Anest Iwata GVSU-500B User manual

.
Instruction Manual
Oil-free Scroll Vacuum pump
GVSU-500B
※ Before use, be sure to fill in the blank spaces below for future repair and after-service.
Serial No.
Who sold it to you
Purchase date
When you began
operation
This instruction manual includes very important warnings, cautions and operating
procedure in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it in a convenient place for immediate and future reading.

-1-
Important information
Be sure to read this instruction manual to understand how to operate equipment
correctly. Only operators, who fully understand warnings, cautions and instructions,
are to operate the equipment. Improper operation (mishandling) can cause serious
bodily injury, death, fire or explosion.
Store this manual in a convenient place for immediate and future reference.
◆ Regarding safety
・ The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws and regulations pertaining to fire, electricity, and
other safety regulations, as well as corporate regulations.
・ Pay special attention to items which are shown by the below marks and symbols.
・ Symbols and marks have the following meanings.
Examples of marks
WARNING
Indicates a potentially hazardous situation which, if not
avoided, may result in serious injury or loss of life.
CAUTION
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury or property
damage.
Examples of symbols
Indicates [Beware]. We will explain briefly in or near the symbol.
(The example on the left is [Beware of electric shock]).
Indicates [Prohibited action]. We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
Indicates [Required action]. We will explain briefly in or near the symbol.
(The example on the left is [Be sure to ground]).
＊ We shall not be responsible for any injury or damage caused by disregard of
warnings, cautions or instructions.
Supplementary notes
Important
Indicates notes which we ask you to observe. They are helpful to
achieve full performance and functionality of the equipment.

-2-
For safe operation
Below is very important information about how to safely operate the equipment.
Before operation, be sure to read and fully understand the contents.
WARNING
Be careful about
hoisting
Danger of cargo collapse
Be careful to install vacuum pump using
elongated hole of connected flange and
crane with sufficient allowable load
capacity (GVSU-500B mass 36kgs) while
paying attention to stability of suspended
load. If not, it can cause damage, failure or
bodily injury from falling cargo due to
hoisting failure, or by being caught
between suspended cargo and other
material.
Avoid moisture
Danger of electric shock
Install in an area which is not exposed to
moisture such as rain or steam. If moisture
comes into and tact with the electric
source connection, it can cause fire or
bodily injury due to short-circuit or electric
shock.
Install at a safe
site
Danger of explosion, fire and
accident
Install in an area free from explosive,
flammable or corrosive substances.
If not, it can cause explosion, fire or
accident.
Ask qualified
electrician
Danger of short-circuit and
electric shock
Ask a qualified electrician to perform
electric wiring.
If not, short-circuit or electric shock can
cause fire or bodily injury.
Turn off electric
source
Danger of electric shock and
entanglement
Be sure to turn off electric source on
building site before wiring. If not, it can
cause electric shock or bodily injury due to
turning objects.
Install over
current
protective device
Danger of accident, fire and
failure
Be sure to install protective device to
protect circuitry.
We recommend over current protective
device (rated 15A) to protect branch
circuit.
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
Install
emergency stop
switch
Danger of accident, fire or failure
Be sure to install an electric source
emergency stop switch (or protective
device that can urgently stop).
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
Install short
circuit protective
device
Danger of fire and electric shock
Install short circuit protective device.
If not, it can cause bodily injury due to fire
or electric shock.
Install overload
protective device
to protect motor
Danger of electric fire and electric
shock
Install overload protective device to protect
motor.
If not, it can cause bodily injury due to
electric fire or electric shock.
Be careful about
wiring
Danger of short-circuit and
electric shock
We recommend an electric source cable
of more than 2mm
2
(more than rated 15A)
cross section area for electric source
cable and ground cable. Be careful to
avoid voltage drop considering local
situation. If not, it can cause a short-circuit
fire and may result in bodily injury from
electric shock.

-3-
Forsafeoperation
WARNING
Use crimp-style
terminal
Danger of short-circuit and
electric shock
Fit firmly proper round type crimp-style
terminal to electric source cable using
crimp tool and connect to motor terminal
section.
If not, it can cause short-circuit fire or
bodily injury from electric shock due to
looseness or disconnection.
Protect cable
from being
pulled
Danger of short-circuit and
electric shock
Be sure to fit cable gland to hole of PG 16
at motor terminal box.
If not, it can cause short-circuit fire or
bodily injury from electric shock.
Be sure to
ground
Danger of electric shock
Connect ground cable to ground terminal
in motor terminal box.
If not, it can cause bodily injury from
electric shock.
Never evacuate
hazardous gas
Danger of explosion and ignition
Do not evacuate gas which is hazardous
to humans or explosive, flammable, or
corrosive. Do not evacuate with
substances containing chemicals,
solvents, and powders.
If done, it can cause failure or bodily
injury by gas, explosion or ignition.
It is not guaranteed fluorine rubber can be
used for all solvents.
Avoid foreign
matter
Danger of entanglement and
foreign matter dispersal
Never put finger or foreign matter into air
holes of fan cover, motor, FS cover.
If done, it can cause bodily injury from
entanglement with turning section, or
foreign matter dispersal
.
Never alter
Danger of electric shock and
entanglement
Do not remove or alter safeguards or
insulation parts.
If done, it can cause bodily injury from
electric shock or turning section and it
can cause deteriorated performance and
operating lifetime, and invalidate
guarantee
.
Change after
vacuum pump is
stopped
Danger of failure and bodily injury
Change air-flush port only after vacuum
pump is stopped. If you change it during
vacuum pump operation, it can cause
vacuum pump failure and bodily injury.
Conduct
periodical
maintenance and
inspection
Danger of failure and bodily injury
Conduct periodical maintenance and
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump, and
bodily injury.
Be careful about
high temperature
Danger of burns
Conduct maintenance and inspection only
after vacuum pump becomes cool enough.
Maintenance and inspection soon after
vacuum pump stops can cause burn
injury.
Turn off electric
source
Danger of electric shock
Be sure to conduct maintenance and
inspection after you turn off electric source.
If not, it can cause bodily injury from
electric shock or turning object.
Ask specialist to
perform repairs
Danger of accident, failure and
shorter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
failure or shorter operating lifetime.

-4-
For safe operation
CAUTION
Use at
designated
temperature
Danger of overheating
Operate at ambient temperature of 5 ℃
～
40 ℃ .
Operating at a temperature range other
than that designated can cause
accident, failure or bodily injury such as
burns due to overheating.
Pay attention
to ventilation
Danger of overheating
Install in a well-ventilated area. Poor ventilation
can disrupt cooling and cause accident, failure
or bodily injury such as burns since this vacuum
pump is an air-cooled type.
Do not block inlet and outlet of cooling air with
obstruction. (Separate inlet side of the cooling
air from obstruction or wall by 10cm or more,
and separate outlet side by 30cm or more)
Avoid dust
Danger of dust
Be sure site is free from dust.
Sucking in of dust can cause failure.
Install on a
solid level
floor
Danger of movement
Please be sure to fix a vacuum pump on solid
and flat floor for installation (within 5
゜
degrees
inclination). Uneven fixing can cause failure and
movement of vacuum pump. Fix the pump base
using four bolts into two deep holes 10 mm in
diameter and 50 mm in length or 10 mm in
diameter and 10 mm in length at the leg of a
pump.
Avoid direct
sunlight
Danger of overheating
Install where equipment is not exposed
to direct sunlight.
Vacuum pump exposed to direct
sunlight can overheat, resulting in
failure.
Check voltage
Motor burnout
Please check electric source and voltage before
wiring. The motor specification is three-phased
AC230V (60Hz). Other related parts have single
voltage. Connection alteration inside motor,
improper wiring to motor and application of
incorrect voltage can cause breakdown such as
motor burnout.
Inspect cause
of problem
Danger of problem recurrence
and failure
If protective device activates, be sure to
turn off electric source and inspect
causes to solve the problem. Do not
operate until problem is solved.
Operation while problem is left unsolved
can cause problem recurrence and
failure.
Remove cap
Danger of cap to fly
Remove cap from inlet and outlet. If the rotation
of the vacuum pump is opposite, operation with
cap being fitted can cause cap to fly by intake or
exhaust impetus, resulting in accident, failure,
or bodily injury from contact with flying objects.
Prevent foreign
matter from
entering
Danger of foreign matter
entering inlet
When checking turning direction, be
careful not to enter foreign matter into
an inlet.
Foreign matter entering inlet can cause
failure.
Check fan
Danger of overheating
Check that cooling fan is turning and cooling air
is flowing.
If not, it can cause accident, failure or bodily
injury such as burns due to overheating.
Pay attention to
exhaust
resistance
Danger of exhaust disruption
When connecting exhaust piping to
vacuum pump and when combining
piping with another vacuum pump, pay
attention to piping size and length so
that it does not cause exhaust
resistance. Exhaust resistance can
disrupt air flow, resulting in failure and
over current.
Prevent foreign
matter from
entering
Danger of foreign matter entering inlet
If you use the seal material or the adhesive,
etc. to prevent Leak of the joint when piping
with internal screw of inlet, be careful not to
enter the seal material or the adhesive into an
inlet.
The seal material or the adhesive entering inlet
can cause failure.

-5-
For safe operation
CAUTION
Start or stop
after closing
isolation valve
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the
open position can draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.
Open air inlet
Danger of abnormal sound and
failure
Open inlet to atmosphere for about 5
seconds before restarting vacuum pump.
If not, it can unbalance temperature inside
vacuum pump, resulting in failure.
Beware
temperature
of intake gas
Danger of exceeding permissible
temperature of intake gas
If intake gas temperature is over 50 ℃ , be
sure to install a chiller or trap between
vacuum pump and vacuum chamber so
that gas intake temperature of vacuum
pump keeps below 50
℃ . If not, vacuum
pump temperature can increase, resulting
in failure.
Operate while
opening air-flush
port
Danger of remaining moisture
When evacuating moisture, be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port is
closed, condensed moisture will remain
inside vacuum pump and cause failure.
Caution after
exhausting vapor
Danger of insufficient vapor
exhaust
After evacuating vapor, do air-flush
operation for at least one hour. If you close
air-flush port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Beware of intake
gas volume
Danger of exceeding permissible
intake gas volume
When sending N
2
gas or dry air into
air-flush port, pressure should be the same
as atmospheric pressure and flow rate
should be less than 10NL/min. If not, it can
increase pressure inside vacuum pump,
resulting in failure.

-6-
Beware of electric shock
Be careful about
high temperature
Model sticker
Cooling fan
Where to attach warning stickers
Where to attach warning stickers
Always keep warning stickers clean and legible. If they become dirty or detached, replace them
with new ones. If you need replacement stickers, contact the distributor from who you purchased
your vacuum pump.

-7-
Contents
Important information .............................................................................................................1
For safe operation ...................................................................................................................2
Contents .......................................................................................................................................7
1. Before use ................................................................................................................................8
1.1 Check the product .............................................................................................................8
2. Name and structure of each section .....................................................................................9
3. Installation ..............................................................................................................................10
3.1 Wiring ................................................................................................................................12
3.2 Test operation ..................................................................................................................14
3.3 Connection to vacuum system (chamber) ...................................................................16
4. Operation ................................................................................................................................17
4.1 Standard operation ..........................................................................................................19
4.1.1 Start-up .......................................................................................................................19
4.1.2 Shut-down...................................................................................................................19
5. Option .....................................................................................................................................20
5.1 Air-flush operation ...........................................................................................................20
5.1.1 Preparation .................................................................................................................21
5.1.2 Start-up and shut-down ..............................................................................................21
5.1.3 When returning to standard operation........................................................................22
6. Maintenance and inspection ................................................................................................23
6.1 Daily maintenance and inspection ................................................................................23
6.2 Maintenance .....................................................................................................................24
7. Problems and remedies .......................................................................................................25
8. Disposal ..................................................................................................................................26
9. Specifications ........................................................................................................................26
9.1 Specifications ..................................................................................................................26
9.2 Dimensions ......................................................................................................................27
9.3 Performance data ............................................................................................................27

-8-
Serial number
○○ ○○○
Alphabetic Numeric
1. Before use
1.1 Check the product
・ Check that the package is right-side-up before opening.
・ Check that the model of the product is the same as the one you ordered.
How to read model name
G V S U– 5 0 0 B
・ Check that there is no damage.
If there is any damage, contact either the distributor from who you purchased your
vacuum pump.
・ Check the following accessories.
Instruction manual (this one)
※ Please prepare electric source cords, crimp-style terminal, electric source
protective devices, piping to inlet, and piping from outlet on customer side.
Open package
WARNING
Danger of cargo collapse
Be careful to install vacuum pump using elongated hole of connected flange and
crane with sufficient allowable load capacity (GVSU-500B mass 36kgs) while
paying attention to stability of suspended load.
If not, it can cause damage, failure or bodily injury from falling cargo due to hoisting
failure, or by being caught between suspended cargo and other material.
Be careful about
hoisting
Displacement (swept volume)
500:500 L/min
GVSU ： model
Year of manufacture

-9-
2. Name and structure of each section
Structure of vacuum pump
Terminal Box
Housing
Outlet Rc 1/2
FS Cover
Motor
Fan Cover
Cooling Fan
Leg
Housing
Motor
Fixed Scroll FS Orbiting Scroll OS
P-seal
Back-up Material
Connected Flange
Connected Flange
Inlet
Outlet
Inlet Rc 1

-10-
3. Installation
WARNING
Danger of electric shock
Install in an area which is not exposed to moisture such as rain or steam.
If moisture comes into and tact with the electric source connection, it can cause fire or
bodily injury due to short-circuit or electric shock.
Avoid moisture
Danger of explosion, fire and accident
Install in an area free from explosive, flammable or corrosive substances.
If not, it can cause explosion, fire or accident.
Install at a safe site
CAUTION
Danger of overheating
Operate at ambient temperature of 5
℃～ 40 ℃ .
Operating at a temperature range other than that designated can cause accident, failure
or bodily injury such as burns due to overheating.
Use at designated
temperature
Danger of overheating
Install in a well-ventilated area (refer to below chart).
Poor ventilation can disrupt cooling and cause accident, failure or bodily injury such as
burns since this vacuum pump is an air-cooled type.
Do not block inlet and outlet of cooling air with obstruction.
(Separate inlet side of the cooling air from obstruction or wall by 10cm or more, and
separate outlet side by 30cm or more)
Necessary ventilated air volume
Over 8m
3
/min
Pay attention to
ventilation
Danger of dust
Be sure site is free from dust.
Sucking in of dust can cause failure.
Avoid dust
Danger of movement
Please be sure to fix a vacuum pump on solid and flat floor for installation (within
5
゜
degrees inclination). Uneven fixing can cause failure and movement of vacuum
pump. Fix the pump base using four bolts into two deep holes 10 mm in diameter and
50 mm in length or 10 mm in diameter and 10 mm in length at the leg of a pump.
Install on a
solid, level floor
Danger of overheating
Install where equipment is not exposed to direct sunlight.
Vacuum pump exposed to direct sunlight can overheat, resulting in failure.
Avoid direct
sunlight

-11-
Installation space
For the maintenance, keep the space as below drawing around vacuum pump.
Keep over 30cm space front of vacuum pump if the vacuum pump can not be moved because of
wiring and connecting.
Important
When building vacuum pump into vacuum system, pay attention to space for maintenance,
ambient temperature and piping. Be sure to fix vacuum pump on solid and level floor.
If you have any questions, contact our distributor from who you purchased your vacuum pump.
Left side
Over 30 cm Over 30 cm
Over 10 cm
Front
Back side
Right side
Over 5 cm

-12-
3.1 Wiring
WARNING
Danger of short-circuit and electric shock
Ask a qualified electrician to perform electrical wiring.
If not, short-circuit or electric shock can cause fire or bodily injury.
Ask qualified
electrician
Danger of electric shock and entanglement
Be sure to turn off electric source on building site before wiring.
If not, it can cause electric shock or bodily injury due to turning objects.
Turn off electric
source
Danger of accident, fire and failure
Be sure to install protective device to protect circuitry. We recommend over
current protective device (rated 15A) to protect branch circuit.
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
Install over current
protective device
Danger of accident, fire or failure
Be sure to install an electric source emergency stop switch (or protective device
that can urgently stop).
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
Install emergency
stop switch
Danger of fire and electric shock
Install short circuit protective device.
If not, it can cause bodily injury due to fire or electric shock.
Install short circuit
protective device
Danger of electric fire and electric shock
Install overload protective device to protect motor. (refer to chart 1 on page 13)
If not, bodily injury due to electric fire or electric shock can result.
Install overload
protective device to
protect motor
Danger of short-circuit and electric shock
We recommend an electric source cable of more than 2mm
2
(more than rated 15A)
cross section area for electric source cable and ground cable.
Be careful to avoid voltage drop considering local situation.
If not, it can cause a short-circuit fire and may result in bodily injury from electric shock.
Be careful about
wiring
Danger of short-circuit and electric shock
Fit firmly proper round type crimp-style terminal to electric source cable using
crimp tool and connect to motor terminal section.
If not, it can cause short-circuit fire or bodily injury from electric shock due to looseness
or disconnection.
Use crimp-style
terminal
Danger of short-circuit and electric shock
Be sure to fit cable gland to hole of PG 16 at motor terminal box.
If not, it can cause short-circuit fire or bodily injury from electric shock.
Protect cable from
being pulled
Danger of electric shock
Connect ground cable to ground terminal in motor terminal box.
If not, it can cause bodily injury from electric shock.
Be sure to ground

-13-
CAUTION
Motor burnout
Please check electric source and voltage before wiring Terminal block.
The motor specification is three-phased AC230V (60Hz).
Other related parts have
single voltage. Connection alteration inside motor, improper wiring to motor and
application of incorrect voltage can cause breakdown such as motor burnout.
Check voltage
Danger of problem recurrence and failure
If protective device activates, be sure to turn off electric source and inspect
causes to solve the problem. Do not operate until problem is solved.
Operation while problem is left unsolved can cause problem recurrence and failure.
Inspect cause of
problem
How to wire
① Remove four bolts on motor terminal box and dismount protection cover.
※ Be careful not to lose removed bolts and washer.
② Remove bolts on electric source terminal in motor terminal box.
③ Insert electric cable through a hole in terminal box into terminal box.
④ Connect each phase of electric source terminal L1, L2 and L3 to each terminal U1, V1 and W1
respectively in accordance with the below wiring diagram.
※ Please make sure that cooling fan code is not loosed or removed.
Chart
－ 1
Voltage
V Frequency Hz Recommended breaker (or protective device) capacity A
230 60 6.25

-14-
Turning Direction
Inlet
Outlet
3.2 Test operation
CAUTION
Danger of cap to fly
Remove cap from inlet
If the rotation of the vacuum pump is opposite, operation with cap being fitted can cause
cap to fly by exhaust impetus, resulting in accident, failure, or bodily injury from contact
with flying objects.
Remove cap
Danger of foreign matter entering inlet
When checking turning direction, be careful not to enter foreign matter into an
inlet.
Foreign matter entering inlet can cause failure.
Prevent foreign
matter from entering
Danger of overheating
Check that cooling fan is turning and cooling air is flowing.
If not, it can cause accident, failure or bodily injury such as burns due to overheating.
Check fan
Test operation
① Open inlet and outlet (Water separator is optional)
(While vapor handling is used, water separator must be attached
to the outlet of the pump and hose must be tied to water
separator firmly.)
② Check pump’s rotation direction
Turn on the power and operate a
Pump with its inlet open.
Make sure that the air comes
out of the outlet.
(The direction of pump’s rotation
viewed from the back of the motor is
counter-clockwise.)
When the air does not come out of the outlet,
the pump probably rotates reversely.
In that case, stop vacuum pump, turn off main
electrical source and change 2 out of 3
wires of electric source connection and change
turning direction to correct one. If you fit pump to vacuum system and control
operation of vacuum pump by remote control, first check pump itself for turning
direction and then fit it to vacuum system.

-15-
③ Check cooling air
Check that cooling fan is turning and cooling air is flowing in that direction as indicated.
Important
Vacuum pump turns counter-clockwise when viewed from motor side.
Check that air comes out from water separator & silencer-mounted rubber hose.
If air does not come out from rubber hose, stop vacuum pump, turn off electrical source and change 2 out of 3
wires of electrical source connection.
Outlet of cooling air Inlet of cooling fan
Cooling fan

-16-
3.3 Connection to vacuum system (chamber)
Inlet is Rc1 and outlet is Rc 1/2.
CAUTION
Danger of exhaust disruption
When connecting exhaust piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping size and length so that it does
not cause exhaust resistance.
Exhaust resistance can disrupt air flow, resulting in failure and over current.
Pay attention to
exhaust resistance
Danger of foreign matter entering inlet
If you use the seal material or the adhesive, etc. to prevent Leak of the joint when
piping with internal screw of inlet, be careful not to enter the seal material or the
adhesive into an inlet.
The seal material or the adhesive entering inlet can cause failure.
Prevent foreign
matter from entering
Important
Use isolation valve between vacuum system and inlet.
Isolation valve is necessary to prevent the drawback of debris attached to the inside of vacuum pump into the
vacuum chamber during start-up and shut-down. (We recommend the use of leak valve also). We recommend
the use of an
automatic valve as the isolation valve which closes during power failure in order to prevent the
drawback of debris inside pump into the vacuum chamber during power failure.
Use the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of a flexible tube between inlet of vacuum pump and vacuum chamber so that vibration
of pump does not transmit to vacuum chamber.
When connecting exhaust piping to outlet of vacuum pump, refer to the following size and length.
・ max. 2m direct pipe length for exhaust pipe size Rc1/2 (inner dia.16)
But if pipe length becomes longer, use a larger size exhaust pipe.
Make sure that exhaust piping is not clogged during pump operation.
Make sure that pressure at outlet does not exceed atmospheric pressure at any conditions.
Chamber
Isolation valve
(Automatic valve)
Leak
valve
Vacuum pump Outlet duct
Inlet Outlet
GVSU-500B

-17-
4. Operation
Be sure to use the procedure below to start up or shut down the pump.
・ When you do not use air-flush device,
proceed 4.1 Standard operation [page 19].
・ When you use air-flush device,
proceed 5.1 Air-flush operation [page 20].
WARNING
Danger of explosion and ignition
Do not evacuate gas which is hazardous to humans or explosive, flammable, or
corrosive.
Do not evacuate with substances containing chemicals, solvents, and
powders.
If done, it can cause failure or bodily injury by gas, explosion or ignition.
※ When evacuating vapor, operate in accordance with 5.1 [page 20].
Never evacuate
hazardous gas
Danger of entanglement and foreign matter dispersal
Never put finger or foreign matter into air holes of fan cover, motor, FS cover.
If done, it can cause bodily injury from entanglement with turning section, or foreign
matter dispersal.
Avoid foreign matter
Danger of electric shock and entanglement
Do not remove or alter safeguards or insulation parts.
If done, it can cause bodily injury from electric shock or turning section and it can cause
deteriorated performance and operating lifetime, and invalidate guarantee.
Never alter
Danger of failure and bodily injury
Change air-flush port only after vacuum pump is stopped.
If you change it during vacuum pump operation, it can cause vacuum pump failure and
bodily injury.
Change after vacuum
pump is stopped
Finger, foreign matter
Finger, foreign matter
Air hole of fan cover Air hole of FS cover
Finger, foreign matter
Air hole of motor

-18-
CAUTION
Danger of vacuum break and pollution
Be sure to close isolation valve between vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the open position can draw back gas and debris
attached to inside of vacuum pump to vacuum chamber due to pressure differential,
resulting in vacuum break and pollution on vacuum chamber side.
Start or stop after
closing isolation
valve
Danger of abnormal sound and failure
Open inlet to atmosphere for about 5 seconds before restarting vacuum pump.
If not, it can unbalance temperature inside vacuum pump, resulting in failure.
Open air inlet
Danger of exceeding permissible temperature of intake gas
If intake gas temperature is over 50
℃ , be sure to install a chiller or trap
between vacuum pump and vacuum chamber so that gas intake temperature of
vacuum pump keeps below 50
℃ .
If not, vacuum pump temperature can increase, resulting in failure.
Beware
temperature of
intake gas
Danger of remaining moisture
When evacuating moisture, be sure to open air-flush port (air-flush operation).
If you evacuate vapor while air-flush port is closed, condensed water will remain inside
vacuum pump and cause failure.
Operate while
opening air-flush
port
Danger of insufficient vapor exhaust
After evacuating vapor, do air-flush operation for at least one hour.
If you close air-flush port or stop vacuum pump soon after evacuating vapor, condensed
moisture will remain inside vacuum pump, which will cause failure.
Caution after
exhausting vapor
Danger of exceeding permissible intake gas volume
When sending
N
2
gas or dry air into air-flush port, pressure should be the same
as atmospheric pressure and flow rate should be less than 10NL/min.
If not, it can increase pressure inside vacuum pump, resulting in failure.
Beware of intake
gas volume
Important
If it takes time to reach ultimate pressure of pump during initial operation (also operation
after pump has not been used for a long time),
Close inlet, and continue operation for 6 ～ 8 hours while opening inlet for 3 ～ 5 seconds to atmosphere 2 ～ 3
times per hour. During pump stoppage, moisture might have entered inside of pump and deteriorated
performance to reach ultimate pressure.
If pump has evacuated liquid such as water or high humid air (over 60%RH),
Moisture can deposit inside pump and cause pump failure. In that case, close isolation valve, and open inlet to
atmosphere for 3
～ 5 seconds several times and exhaust moisture inside pump to outside.
If pump has continued operation around ultimate pressure or continuously evacuated high
humid gas
Moisture can be condensed and remains inside pump, causing insufficient ultimate pressure and failure.
In that case, do air-flush operation in accordance with 5.1 [page 20].