Anest Iwata DVSL-100C User manual

.
Instruction Manual (Original Instructions)
Oilfree Scroll Vacuum Pump
DVSL-100C
※ Before use, be sure to fill in the blank spaces below for future repair and after service.
Serial No.
Who sold it to you
Purchase date
When you began
operation
This instruction manual includes very important warnings, cautions and operating
procedure in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it in a convenient place for immediate and future reading.
LR104996
本商品はカナダ規格(CSA)取得品です 。
(Canadian Standards Association)

-1-
Important information
Important information
Be sure to read this instruction manual to understand how to operate equipment
correctly. Only operators, who fully understand warnings, cautions and instructions,
are to operate the equipment. Improper operation (mishandling) can cause serious
bodily injury, death, fire or explosion.
Store this manual in a convenient place for immediate and future reference.
◆ Regarding safety
・ The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws and regulations pertaining to fire, electricity, and
other safety regulations, as well as corporate regulations.
・ Pay special attention to items which are shown by the below marks and symbols.
・ Symbols and marks have the following meanings.
Examples of marks
WARNING
Indicates a potentially hazardous situation which, if not
avoided, may result in serious injury or loss of life.
CAUTION
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury or property
damage.
Examples of symbols
Indicates [Beware]. We will explain briefly in or near the symbol.
(The example on the left is [Beware of electric shock]).
Indicates [Prohibited action]. We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
Indicates [Required action]. We will explain briefly in or near the symbol.
(The example on the left is [Be sure to ground]).
＊ We shall not be responsible for any injury or damage caused by disregard of
warnings, cautions or instructions.
Supplementary notes
Important
Indicates notes which we ask you to observe. They are helpful to
achieve full performance and functionality of the equipment.

-2-
For afe operation
Below is very important information about how to safely operate the equipment.
Before operation, be sure to read and fully understand the contents.
WARNING
Be careful about
hoi ting
Danger of load collap e
Please install and move a vacuum pump
by firmly holding the glip of a pump
(DVSL 100C’s gross weight: 15kg).
Be careful to install a vacuum pump as
physical damage, failure of a product and
body injury can be caused by dropping of
a pump and getting caught in the gap
between a pump and the other object.
Avoid moi ture
Danger of electric hock
Install in an area which is not exposed to
moisture such as rain or steam. If moisture
comes into and tact with the electric
source connection, it can cause fire or
bodily injury due to short circuit or electric
shock.
In tall at a afe
ite
Danger of explo ion, fire and
accident
Install in an area free from explosive,
flammable or corrosive substances.
If not, it can cause explosion, fire or
accident.
A k qualified
electrician
Danger of hort-circuit and
electric hock
Ask a qualified electrician to perform
electric wiring.
If not, short circuit or electric shock can
cause fire or bodily injury.
Turn off electric
ource
Danger of electric hock and
entanglement
Be sure to turn off electric source on
building site before wiring. If not, it can
cause electric shock or bodily injury due to
turning objects.
In tall
overcurrent
protective device
Danger of accident, fire and
failure
Be sure to install protective device to
protect circuitry.
We recommend an overcurrent protective
device (rated 15A) to protect branch
circuit.
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
In tall
emergency top
witch
Danger of accident, fire or failure
Be sure to install an electric source
emergency stop switch (or protective
device that can urgently stop).
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
In tall hort
circuit protective
device
Danger of fire and electric hock
Install short circuit protective device.
If not, it can cause bodily injury due to fire
or electric shock.
In tall motor
protective circuit
breaker to
protect motor
Danger of electric fire and electric
hock
Install motor protective circuit breaker to
protect motor.
If not, it can cause bodily injury due to
electric fire or electric shock.
If you have any questions about the
selection of protective devices, contact
either the dealer who sold it to you or us.
Be careful about
wiring
Danger of hort-circuit and
electric hock
We recommend an electric wire of larger
than 2mm
2
(more than rated 10A,) cross
section area for electric wire (including
grounding wire.).
Be careful to avoid voltage drop
considering local situation.
If not, it can cause a short circuit fire and
may result in bodily injury from electric
shock.

-3-
For afe operation
WARNING
U e crimp- tyle
terminal
Danger of hort-circuit and
electric hock
Fit firmly proper round type crimp style
terminal to electric source cable using
crimp tool and connect to motor terminal
section.
If not, it can cause short circuit fire or
bodily injury from electric shock due to
looseness or disconnection.
Protect cable
from being
pulled
Danger of hort-circuit and
electric hock
Be sure to fit cable gland to hole of
φ 22mm at motor terminal box.
If not, it can cause short circuit fire or
bodily injury from electric shock.
Be ure to
ground
Danger of electric hock
Connect ground cable to ground terminal
in motor terminal box.
If not, it can cause bodily injury from
electric shock.
Never evacuate
hazardou ga
Danger of explo ion and ignition
Do not evacuate gas which is hazardous
to humans or explosive, flammable, or
corrosive. Do not evacuate with
substances containing chemicals,
solvents, and powders.
If done, it can cause failure or bodily
injury by gas, explosion or ignition.
It is not guaranteed fluorine rubber can be
used for all solvents.
Avoid foreign
matter
Danger of entanglement and
foreign matter di per al
Never put finger or foreign matter into air
holes of fan cover, FS cover.
If done, it can cause bodily injury from
entanglement with turning section, or
foreign matter dispersal
.
Never alter
Danger of electric hock and
entanglement
Do not remove or alter safeguards or
insulation parts.
If done, it can cause bodily injury from
electric shock or turning section and it
can cause deteriorated performance and
operating lifetime, and invalidate
guarantee.
Change after
vacuum pump i
topped
Danger of failure and bodily injury
Change air flush port only after vacuum
pump is stopped. If you change it during
vacuum pump operation, it can cause
vacuum pump failure and bodily injury.
Conduct
periodical
maintenance and
in pection
Danger of failure and bodily injury
Conduct periodical maintenance and
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump, and
bodily injury.
Be careful about
high temperature
Danger of burn
Conduct maintenance and inspection only
after vacuum pump becomes cool enough.
Maintenance and inspection soon after
vacuum pump stops can cause burn injury.
Turn off electric
ource
Danger of electric hock
Be sure to conduct maintenance and
inspection after you turn off electric
source. If not, it can cause bodily injury
from electric shock or turning object.
A k peciali t to
perform repair
Danger of accident, failure and
horter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
failure or shorter operating lifetime.

-4-
For afe operation
CAUTION
U e at
de ignated
temperature
Danger of overheating
Operate at ambient temperature of 5 ℃
～ 40 ℃ .
Operating at a temperature range other
than that designated can cause
accident, failure or bodily injury such as
burns due to overheating.
Pa y at tenti on
to ventil at io n
Danger of overheating
Install in a well ventilated area. Poor ventilation
can disrupt cooling and cause accident, failure
or bodily injury such as burns since this vacuum
pump is an air cooled type.
Do not block inlet and outlet of cooling air with
obstruction. (Separate inlet side of the cooling
air from obstruction or wall by 10cm or more,
and separate outlet side by 30cm or more)
Avoid du t
Danger of du t
Be sure site is free from dust.
Sucking in of dust can cause failure.
Fix o n a
olid le ve l
floor
Danger of movement
Be sure to fix on solid and level floor (less than
5° inclination).
Uneven fix can cause failure and movement of
vacuum pump. If fix floor is unstable, fix pump
with 4 bolts using hole of
φ 9mm at leg section.
Avoid di re ct
unlig ht
Danger of overheating
Install where equipment is not exposed
to direct sunlight.
Vacuum pump exposed to direct
sunlight can overheat, resulting in
failure.
Check voltage
Motor burnout
Before doing any wiring, check electric source
and voltage. This pump is multi voltage type of
AC100V/AC200V. Voltage can be changed at
terminal block. This pump is wired to 100V
when delivered to you. Check your electric
source, voltage, and wire correctly to terminal
block. Improper wiring and incorrect voltage can
cause motor burnout.
In pect cau e
of problem
Danger of problem recurrence
and failure
If protective device activates, be sure to
turn off electric source and inspect
causes to solve the problem. Do not
operate until problem is solved.
Operation while problem is left unsolved
can cause problem recurrence and
failure.
Remove cap
Danger of cap to fly
Remove cap from inlet and outlet. Operation
with cap being fitted can cause cap to fly by
intake of exhaust impetus, resulting in accident,
failure, or bodily injury from contact with flying
objects.
Prevent foreign
matter from
entering
Danger of foreign matter
entering inlet
When checking turning direction, be
careful not to enter foreign matter into
an inlet.
Foreign matter entering inlet can cause
failure.
Check fan
Danger of overheating
Check that cooling fan is turning and cooling air
is flowing.
If not, it can cause accident, failure or bodily
injury such as burns due to overheating.
Pay attention to
exhau t
re i tance
Danger of exhau t di ruption
When connecting exhaust piping to
vacuum pump and when combining
piping with another vacuum pump, pay
attention to piping size and length so
that it does not cause exhaust
resistance. Exhaust resistance can
disrupt air flow, resulting in failure and
over current.
Prevent foreign
matter from
entering
Danger of foreign matter entering inlet
If you use the seal material or the adhesive,
etc. to prevent Leak of the joint when piping
with internal screw of inlet, be careful not to
enter the seal material or the adhesive into an
inlet.
The seal material or the adhesive entering inlet
can cause failure.

-5-
For afe operation
CAUTION
Start or top
after clo ing
i olation valve
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during start up and stop.
Start up or stop with isolation valve in the
open position can draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.
Be w are
tempe ra tu re
of in ta ke ga
Danger of exceeding permi ible
temperature of intake ga
If intake gas temperature is over 50 ℃ , be
sure to install a chiller or trap between
vacuum pump and vacuum chamber so
that gas intake temperature of vacuum
pump keeps below 50
℃ . If not, vacuum
pump temperature can increase, resulting
in failure.
Operate while
opening air-flu h
port
Danger of remaining moi ture
When evacuating moisture, be sure to
open air flush port (air flush operation). If
you evacuate vapor while air flush port is
closed, condensed moisture will remain
inside vacuum pump and cause failure.
Caution after
exhau ting vapor
Danger of in ufficient vapor
exhau t
After evacuating vapor, do air flush
operation for at least one hour. If you close
air flush port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Beware of intake
ga volume
Danger of exceeding permi ible
intake ga volume
When sending N
2
gas or dry air into
air flush port, pressure should be the
same as atmospheric pressure and flow
rate should be less than 10NL/min. If not,
it can increase pressure inside vacuum
pump, resulting in failure.

-6-
Where to attach warning ticker
Where to attach warning ticker
Always keep warning stickers clean and legible. If they become dirty or detached, replace them
with new ones. If you need replacement stickers, contact the dealer who sold the vacuum pump
to you.
Beware of electric hock
Be careful about
high temperature

-7-
Content
Important information.....................................................................................................................1
Important information .............................................................................................................1
For afe operation ...................................................................................................................2
Content .......................................................................................................................................7
1. Before u e................................................................................................................................8
1.1 Check the product.............................................................................................................8
2. Name and tructure of each ection...................................................................................10
3. In tallation..............................................................................................................................11
3.1 Wiring................................................................................................................................12
3.2 Te t operation..................................................................................................................16
3.3 Connection to vacuum y tem (chamber) ...................................................................17
4. Operation................................................................................................................................18
4.1 Standard operation..........................................................................................................20
4.1.1 Start-up ......................................................................................................................20
4.1.2 Shut-down .................................................................................................................20
4.2 Air-flu h operation...........................................................................................................20
4.2.1 Preparation ................................................................................................................21
4.2.2 Start-up and hut-down ...........................................................................................21
4.2.3 When returning to tandard operation...................................................................22
5. Maintenance and in pection................................................................................................23
5.1 Daily maintenance and in pection ................................................................................23
5.2 Maintenance.....................................................................................................................24
6. Problem and remedie .......................................................................................................25
7. Di po al..................................................................................................................................25
8. Specification ........................................................................................................................27
8.1 Specification ..................................................................................................................27
8.2 Dimen ion ......................................................................................................................28
8.3 Performance data ............................................................................................................28

-8-
1. Before u e
1.1 Check the product
・
・・
・ Check that the package i right- ide-up before opening.
・
・・
・ Check that the model of the product i the ame a the one you ordered.
How to read model name
ＤＶＳＬ
ＤＶＳＬＤＶＳＬ
ＤＶＳＬ－
－－
－１００
１００１００
１００ Ｃ
ＣＣ
Ｃ
・
・・
・ Check that there i no damage.
If there is any damage, contact either the dealer who sold it to you or us.
・
・・
・ Check the following acce orie .
Instruction manual (this one)
(Instruction manuals written by official languages except English must be sent to a
customer along with the delivery of a product.)
Air muffler for air flushing (which is attached to the grip)
※ Please prepare electric wires, crimp style terminal, electric source protective
devices, piping to inlet, and piping from outlet on customer side.
DVSL ： model
Displacement (swept volume)
１００：１００ Ｌ／ｍｉｎ
Serial number
○○ ○○○
Alphabetic Numeric
Y
ear of manufacture
Vinyl bag
(Air muffler is contained inside)

-9-
Open package
WARNING
Danger of load collap e
Plea e in tall and move a vacuum pump by firmly holding the glip of a
pump (DVSL-100C’ gro weight: 15kg).
Be careful to in tall a vacuum pump a phy ical damage, failure of a
product and body injury can be cau ed by dropping of a pump and getting
caught in the gap between a pump and the other object.
Be careful about
hoi ting
Side Panel 2
Outer case
Upper Cover
Scroll vacuum pump
Rear Panel
Side Panel 1
Front Panel
Bottom pad
Instruction Manual
(this one)

-10-
Motor
Motor
Air Flush Port (Rc1/8)
(It is closed by plug when delivered to you.)
Inlet NW25
（
Internal screw size Rc 3/8）
Grip
Outlet NW16
Bracket
Terminal Box
2. Name and tructure of each ection
Structure of vacuum pump
Orbiting Scroll OS
Fixed Scroll FS Grip
Housing
Back up Seal
P Seal
Tip Seal ON/OFF S
witch

-11-
3. In tallation
WARNING
Danger of electric hock
In tall in an area which i not expo ed to moi ture uch a rain or team.
If moisture comes into and tact with the electric source connection, it can cause fire or
bodily injury due to short circuit or electric shock.
Avoid moi ture
Danger of explo ion, fire and accident
In tall in an area free from explo ive, flammable or corro ive ub tance .
If not, it can cause explosion, fire or accident.
In tall at a afe ite
CAUTION
Danger of overheating
Operate at ambient temperature of 5
℃
℃℃
℃～
～～
～ 40 ℃
℃℃
℃ .
Operating at a temperature range other than that designated can cause accident, failure
or bodily injury such as burns due to overheating.
U e at de ignated
temperature
Danger of overheating
In tall in a well-ventilated area (refer to below chart).
Poor ventilation can disrupt cooling and cause accident, failure or bodily injury such as
burns since this vacuum pump is an air cooled type.
Do not block inlet and outlet of cooling air with obstruction.
Nece ary ventilated air volume
Over 2m
3
/min
Pa y at tenti on t o
ve nt ilati on
Danger of du t
Be ure ite i free from du t.
Sucking in of dust can cause failure.
Avoid du t
Danger of movement
Be ure to fix vacuum pump on olid and level floor (le than 5° inclination).
Uneven fix can cause failure and movement of vacuum pump. Fix pump base with 4
bolts using hole of 9mm at bracket.
In ta ll on a
olid, l eve l flo or
Danger of overheating
In tall where equipment i not expo ed to direct unlight.
Vacuum pump exposed to direct sunlight can overheat, resulting in failure.
Avoid di re ct
unlig ht
Important
When building vacuum pump into vacuum system, pay attention to space for maintenance,
ambient temperature and piping. Be sure to fix vacuum pump on solid and level floor.
If you have any questions, contact the dealer who sold it to you or us.

-12-
3.1 Wiring
WARNING
Danger of hort-circuit and electric hock
A k a qualified electrician to perform electrical wiring.
If not, short circuit or electric shock can cause fire or bodily injury.
A k qualified
electrician
Danger of electric hock and entanglement
Be ure to turn off electric ource on building ite before wiring.
If not, it can cause electric shock or bodily injury due to turning objects.
Turn off electric
ource
Danger of accident, fire and failure
Be ure to in tall protective device to protect circuitry. We recommend
overcurrent protective device (rated 15A) to protect branch circuit.
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
In tall overcurrent
protective device
Danger of accident, fire or failure
Be ure to in tall an electric ource emergency top witch (or protective device
that can urgently top).
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
In tall emergency
top witch
Danger of fire and electric hock
In tall hort circuit protective device.
If not, it can cause bodily injury due to fire or electric shock.
In tall hort circuit
protective device
Danger of electric fire and electric hock
In tall motor protective circuit breaker to protect motor. (refer to chart 1 on page
15)
If not, bodily injury due to electric fire or electric shock can result.
If you have any questions about the selection of protective devices, contact either the
dealer who sold it to you or us.
In tall motor
protective circuit
breaker to protect
motor
Danger of hort-circuit and electric hock
We recommend an electric wire of larger than 2mm
2
(more than rated 10A,) cro
ection area for electric wire (including grounding wire.).
Be careful to avoid voltage drop con idering local ituation.
If not, it can cause a short circuit fire and may result in bodily injury from electric shock.
Be careful about
wiring
Danger of hort-circuit and electric hock
Fit firmly proper round type crimp- tyle terminal to electric ource cable u ing
crimp tool and connect to motor terminal ection.
If not, it can cause short circuit fire or bodily injury from electric shock due to looseness
or disconnection.
U e crimp- tyle
terminal
Danger of hort-circuit and electric hock
Be ure to fit cable gland to hole of 22mm at motor terminal box.
If not, it can cause short circuit fire or bodily injury from electric shock.
Protect cable from
being pulled
Danger of electric hock
Connect ground cable to ground terminal in motor terminal box.
If not, it can cause bodily injury from electric shock.
Be ure to ground

-13-
Danger of re tart
Be ure to witch off electric ource before maintenance or in pection.
Single-pha e motor ha a thermal protector.
Vacuum pump restarts become cool without warning after vacuum pump.
With a thermal
protector
CSA Requirement
Thermally protected automatic reset. TYPE TP212. Motor restart without warning after protector trip.
Min. circuit ampacity of conductor is 10A
Max. branch circuit breaker is 15A
When you u ed thi pump in Europe.
This vacuum pump must be equipped with a main disconnect device in accordance with requirements of
EN60204 1, clause 5.3.2.It is recommended to use a circuit breaker as main breaker which is suitable for
isolation according to EN60947 2 and is equipped with an operating handle which is lockable in OFF position
and complies with the other requirements of EN60204 1, clause 5.3
CAUTION
Motor burnout
Before doing any wiring, check electric ource and voltage.
Thi pump i multi voltage type of AC100V/AC200V.
Voltage can be changed at terminal block.
Thi pump i wired to 100V when delivered to you.
Check your electric ource, voltage, and wire correctly to terminal block.
Improper wiring and incorrect voltage can cause motor burnout.
Check voltage
Danger of problem recurrence and failure
If protective device activate , be ure to turn off electric ource and in pect
cau e to olve the problem. Do not operate until problem i olved.
Operation while problem is left unsolved can cause problem recurrence and failure.
In pect cau e of
problem

-14-
Chart － 1
Voltage
V
Frequency
Hz
Recommended breaker (or
protective device) capacity
A
１００ ５０ ４．０
１００ ６０ ４．６
１１５ ６０ ４．３
２００ ５０ ２．０
２００ ６０ ２．３
２３０ ５０ ２．５
２３０ ６０ ２．１

-15-
How to wire
① Remove 4pcs. of M5 bolt at motor terminal box and remove protection cover.
※ Be careful not to lose removed M5 bolts and washer.
② Wiring diagram is shown inside protection cover.
You can change to a 100V or 200V connection by changing terminal plate (2pcs.).
※
※※
※ It i wired to 100V when delivered to you.
③ If you want to change to a 200V connection, remove M5 nut of electric source
terminal and change terminal plate as illustrated below.
④ Connect electric cable to terminal by using cable gland at φ 22mm hole of motor
terminal box.
⑤ Insert electric wire through cable gland on the bottom side of terminal box.
⑥ Connect each phase L N to each electric source terminal respectively in
accordance with the below wiring diagram.

-16-
Turning Direction
Cap
Inlet
Outlet
3.2 Te t operation
CAUTION
Danger of cap to fly
Remove cap from inlet and outlet.
Operation with cap being fitted can cause cap to fly by intake or exhaust impetus,
resulting in accident, failure, or bodily injury from contact with flying objects.
Remove cap
Danger of foreign matter entering inlet
When checking turning direction, be careful not to enter foreign matter into an
inlet.
Foreign matter entering inlet can cause failure.
Prevent foreign
matter from entering
Danger of overheating
Check that cooling fan i turning and cooling air i flowing.
If not, it can cause accident, failure or bodily injury such as burns due to overheating.
Check fan
Te t operation
① Open inlet and outlet
Remove caps (2 places)
from inlet and outlet of
vacuum pump.
② Check turning direction
Open inlet, turn on electrical
source to start operating
vacuum pump, and Check
that air comes out from outlet.
If you fit pump to vacuum system and control operation of vacuum pump by
remote control,
fir t check pump it elf for turning direction and then fit it to
vacuum system.

-17-
3.3 Connection to vacuum y tem (chamber)
Inlet is NW25 (Internal screw size : Rc 3/8) and outlet is NW16.
CAUTION
Danger of exhau t di ruption
When connecting exhau t piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping ize and length o that it doe
not cau e exhau t re i tance.
Exhaust resistance can disrupt air flow, resulting in failure and over current.
Pay attention to
exhau t re i tance
Danger of foreign matter entering inlet
If you u e the eal material or the adhe ive, etc. to prevent Leak of the joint when
piping with internal crew of inlet, be careful not to enter the eal material or the
adhe ive into an inlet.
The seal material or the adhesive entering inlet can cause failure.
Prevent foreign
matter from entering
Important
U e i olation valve between vacuum y tem and inlet.
Isolation valve is necessary to prevent the drawback of debris attached to the inside of vacuum pump into the
vacuum chamber during start up and shut down. (We recommend the use of leak valve also). We recommend
the use of an
automatic valve as the isolation valve which closes during power failure in order to prevent the
drawback of debris inside pump into the vacuum chamber during power failure.
U e the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of a flexible tube between inlet of vacuum pump and vacuum chamber so that vibration
of pump does not transmit to vacuum chamber.
When connecting exhau t piping to outlet of vacuum pump, refer to the following ize and length.
・ max. 9m direct pipe length for exhaust pipe size Rc3/8 (inner dia.12.5)
But if pipe length becomes longer, use a larger size exhaust pipe.
Make ure that exhau t piping i not clogged during pump operation.
Make sure that pressure at outlet does not exceed atmospheric pressure at any conditions.
Chamber
I olation valve
(Automatic valve)
Leak
valve
Vacuum pump
Outlet duct
Inlet Outlet
DVSL-100C

-18-
4. Operation
Be sure to use the procedure below to start up or shut down the pump.
・ When you do not use air flush device,
proceed 4.1 Standard operation [page 20].
・ When you use air flush device,
proceed 4.2 Air-flu h operation [page 21].
WARNING
Danger of explo ion and ignition
Do not evacuate ga which i hazardou to human or explo ive, flammable, or
corro ive.
Do not evacuate with ub tance containing chemical , olvent , and
powder .
If done, it can cause failure or bodily injury by gas, explosion or ignition.
※ When evacuating vapor, operate in accordance with 4.2 [page 21].
※ Fluorine rubber seal specification can be used for exhaust some solvents .
However It is not guaranteed fluorine rubber can be used for all solvents.
Never evacuate
hazardou ga
Danger of entanglement and foreign matter di per al
Never put finger or foreign matter into air hole of bracket.
If done, it can cause bodily injury from entanglement with turning section, or foreign
matter dispersal.
Avoid foreign matter
Danger of electric hock and entanglement
Do not remove or alter afeguard or in ulation part .
If done, it can cause bodily injury from electric shock or turning section and it can cause
deteriorated performance and operating lifetime, and invalidate guarantee.
Never alter
Danger of failure and bodily injury
Change air-flu h port only after vacuum pump i topped.
If you change it during vacuum pump operation, it can cause vacuum pump failure and
bodily injury.
Change after
vacuum pump i
topped
Finger, foreign matter
Air hole of bracket