Agilent Technologies TriScroll 600 Series User manual

D R A F T 4 / 7 / 1 1
Vacuum Products Division
TriScrollTM 600
Series
Dry Scroll
Vacuum Pump
Manual No. 699904300
Revision G
May 2004
MAJOR MAINTENANCE
MANUAL

D R A F T 4 / 7 / 11
Copyright 2004
Agilent, Inc.
TriScroll™600 Series
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
iii
Table of Contents
Declaration of Conformity
Preface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . .vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . .viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . .viii
Factory Service Options . . . . . . . . . . . . . . . . . . . .ix
Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . .ix
Major Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . . . 1
Maintenance Tool Kit . . . . . . . . . . . . . . . . . . . . . 2
Major Maintenance Tool Kit . . . . . . . . . . . . . . . . 4
Tip Seal Tool Kit . . . . . . . . . . . . . . . . . . . . . . . . . 6
TriScroll 600 Disassembly . . . . . . . . . . . . . . . . . . . . 7
Remove and Disassemble the Intake Fitting . . . 7
Remove and Disassemble the
Outboard Housing . . . . . . . . . . . . . . . . . . . . . . 8
Remove the Sync Cranks . . . . . . . . . . . . . . . . 10
Remove and Disassemble the Orbiting Plate . 12
Remove and Disassemble the
Inboard Housing . . . . . . . . . . . . . . . . . . . . . . 19
Crankshaft Assembly . . . . . . . . . . . . . . . . . . . . . . . 29
Crankshaft Exploded View . . . . . . . . . . . . . . . . . 29
Assemble the Crankshaft . . . . . . . . . . . . . . . . . . 30
Inboard Housing Assembly . . . . . . . . . . . . . . . . . . 33
Inboard Housing Exploded View . . . . . . . . . . . . 33
Inboard Housing Assembly . . . . . . . . . . . . . . . . 35
Insert the Shaft Seal . . . . . . . . . . . . . . . . . . . . 35
Insert the Crankshaft . . . . . . . . . . . . . . . . . . . 37
Insert the Seal Housing . . . . . . . . . . . . . . . . . 39
Install the Vents and Plugs . . . . . . . . . . . . . . . 42
Exhaust Port Reassembly . . . . . . . . . . . . . . . . 44
Bypass Port Reassembly . . . . . . . . . . . . . . . . 47
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . . 51
Orbiting Plate Exploded View . . . . . . . . . . . . . . 51
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . 53
Install the Bearing Assembly . . . . . . . . . . . . . 53
Install the Wave Washer and Shaft Seal . . . . . 58
Install the Needle Bearings . . . . . . . . . . . . . . 61
TriScroll 600 Assembly . . . . . . . . . . . . . . . . . . . . . 65
TriScroll 600 Exploded View . . . . . . . . . . . . . . . 65
Final Assembly . . . . . . . . . . . . . . . . . . . . . . . . . 69
Install the Orbiting Plate . . . . . . . . . . . . . . . . 72
Install the Sync Crank and Tip Seals
into the Outboard Housing . . . . . . . . . . . . . . 79
Install the Outboard Housing . . . . . . . . . . . . 82
Replace the Cowling, Cover,
and Intake Fitting . . . . . . . . . . . . . . . . . . . . . 83
Put the Pump Back into Service . . . . . . . . . . . . 86
Request for Return Health
Sales and Service Offices

TriScroll 600 Dry Scroll Vacuum Pump
This page intentionally left blank.
D R A F T 4 / 2 9 / 0 4

Agilent, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
John Ehmann
Operations Manager
Agilent, Inc.
We
Wir
Nous
Nosotros
Wij
Noi Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Products Division
Lexington, Massachusetts, USA
Vacuum Products Division
TriScroll Series Vacuum Pump
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
March 2003
Declaration of Conformity

vi
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 7 / 11
Preface
This manual provides the information you need to successfully perform scheduled maintenance on
your Agilent TriScrollTM Dry Vacuum Pump. The time to perform major rebuild is typically 18,000
hours. If you have questions that are not addressed in this manual, please contact the nearest Agilent
service facility listed on the rear cover of this manual.
Safety Considerations
READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.
The following format is used in this manual to call attention to hazards:
Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid
them. The consequences of work performed by unskilled or improperly trained maintenance personnel,
or careless operation of the equipment employed in the specified maintenance procedures can be
serious.
Every maintenance person must read and thoroughly understand the materials discussed and the
instructions provided in this manual, as well as any additional information provided by Agilent.
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.

vii
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 7 / 1 1
All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Agilent location.
WARNING Disconnect power from the TriScroll
600 before performing any mainte-
nance procedure.
Allow the pump to cool before perform-
ing any maintenance procedure.
Approximate cool-down time is one to
two hours.
CAUTION Wipe all O-rings clean with a lint-free
cloth before installation to ensure that
no foreign matter is present to impair
the seal.
Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration and reduces their ability to
hold a vacuum.
If applicable, apply a small amount of
Krytox®GPL 224 grease and wipe the
O-rings “shiny” dry.
NOTE Agilent recommends replacing all
O-rings during routine maintenance or
during any maintenance procedure
requiring that O-rings be removed.
Unless otherwise stated, apply
Loctite®242 or Loctite PST®to the first
few threads only. Apply just enough to
obtain a seal.
WARNING The TriScroll 600 weighs 32 kg (70 lbs).
To avoid injury, use proper lifting tech-
niques when moving the pump.

viii
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 7 / 11
Related TriScroll Manuals
Manuals related to the installation and operation, tip seal and pump module replacement for
TriScroll 600 series pumps are listed in the following table:
Maintenance and Tool Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form.
A description of each kit and ordering information is provided in the following table:
Title Applicable TriScroll Model Part Number
Pump Module Replacement All TriScroll 600 Series Models 699904305
Tip Seal Replacement Manual All TriScroll 600 Series Models 699904310
Installation and Operation Manual All TriScroll 600 Series Models 699904290
Description Contents Applicable TriScroll Model Part Number
Major Maintenance Kit All bearings, bearing seals,
bearing lubricant, O-rings,
and tip seals required to
rebuild TriScroll 600 Series
pumps.
All TriScroll 600 Series models PTSS0600MK
Maintenance Tool Kit All fixtures and tools
required to perform any
maintenance on
TriScroll 600 Series
pumps.
All TriScroll 600 Series models PTSS0600TK
Tip Seal Tool Kit All tools required to
change the tip seals on
any TriScroll Series pump.
All TriScroll Series models PTSTSTKIT
Replacement Tip Seal Set Replacement tip seals and
static O-rings for TriScroll
600 Series pumps.
All TriScroll 600 Series models PTSS0600TS
NOTE: The Maintenance Tool Kit or the Tip Seal Tool Kit is required for
tip seal replacement.

ix
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 7 / 1 1
Factory Service Options
Agilent offers factory-rebuild service or advance exchange of complete TriScroll Pumps or TriScroll
Pump Modules. Contact your nearest Agilent sales office for price and availability information. Select
your preferred service option from the table below.
Contacting Agilent
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the back cover
of this manual for a listing of our sales and service offices.
Visit our web site at:
http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/pages/default.aspx.
Factory Service Options Part Number
Advance Exchange TriScroll 600 Single Phase EXPPTS06001
Advance Exchange TriScroll 600 Three Phase EXPPTS06003
Advance Exchange TriScroll 610 Single Phase EXPPTS06101
Advance Exchange TriScroll 610 Three Phase EXPPTS06103
Advance Exchange TriScroll 600 Pump Module Only EXPTS0600SC
Advance Exchange TriScroll 610 Pump Module Only EXPTS0610SC
Service/Rebuild TriScroll 600 Pump (Single or Three Phase) PTS0600KMA
Service/Rebuild TriScroll 610 Pump (Single or Three Phase) PTS0610KMA
Service/Rebuild TriScroll 600 Pump Module Only PTS0600SCRP
Service/Rebuild TriScroll 610 Pump Module Only PTS0610SCRP

TriScroll 600 Dry Scroll Vacuum Pump
This page intentionally left blank.
D R A F T 4 / 7 / 11

TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
1
Major Maintenance
General Information
Agilent TriScroll 600 series pumps are designed to provide years of trouble-free service if maintenance
procedures and intervals are observed. Bearing grease replenishment and tip seal replacement are
recommended when the pump base pressure has risen to an unacceptably high level for your
application. Bearings, rotary seals and O-rings should also be replaced if the pump exhibits humming
or grinding noises from the bearings. Main bearing life may be shortened if your application requires
the pumping of high quantities of water vapor. Use of the bearing purge will keep this water from
impacting bearing life.
Required Equipment
❑Maintenance Tool Kit: PTSS0600TK (page 2)
❑Major Maintenance Kit: PTSS0600MK (page 4)
❑Arbor Press: 1/2 ton or larger, 10" work diameter capacity, 8" capacity over table
❑Oven: 400 oF temperature capability, 11" wide x 11" deep x 4" high minimum chamber,
500 watt or higher heating capacity
❑Heat Resistant Surface
❑Vacuum Gauge: Capable of measuring pressure of 5 mTorr to 20 mTorr with an accuracy of
± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

2
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Maintenance Tool Kit

3
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Maintenance Tool Kit (continued)

4
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Major Maintenance Tool Kit
Nylon Sleeve

5
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Major Maintenance Tool Kit (continued)
TS-600 O-rings
O-ring
Part Number Quantity
Inside
Diameter
(in.)
Cross-Section
(in.)
2-016 6 0.614 0.070
2-113 2 0.549 0.103
2-115 1 0.674 0.103
2-127 1 1.424 0.103
2-137 1 2.050 0.103
2-152 1 3.237 0.103
2-157 1 4.487 0.103
2-207 1 0.546 0.139
2-273 1 9.734 0.139

6
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Tip Seal Tool Kit

7
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
TriScroll 600 Disassembly
Remove and Disassemble the Intake
Fitting
1. Remove the two M5x16 screws from the
intake assembly.
2. Remove the intake assembly from the top of
the pump.
3. Remove and discard the O-ring from the
groove on the underside of the intake fitting.
4. Remove the intake clamp from the intake
fitting.
5. Remove and discard the snap ring from the
intake fitting.
6. Remove the screen from the intake fitting.

8
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Remove and Disassemble the
Outboard Housing
1. Remove the three M5x16 screws that attach
the cowling to the module.
2. Remove the cowling.
.
3. Remove the six M5x22 screws that attach
the outboard cover to the outboard housing.
TriScroll 600 Disassembly (continued)

9
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
4. Remove the outboard cover.
5. Remove and discard the O-ring.
6. Remove the six M6x55 screws that attach
the outboard housing to the outboard
housing.
7. Remove the outboard housing.
8. Remove and discard the O-ring from the
inboard housing.
TriScroll 600 Disassembly (continued)

10
TriScroll 600 Dry Scroll Vacuum Pump
D R A F T 4 / 2 9 / 0 4
Remove the Sync Cranks
1. Remove the snap ring from each sync crank
bore.
2. Remove and discard the sync cranks.
TriScroll 600 Disassembly (continued)
NOTE If the sync cranks don’t
slide out easily, heat the
outboard housing to
approximately 150 °F.
WARNING Use heat resistant gloves
when handling the
outboard housing after it is
heated.