent Technologies 4072A Advanced User manual

Pre-Installation Guide
Agilent 4072A Advanced Parametric Tester
Agilent 4073A Ultra Advanced Parametric Tester
Edition 3
5968-4911E
October 2000
Printed in Japan
Copyright ©1999, 2000 Agilent Technologies, Inc.

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Notice
The information contained in this document is subject to change without notice. Agilent Technologies makes no
warranty of any kind with regard to this material, including, but not limited to, the implied warranties of
merchantability and fitness for a particular purpose. Agilent Technologies shall not be liable for errors contained
herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this
material.
Warranty
A copy of the specific warranty terms applicable to your Agilent Technologies product and replacement parts can
be obtained from your local Sales and Service Office.
Audience
This manual is intended for customers who purchase the Agilent 4072A or 4073A. Agilent customer engineers
(CE) may also refer to this manual during site preparation consultation.
Printing History
The printing date and publication number indicate the current edition. The printing date changes when a new
edition is printed. (Minor corrections and updates, which are incorporated at reprint, do not require a date change.)
The publication number is updated when extensive technical changes are incorporated.
Edition 1 For Agilent 4070 System Software Revision B.02.00, March 1999
Edition 2 For Agilent 4070 System Software Revision B.02.10, April 2000
Edition 3 For Agilent 4070 System Software Revision B.03.00, September 2000

3
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
1. General Information
Agilent 4072A/4073A Tester Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Local Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Principal Operator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2. Site Preparation
Space Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Electrical Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Power Configurations and Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Main Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Additional Power Outlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Line Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Power Line Transients . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Uninterruptible Power Supply (UPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Emergency Off (EMO) System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Upgrading from the Agilent 4071A to the Agilent 4072A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Upgrading from the Agilent 4071A to the Agilent 4073A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Upgrading from the Agilent 4072A to the Agilent 4073A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Environmental Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Temperature and Humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Floor Vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Air Cleanliness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Air Conditioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Air Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Lighting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Software Media Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Safety Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Earthquake . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Fire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Chemicals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3. Wafer Probers
Mounting the Testhead on the Wafer Prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Mounting Mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Probe Card for Direct Docking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Personality Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Wafer Prober Sense Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Wiring for the Personality Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Placing the Testhead beside a Manual Wafer Prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Extension Cable Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Wiring for the Extension Cable Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4. Receiving
Shipping Damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Checking the Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Unpacking the System Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Unpacking the Testhead . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Unpacking Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Moving the Cabinet, Testhead and Accessories to Your Clean Room. . . . . . . . . . . . . . . . . . . . . . . . . . . 44
For the Agilent 4073A Testhead. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
For the 4072A Testhead . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
For the Cabinet and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
A. Site Preparation Checklist
B. Layout Planning Sheet
C. Pin Board Configuration Tables
Example Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
D. Testhead and Personality Board Dimensions
E. Emergency Off (EMO) System
Block Diagram and Operation of the Emergency Off Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Turn On the System Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Turn Off the System Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
EMO Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
I/O Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
Example Design of an External Emergency Lamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
1General Information

6 Chapter 1
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
General Information
This manual contains Agilent 4072A Advanced parametric tester and Agilent 4073A Ultra Advanced parametric
tester pre-installation information and is the primary reference document to assist you in installation planning and
site preparation.
This manual contains specifications and information to help you decide what you’ll need to do before your system
arrives, where to locate your system, how to establish the required environmental and electrical conditions, what to
do when you receive your system, and what you’ll need to have ready when your system arrives.
This chapter briefly describes the Agilent 4072A/4073A tester configuration, explains several important
pre-installation considerations, and provides a brief start-to-finish system installation overview.
Chapter 2 provides system layout instructions, explains power and environmental considerations, and describes
important safety precautions.
Chapter 3 outlines wafer prober requirements and considerations.
Chapter 4 provides receiving information, including how to check for damage and uncrating and moving your
tester to its final location.
The appendixes include various aids to facilitate planning and site preparation.

Chapter 1 7
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
General Information
Agilent 4072A/4073A Tester Configuration
Agilent 4072A/4073A Tester Configuration
Figure 1-1. shows the 4072A/4073A tester.
Figure 1-1. Overview of the 4072A/4073A Tester
The 4072A/4073A tester consists of the following:
System Cabinet The standard system cabinet contains the 4072A/4073A tester system instruments and is
1.6 m (5.3 ft.) high. The standard cabinet has an emergency off (EMO) unit.
Testhead To test devices on a wafer, the testhead can be mounted on an automatic wafer prober, or can
be placed next to a manual wafer prober. You can also test packaged devices by mounting
them on a test fixture that attaches to the testhead.
System Controller The 4072A/4073A tester requires an HP 9000 Model 745/132L computer to control the
system instruments.
Flat Panel Display The flat panel display can be mounted, with the stand, at the side of the system cabinet.
System Cabinet
Flat Panel Display
Testhead
Wafer Prober

8 Chapter 1
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
General Information
Considerations
Considerations
To ensure correct site preparation and trouble-free installation, several items must be taken into consideration
before installing the 4072A/4073A tester, as explained below.
Local Codes
Special codes and regulations covering the installation of the test system may apply in your area. It is the
customer’s responsibility to ensure that all local laws, regulations, and codes for buildings, machinery, and
electrical distribution systems are complied with before the system arrives.
Principal Operator
The customer should appoint a principal operator or system manager. This person will be responsible for operating
the 4072A/4073A tester, performing operator maintenance when necessary, and scheduling periodic maintenance.
The principal operator’s initial responsibilities are to establish and monitor site preparation schedules, and to order
system supplies. The principal operator must be present for the system installation.

Chapter 1 9
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
General Information
Installation Overview
Installation Overview
This section provides a brief start-to-finish system installation overview.
NOTE If the following steps are not completed prior to the system installation date, the Agilent customer
engineer (CE) may not be able to install the tester.
After ordering the 4072A/4073A tester, the customer should:
1. Appoint a principal operator or system manager to be responsible for system installation and operation.
2. Select the location for the system.
3. Plan the layout of the system.
4. Order the wafer prober and hardware necessary to mount the testhead on the wafer prober.
5. Order consumable supplies (for instance, DDS digital audio tape, flexible disks, and so on).
6. Contact the Agilent representative (customer engineer or field engineer) and prober manufacturer’s field
engineer to schedule the system installation date. The tester should be installed on the same day as the wafer
prober installation. If not, arrange with the wafer prober manufacturer to have a qualified engineer or technician
present on the day of system installation to mount the testhead on the wafer prober.
7. Prepare a lock for the main switch, required for lockout during maintenance of the system. Determine the lock’s
suitability by considering the hole in the main switch. Figure 1-2. shows the dimensions of the main switch.
Figure 1-2. Main Switch Dimensions
OFF
OFF
ON
FRONT RIGHT
LEFT
BOTTOM
10 mm
10 mm 25 mm
4 mm
25 mm
60 mm
60 mm
Hole Hole
Hole
10 mm
Power
distribution
unit (PDU)
Main switch
Lock for
lockout Hole
Hole
Hole

10 Chapter 1
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
General Information
Installation Overview
When the 4072A/4073A tester is delivered, the customer should:
1. Unpack and inspect each part of the system as described in chapter 4, “Receiving.”
2. Check the delivered items against the contents checklist to confirm a complete shipment.
3. Notify your Agilent service office and the responsible Agilent CE that all system components have arrived.
4. Move all system components to the system installation site. If it is in your clean room, move them into your
clean room.
At the 4072A/4073A tester installation, the following persons must be present:
•Principal operator or system administrator to assist with the tester installation.
•Prober technician or qualified personnel to integrate the testhead on the wafer prober.
•Manipulator technician, if applicable.

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
2Site Preparation

12 Chapter 2
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Space Requirements
Space Requirements
The amount of floor space required for your Agilent 4072A/4073A tester can be quickly and accurately determined
by using the System Component Template and blank grid sheets provided in appendix B. The template and grid
sheets are scaled so that each square on the grid sheet represents 20 cm ´20 cm = 400 cm2(approx. 0.43 ft2) of
floor space.
From the template sheet, simply cut out the components included with your system, then place the cutouts on the
grid sheet to determine the best layout for your 4072A/4073A tester.
Keep the following points in mind when selecting the system location and performing the final site layout.
•Indicate the location of all power outlets on the site layout drawing, and plan system component placement
accordingly.
NOTE The main power cable for the system cabinet, furnished with 200 or 208 Vac power line options, is
4 meters (approx. 13 ft.) long. Arrange the system so that the power cable is not strained and does
not pass under other system components.
•Provide adequate space for the wafer prober. Position the wafer prober 1 meter (3.3 ft.) or less from the tester so
the signal cables can be connected from the system cabinet to the testhead. Table 2-1. shows the cable lengths
from the bottom of the system cabinet.
•Provide at least 0.6 meter (24 in) of clearance at the front and rear of the system cabinet to allow space for
servicing. Agilent recommends 1 meter (39 in) of space for servicing.
•Make sure there is adequate workspace around the system so that operating personnel can move freely, without
affecting system operation.
•Plan for a table to be placed by the prober to place the testhead on when servicing. The table must be able to
bear the weight of the testhead (approx. 75 kg).
•Purchase a fireproof cabinet or locker for storing important items, such as documents and software media.
•To ensure adequate clearance for the system, check all doors, elevators, and passageways that the tester will use
on the way to the installation site. Refer to figure 2-1. for the dimensions of the system cabinet.
•Verify the load capacity of the floor at the installation site and all floors on the way to the site. All floors must
have a minimum load capacity of 21 kg/cm2(300 lbs/in2).
•Make sure that tile, concrete, or other industrial floors are adequate for the system site. Use a special wiring
arrangement, or provide conduits or some type of protection for exposed power and signal cables.
Table 2-1. Cable Lengths from System Cabinet Bottom
Cable Length from System
Cabinet Bottom
Air duct 3 m (9.8 ft.)
Test leads for CMU (Agilent 4284A) 2.4 m (7.9 ft.)
Test leads for DVM (Agilent 3458A) 3.1 m (10.2 ft.)
Test leads for PGU (Agilent 81110A, Agilent 8114A) 2.4 m (7.9 ft.)

Chapter 2 13
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Space Requirements
•Install a telephone with an extra-long receiver cord, to allow the operator easy access to any part of the system
while on the phone.
•If the system controller is to be rack mounted in the system cabinet, the distance between the system cabinet
and the display must be 50 cm (20 in) or less.
Figure 2-1. System Cabinet Dimensions
Top View Front View Side View
906 mm
513 mm
600 mm
120 degree
max.
120 degree
max.
1600 mm
600 mm 906 mm

14 Chapter 2
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Electrical Requirements
Electrical Requirements
This section describes electrical requirements for the 4072A/4073A tester instruments, system controller, and
peripherals. This section also describes the power cables and outlets.
Power Configurations and Requirements
The 4072A/4073A tester requires single phase power configuration with protective earth. Its line voltage is 200,
208, 220, or 240 Vac, and line frequency is 50 or 60 Hz. The line voltage and frequency are selected by specifying
options.
The system cabinet for the 4072A/4073A tester is equipped with a power distribution unit (PDU) for each line
voltage. The rated current of the PDU is 20 A for 200/220/240 Vac, and 24 A for 208 Vac. The short circuit current
rating is 5 kA for 200/220/240 Vac, and 10 kA for 208 Vac.
The site installation location must satisfy the power requirements described in table 2-2. For example, if you install
the 4072A/4073A tester with a line voltage of 208 Vac and a line frequency of 60 Hz, the electric power must
satisfy the line voltage range of 187 to 228 Vac, at least 24 A, and a line frequency range of 48 to 63 Hz.
Table 2-4. lists the actual power consumption for each component in the 4072A/4073A tester. The total power
consumption can be calculated from the table. For example, in the case of a system with 208 Vac line voltage,
where the system controller, 17 inch display, 4072A/4073A testhead, 4284A LCR meter, and 3458A digital
multimeter are included in the system cabinet and the power for these instruments is supplied from the cabinet
PDU, the total power consumption results in 9.5 A. If you add three 81110A pulse generators, the total power
consumption results in 14.0 A. Note that there is a margin of 10.0 A (= 24.0 - 14.0). If you add another instrument
consuming 2.0 A, you can connect its power cable to the cabinet PDU. The total current consumption must be less
than the maximum current for instrument or controller power outlets.
Table 2-3. shows the maximum number of installed 81110A and 8114A pulse generators. If you are using only the
81110As in the system cabinet, up to five 81110As can be mounted. You can have up to two 8114As. In the case of
one 8114A, you can mount up to four 81110As, and in the case of two 8114As, you can mount up to two 81110As.
It is very important that the maximum number of 81110As or 8114As installing into the system cabinet and the
power consumption of these instruments not be exceeded.
Table 2-2 Power Requirements for the 4072A/4073A Tester
Normal Line Voltagea
a. Line frequency must be 48 to 63 Hz.
Allowable Voltage Range Rated Current Short Circuit Current Rating
200 Vac 180 - 220 Vac 20 A 5 kA
208 Vac 187 - 228 Vac 24 A 10 kA
220 Vac 198 - 242 Vac 20 A 5 kA
240 Vac 216 - 252 Vac 20 A 5 kA
Table 2-3. Maximum Number of Installed Pulse Generators
Number of 8114A Maximum Number of 81110A
05
14
22

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Electrical Requirements
Main Power Cable
You must select the cabling method and the power cables according to the line voltage selection. There are two
methods for connecting between the switchboard and the system cabinet:
a. Connect with a power cable directly.
b. Connect with two power cables via a plug and receptacle.
Figure 2-2. Connecting Power Cable
The system cabinet is furnished with a power cable and a plug according to the specified line voltage option, as
shown in Table 2-5.. The furnished power cable and plug can be connected as shown in figure 2-2. (b). You must
prepare the power cable and receptacle for connection to the switchboard. Use a NEMA L6-30R outlet (for
example, National’s model WF2330B/W or WK2330) for the NEMA L6-30P plug.
Table 2-4. Power Consumption of the 4072A/4073A System Instruments
Component Line Voltage
200 Vac 208 Vac 220 Vac 240 Vac
System Cabinet 1.0 A 1.0 A 0.9 A 0.9 A
Testhead 2.5 A 2.4 A 2.3 A 2.1 A
4284A LCR Meter 0.8 A 0.8 A 0.7 A 0.7 A
3458A Digital Multimeter 0.4 A 0.4 A 0.4 A 0.4 A
System Controller (HP 9000 Model 745/132L) 4.2 A 4.1 A 3.9 A 3.5 A
81110A Pulse Generator (1 ea) 1.5 A 1.5 A 1.4 A 1.3 A
8114A Pulse Generator (1 ea) 1.2 A 1.2 A 1.1 A 1.0 A
Color Display (19 inch) 1.4 A 1.3 A 1.2 A 1.2 A
Color Display (17 inch) 0.8 A 0.8 A 0.7 A 0.7 A
(a) Connect Power Cable Directly (b) Connect Power Cable via Plug and Receptacle
Swichboard Swichboard
System Cabinet System Cabinet
Power Cable Power Cable
Receptacle
Plug

16 Chapter 2
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Electrical Requirements
You can install your own power cable, instead of the furnished one, as shown in figure 2-2. (a).
If your electrician prepares the power cable, it must be a three-wire cable that provides a means of earth grounding.
To connect to the main switch, select an AWG 10 to AWG 16 cable. It must be able to carry the rated current. Note
that the power cable, plug, and receptacle that you provide must meet your local regulations.
Please take note of the diameter of the power cable that you connect to the power distribution unit (PDU). For
securing the power cable, the PDU has a cable clamp that can handle the following cable diameters. For the
200/208 Vac line voltage option, it ranges from 16.5 to 18.5 mm (0.65 to 0.73 in), and for the 220/240 Vac line
voltage option, it ranges from 6.5 to 10.0 mm (0.26 to 0.39 in).
Figure 2-3. Plug and Outlet (NEMA L6-30P/R)
Additional Power Outlets
To provide power for test/maintenance equipment and other equipment not included in the system, install
additional power outlets (2 power outlets, 15 A) at the site. Show the locations of all additional power outlets on
your site layout drawing and include their potential load in your calculation for total site power. Additional power
outlets must be supplied with grounding circuits intact and must be used when connecting additional equipment.
Table 2-5. Furnished Power Cable and Plug
Line Voltage Option Power Cable Plug
200 Vac AWG 10, 4 m NEMA L6-30P
208 Vac AWG 10, 4 m NEMA L6-30P
220 Vac not furnished not furnished
240 Vac not furnished not furnished
Table 2-6. Cable Clamp Size
Line Voltage Option Cable Clamp Size
200 Vac 16.5 to 18.5 mm
(0.65 to 0.73 in)
208 Vac
220 Vac 6.5 to 10.0 mm
(0.26 to 0.39 in)
240 Vac
EARTH
LINE
NEMA L6-30P NEMA L6-30R
NEUTRAL

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Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Precautions
Precautions
To ensure operator safety and stable system operation, observe the following precautions.
Line Voltage
Make sure the line voltage is within the specified range. If the line voltage is too low or too high, sporadic failures
or complete system shutdown may occur.
NOTE Agilent Technologies recommends that the following line voltage conditions be satisfied for
measuring low-current and low-voltage with the 4073A:
Burst Noise: £1 kV (earth, line and neutral modes)
Surge Noise: £1 kV (common and normal modes)
Agilent Technologies recommends that if the conditions above cannot be met, the tester should use
the noise cut trans.
This line voltage environment conforms to EN61326-1.
Grounding
The system cabinet, the system controller, and all computer peripherals are tied to earth ground through the
three-wire power cable grounding wire. Earth grounding protects the operator against shock hazards and protects
the system components against catastrophic events, such as lightening.
Also, all system components must have a common ground reference that is electrically isolated from any
non-system equipment due to the interfaces between the system controller, system instruments, and computer
peripherals. Otherwise, signals generated by non-system equipment could cause system errors.
WARNING To protect operators from electric shock injury due to current leakage, a grounding
connection is essential before connecting the power supply. When you connect the system to
the power supply, connect the grounding wire before connecting other power wires.
If you plan to include a ground-fault circuit interrupter (GFCI) in your power lines, select a breaker that has a rated
sensitivity of 30 mA for the 208/220/240 Vac line voltage option. This ensures that the breaker is not tripped by
regular current leakage. For the 200 Vac line voltage option, the PDU is equipped with a GFCI as a main circuit
breaker.

18 Chapter 2
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Precautions
Power Line Transients
Heavy electrical loads from nearby machinery or equipment, for example, elevators or electric welders, can cause
intermittent system errors, even if that equipment is on a different circuit breaker. To prevent this, you must provide
a separate, completely independent circuit with isolated ground and circuit breaker coming directly from the main
power source of the building.
NOTE Agilent Technologies does not recommend installing printers or plotters close to the 4072A/4073A
tester. When the electrical motors in these peripherals begin operating and their electric
consumption increases, noise from print head or pen movement may cause system errors.
Uninterruptible Power Supply (UPS)
To protect data in the memory of the computer from temporary power loss, it is strongly recommended that an
uninterruptible power supply (UPS) be used. The UPS should satisfy the following requirements:
Capacity: more than 2,000 VA
Capability: to provide immediate power to the computer system if a power loss occurs.
Please consult a UPS manufacturer for details.
Emergency Off (EMO) System
The system cabinet is equipped with an emergency off (EMO) unit. When you press the EMO switch, the main
contactor and emergency breaker in the power distribution unit (PDU) of the system cabinet opens and stops
supplying electrical power to the system components.
The EMO unit can also receive an emergency signal from another instrument or system, and can stop supplying
electric power to the system components. In addition, it can transfer an emergency signal to any other instruments
or systems.
If you configure the EMO system with a 4072A/4073A tester, you must understand the EMO unit before
connecting it to other systems. See appendix E, “Emergency Off System.”
Upgrading from the Agilent 4071A to the Agilent 4072A
The Agilent E3196A upgrade kit is used to upgrade from the 4071A to the 4072A tester. In particular, the 4072A
requires 200 or 208 Vac instead of 100 or 120 Vac. If you are using the 4071A with 100 or 120 Vac, you must
prepare the 200, 208, 220, or 240 Vac.
The E3196A upgrade kit consists of the cabinet, HF matrix, some accessories, parts, and pulse generators (option).
The allowable number of 81110A and 8110A pulse generators are shown in table 2-3..
The following space is required for upgrading:
Testhead: at least 2 ´2 m2(6.6 ´6.6 ft2)
Cabinet: at least 1 ´3 m2(3.3 ´9.8 ft2)

Chapter 2 19
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Precautions
Upgrading from the Agilent 4071A to the Agilent 4073A
The Agilent E3197A upgrade kit is used to upgrade from the 4071A to the 4073A tester. In particular, the 4073A
requires 200 or 208 Vac instead of 100 or 120 Vac. If the you are using the 4071A with 100 or 120 Vac, you must
prepare the 200, 208, 220, or 240 Vac.
The E3197A upgrade kit consists of the cabinet, HF matrix, some accessories, parts, and pulse generators (option).
The allowable number of 81110A and 8110A pulse generators are shown in table 2-3..
The following space is required for upgrading:
Testhead: at least 2 ´2 m2(6.6 ´6.6 ft2)
Cabinet: at least 1 ´3 m2(3.3 ´9.8 ft2)
Upgrading from the Agilent 4072A to the Agilent 4073A
The Agilent E3198A upgrade kit is used to upgrade from the 4072A to the 4073A tester. The E3198A upgrade kit
upgrades the testhead only, with the 4072A cabinet being used as the 4073A cabinet.
The following space is required for upgrading:
Testhead: at least 2 ´2 m2(6.6 ´6.6 ft2)

20 Chapter 2
Agilent 4072A/4073A Pre-Installation Guide, Edition 3
Site Preparation
Environmental Considerations
Environmental Considerations
To ensure optimum 4072A/4073A tester accuracy and performance, be sure to comply with the following
environmental conditions.
Temperature and Humidity
The measurement accuracy is specified at the following temperature and humidity:
Temperature: 23 °C ± 5 °C (73 °F ± 9 °F)
Humidity: 5% to 70% RH (Especially, the 4073A must keep no-condesing.)
NOTE After the SMU calibration, the temperature change must be less than 3 °C.
In addition to the above temperature and humidity conditions, Agilent Technologies recommends
that the following conditions be satisfied for measuring low-current and low-voltage with the
4073A:
Temperature change: Within ± 1 °C after the calibration
Temperature change period: ³10 minutes
Humidity: £50%
The 4072A/4073A must be operated under the following conditions:
For the 4072A:
Operating temperature: 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature: -20 °C to 60 °C (-68 °F to 140 °F)
For the 4073A:
Operating temperature: 5 °C to 35 °C (41 °F to 95 °F)
Storage temperature: -20 °C to 50 °C (-68 °F to 122 °F)
Storage humidity: £80%
NOTE When using the flat panel display with the 4072A/4073A, the following conditions must be
satisfied, in addition to the conditions shown above.
Operating temperature: 5 °C to 35°C (41 °F to 95 °F)
Operating humidity: 20% to 70% RH (no-condensing)
Storage humidity range: 20% to 85% (-20 °C to 50 °C, -4 °F to 122 °F)
20% to 55% (50 °C to 60 °C, 122 °F to 140 °F)