Agilent Technologies TriScroll 320 Series User manual

INSTALLATION AND
OPERATION MANUAL
Vacuum Products Division
TriScrollTM 320 Series
Dry Scroll
Vacuum Pump
Manual No. 699904342
Revision F
October 2014

Copyright 2014
Agilent, Inc.
TriScroll™320
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent, Inc.

i
TriScroll 320 Series Vacuum Pump
Contents
Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . . . . 1
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . 2
Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 2
Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 2
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . 3
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . 5
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . 7
Single Phase Motor Connection . . . . . . . . . . . . . . 7
Mechanical Connections . . . . . . . . . . . . . . . . . . . . . 8
Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Rotation of the Pump Inlet
with Respect to the Motor Frame . . . . . . . . . . . . . 8
Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Optional Isolation Valve. . . . . . . . . . . . . . . . . . . . . . 8
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
General Information . . . . . . . . . . . . . . . . . . . . . . 11
Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 11
Maintenance and Tooling Kits . . . . . . . . . . . . . . 11
Factory Service Options . . . . . . . . . . . . . . . . . . . 12
Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . 12
Request for Return Health and Safety Certification
List of Figures
Figure Caption Page
1 Interface Drawing with Dimensions . . . . . . . .4
2 Pumping Speed Curves . . . . . . . . . . . . . . . . .4
3 TriScroll 320 Vacuum Pump . . . . . . . . . . . . . .5
4 Single Phase Motor Electrical Connections . . .7
5 Isolation Valve Location . . . . . . . . . . . . . . . . .8
List of Tables
Table Title Page
1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Full Load Motor Currents . . . . . . . . . . . . . . . 7
3 VPI Valve Installation Data . . . . . . . . . . . . . . 9
4 Troubleshooting Chart . . . . . . . . . . . . . . . . 10
5 Other Related Manuals . . . . . . . . . . . . . . . . 11
6 Maintenance and Tooling Kits . . . . . . . . . . 11
7 Factory Service Options . . . . . . . . . . . . . . . 12
8 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 12

TriScroll 320 Series Vacuum Pump
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1
TriScroll 320 Series Vacuum Pump
Instructions for Use
General Information
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Agilent before
operating the equipment. Agilent will not be held
responsible for any events that occur due to
non-compliance with these instructions, improper use by
untrained persons, non-authorized interference with the
equipment, or any action contrary to that provided for by
specific national standards.
The TriScroll™ 320 is a dry, scroll vacuum pump
specifically optimized for helium leak detection
equipment. This pump is suitable for pumping air or inert
gases. The pump is not intended to pump toxic, corrosive,
explosive, or particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 3.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Preparation for Installation
The pump is supplied in a special protective packing. If
this shows signs of damage, which may have occurred
during transport, contact your local sales office.
Total weight of the packing, including the pump, is
approximately 34.2 kg (75 lbs).
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.
Temperature: –20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING When unpacking the pump, be sure not
to drop it, and avoid any kind of sudden
impact or shock vibration to it.
WARNING The TriScroll 320 weighs 26.4 kg
(58 lbs). To avoid injury, use proper lift-
ing techniques when moving the pump.
NOTE Normal exposure to the environment
cannot damage the pump. Neverthe-
less, it is advisable to keep the pump
inlet closed until the pump is installed
in the system.

TriScroll 320 Series Vacuum Pump
2
Installation Requirements
Do not install or use the pump in an environment
exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those
with a high fire risk.
During operation, the following environmental
conditions must be respected:
Operation
In order to reach ultimate vacuum, the pump must be left
running for about an hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Agilent’s dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
Start up Procedure
1. Ensure that the vacuum system isolation valve is
closed.
2. Turn on power to the pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve. This
prevents debris in pump from being transported into
the vacuum system.
2. Turn off pump.
Maintenance
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)
CAUTION As supplied from the factory, the pump
is configured for low voltage. Verify that
the configuration matches the supply
voltage.
If voltage changeover is required,
configure the voltage as described in
“Electrical Connections” on page 7.
WARNING During operation the outer surface of
the motor housing can become hot.
Avoid touching the motor housing
during pump operation.
WARNING The pump is designed for operation
with neutral or noncorrosive fluids. It
is absolutely forbidden to use it with
potentially explosive, inflammable or
poisonous substances.
WARNING ❑Death may result from contact with
high voltages. Always take extreme care
and observe the accident prevention
regulations in force.
❑When the machine is powered up,
be careful of moving parts and high
voltages.
❑If you have to perform maintenance
on the pump after a considerable time
in operation, allow the pump to cool as
the temperature of the outer surface
may be in excess of 60 °C (140 °F).
❑Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE Before returning the pump to the factory
for repair, the “Health and Safety” sheet
attached to this instruction manual must
be completed and sent to the local sales
office. A copy of the sheet must be
inserted in the pump package before
shipping.

3
TriScroll 320 Series Vacuum Pump
Technical Information
Table 1 Specifications
Model TriScroll™ 320 Dry Scroll Vacuum Pump
Interface dimensions See Figure 1
Peak pumping speed 50 Hz: 210 l/m, 12.6 m3/hr (7.4 cfm)
60 Hz: 250 l/m, 15 m3/hr (8.8 cfm)
Media Clean air. No toxic, corrosive, explosive or particulate forming gases
Ultimate pressure (Torr) 1.0 x 10-2 Torr (1.3 x 10-2 mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum continuous inlet pressure 100 Torr
Maximum outlet pressure 1.1 atmosphere (1.5 psig)
Inlet connection NW25
Exhaust connection Female 1/4" National Pipe Thread (NW16 adapter provided)
Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 0.75 HP (0.56 kW)
Operating voltages Single phase models:
❑50-60 Hz/100-115:200-230 VAC ±10%
Motor full load currents See Table 2 on page 7
Motor thermal protection Type U automatic
Operating speed 60 Hz: 1725 RPM, 50 Hz: 1425 RPM
Cooling system Air-cooled
Weight Pump only: 26.4 kg (58 lbs)
Shipping weight: 34.2 kg (75 lbs)
Noise level (per ISO 11201) 68 dB(A)
Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec
Installation Pollution Degree: 2
Installation Category: II
Altitude: 2000 m, indoor usage and storage

TriScroll 320 Series Vacuum Pump
4
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves

5
TriScroll 320 Series Vacuum Pump
Figure 3 TriScroll 320 Vacuum Pump
1. Cowling Screws; M5 (3)
2. Cowling
3. Inlet (NW25)
4. Inlet Screen
5. NW16 Exhaust Adapter
6. Bearing Purge Port (1/4" National Pipe Thread)
7. Pump Frame
8. Frame Screws; M6 (4)
9. Gas Ballast Port (1/4" National Pipe Thread)
10. Mounting Holes; 11 mm diameter thru (8)
11. Rubber Feet (4)
12. Motor Cover Screws (3)
13. Motor Electrical Cover
Unpacking and Inspection
The shipping container is a double carton.
1. After opening the outer box, remove the foam
packing.
2. Slit open the inner box.
3. Lift the pump with the plywood base out of the inner
box.
4. Remove the four bolts securing the pump frame to the
plywood base.
5. Locate the NW16 exhaust fitting and set it aside.
6. Inspect the pump for damage. If there is shipping
damage, contact the freight carrier and your local
Agilent sales office immediately.
7. Save the carton and packing materials.
6
3
2
1
5
4
8
9
7
10
13
12
11

TriScroll 320 Series Vacuum Pump
6
Installation
Safety
Do not remove or modify any safety or insulating
equipment from the pump. To do so may create a serious
safety hazard and may void the warranty.
Startup
1. Check that the inlet screen is installed before
beginning operation.
2. Operate the pump at an ambient temperature of 5° C
to 40° C (41° F to 104° F), otherwise damage to the
pump or shortened operating life may result.
3. Close the isolation valve between the vacuum pump
and the vacuum chamber before startup or shutdown;
debris may be sucked back into the vacuum
chamber.
An optional isolation valve can be installed for this
purpose. See “Optional Isolation Valve” on page 8.
WARNING ❑This pump is designed to pump and
exhaust air and inert gases only; it is not
designed to pump explosive, flamma-
ble, toxic, or corrosive gases. They can
cause bodily injury, explosion, or fire.
❑Install in an area that is not exposed
to rain, steam, or excessive humidity.
They can cause electric shock, short cir-
cuits, and severe bodily injury.
❑Before inspecting or servicing the
pump, be sure the electrical supply is
disconnected.
❑Protect against short circuits by
installing a circuit breaker of the proper
capacity.
❑The circuit breaker must be suitably
located and easily reached.
❑The circuit breaker must be marked
at the disconnecting device for the
equipment with the on/off symbol I/O
and meet the relevant requirements of
IEC60947-1 and IEC60947-3.
❑An exhaust silencer option is avail-
able for those applications in which it is
desirable to diminish the sound level
produced by the pump.
❑To prevent bodily injury, avoid
exposing any part of the human body to
vacuum.
CAUTION Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for pro-
cess solids, chemicals, powders, sol-
vents, condensates, or other
particulates. They can damage the
equipment, degrade its performance, or
shorten its useful life.
Consult a qualified electrician when-
ever wiring the pump.
TriScroll series pumps operate in a
clockwise direction when viewed from
the motor end. (Note the arrow on the
pump frame.) Improper rotation can
cause permanent damage to the pump.
WARNING Do not insert a finger or any foreign
object in the path of the fan; serious
personal injury may result or the pump
may be damaged.
CAUTION Do not block the fan ducts because the
pump can become overheated. A pump
surface temperature in excess of 55 °C
(131 °F) is potentially damaging. If such
conditions are observed, turn pump off
and allow to cool. Disassemble, inspect
for damage, and repair if necessary.