Agilent Technologies VHS-10 User manual

DRAF T
Vacuum Products Division
VHS-10 & VHS-400
DiffusionPumps
Part No. 699901023
Rev. L
June 2013

D R A F T
Copyright 2013
Agilent, Inc.
VHS-10 & VHS-400 Diffusion Pumps
Santovac
®
5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC.
Viton
®
is a registered trademark of E. I du Pont de Nemours and Company.

VHS-10 & VHS-400 Diffusion Pumps
D R A F T
3
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of
humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the product
cleaned by an independent agency skilled and approved in handling and cleaning contaminated
materials before the product will be accepted by Agilent, Inc. for repair and/or replacement.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Disclaimer
Operation and maintenance of this equipment involves serious risk. It is the responsibility of the user to
maintain safe operating conditions at all times. Agilent assumes no liability for personal injury or
damage resulting from operation or service of the equipment.
Agilent has no control over the use of this equipment and is not responsible for personal injury or
damage resulting from its use. The safe use and disposal of hazardous or potentially hazardous
materials of any kind is the sole responsibility of the user. Observe all WARNINGS and CAUTIONS to
minimize the serious hazards involved.
It is the sole responsibility of the users of Agilent equipment to comply with all local, state and federal
safety requirements (laws and regulations) applicable to their system. Employ the services of an
industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and
use.

VHS-10 & VHS-400 Diffusion Pumps
4
D R A F T
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.

VHS-10 & VHS-400 Diffusion Pumps
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5
Contents
Documentation Conventions ...................................................................................................... 11
Diffusion Pump Hazards ............................................................................................................. 11
Introduction .................................................................................................................................... 19
Operating Characteristics............................................................................................................. 19
Pump Air Speed and Throughput ................................................................................................. 23
Physical Specifications................................................................................................................. 24
Wiring Diagram ........................................................................................................................... 26
Installation ...................................................................................................................................... 27
Unpacking ................................................................................................................................... 27
Pump Oil Installation ................................................................................................................... 28
Vacuum System Connections....................................................................................................... 28
Cooling Water Connections ......................................................................................................... 29
Electrical Connections ................................................................................................................. 30
Thermal Switch Connections ....................................................................................................... 31
Operation ........................................................................................................................................ 33
Startup Procedure ........................................................................................................................ 34
Shutdown Procedure.................................................................................................................... 34
Troubleshooting ............................................................................................................................. 35
Leakage ....................................................................................................................................... 35
Outgassing................................................................................................................................... 35
Poor Pump or System Performance .............................................................................................. 36
Appendix A. Maintenance ............................................................................................................. 39
Periodic Inspections ............................................................................................................... 39
Cleaning ................................................................................................................................ 40
Disassembly and Reassembly Procedures............................................................................... 41
Appendix B. Parts ..........................................................................................................................47
Replacement Parts ....................................................................................................................... 47

VHS-10 & VHS-400 Diffusion Pumps
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VHS-10 & VHS-400 Diffusion Pumps
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List of Figures
1-1 VHS-10 Speed and Throughput Curves ................................................................................. 23
1-2 VHS-400 Speed and Throughput Curves ............................................................................... 23
1-3 VHS-10 and VHS-400 Outline with ASA Flanges .................................................................. 24
1-4 Operating Characteristics...................................................................................................... 26
A-1 VHS-10 and VHS-400 Jet Assembly ...................................................................................... 42
A-2 VHS-10 and VHS-400 Heater Connections ........................................................................... 43
A-3 Solid Steel and Slotted Stainless Clamp Plate ........................................................................ 44
A-4 Fill and Drain Assemblies ..................................................................................................... 45

VHS-10 & VHS-400 Diffusion Pumps
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VHS-10 & VHS-400 Diffusion Pumps
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List of Tables
1 General Hazards................................................................................................................... 12
2 Explosive Conditions............................................................................................................. 14
3 Pressurization Hazards.......................................................................................................... 15
1-1 VHS-10 Operating Specifications.......................................................................................... 19
1-2 VHS-400 Operating Specifications........................................................................................ 21
1-3 VHS-10 and VHS-400 Dimensions ....................................................................................... 24
4-1 Troubleshooting Guide ......................................................................................................... 36
B-1 Replacement Parts ............................................................................................................... 47

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VHS-10 & VHS-400 Diffusion Pumps
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Preface
Documentation Conventions
This manual uses the following documentation conventions:
WARNING Warnings indicate a particular procedure or practice, which
if not followed correctly, could lead to serious injury.
CAUTION Cautions indicate a particular procedure or practice, which if
not followed, could cause damage to the equipment.
NOTE Notes contain important information.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Agilent. Be aware of the hazards associated with this
equipment, know how to recognize potentially hazardous conditions, and how to avoid
them. Read carefully and strictly observe all cautions and warnings. The consequences of
unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Agilent office.
Diffusion Pump Hazards
Designers of systems utilizing diffusion pumps must design out hazards wherever possible.
For hazards that cannot be designed out, warnings, procedures, and instructions on proper
use and servicing are provided. Please use guards, safety features, and interlocks as
recommended.
Refer to Table 1 for a list of general hazards and recommended actions, Table 2 on page 14
for a list of prohibited actions that can result in explosions, and Table 3 on page 15 for a list
of pressurization hazards that can result in damage to equipment.

VHS-10 & VHS-400 Diffusion Pumps
12
D R A F T
The installation, operation, and servicing of diffusion pumps involves one or more of the
hazards in 1, any one of which in the absence of safe operating practices and precautions,
could potentially result in death or serious harm to personnel.
Table 1 General Hazards
Hazard Suggested Corrective Action
Loss of utility: water and/or electricity Provide sufficient backup water and power supply
as necessary to effect a safe shutdown under worst
case conditions
Overpressure in foreline Provide an interlock to ensure that the power
supply to the pump heater cannot be activated if
the foreline pump is not running and/or the
pressure in foreline is above 0.5 Torr (0.38 mbar;
66.5 Pa)
Overtemperature Fit temperature sensors and pump fluid level
sensors with a feedback to an interlock on the
heater power supply
Insufficient water flow through the main cooling
coils
Use water flow sensor and feedback to interlock
the heater power supply
Water trapped between inlet and outlet of Quick
Cool coil, or liquid nitrogen trapped between inlet
and outlet of liquid nitrogen trap
Provide vent or pressure relief valves for both
Quick Cool coil and liquid nitrogen trap
Loss of electrical ground integrity Incorporate ground fault interrupt circuit into
heater power supply
Positive pressure in pumping system Integrate pressure relief valve in vacuum system
High voltage Prevent personnel contact with high voltages;
design and attach warnings
Toxicity and Corrosivity Vent toxic and/or corrosive gases to a safe
location; ensure adequate dilution or scrubbing to
safe levels; take all actions required to meet air
quality standards
Explosion Integrate pressure relief valves
Do not use hydrocarbon-based pumping fluids

VHS-10 & VHS-400 Diffusion Pumps
D R A F T
13
Explosion
❑ Operation of the diffusion pump without continuous evacuation below 0.5 Torr
(0.67 mbar; 66.5 Pa), or without coolant and introducing a strong oxidizer (such as
air) or explosive vapors or powders or materials which may react with pumping
fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion. Such an
explosion can violently expel valves and other hardware, slam open doors that are
not designed for appropriate pressure relief, or burst other components of the
vacuum system. Serious injury or death may result from expelled parts, doors,
shrapnel, and shock waves.
❑ Three elements are required for explosion: fuel, oxidizer, and an ignition. A
combination of temperature and pressure can be a source of ignition. Most diffusion
pump fluids are fuels. Hydrocarbon fluids are more prone to oxidize and explode
than synthetic silicone-based fluid. The oxidizer can be air, which can be introduced
by a leak, deliberately brought in via a process, or inadvertently admitted by operator
error.
Oxygen and other strong oxidizers are even more dangerous than air. Certain
conditions of temperature and pressure can cause a combustible mixture to explode.
The larger the diffusion pump, the greater the risk of explosion and the greater the
risk of damage and injury. Never operate large diffusion pumps utilizing hydrocarbon
oils without a complete safety analysis for the entire system and for the application.
❑ Explosion and Fire from Acetone and Alcohol: Diffusion pumps are typically cleaned
with acetone and alcohol. When combined with air, oxygen, and other oxides,
alcohol and most other solvents are very flammable and explosive. Never permit any
trace of these cleaners to remain in or on the pump. Always remove all traces of
alcohol and acetone and other cleaners with clean, dry, oil-free compressed air.

VHS-10 & VHS-400 Diffusion Pumps
14
D R A F T
Never operate a large diffusion pump under the conditions listed in Table 2. Any of these
situations increases the probability of an explosion.
Table 2 Explosive Conditions
Prohibited Action Explosion-Causing Condition
Do not run pump without cooling water Overtemperature
Do not run pump with low level of pump fluid Overtemperature
Do not run pump without proper backing or holding
pump
Overpressure
Do not run pump when not evacuated below 0.5 Torr
(0.66 mbar; 66.5 Pa)
Overpressure
Do not admit air to, or rough through, a pump with hot
boiler
Overpressure plus strong oxidizer
Do not open drain or fill plug while pump is under
vacuum, especially when it is hot
Overpressure plus strong oxidizer
Do not contaminate pump with explosive vapors Lower explosive threshold of gas mixtures
Do not remove, defeat, or override safety
counter-measures such as pressure and thermal
switches and valve sequencer interlocks
Overtemperature, overpressure, more
combustible mixtures
Do not machine or weld any part of the pump without
removing all fluid or solvent residue in pump
Source of ignition
Do not use unsuitable pumping fluid Lower explosive threshold of gas mixture

VHS-10 & VHS-400 Diffusion Pumps
D R A F T
15
Pressurization Hazards
Large vacuum pumps and their components are designed for vacuum service. They are not
designed for pressurization, which could cause them to burst possibly expelling shrapnel at
lethal velocities. Serious accidents have been caused by intentional pressurization of
vacuum systems and their components.
❑ Never pressurize any part of a vacuum system for test or any other purpose.
❑ Always provide pressure relief when designing diffusion pumps into systems and
ensure that pressure relief motion is limited to safe envelopes.
❑ Never permit the hazards in Table 3 to develop.
❑ Pressure Relief Devices: Systems must be designed with pressure relief devices to
provide safe pressure relief from internal explosions. Always recognize that safety
devices can fail or malfunction. Provide redundant protection by installing devices
having different failure modes, failure mechanisms, and failure causes. Be certain
that exhaust duct materials are capable of withstanding the corrosiveness,
temperature, and pressure of exhausted products.
Dangerous Substances
❑ Chemical Dangers of Acetone and Alcohol: Diffusion pumps are typically cleaned
with acetone or alcohol. Acetone, alcohol, and most other solvents are irritants,
narcotics, and depressants, and/or carcinogenic. Their inhalation and ingestion may
produce serious effects. Even absorption through the skin can result in moderate
toxicity. Always ensure that cleaning operations are performed in large,
well-ventilated rooms. Use of self-contained breathing apparatus may be necessary,
depending upon the solvent type and vapor concentration in surrounding air.
❑ Poisonous and Corrosive Compounds: When pumping poisonous, reactive, and/or
corrosive gas, vapors, or chemicals, proper operation and regeneration do not
always ensure that all hazardous materials have been totally removed. If hazardous
gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities
may exist during operation or remain after regeneration to cause severe injury or
death.
Table 3 Pressurization Hazards
Prohibited Action Result
Do not block inlet or vent of liquid nitrogen trap and
lines
LN2trap and/or lines burst
Do not close isolation valves at inlet and discharge of
main water cooling coils when pump is heated
Water turns to steam and bursts coils
Do not pressurize the pump body (above 1 atm.) Body of pump bursts
Do not make a hole through the vacuum wall Loss of structural integrity of wall

VHS-10 & VHS-400 Diffusion Pumps
16
D R A F T
❑ Pump Fluids: Overheating the pump fluid, exposing it to air or reactive materials, or
over-pressurizing it above the normal operating range, approximately 1x10−3Torr
(1.3x10−3mbar) decomposes the fluid and possibly makes it toxic. This is especially
true of backstreamed mechanical pump fluids which are more volatile (unstable).
Overheating of accidentally introduced or backstreamed mechanical pump fluids
cannot be protected against by thermal switches which are set for diffusion pump
fluid.
❑ Process Gasses: Process gasses are frequently toxic, flammable, corrosive, explosive,
or otherwise reactive. Agilent has no control over the types of gasses passing through
the user’s diffusion pump as these are entirely under the control of the process user
and/or the hardware systems integrator. Since these gasses can cause serious injury
or death, it is very important to plumb the exhaust of the pump to the facility’s
hazardous gas exhaust system which incorporates appropriate filters, scrubbers and
similar components to ensure that the exhaust meets all air and water pollution
control regulations.
High Temperatures
❑ Hot Surfaces: Boiler temperatures reach 530 °F (275 °C) which can cause serious
burns. Always ensure that surfaces have cooled to near room temperature before
touching them.
❑ Hot Cooling Water and Steam: The water used to cool the pump can reach scalding
temperatures. Touching or rupture of the cooling surface can cause serious burns.
Water left inside Quick Cool coils from previous use turns to steam when the pump
is reheated. This steam must be allowed to escape without contacting personnel.
Whenever possible, design the water system with interlock valves so that power
cannot be applied to the pump unless water is flowing in the main cooling coils (not
Quick Cool coils).
Cold Surfaces
Liquid nitrogen cooled traps are commonly used in diffusion pumps. Metal surfaces at
liquid nitrogen temperature can cause severe frostbite. These surfaces remain cold in excess
of 30 minutes after liquid nitrogen evaporation.

VHS-10 & VHS-400 Diffusion Pumps
D R A F T
17
Cold Coolant
Liquid nitrogen. a cryogenic liquid, is used in traps. If it is splashed on body tissues or eyes,
it can cause severe frostbite or blindness. The extremely low temperature of liquefied
nitrogen can cause skin damage similar to high temperature burns. Contact with the cold
gas evolving from the liquid can produce the same effect. Delicate tissues, such as the eye
tissues, are most easily damaged by exposure to cold gas or liquid. To minimize the risk of
hazardous contact of cold gaseous nitrogen with any part of the body, wear personal safety
equipment recommended for use with cryogenic materials, including:
❑ Face shield
❑ Full-sleeved lab coat
❑ Clean, dry gloves which fit loosely so they can be thrown off quickly if frozen by
contact with the gas.
High Voltages
Diffusion pump heaters operate at voltages (up to 480 V) high enough to kill. Design
systems to prevent personnel contact with high voltages. Securely attach prominent hazard
warnings. Personnel should always break the primary circuit to the power supply when
direct access to the heater or wiring is required.
Large Equipment and Heavy Weights
The lifting and moving of large diffusion pumps requires power-assisted equipment and the
use of trained moving and installation personnel to avoid dropping, slipping, and
overturning the pump. Pumps weigh in excess of 180 lbs (81 kg) and are 3 to 6 feet in their
largest dimension (1 to 2 meters). Their mishandling can cause severe injury. Check the
weight of the equipment before lifting and assure that the power-assist device is adequate
for the task. Do not stand under the equipment being lifted and moved.
Asphyxiation
Death from suffocation can result if a large amount of liquid nitrogen is spilled in a small,
poorly ventilated room or equipment. All diffusion pumps are typically cleaned with
acetone or alcohol. Acetone. alcohol, and most other solvents are very volatile (unstable).
During cleaning. the volatility of these cleaners may permit their gases to displace air and its
life-supporting oxygen which could cause death or serious injury by asphyxiation. Always
ensure that cleaning operations are performed in large, well-ventilated areas.

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VHS-10 & VHS-400 Diffusion Pumps
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Introduction
This chapter consists of:
❑ “Operating Characteristics”
❑ “Pump Air Speed and Throughput” on page 23
❑ “Physical Specifications” on page 24
❑ “Wiring Diagram” on page 26
Operating Characteristics
The operating characteristics and physical specifications of the VHS-10 and VHS-400
diffusion pumps are given in Table 1-1 and Table 1-2 on page 21. The graphs in Figure 1-1
through Figure 1-2 on page 23 show air speed and throughput as a function of inlet
pressure. The dimensions of the inlet flange that connects to the system to be evacuated are
given in Table 1-3 on page 24.
NOTE The data in Table 1-1 on page 19 refers to pumps charged with
DC-704 diffusion pump fluid.
Table 1-1 VHS-10 Operating Specifications
Specification Units 4400 W 5100 W
Optimum Operating
Range
Torr
mbar
1x10−3to < 5x10−9
1.3x10−3to < 6.5x10−91.5x10−3to < 5x10−9 2x10−3to < 6.5x10−9
Pumping Speed,
Maximum
l/s, Air
l/s, Helium
5300 with std cold cap
4200 with extended cold
cap
6600 with std cold cap
5200 with extended cold
cap
5300 with std cold cap
4200 with extended cold
cap
6600 with std cold cap
5200 with extended cold
cap
Throughput (Air), Max.
Overload Range
@ 1x10−2 Torr
(1.3x10−2mbar))
Torr-l/s
mbar-l/s 7.7
10.2
8.1
10.8

VHS-10 & VHS-400 Diffusion Pumps
20
D R A F T
Forepressure, Max.
No Load
Full Load
Torr
mbar
Torr
mbar
0.65
0.87
0.55
0.73
Backstreaming Rate
at Pump Inlet
(within Optimum
Operating Range)
mg/cm2/min
5.0x10−4(with std cold cap)
1.0x10−4(with extended cold cap)
Electrical Requirements
AC, 50/60 Hz, 3 phase
V 208, 240, 380, 480
Cooling Water Flowrate
@ Inlet Temperature of
60 to 80 oF
(120 °F max.)
gpm (US)
.5
Warmup Time minutes 12
Cooldown Time
Without Quick Cool
With Quick Cool
minutes
65
22
67
25
Fluid Charge cc 1000
Recommended
backing pump capacity*
cfm 30
*Recommended sizes when operating at maximum throughput.
Pressure drop across coils
psi
5
Heater circuit resistance
Ohms
L1-L2/L2-L3/L1-L3 L1-L2/L2-L3/L1-L3
19.6/19.6/39.2 at 208 V 17/17/34 at 208 V
26.2/26.2/52.4 at 240 V 22.6/22.6/45.1 at 240 V
65.6/65.6/131.2 at 380 V 56.6/56.6/113.2 at 380 V
104.7/104.7/209.4 at 480 V 90.4/90.4/180.8 at 480 V
Weight lbs (kg) 150 (68)
Jet assembly 4-stage, self-aligning aluminum
Foreline baffle Stacked self-aligning half moon
Water connections 1/8" FPT
Table 1-1 VHS-10 Operating Specifications (Continued)
Specification Units 4400 W 5100 W