Anest Iwata ISP-50 User manual

.
Instruction Manual (Original Instructions)
Oilfree Scroll Vacuum Pump
ISP-50
※ Before use, be sure to fill in the blank spaces below for future repair and after service.
Serial No.
Who sold it to you
Purchase date
When you began
operation
This instruction manual includes very important warnings, cautions and operating
procedure in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it in a convenient place for immediate and future reading.
LR104996
本商品はカナダ規格(CSA)取得品です 。
(Canadian Standards Association)

-1-
Important infomation
Important information
Be sure to read this instruction manual to understand how to operate equipment
correctly. Only operators, who fully understand warnings, cautions and instructions,
are to operate the equipment. Improper operation (mishandling) can cause serious
bodily injury, death, fire or explosion.
Store this manual in a convenient place for immediate and future reference.
◆ Regarding safety
・ The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws and regulations pertaining to fire, electricity, and
other safety regulations, as well as corporate regulations.
・ Pay special attention to items which are shown by the below marks and symbols.
・ Symbols and marks have the following meanings.
Examples of marks
WARNING
Indicates a potentially hazardous situation which, if not
avoided, may result in serious injury or loss of life.
CAUTION
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury or property
damage.
Examples of symbols
Indicates [Beware]. We will explain briefly in or near the symbol.
(The example on the left is [Beware of electric shock]).
Indicates [Prohibited action]. We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
Indicates [Required action]. We will explain briefly in or near the symbol.
(The example on the left is [Be sure to ground]).
＊ We shall not be responsible for any injury or damage caused by disregard of
warnings, cautions or instructions.
Supplementary notes
Important
Indicates notes which we ask you to observe. They are helpful to
achieve full performance and functionality of the equipment.

-2-
For afe operation
Below is very important information about how to safely operate the equipment.
Before operation, be sure to read and fully understand the contents.
WARNING
Be careful about
lifting
Danger of cargo collap e
Hold the bottom of the product (ISP 50
mass 12kgs) firmly, when installing
vacuum pump.
If not, it can cause damage, failure or
bodily injury from falling vacuum pump, or
by being caught between vacuum pump
and other material.
Avoid moi ture
Danger of electric hock
Install in an area which is not exposed to
moisture such as rain or steam. If moisture
comes into and tact with the electric
source connection, it can cause fire or
bodily injury due to short circuit or electric
shock.
In tall at a afe
ite
Danger of explo ion, fire and
accident
Install in an area free from explosive,
flammable or corrosive substances.
If not, it can cause explosion, fire or
accident.
A k qualified
electrician
Danger of hort-circuit and
electric hock
Ask a qualified electrician to perform
electric wiring.
If not, short circuit or electric shock can
cause fire or bodily injury.
Turn off electric
ource
Danger of electric hock and
entanglement
Be sure to turn off electric source on
building site before wiring. If not, it can
cause electric shock or bodily injury due to
turning objects.
In tall
overcurrent
protective device
Danger of accident, fire and
failure
Be sure to install protective device to
protect circuitry.
We recommend an overcurrent protective
device (rated 15A) to protect branch
circuit.
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
In tall
emergency top
witch
Danger of accident, fire or failure
Be sure to install an electric source
emergency stop switch (or protective
device that can urgently stop).
If equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
In tall hort
circuit protective
device
Danger of fire and electric hock
Install short circuit protective device.
If not, it can cause bodily injury due to fire
or electric shock.
In tall motor
protective circuit
breaker to
protect motor
Danger of electric fire and electric
hock
Install motor protective circuit breaker to
protect motor.
If not, it can cause bodily injury due to
electric fire or electric shock.
If you have any questions about the
selection of protective devices, contact
either the dealer who sold it to you or us.
Be careful about
wiring
Danger of hort-circuit and
electric hock
We recommend an electric wire of larger
than 2mm
2
(more than rated 10A,) cross
section area for electric wire (including
grounding wire.).
Be careful to avoid voltage drop
considering local situation.
If not, it can cause a short circuit fire and
may result in bodily injury from electric
shock.

-3-
For afe operation
WARNING
Be careful about
in ertion
Danger of hort-circuit and
electric hock
Insert the connector to the receptacle
surely by using an electric wire with an
appropriate connector.
If not, it can cause short circuit fire or
bodily injury from electric shock due to
looseness or disconnection.
With a thermal
protector
[Only
ingle-pha e
motor]
Danger of re tart
Be sure to switch off electric source before
maintenance or inspection.
Single phase motor has a thermal
protector.
Vacuum pump restarts become cool
without warning after vacuum pump.
Be ure to
ground
Danger of electric hock
Connect grounding wire to electric source.
If not, it can cause bodily injury from
electric shock.
Never evacuate
hazardou ga
Danger of explo ion and ignition
Do not evacuate gas which is hazardous
to humans or explosive, flammable, or
corrosive. Do not evacuate with
substances containing chemicals,
solvents, and powders.
If done, it can cause failure or bodily
injury by gas, explosion or ignition.
Avoid foreign
matter
Danger of entanglement and
foreign matter di per al
Never put finger or foreign matter into air
hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2)
cooling fins.
If done, it can cause bodily injury from
entanglement with turning section, or
foreign matter dispersal
.
Never alter
Danger of electric hock and
entanglement
Do not remove or alter safeguards or
insulation parts.
If done, it can cause bodily injury from
electric shock or turning section and it
can cause deteriorated performance and
operating lifetime, and invalidate
guarantee.
Change after
vacuum pump i
topped
Danger of failure and bodily injury
Change air flush port only after vacuum
pump is stopped. If you change it during
vacuum pump operation, it can cause
vacuum pump failure and bodily injury.
Conduct
periodical
maintenance and
in pection
Danger of failure and bodily injury
Conduct periodical maintenance and
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump, and
bodily injury.
Be careful about
high temperature
Danger of burn
Conduct maintenance and inspection only
after vacuum pump becomes cool enough.
Maintenance and inspection soon after
vacuum pump stops can cause burn injury.
Turn off electric
ource
Danger of electric hock
Be sure to conduct maintenance and
inspection after you turn off electric
source. If not, it can cause bodily injury
from electric shock or turning object.
A k peciali t to
perform repair
Danger of accident, failure and
horter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
failure or shorter operating lifetime.

-4-
For afe operation
CAUTION
U e at
de ignated
temperature
Danger of overheating
Operate at ambient temperature of 5 ℃～
40 ℃ .
Operating at a temperature range other
than that designated can cause accident,
failure or bodily injury such as burns due
to overheating.
Pay a tten t i o n
to ventil a t i o n
Danger of overheating
Install in a well ventilated area. Poor
ventilation can disrupt cooling and cause
accident, failure or bodily injury such as
burns since this vacuum pump is an
air cooled type.
Do not block inlet and outlet of cooling air
with obstruction. (Separate inlet side of the
cooling air from obstruction or wall by 1cm
or more, and separate outlet side by10cm
or more)
Avo i d d u t
Danger of du t
Be sure site is free from dust.
Sucking in of dust can cause failure.
In tall o n a
olid, l e vel
floor
Danger of unbalance
Be sure to install on solid and level floor
(less than 5° inclination).
Uneven installation can cause failure and
movement of vacuum pump. If installation
floor is unstable, fix pump base with 4 φ9
holes of pump leg (ISP 50).
Avo i d d irect
unlig h t
Danger of overheating
Install where equipment is not exposed to
direct sunlight.
Vacuum pump exposed to direct sunlight
can overheat, resulting in failure.
Check voltage
Motor burnout
Before doing any wiring, check electric
source and voltage.
ISP 50 SV1 is AC100V class.
Voltage can not be changed. Check your
electric source, voltage, and wire correctly
to receptacle.
Improper wiring and incorrect voltage can
cause motor burnout.
In pect cau e of
problem
Danger of problem recurrence
and failure
If protective device or thermal protector
activates, be sure to turn off electric
source and inspect causes to solve the
problem. Do not operate until problem is
solved. Operation while problem is left
unsolved can cause problem recurrence
and failure.
Remove blank
flange
Danger of exhau t di ruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted
can disrupt exhaust or cause blank flange
to fly by exhaust impetus, resulting in
accident, failure, or bodily injury from
contact with flying objects.
Prevent foreign
matter from
entering
Danger of foreign matter entering
inlet
When checking turning direction, be
careful not to enter foreign matter into an
inlet. Foreign matter entering inlet can
cause failure.
Check fan
Danger of overheating
Check that cooling fan is turning and
cooling air is flowing.
If not, it can cause accident, failure or
bodily injury such as burns due to
overheating.
Pay attention to
exhau t
re i tance
Danger of exhau t di ruption
When connecting exhaust piping to
vacuum pump and when combining piping
with another vacuum pump, pay attention
to piping size and length so that it does
not cause exhaust resistance. Exhaust
resistance can disrupt air flow, resulting in
failure and overcurrent.
Start or top
after clo ing
i olation valve
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during startup and stop.
Start up or stop with isolation valve in the
open position can draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.

-5-
For afe operation
CAUTION
Open a i r
inle t
Danger of abnormal ound and
failure
Open inlet to atmosphere for about 5
seconds before restarting vacuum pump.
If not, it can unbalance temperature inside
vacuum pump, resulting in failure.
Bew a re
tempe r a t u r e
of in t a k e ga
Danger of exceeding permi ible
temperature of intake ga
If intake gas temperature is over 50 ℃ , be
sure to install a chiller or trap between
vacuum pump and vacuum chamber so
that gas intake temperature of vacuum
pump keeps below 50
℃ . If not, vacuum
pump temperature can increase, resulting
in failure.
Operate while
opening air-flu h
port
Danger of remaining moi ture
When evacuating moisture, be sure to
open air flush port (air flush operation). If
you evacuate vapor while air flush port is
closed, condensed moisture will remain
inside vacuum pump and cause failure.
Caution after
exhau ting vapor
Danger of in ufficient vapor
exhau t
After evacuating vapor, do air flush
operation for at least one hour. If you close
air flush port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Beware of intake
ga volume
Danger of exceeding permi ible
intake ga volume
When sending N
2
gas or dry air into
air flush port, pressure should be the
same as atmospheric pressure and flow
rate should be less than 4L/min. If not, it
can increase pressure inside vacuum
pump, resulting in failure.

-6-
Where to attach warning ticker
Where to attach warning ticker
Always keep warning stickers clean and legible. If they become dirty or detached,
replace them with new ones. If you need replacement stickers, contact the dealer
who sold the vacuum pump to you.
Motor frame
Receptacle
Cooling fan
Beware of
Electrical hock
Beware of high
temperature

-7-
Contents
Important infomation ..................................................................................................................1
Important information .............................................................................................................1
For afe operation ...................................................................................................................2
Content .......................................................................................................................................7
1. Before u e................................................................................................................................8
1.1 Check the product.............................................................................................................8
2. Name and tructure of each ection...................................................................................11
3. In tallation .............................................................................................................................12
3.1 Wiring................................................................................................................................13
3.2 Te t operation..................................................................................................................17
3.3 Connection to vacuum y tem (chamber) ...................................................................18
4. Operation ...............................................................................................................................19
4.1 Standard operation .........................................................................................................21
4.1.1 Start-up ......................................................................................................................21
4.1.2 Shut-down .................................................................................................................21
4.2 Air-flu h operation ..........................................................................................................22
4.2.1 Preparation ................................................................................................................22
4.2.2 Start-up and hut-down ...........................................................................................23
4.2.3 When returning to tandard operation...................................................................23
5. Maintenance and in pection................................................................................................24
5.1 Daily maintenance and in pection ................................................................................24
5.2 Maintenance.....................................................................................................................25
6. Problem and remedie .......................................................................................................26
7. Di po al .................................................................................................................................27
8. Specification ........................................................................................................................28
8.1 Specification ..................................................................................................................28
8.1.1 ISP-50.............................................................................................................................28
8.2 Dimen ion ......................................................................................................................29
8.2.1 ISP-50-SV1.....................................................................................................................29
8.3 Performance data ............................................................................................................30

-8-
ISP 50 SV1/SV2
1. Before u e
1.1 Check the product
・
・・
・ Check that the package i right- ide-up before opening.
・
・・
・ Check that the model of the product i the ame a the one you ordered.
How to read model name
I S P – 5 0 – S V 1
ISP ： model
Inlet direction
V
： vertical
Motor
S
： Single phase
Displacement (swept volume)
50
： 50 L/min at 50Hz Motor
Input Voltage
1
： AC100V 50/60Hz , 115V 60Hz

-9-
・
・・
・ Check that there i no damage.
If there is any damage, contact either the dealer who sold it to you or us.
・
・・
・ Check the following acce orie .
Instruction manual (this one)
(Instruction manuals written by official languages except English must be sent to a
customer along with the delivery of a product.)
Air muffler for air flush
(ISP 50 is attached to outlet flange.)
※ Please prepare electric wires, crimp style terminal, protective devices, piping to
inlet, and piping from outlet on customer side.
Serial number
○○ ○○○
Alphabetic Numeric
Vinyl bag
(Air muffler is contained inside)
Year of manufacture

-10-
Open package
WARNING
Danger of cargo collap e
Hold the bottom of the product (ISP-50 ma 12kg ) firmly, when in talling
vacuum pump.
If not, it can cause damage, failure or bodily injury from falling vacuum pump, or by
being caught between vacuum pump and other material.
Be careful about
lifting
※ This product does not come with an electric wire.
Instruction manual
（ this one ）
Upper cover
Scroll vacuum pump
Base cover
Box
Back cover
Side cover B
Side cover A

-11-
2. Name and tructure of each ection
・
ISP 50
Motor power box
Inlet NW25
Turning direction
plate
Motor
Outlet NW16
Air Flush Port (Rc 1/8)
Cooling fan
Receptacle
Hour meter

-12-
Structure of vacuum pump
3. In tallation
WARNING
Danger of electric hock
In tall in an area which i not expo ed to moi ture uch a rain or team.
If moisture comes into and tact with the electric source connection, it can cause fire or
bodily injury due to short circuit or electric shock.
Avoid moi ture
Danger of explo ion, fire or accident
In tall in an area free from explo ive, flammable or corro ive ub tance .
If not, it can cause explosion, fire or accident.
In tall at a afe ite
CAUTION
Danger of overheating
Operate at ambient temperature of 5
℃
℃℃
℃～
～～
～ 40 ℃
℃℃
℃ .
Operating at a temperature range other than that designated can cause accident, failure
or bodily injury such as burns due to overheating.
U e at de ignated
temperature
Danger of overheating
In tall in a well-ventilated area (refer to below chart).
Poor ventilation can disrupt cooling and cause accident, failure or bodily injury such as
burns since this vacuum pump is an air cooled type.
Do not block inlet and outlet of cooling air with obstruction.
(Separate inlet side of the cooling air from obstruction or wall by 1cm or more, and
separate outlet side by10cm or more)
Nece ary ventilated air volume
Over 2 m
3
/min
Pay a tten t i o n to
ve ntil a t i o n
Inlet
Outlet
Cooling fan
Fixed scroll FS(2)
Orbiting scroll OS
Cooling fan Fixed scroll FS(1)
Hour meter

-13-
Danger of du t
Be ure ite i free from du t.
Sucking in of dust can cause failure.
Avo i d d u t
Danger of unbalance
Be ure to in tall on olid and level floor (le than 5° inclination).
Uneven installation can cause failure and movement of vacuum pump. If installation
floor is unstable, fix pump base with 4 φ 9 holes of pump leg (ISP 50).
In tall o n a
olid, l e vel floo r
Danger of overheating
In tall where equipment i not expo ed to direct unlight.
Vacuum pump exposed to direct sunlight can overheat, resulting in failure.
Avo i d d irect
unlig h t
Important
When building vacuum pump into vacuum system, pay attention to space for maintenance,
ambient temperature and piping. Be sure to fix vacuum pump on solid and level floor.
If you have any questions, contact the dealer who sold it to you or us.
3.1 Wiring
WARNING
Danger of hort-circuit and electric hock
A k a qualified electrician to perform electric wiring.
If not, short circuit or electric shock can cause fire or bodily injury.
A k qualified
electrician
Danger of electric hock and entanglement
Be ure to turn off electric ource on building ite before wiring.
If not, it can cause electric shock or bodily injury due to turning objects.
Turn off electric
ource
Danger of accident, fire and failure
Be ure to in tall protective device to protect circuitry. We recommend an
overcurrent protective device (rated 15A) to protect branch circuit.
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
In tall overcurrent
protective device
Danger of accident, fire or failure
Be ure to in tall an electric ource emergency top witch (or protective device
that can urgently top).
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
In tall emergency
top witch
Danger of fire and electric hock
In tall hort circuit protective device.
If not, it can cause bodily injury due to fire or electric shock.
In tall hort circuit
protective device

-14-
Danger of fire and electric hock (refer to chart 1 on page 15)
Install motor protective circuit breaker to protect motor
If not, it can cause bodily injury due to electric fire or electric shock.
If you have any questions about the selection of protective devices, contact either the
dealer who sold it to you or us.
In tall motor
protective circuit
breaker to protect
motor
Danger of hort-circuit and electric hock
We recommend an electric wire of larger than 2mm
2
(more than rated 10A,) cro
ection area for electric wire (including grounding wire.).
Be careful to avoid voltage drop con idering local ituation.
If not, it can cause a short circuit fire and may result in bodily injury from electric shock.
Be careful about
wiring
Danger of hort-circuit and electric hock
In ert the connector to the receptacle urely by u ing an electric wire with an
appropriate connector.
If not, it can cause short circuit fire or bodily injury from electric shock due to looseness
or disconnection.
Be careful about
in ertion
Danger of electric hock
Connect grounding wire to electric ource.
If not, it can cause bodily injury from electric shock.
Be ure to ground
Danger of re tart
Be ure to witch off electric ource before maintenance or in pection.
Single-pha e motor ha a thermal protector.
Vacuum pump restarts become cool without warning after vacuum pump.
With a thermal
protector
CSA Requirement
Thermally protected automatic reset. TYPE TP212. Motor restart without warning after protector trip.
Min. circuit ampacity of conductor is 10A
Max. branch circuit breaker is 15A
When you u e thi pump in Europe.
This vacuum pump must be equipped with a main disconnect device in accordance with requirements of
EN60204 1, clause 5.3.2. It is recommended to use a circuit breaker as main breaker which is suitable for
isolation according to EN60947 2 and is equipped with an operating handle which is lockable in OFF position
and complies with the other requirements of EN60204 1, clause 5.3.

-15-
CAUTION
Motor burnout
Before doing any wiring, check electric ource and voltage.
ISP-50-SV1 i AC100V cla .
Voltage can not be changed.
Check your electric ource, voltage, and wire correctly to receptacle.
Improper wiring and incorrect voltage can cause motor burnout.
Check voltage
Danger of problem recurrence and failure
If motor protective device or thermal protector activate , be ure to turn off
electric ource and in pect cau e to olve the problem.
Do not operate until problem i olved.
Operation while problem is left unsolved can cause problem recurrence and failure.
In pect cau e of
problem
Chart 1
Single phase 100V class specifications
Voltage
V
Frequency
Hz
Recommended
protective device (or
breaker) capacity
A
100 50 2.6
100 60 2.4
115 60 2.4

-16-
How to wire
WARNING
Danger of fire and electric hock (refer to chart 1 on page 15)
Install motor protective circuit breaker to protect motor
If not, it can cause bodily injury due to electric fire or electric shock.
If you have any questions about the selection of protective devices, contact either the
dealer who sold it to you or us.
In tall motor
protective circuit
breaker to protect
motor
① Prepare electric wire with a connector corresponding to the receptacle (table 2).
Protective device must be installed between this cord and electric source.
② Insert a connector of electric wire into receptacle of motor power box.
Table － 2
Receptacle Electric source (primary side)
L
N
Single Phase AC100 115V±10%(in case of 100V class)
SOT 16
(Kawasaki
Electric wire
Co,.Ltd)
け
Ground
※ Receptacle has specified dimension to IEC60320. Selection of connector must be
along with IEC60320. If you have any questions about the selection of electric wire
with a connector, contact either the dealer who sold it to you or us.

-17-
3.2 Te t operation
CAUTION
Danger of exhau t di ruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted can disrupt air flow or cause blank flange to fly
by exhaust impetus, resulting in accident, failure, or bodily injury from contact with flying
objects.
Remove blank
flange
Danger of foreign matter entering inlet
When checking turning direction, be careful not to enter foreign matter into an
inlet. Foreign matter entering inlet can cau e failure.
Prevent foreign
matter from entering
Danger of overheating
Check that cooling fan i turning and cooling air i flowing.
If not, it can cause accident, failure or bodily injury such as burns due to overheating.
Check fan
Te t operation
① Open inlet and outlet
Remove blank flanges (2 places)
from inlet and outlet of
vacuum pump.
② Check turning direction
Open inlet, turn on electrical source
to start operating vacuum pump
and check that comes out of air
outlet.
If you fit pump to vacuum system
and control operation of vacuum
pump by remote control,
fir t check pump it elf for turning direction and then fit it to vacuum system.
O
ring
C
lamp
Blank flange
Turning
Turning Direction plate

-18-
③ Check cooling air
Check that cooling fan is turning and cooling air is flowing in that direction as indicated.
3.3 Connection to vacuum y tem (chamber)
・ Inlet of ISP 50 is NW25 and outlet is NW16.
CAUTION
Danger of exhau t di ruption
When connecting exhau t piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping ize and length o that it doe
not cau e exhau t re i tance.
Exhaust resistance can disrupt air flow, resulting in failure and overcurrent.
Pay attention to
exhau t re i tance
Important
U e i olation valve between vacuum y tem and inlet.
Isolation valve is necessary to prevent the drawback of debris attached to the inside of vacuum pump into the
vacuum chamber during start up and shut down. (We recommend the use of leak valve also). We recommend
the use of an
automatic valve a the i olation valve which clo e during power failure in order to prevent
the drawback of debri in ide pump into the vacuum chamber during power failure.
U e the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of a flexible tube between inlet of vacuum pump and vacuum chamber so that vibration
of pump does not transmit to vacuum chamber.
When connecting exhau t piping to outlet of vacuum pump, refer to the following ize and length.
・ It is recommended in the case of ISP 50, max. 30m direct pipe length for exhaust pipe size NW16 (inner dia.16)
But if pipe length becomes longer, use a larger size exhaust pipe.
Make ure that exhau t piping i not clogged during pump operation.
Make sure that pressure at outlet does not exceed atmospheric pressure at any conditions.
Chamber
I olation valve
(Automatic valve)
Leak
valve
Vacuum pump
Outlet duct
Inlet Outlet
ISP-50
Cooling fan
Inlet of cooling fan
Outlet of cooling air