Anest Iwata ISP-1000 User manual

.
Instruction Manual (Original Instructions)
Oil-free Scroll Vacuum Pump
ISP-1000
※ Before use, be sure to fill in the blank spaces below for future repair an after-service.
Serial No.
Who sol it to you
Purchase ate
When you began
operation
This instruction manual inclu es very important warnings, cautions an
operating
proce ure in or er to operate this pump safely an efficiently.
Be sure to rea this instruction manual thoroughly an fully un erstan before
operation.
After rea ing it, store it in a convenient place for imme iate an future rea ing.
LR104996
Our product have got CSA approval.
(Cana ian Stan ar s Association)

-1-
Important information
Be sure to rea this instruction manual to un erstan how to operate equipment
correctly. Only operators, who fully un erstan warnings, cautions an instructions,
are to operate the equipment. Improper operation (mishan ling) can cause serious
bo ily injury, eath, fire or explosion.
Store this manual in a convenient place for imme iate an future reference.
◆ Regar ing safety
・ The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws an regulations pertaining to fire, electricity, an
other safety regulations, as well as corporate regulations.
・ Pay special attention to items which are shown by the below marks an symbols.
・ Symbols an marks have the following meanings.
Examples of marks
WARNING
In icates a potentially hazar ous situation which, if not
avoi e , may result in serious injury or loss of life.
CAUTION
In icates a potentially hazar ous situation which, if not
avoi e , may result in minor or mo erate injury or property
amage.
Examples of symbols
In icates [Beware]. We will explain briefly in or near the symbol.
(The example on the left is [Beware of electric shock]).
In icates [Prohibite action]. We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
In icates [Require action]. We will explain briefly in or near the symbol.
(The example on the left is [Be sure to groun ]).
＊ We shall not be responsible for any injury or amage cause by isregar of
warnings, cautions or instructions.
Supplementary notes
Important
In icates notes which we ask you to observe. They are helpful to
achieve full performance an functionality of the equipment.

-2-
For saf op ration
Below is very important information about how to safely operate the equipment.
Before operation, be sure to rea an fully un erstan the contents.
WARNING
B car ful about
hoisting
Dang r of cargo collaps
Be careful to install vacuum pump using
motor eyebolt an crane with sufficient
allowable loa capacity (ISP-1000 mass
56kgs) while paying attention to stability of
suspen e loa . If not, it can cause
amage, failure or bo ily injury from falling
cargo ue to hoisting failure, or by being
caught between suspen e cargo an
other material.
Avoid moistur
Dang r of l ctric shock
Install in an area which is not expose to
moisture such as rain or steam. If moisture
comes into an tact with the electric
source connection, it can cause fire or
bo ily injury ue to short-circuit or electric
shock.
Install at a saf
sit
Dang r of xplosion, fir and
accid nt
Install in an area free from explosive,
flammable or corrosive substances.
If not, it can cause explosion, fire or
acci ent.
Ask qualifi d
l ctrician
Dang r of short-circuit and
l ctric shock
Ask a qualifie electrician to perform
electric wiring.
If not, short-circuit or electric shock can
cause fire or bo ily injury.
Turn off l ctric
sourc
Dang r of l ctric shock and
ntangl m nt
Be sure to turn off electric source on
buil ing site before wiring. If not, it can
cause electric shock or bo ily injury ue to
turning objects.
Install
ov rcurr nt
prot ctiv d vic
Dang r of accid nt, fir and
failur
Be sure to install protective evice to
protect circuitry.
We recommen overcurrent protective
evice (rate 15A) to protect branch
circuit.
If equipment is not stoppe in an
emergency, it can cause acci ent, fire or
failure.
Install
m rg ncy stop
switch
Dang r of accid nt, fir or failur
Be sure to install an electric source
emergency stop switch (or protective
evice that can urgently stop).
If equipment is not stoppe in an
emergency, it can cause acci ent, fire or
failure.
Install short
circuit prot ctiv
d vic
Dang r of fir and l ctric shock
Install short circuit protective evice.
If not, it can cause bo ily injury ue to fire
or electric shock.
Install motor
prot ctiv circuit
br ak r to
prot ct motor
Dang r of l ctric fir and l ctric
shock
Install motor protective circuit breaker to
protect motor.
If not, it can cause bo ily injury ue to
electric fire or electric shock.
If you have any questions about the
selection of protective evices, contact
either the ealer who sol it to you or us.
B car ful about
wiring
Dang r of short-circuit and
l ctric shock
We recommen an electric source cable
of more than 2mm
2
(more than rate 15A)
cross section area for electric source
cable an groun cable. Be careful to
avoi voltage rop consi ering local
situation. If not, it can cause a short-circuit
fire an may result in bo ily injury from
electric shock.

-3-
For saf op ration
WARNING
Us crimp-styl
t rminal
Dang r of short-circuit and
l ctric shock
Fit firmly proper roun type crimp-style
terminal to electric source cable using
crimp tool an connect to motor terminal
section.
If not, it can cause short-circuit fire or
bo ily injury from electric shock ue to
looseness or isconnection.
Prot ct cabl
from b ing
pull d
Dang r of short-circuit and
l ctric shock
Be sure to fit cable glan to hole of
φ 22mm at motor terminal box.
If not, it can cause short-circuit fire or
bo ily injury from electric shock.
B sur to
ground
Dang r of l ctric shock
Connect groun cable to groun terminal
in motor terminal box.
If not, it can cause bo ily injury from
electric shock.
N v r vacuat
hazardous gas
Dang r of xplosion and ignition
Do not evacuate gas which is hazar ous
to humans or explosive, flammable, or
corrosive. Do not evacuate with
substances containing chemicals,
solvents, an pow ers.
If one, it can cause failure or bo ily
injury by gas, explosion or ignition.
Avoid for ign
matt r
Dang r of ntangl m nt and
for ign matt r disp rsal
Never put finger or foreign matter into air
hole of fan cover, air hole of motor or
clearance between FS(1) an FS(2)
cooling fins.
If one, it can cause bo ily injury from
entanglement with turning section, or
foreign matter ispersal
.
N v r alt r
Dang r of l ctric shock and
ntangl m nt
Do not remove or alter safeguar s or
insulation parts.
If one, it can cause bo ily injury from
electric shock or turning section an it
can cause eteriorate performance an
operating lifetime, an invali ate
guarantee.
Chang aft r
vacuum pump is
stopp d
Dang r of failur and bodily injury
Change air-flush port only after vacuum
pump is stoppe . If you change it uring
vacuum pump operation, it can cause
vacuum pump failure an bo ily injury.
Conduct
p riodical
maint nanc and
insp ction
Dang r of failur and bodily injury
Con uct perio ical maintenance an
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump, an
bo ily injury.
B car ful about
high t mp ratur
Dang r of burns
Con uct maintenance an inspection only
after vacuum pump becomes cool enough.
Maintenance an inspection soon after
vacuum pump stops can cause burn injury.
Turn off l ctric
sourc
Dang r of l ctric shock
Be sure to con uct maintenance an
inspection after you turn off electric
source. If not, it can cause bo ily injury
from electric shock or turning object.
Ask sp cialist to
p rform r pairs
Dang r of accid nt, failur and
short r op rating lif tim
Ask specialist to perform repairs.
Defective repairs can cause acci ent,
failure or shorter operating lifetime.

-4-
For saf op ration
CAUTION
D tach
packaging tray
Dang r of abnormal vibration
Detach equipment from packaging tray.
Operation while equipment is mounte on
packaging tray can cause abnormal
vibration, resulting in acci ent an failure.
Us at
d signat d
t mp ratur
Dang r of ov rh ating
Operate at ambient temperature of 10 ℃～ 40 ℃ .
Operating at a temperature range other than that
esignate can cause acci ent, failure or bo ily
injury such as burns ue to overheating.
Pay a tt ntion
to v nt i lati o n
Dang r of ov rh ating
Install in a well-ventilate area. Poor
ventilation can isrupt cooling an cause
acci ent, failure or bo ily injury such as
burns since this vacuum pump is an
air-coole type.
Avoi d d u s t
Dang r of dust
Be sure site is free from ust.
Sucking in of ust can cause failure.
Insta l l on a
soli d , l v l
floor
Dang r of unbalanc
Be sure to install on soli an level floor
(less than 5° inclination).
Uneven installation can cause failure an
movement of vacuum pump. If installation
floor is unstable, fix pump base with 4
bolts using M10 tap section.
Avoi d d i r ct
sunl i g h t
Dang r of ov rh ating
Install where equipment is not expose to irect
sunlight.
Vacuum pump expose to irect sunlight can
overheat, resulting in failure.
Ch ck voltag
Motor burnout
Before oing any wiring, check electric
source an voltage. This pump is a multi
voltage type of AC200V/AC400V. Voltage
can be change at terminal block. This
pump is wire to 200V when elivere to
you. Check your electric source, voltage,
an wire correctly to terminal block.
Improper wiring an incorrect voltage can
cause motor burnout.
Insp ct caus
of probl m
Dang r of probl m r curr nc and
failur
If protective evice or thermal protector activates,
be sure to turn off electric source an inspect
causes to solve the problem. Do not operate until
problem is solve . Operation while problem is left
unsolve can cause problem recurrence an
failure.
R mov blank
flang
Dang r of xhaust disruption
Remove blank flange from inlet an outlet.
Operation with blank flange being fitte
can isrupt exhaust or cause blank flange
to fly by exhaust impetus, resulting in
acci ent, failure, or bo ily injury from
contact with flying objects.
Pr v nt for ign
matt r from
nt ring
Dang r of for ign matt r nt ring inl t
When checking turning irection, be careful not to
enter foreign matter into an inlet. Foreign matter
entering inlet can cause failure.
Pay att ntion to
xhaust
r sistanc
Dang r of xhaust disruption
When connecting exhaust piping to
vacuum pump an when combining piping
with another vacuum pump, pay attention
to piping size an length so that it oes not
cause exhaust resistance. Exhaust
resistance can isrupt air flow, resulting in
failure an over-current.
Start or stop
aft r closing
isolation valv
Dang r of vacuum br ak and pollution
Be sure to close isolation valve between vacuum
pump an vacuum system (chamber) uring
start-up an stop. Start-up or stop with isolation
valve in the open position can raw back gas an
ebris attache to insi e of pump to vacuum
chamber ue to pressure ifferential, resulting in
vacuum break an pollution on vacuum chamber
si e.

-5-
For saf op ration
CAUTION
Op n air
inl t
Dang r of abnormal sound and
failur
Open inlet to atmosphere for about 5
secon s before restarting vacuum pump.
If not, it can unbalance temperature insi e
vacuum pump, resulting in failure.
B wa r
t mp ra t u r
of in t a k g a s
Dang r of xc ding p rmissibl
t mp ratur of intak gas
If intake gas temperature is over 50 ℃ , be
sure to install a chiller or trap between
vacuum pump an vacuum chamber so
that gas intake temperature of vacuum
pump keeps below 50
℃ . If not, vacuum
pump temperature can increase, resulting
in failure.
Caution aft r
xhausting vapor
Dang r of insuffici nt vapor
xhaust
After evacuating vapor, o air-flush
operation for at least one hour. If you close
air-flush port or stop vacuum pump soon
after evacuating vapor, con ense water
will remain insi e vacuum pump which will
cause failure.
B war of intak
gas volum
Dang r of xc ding p rmissibl
intak gas volum
When sen ing N
2
gas or ry air into
air-flush port, pressure shoul be the
same as atmospheric pressure an flow
rate shoul be less than 10NL/min. If not,
it can increase pressure insi e vacuum
pump, resulting in failure.
Op rat whil
op ning air-flush
port
Dang r of r maining moistur
When evacuating moisture, be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port is
close , con ense moisture will remain
insi e vacuum pump an cause failure.

-6-
Wh r to attach warning stick rs
Wh r to attach warning stick rs
Always keep warning stickers clean an legible. If they become irty or etache , replace them
with new ones. If you nee replacement stickers, contact the ealer who sol the vacuum pump
to you.
Hour counter cover
Protection cover
B war of l ctric shock
B car ful about high t mp ratur

-7-
Contents
Important information.................................................................................................................1
Important information .............................................................................................................1
For saf op ration ...................................................................................................................2
Cont nts .....................................................................................................................................7
1. B for us ................................................................................................................................8
1.1 Ch ck th product .............................................................................................................8
2. Nam and structur of ach s ction...................................................................................10
3. Installation..............................................................................................................................11
3.1 Wiring................................................................................................................................12
3.2 T st op ration ..................................................................................................................15
3.3 Conn ction to vacuum syst m ......................................................................................16
4. Op ration................................................................................................................................17
4.1 Standard op ration..........................................................................................................19
4.1.1 Start-up ......................................................................................................................19
4.1.2 Shut-down .................................................................................................................19
4.2 Air-flush op ration...........................................................................................................20
4.2.1 Pr paration ................................................................................................................20
4.2.2 Startup and shut-down ............................................................................................21
4.2.3 Wh n r turning to standard op ration...................................................................21
5. Maint nanc and insp ction................................................................................................22
5.1 Daily maint nanc and insp cction ..............................................................................22
5.2 Maint nanc .....................................................................................................................23
6. Probl ms and r m di s .......................................................................................................24
7. Disposal..................................................................................................................................25
8. Sp cifications ........................................................................................................................25
8.1 Sp cifications ..................................................................................................................25
8.2 Dim nsions ......................................................................................................................26
8.3 P rformanc data ............................................................................................................26

-8-
Serial number
○○ ○○○
Alphabetic Numeric
Vinyl bag
(Air muffler is containe insi e)
1. B for us
1.1 Ch ck th product
・
・・
・ Ch ck that th packag is right-sid -up b for op ning.
・
・・
・ Ch ck that th mod l of th product is th sam as th on you ord r d.
How to r ad mod l nam
I S P – 1 0 0 0 – T H A
・
・・
・ Ch ck that th r is no damag .
If there is any amage, contact either the ealer who sol it to you or us.
・
・・
・ Ch ck th following acc ssori s.
Instruction manual (this one)
Air muffler for air-flushing (which is attache to eyebolt of motor)
※ Please prepare electric source cor s, crimp-style terminal, protective evices,
piping to inlet, an piping from outlet on customer si e.
Displacement (swept volume)
1000:1000 L/min at 50Hz Motor
Inlet irection
H
： horizontal
V
： vertical
ISP ： mo el
ISP
-
1000
-
TV
A
ISP-1000-THA
Three phase
Year of manufacture

-9-
Op n packag
WARNING
Dang r of cargo collaps
B car ful to install vacuum pump using motor y bolt and cran with suffici nt
allowabl load capacity (ISP-1000 mass 56kgs) whil paying att ntion to stability
of susp nd d load.
If not, it can cause amage, failure or bo ily injury from falling cargo ue to hoisting
failure, or by being caught between suspen e cargo an other material.
B car ful about
hoisting
CAUTION
Dang r of abnormal vibration
D tach quipm nt from packaging tray.
Operation while equipment is mounte on packaging tray can cause abnormal vibration,
resulting in acci ent an failure.
D tach
packaging tray
Packing tray
Cover
Inner Cover
Upper Cover

-10-
2. Nam and structur of ach s ction
Structur of vacuum pump
Turning Direction Plate
Eye bolt
Motor Base
Motor
IN Plate
OUT Plate
Inlet NW40
Outlet NW40
Air Flush Port
(Rc1/8)
Fan Cover
Hour Counter
Cooling Fan
Orbiting Scroll OS
Fixe Scroll
FS(2)
Fixe Scroll
FS(1)
Cooling Fan

-11-
3. Installation
WARNING
Dang r of l ctric shock
Install in an ar a which is not xpos d to moistur such as rain or st am.
If moisture comes into an tact with the electric source connection, it can cause fire or
bo ily injury ue to short-circuit or electric shock.
Avoid moistur
Dang r of xplosion, fir and accid nt
Install in an ar a fr from xplosiv , flammabl or corrosiv substanc s.
If not, it can cause explosion, fire or acci ent.
Install at a saf sit
CAUTION
Dang r of ov rh ating
Op rat at ambi nt t mp ratur of 10
℃
℃℃
℃～
～～
～ 40 ℃
℃℃
℃ .
Operating at a temperature range other than that esignate can cause acci ent, failure
or bo ily injury such as burns ue to overheating.
Us at d signat d
t mp ratur
Dang r of ov rh ating
Install in a w ll-v ntilat d ar a (r f r to b low chart).
Poor ventilation can isrupt cooling an cause acci ent, failure or bo ily injury such as
burns since this vacuum pump is an air-coole type.
N c ssary v ntilat d air volum
Ov r 12m
3
/min
Pay a tt ntion t o
v n t i lati o n
Dang r of dust
B sur sit is fr from dust.
Sucking in of ust can cause failure.
Avoi d d u s t
Dang r of unbalanc
B sur to install on solid and l v l floor (l ss than 5° inclination).
Uneven installation can cause failure an movement of vacuum pump. If installation
floor is unstable, fix pump base with 4 bolts using M10 tap section.
Insta l l on a
soli d , l v l fl o o r
Dang r of ov rh ating
Install wh r quipm nt is not xpos d to dir ct sunlight.
Vacuum pump expose to irect sunlight can overheat, resulting in failure.
Avoi d d i r ct
sunl i g h t
Important
When buil ing vacuum pump into vacuum system, pay attention to space for maintenance,
ambient temperature an piping.
If you have any questions, contact the ealer who sol it to you or us.
M10 tap section
less than 5°
inclination

-12-
3.1 Wiring
WARNING
Dang r of short-circuit and l ctric shock
Ask a qualifi d l ctrician to p rform l ctrical wiring.
If not, short-circuit or electric shock can cause fire or bo ily injury.
Ask qualifi d
l ctrician
Dang r of l ctric shock and ntangl m nt
B sur to turn off l ctric sourc on building sit b for wiring.
If not, it can cause electric shock or bo ily injury ue to turning objects.
Turn off l ctric
sourc
Dang r of accid nt, fir and failur
B sur to install prot ctiv d vic to prot ct circuitry. W r comm nd
ov rcurr nt prot ctiv d vic (rat d 15A) to prot ct branch circuit.
If equipment is not stoppe in an emergency, it can cause acci ent, fire or failure.
Install ov rcurr nt
prot ctiv d vic
Dang r of accid nt, fir or failur
B sur to install an l ctric sourc m rg ncy stop switch (or prot ctiv d vic
that can urg ntly stop).
If equipment is not stoppe in an emergency, it can cause acci ent, fire or failure.
Install m rg ncy
stop switch
Dang r of fir and l ctric shock
Install short circuit prot ctiv d vic .
If not, it can cause bo ily injury ue to fire or electric shock.
Install short circuit
prot ctiv d vic
Dang r of l ctric fir and l ctric shock (r f r to chart 1 on pag 14)
Install motor prot ctiv circuit br ak r to prot ct motor.
If not, bo ily injury ue to electric fire or electric shock can result.
If you have any questions about the selection of protective evices, contact either the
ealer who sol it to you or us.
Install motor
prot ctiv circuit
br ak r to prot ct
motor
Dang r of short-circuit and l ctric shock
W r comm nd an l ctric sourc cabl of mor than 2mm
2
(mor than rat d 15A)
cross s ction ar a for l ctric sourc cabl and ground cabl .
B car ful to avoid voltag drop consid ring local situation.
If not, it can cause a short-circuit fire an may result in bo ily injury from electric shock.
B car ful about
wiring
Dang r of short-circuit and l ctric shock
Fit firmly prop r round typ crimp-styl t rminal to l ctric sourc cabl using
crimp tool and conn ct to motor t rminal s ction.
If not, it can cause short-circuit fire or bo ily injury from electric shock ue to looseness
or isconnection.
Us crimp-styl
t rminal
Dang r of short-circuit and l ctric shock
B sur to fit cabl gland to hol of φ 22mm at motor t rminal box.
If not, it can cause short-circuit fire or bo ily injury from electric shock.
Prot ct cabl from
b ing pull d
Dang r of l ctric shock
Conn ct ground cabl to ground t rminal in motor t rminal box.
If not, it can cause bo ily injury from electric shock.
B sur to ground

-13-
Use roun type terminal.
Activate the emergency stop by electric source
switch or protective evice.
Avoi motor burnout by protective evice (chart 1).
Use rate over 15A electric source cable an
groun cable.
Fit cable-glan .
Connect groun cor to groun terminal.
CSA R quir m nt
Motor not protecte . External overheat protection in accor ance with CE co e, part 1, must be provi e .
Min. circuit ampacity of con uctor is 15A
Max. branch circuit breaker is 15A
Wh n you us d this pump in Europ .
This vacuum pump must be equippe with a main isconnect evice in accor ance with requirements of
EN60204-1, clause 5.3.2. It is recommen e to use a circuit breaker as main breaker which is suitable for
isolation accor ing to EN60947-2 an is equippe with an operating han le which is lockable in OFF position
an complies with the other requirements of EN60204-1, clause 5.3.
CAUTION
Motor burnout
B for doing any wiring, ch ck l ctric sourc and voltag .
This pump is a multi voltag typ of AC200V/AC400V.
Voltag can b chang d at t rminal block.
This pump is wir d to 200V wh n d liv r d to you.
Ch ck your l ctric sourc , voltag , and wir corr ctly to t rminal block.
Improper wiring an incorrect voltage can cause motor burnout.
Ch ck voltag
Dang r of probl m r curr nc and failur
If prot ctiv d vic or th rmal prot ctor activat s, b sur to turn off l ctric
sourc and insp ct caus s to solv th probl m. Do not op rat until probl m is
solv d.
Operation while problem is left unsolve can cause problem recurrence an failure.
Insp ct caus of
probl m
Cable-glan
Groun Terminal
M5 Bolt
Electric Source
M4 Nut

-14-
Terminal plate
Terminal Block
Electric Source
Terminal M4 Nut
Groun Terminal
M5 Bolt
200V Connection
(When elivere to you)
400V Connection
Chart
－ 1
Voltage
V
Frequency
Hz
Recommen e protective
evice (or breaker)
capacity
A
200 50 6.3
200 60 6.7
208 60 6.7
230 60 6.6
380 50 3.6
400 50 3.9
415 50 4.1
460 60 3.8
How to wir
① Remove 4pcs. of M5 bolt at motor terminal box an remove protection cover.
※ Be careful not to lose remove M5 bolts an washer.
② Wiring iagram is shown insi e protection cover.
You can change to a 200V or 400V connection by changing terminal plate (3pcs.).
※
※※
※ It is wir d to 200V wh n d liv r d to you.
③ If you want to change to a 400V connection, remove M4 nut of electric source
terminal an change terminal plate as illustrate below.
④ Insert electric source cor through cable glan on the bottom si e of terminal box.
⑤ Connect each phase L1-L2-L3 to each electric source terminal respectively in
accor ance with the below wiring iagram.

-15-
Turning Direction
Turning Direction plate
3.2 T st op ration
CAUTION
Dang r of xhaust disruption
R mov blank flang from inl t and outl t.
Operation with blank flange being fitte can isrupt exhaust or cause blank flange to fly
by exhaust impetus, resulting in acci ent, failure, or bo ily injury from contact with flying
objects.
R mov blank
flang
Dang r of for ign matt r nt ring inl t
Wh n ch cking turning dir ction, b car ful not to nt r for ign matt r into an
inl t. For ign matt r nt ring inl t can caus failur .
Pr v nt for ign
matt r from nt ring
T st op ration
① Open inlet an outlet
Remove blank flanges (2 places)
from inlet an outlet of
vacuum pump.
② Check turning irection
Open inlet, turn on electrical source
to start operating vacuum pump.
Vacuum pump turns clockwise
when viewe from motor si e.
Check that comes out of air outlet.
If air oes not come out from outlet, vacuum pump may turn in reverse.
In that case, stop vacuum pump, turn off main electrical source an change 2 out
of 3 wires of electric source connection an change turning irection to correct one.
If you fit pump to vacuum system an control operation of vacuum pump by
remote control,
first ch ck pump its lf for turning dir ction an then fit it to
vacuum system.
Important
Vacuum pump turns clockwis wh n vi w d from motor sid .
If pump turns counter-clockwise, stop vacuum pump, turn off electrical source an change 2 out of 3 wires of
electrical source connection.
Blank Flange
Clamp
Centering Ring with O-ring

-16-
3.3 Conn ction to vacuum syst m (chamb r)
Inlet is NW40 an outlet is NW40.
CAUTION
Dang r of xhaust disruption
Wh n conn cting xhaust piping to vacuum pump and wh n combining piping
with anoth r vacuum pump, pay att ntion to piping siz and l ngth so that it do s
not caus xhaust r sistanc .
Exhaust resistance can isrupt air flow, resulting in failure an over-current.
Pay att ntion to
xhaust r sistanc
Important
Us isolation valv b tw n vacuum syst m and inl t.
Isolation valve is necessary to prevent the rawback of ebris attache to the insi e of vacuum pump into the
vacuum chamber uring start-up an shut- own. (We recommen the use of leak valve also). We recommen
the use of an
automatic valv as the isolation valve which closes uring power failure in or er to prevent the
rawback of ebris insi e pump into the vacuum chamber uring power failure.
Us th cl an conn cting pip b tw n vacuum chamb r and vacuum pump.
We recommen the use of a flexible tube between inlet of vacuum pump an vacuum chamber so that vibration
of pump oes not transmit to vacuum chamber.
Wh n conn cting xhaust piping to outl t of vacuum pump, r f r to th following siz and l ngth.
・ max. 40m irect pipe length for exhaust pipe size NW40 (inn r dia.40)
But if pipe length becomes longer, use a larger size exhaust pipe.
Mak sur that xhaust piping is not clogg d during pump op ration.
Make sure that pressure at outlet oes not excee atmospheric pressure at any con itions.
Chamb r
Isolation valv
(Automatic valv )
L ak
valv
Vacuum pump
Outl t duct
Inl t Outl t
ISP-1000

-17-
4. Op ration
Be sure to use the proce ure below to start up or shut own the pump.
・ When you o not use air-flush evice,
proc d 4.1 Standard op ration [pag 19].
・ When you use air-flush evice,
proc d 4.2 Air-flush op ration [pag 20].
WARNING
Dang r of xplosion and ignition
Do not vacuat gas which is hazardous to humans or xplosiv , flammabl , or
corrosiv .
Do not vacuat with substanc s containing ch micals, solv nts, and
powd rs.
If one, it can cause failure or bo ily injury by gas, explosion or ignition.
※ When evacuating vapor, operate in accor ance with 4.2 [page 20].
N v r vacuat
hazardous gas
Dang r of ntangl m nt and for ign matt r disp rsal
N v r put fing r or for ign matt r into air hol of fan cov r, air hol of motor or
cl aranc b tw n FS(1) and FS(2) cooling fins.
If one, it can cause bo ily injury from entanglement with turning section, or foreign
matter ispersal.
Avoid for ign matt r
Dang r of l ctric shock and ntangl m nt
Do not r mov or alt r saf guards or insulation parts.
If one, it can cause bo ily injury from electric shock or turning section an it can cause
eteriorate performance an operating lifetime, an invali ate guarantee.
N v r alt r
Dang r of failur and bodily injury
Chang air-flush port only aft r vacuum pump is stopp d.
If you change it uring vacuum pump operation, it can cause vacuum pump failure an
bo ily injury.
Chang aft r
vacuum pump is
stopp d
Fing r, for ign matt r
Fing r, for ign matt r
Clearance between FS(1) an FS(2)
cooling fins
Air hole of fan cover
Air hole of motor

-18-
CAUTION
Dang r of xhaust disruption
R mov blank flang from inl t and outl t.
Operation with blank flange being fitte can isrupt exhaust or cause blank flange to fly
by exhaust impetus, resulting in acci ent, failure, or bo ily injury from contact with flying
objects.
R mov blank
flang
Dang r of vacuum br ak and pollution
B sur to clos isolation valv b tw n vacuum pump and vacuum syst m
(chamb r) during start-up and stop.
Start-up or stop with isolation valve in the open position can raw back gas an ebris
attache to insi e of vacuum pump to vacuum chamber ue to pressure ifferential,
resulting in vacuum break an pollution on vacuum chamber si e.
Start or stop aft r
closing isolation
valv
Dang r of abnormal sound and failur
Op n inl t to atmosph r for about 5 s conds b for r starting vacuum pump.
If not, it can unbalance temperature insi e vacuum pump, resulting in failure.
Op n air i n l t
Dang r of xc ding p rmissibl t mp ratur of intak gas
If intak gas t mp ratur is ov r 50
℃
℃℃
℃ , b sur to install a chill r or trap
b tw n vacuum pump and vacuum chamb r so that gas intak t mp ratur of
vacuum pump k ps b low 50 ℃
℃℃
℃ .
If not, vacuum pump temperature can increase, resulting in failure.
B wa r
t mp ra t u r o f
intak g a s
Dang r of r maining moistur
Wh n vacuating moistur , b sur to op n air-flush port (air-flush op ration).
If you evacuate vapor while air-flush port is close , con ense water will remain insi e
vacuum pump an cause failure.
Op rat whil
op ning air-flush
port
Dang r of insuffici nt vapor xhaust
Aft r vacuating vapor, do air-flush op ration for at l ast on hour.
If you close air-flush port or stop vacuum pump soon after evacuating vapor, con ense
moisture will remain insi e vacuum pump, which will cause failure.
Caution aft r
xhausting vapor
Dang r of xc ding p rmissibl intak gas volum
Wh n s nding
N
2
gas or dry air into air-flush port, pr ssur should b th sam
as atmosph ric pr ssur and flow rat should b l ss than 10NL/min.
If not, it can increase pressure insi e vacuum pump, resulting in failure.
B war of intak
gas volum
Important
If it tak s tim to r ach ultimat pr ssur of pump during initial op ration (also op ration
aft r pump has not b n us d for a long tim ),
Close inlet, an continue operation for 6 ～ 8 hours while opening inlet for 3 ～ 5 secon s to atmosphere 2 ～ 3
times per hour. During pump stoppage, moisture might have entere insi e of pump an eteriorate
performance to reach ultimate pressure.
If pump has vacuat d liquid such as wat r or high humid air (ov r 60%RH),
Moisture can eposit insi e pump an cause pump failure. In that case, close isolation valve, an open inlet to
atmosphere for 3
～ 5 secon s several times an exhaust moisture insi e pump to outsi e.
If pump has continu d op ration around ultimat pr ssur or continuously vacuat d high
humid gas
Moisture can be con ense an remains insi e pump, causing insufficient ultimate pressure an failure.
In that case, o air-flush operation in accor ance with 4.2 [page 18].