Anest Iwata ISP-500B User manual

IM-500B 1/3/07 Page 1 of 26
ISP-500B
Oil-free Scroll Vacuum
Pump
Instruction Manual
Record of Pump Information
Serial Number:
Purchase date:
In Service date:
Dealer information:

IM-500B 1/3/07 Page 2 of 26
Be sure to read this manual to understand operation and functions correctly. Only
operators, who fully understand warnings, cautions and instructions, are to operate the
equipment. If not, fire, explosion, serious bodily injury or death may occur.
•About Safety
Warnings and cautions are especially important for safe operation. Obey the safety
instructions given below and take note of appropriate precautions. Marks and symbols
have the following meanings.
Examples of Marks
Indicates a potentially hazardous situation which, if not
avoided, may result in serious injury or loss of life.
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury or property
damage.
Examples of Symbols
Indicates you must be careful. We will explain briefly in or
near the symbol. The example on the left is “Be careful
about electric shock”
Indicates [you must not do]. We will explain briefly in or
near the symbol.
(The example on the left is “Do Not touch!”
Indicates an action you must do. We will explain briefly in or
near the symbol.
(The example on the left is “Be sure to ground!”
* Neither the manufacturer nor the dealer from whom the pump was purchased shall be
responsible for any injury or damage caused by disregard of warnings, cautions or
instructions.
Supplementary Notes
Indicates notes which we ask you to observe. They are
helpful to achieve full performance and function of the
equipment.
Important Safety Information
ISP-500B

IM-500B 1/3/07 Page 3 of 26
Contents of Instruction Manual
Important Information………………………..………….…..2
Contents…………………………………………….….…….…3
1. For safe operation……………………………………….……… 4
2. Specifications……………………………………………….……. 7
3. Names of each section……………………………………….…. 9
4. Outer dimensions……………………………………………..….10
5. Installation……………………………………………………..….11
6. Operation……………………………………………………........18
7. Maintenance and inspection…………………………….…….24
8. Problems and remedies………………………………….……..26

IM-500B 1/3/07 Page 4 of 26
As the below points are very important for safe operation, be sure to read
and fully understand the contents before operation.
Never pump toxic, explosive, flammable, corrosive gases, chemicals,
solvents or powders.
*Flowing substances, explosion or fire can cause bodily injury.
Install in an area without
explosive, flammable
substances.
*If not, it can cause
explosion or fire.
Install in an area
which is not exposed
to moisture such as
rain or steam.
*If not, it can cause
electric shock.
Be sure to cut off electric
source before wiring or
inspection.
*If not, it can cause
electric shock or damage
by turning section (fan).
Never put fingers or
foreign matter into
air hole of pump or
clearance of cooling
fins.
*If done, it can cause
injury.
Ask qualified electrician to
perform electric wiring
job.
*If not, electric shock may
occur.
Never alter the
equipment.
*If done, it can cause
damage or shorter
lifetime.
Be sure to ground.
*If not, it can cause
electric shock or fire.
Ask specialist to
perform repairs.
*If not, it can cause
failure, damage or
shorter lifetime.
Prevent short-circuit with
ground leakage breaker of
proper capacity.
*If not, it can cause
electric shock or fire.
Be sure to install
electric source
switch.
*If not, it can cause
damage or fire.
1.1 For safe operation

IM-500B 1/3/07 Page 5 of 26
•Be sure to check Wiring diagram before a power
supply. (Refer to p. 13 and be shown inside terminal
cover.) If not, it can cause damage.
•The pump has a motor thermal protector. Motor
restart without warning after protector trip.
•Be sure to switch off electric source before
maintenance or inspection. If not done, it can cause
electric shock or bodily injury from turning objects.
Install in a safe place.
•Install on a level foundation (an inclination of
less than 5’ ).
•in a place free of dirt or dust from iron, stone or
wood.
•in a place free of corrosive gas.
If done, it can cause damage, decrease in performance or
shorter lifetime.
Use at temperature of 5
~ 40°C (during
operation).
*If not, it can cause
damage or shorter
lifetime.
Conduct periodic
maintenance and
inspections.
*If not, it can cause
damage or shorter
lifetime.
Do the maintenance
after pump becomes
fully cool.
*If not, it can cause
burns.
Be sure to close
isolation valve
between pump and
vacuum system
(chamber) during
startup and stop.
*If not, debris
attached to inside of
pump can be drawn
back to vacuum
chamber.

IM-500B 1/3/07 Page 6 of 26
Always keep warning stickers clean. If they become dirty or lost,
replace them with new ones. If you need stickers, contact the shop
which sold the vacuum pump to you.
Where to attach warning stickers
ISP-500B Single Phase
ISP-500B Three Phase

IM-500B 1/3/07 Page 7 of 26
Displacement (swept
volume) L/min
50 Hz
500
60 Hz
600
Ultimate pressure
Pa (Torr)
Leak tightness
Pa (mbar) – L/S
Maximum inlet
pressure
Atmospheric pressure
Ambient operating
temperature range
Motor Type
Single-phase induction
motor 4P
Totally Enclosed
Insulation class BIP44
Capacitor start
Thermal Protector
TP212
Automatic Reset Type
3-phase induction motor 4P
Totally enclosed
Insulation Class B IP44
Voltage V
100
115
200
230
200
208
230
380
415
460
50Hz
8.5
-
4.3
3.9
2.7
-
-
1.57
1.63
-
60Hz
10.0
8.6
4.8
4.0
2.8
2.6
2.5
-
-
1.47
50Hz
1430
-
1430
1450
1460
-
-
1470
1470
-
60Hz
1660
1720
1690
1730
1740
1740
1760
-
-
1770
Note 1: Pumping speed and ultimate pressure remain the same when air flush is
ON (opened) and OFF (closed).
Note 2: Leak tightness is measured when pump is stopped and air flush is OFF (closed).
Note 3: Water vapor handling is less than 25g/day (25°C humitidy 60%) when air flush is
ON(opened). Air flush volume is 10 liters/min.
Note 4: Air Flush is OFF (closed) when pump is delivered.
2.1 Specifications
<1.0 x 10-2 (<1.0 x 10-4)
<1 (<7.5 x 10-3)
5 °C ~ 4 0 °C
Output kW 0.6
Rated current
A
Revolution
min-1 (rpm)

IM-500B 1/3/07 Page 8 of 26
Single phase Three-phase
Noise level at 1m dB(A)
with Air Flush ON
(opened)
< 62
< 70
< 60
< 68
Inlet connection
NW 40
Outlet connection
NW 25
Direction of inlet
Laterally fitted (Perpendicularly fitted)
Dimensions mm
L x W x H
443 x 328 x 372
(443 x 298 x 397)
372 x 328 x 372
(372 x 298 x 397)
Mass kg
44
38
Cooling system
Air cooled
Air cooled
Others
Hour meter & Air Flush
Hour meter & Air Flush
Note 5: Noise level is measured at ultimate pressure in an anechoic room.
Note 6: Three Phase Motor does not have over heat protection. Be sure to install a heat
protection like a breaker. (Refer to p. 15)
2.1 Specifications (continued)
2.2 Performance data

IM-500B 1/3/07 Page 9 of 26
3.1 Names of each section

IM-500B 1/3/07 Page 10 of 26
4.0 Outside Dimensions

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5.1 Check the Product
•Check that the package is right-side-up and then open it.
•Check that model of the product is correct as you ordered.
•Check that there is no damage. If there is any damage, contact the vendor which
sold it to you.
•Remove inlet blank flange and outlet blank flange. If you continue operation with
blank flanges, it can cause damage.
•Check that air flush filter for air flush port is in the plastic bag.
5.2 Installation
5.0 Installation
Danger of explosion and fire
Install in an area which is not exposed to
explosives,
flammable gas, or other related things.
If not, it can cause explosion or fire.
Danger of electric shock
Install in an area which is not exposed to moisture
such as rain or steam.
Moisture on electric source connection can cause
bodily injury by short circuit or electric shock.

IM-500B 1/3/07 Page 12 of 26
Install on a firm, level floor.
Be sure to install on a firm, level floor (less than 5° inclination).
Uneven installation can cause failure.
If installation floor is unstable, fix pump base by using 4-M10 tap
screws of pump base.
Install in an area which is not exposed to sunshine.
Direct sunshine can cause high temperature and failure.
5.3 Wiring
Ask qualified electrician.
Ask qualified electrician to perform electric wiring job.
If not, electric shock or fire may occur.
Turn off electric source.
Be sure to turn off main electric source on building site.
If not, it can cause injury due to electric shock.
Check electric source and voltage.
Check electric source and voltage before doing the wiring.
There are single-phase and three-phase motors for ISP-500B.
Three-phase has 200V/400V dual voltage. Single-phase has
100V/200V dual voltage.
It is wired to 200V connection when delivered to you.
Check electric source and voltage, and wiring.
Operate at designated temperature.
Operate at ambient temperature of 5°C ~ 40°C.
Other temperature than designated ones can cause damage, burn
or failure.
Pay attention to ventilation.
Install in a well-ventilated area (refer to right chart).
Poor ventilation can cause abnormal overheating,
burns or failure since it is air-cooled type.
Necessary Ventilated Air
ISP500B
8m3/min
over 8m3/min
Install in a safe place.
Install in an area which is not exposed to dust or corrosive gas.
If not, it can cause damage or failure.

IM-500B 1/3/07 Page 13 of 26
How to Wire
Remove terminal cover of motor and check terminal block inside.
Wiring diagram is shown inside terminal cover.
•ISP-500B Single-phase
You can change to 100V or 200V connection by changing terminal plate. It is wired to 200V
connection when delivered to you.
If you want to change to 100V connection, remove electric source terminal M4 nut and change
terminal plate as illustrated below. Connect electric source cord through cable gland on the right
side of terminal box.
•ISP-500B Three-phase
You can change to 200V or 400V connection by changing terminal plate. It is wired to 200V when
delivered to you. If you want to change to 400V connection, remove electric source terminal M4
nut and change terminal plate as illustrated. Connect electric source cord through cable gland on
the bottom side of terminal box. Connect L1-L2-L3 to U1-V1-W1 terminals of motor,
respectively.

IM-500B 1/3/07 Page 14 of 26
Install emergency stop switch!
Be sure to install electric source switch (or breaker for emergency stop) for emergency stop.
If not, it can cause damage or fire.
Only the single phase motor has a thermal protector!
Single phase motor has a thermal protector with automatic reset function. Motor automatically
restarts after protector trip when the motor gets cooler. When thermal protection works, be sure
to switch off the power and inspect the abnormal conditions. (Refer to p. )
With a thermal prot ector (single phase only)
CSA REQUIREMENT
Three phase motor is NOT protected!
External protection in accordance with CE Code, Part 1, MUST be provided.
Minimum circuit ampacity of conductor is as follows:
ISP-500B single phase – 18A ISP-500B three phase – 15A
Maximum Branch Circuit Breaker is ISP-500B – 15A (1 Phase 100/115V is 20A)
Danger of fire due to electricity
1. Avoid motor burnout by installing recommended breaker. (refer to chart 1 on the next page)
If not, it can cause bodily injury or fire due to electricity.
2. Use electric source cord and ground cord of over 2mm²(over rated 18A/single phase and
15A/three phase) for ISP-500B. If not, it can cause bodily injury or fire due to electricity.
3. Firmly fit proper round crimp-style terminal to electric cord with application device and
connect to motor terminal. If not, it can cause bodily injury or electrical fire due to looseness or
disconnection.
4. Be sure to connect electric cord to terminal by using cable gland at φ20mm hole of motor
terminal box. If not, it can cause bodily injury or fire due to looseness or disconnection.
5. Be sure to ground. Connect ground cord to ground terminal in motor terminal box. If not, it
can cause bodily injury such as electric shock.
When Using This Pump In Europe
This vacuum pump must be equipped with a main disconnect device in accordance with requirements of
EN60204-1, clause 5.3.2.
It is recommended to use a circuit breaker as main breaker which is suitable for isolation according to
EN60947-2 and is equipped with an operating handle which is lockable in the OFF position and complies
with the other requirements of EN60204-1, clause 5.3.

IM-500B 1/3/07 Page 15 of 26
ISP-500B Three Phase with 200V connection
Chart 1 – Breaker Capacities for Single &Three-phase ISP-500B vacuum pumps
Single-phase specifications
Three-phase specifications
V
Hz
Recommended Breaker
Capacity A
V
Hz
Recommended Breaker
Capacity A
100
50
10.7
200
50
3.1
100
60
12.5
200
60
3.2
115
60
10.8
208
60
3.0
200
50
5.4
230
60
2.9
200
60
6.0
380
50
1.8
230
50
4.9
415
50
1.9
230
60
5.0
460
60
1.7

IM-500B 1/3/07 Page 16 of 26
Check turning direction after wiring
Turning direction of pump is clockwise viewed form motor side.
Operate pump with inlet opened, and check that air comes out from outlet. If it turns counterclockwise in
case of three-phase, reverse any two phase wires in electric source connection. If you fit pump to vacuum
system and switch pump ON-OFF with remote control, first check pump itself about turning direction and
then fit it to vacuum system.
Avoid dropping foreign matter inside.
When checking turning directions, avoid dropping
foreign matter into inlet. A drop of foreign matter
can cause failure.

IM-500B 1/3/07 Page 17 of 26
•Inlet of ISP-500B is NW40 and outlet is NW25.
•Use isolation valve (we recommend the use of leak valve also) between vacuum
chamber and inlet (NW40 for ISP-500B). These valves (isolation valve and leak
valve) are used to prevent the drawback of debris attached to the inside of vacuum
pump into the vacuum chamber during start-up or shut-down. We recommend the
use of automatic valve as isolation valve which closes during power failure in
order to prevent the drawback of debris inside pump into the vacuum chamber
during power failure.
•Use the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of flexible pipe between inlet of pump and vacuum
chamber so that vibration of pump does not transmit to vacuum chamber.
5.4 Connection to vacuum system

IM-500B 1/3/07 Page 18 of 26
Be sure to use the procedure below to start up or shut down the pump.
If it takes time to reach ultimate pressure of pump during initial operation (also operation after pump has not been used
for a long time)
Close inlet, and continue operation for 6 – 8 hours while opening inlet for 3 ~ 5 seconds to atmosphere 2 – 3 times per
hour. During pump stoppage, moisture might have entered inside of pump and decreased performance to reach
ultimate pressure.
If pump have pumped liquid such as water or high humid air (over 60% RH) during operation
Moisture can deposit in pump and fail pump. Close isolation valve and open inlet for 3 ~ 5 seconds to atmosphere
several times and exhaust moisture in pump to atmosphere.
Remove blank flanges from inlet and outlet, and operate pump.
Operation with blank flanges fitted can cause damage.
Close isolation valve during start-up or shut-down of pump.
Be sure to close isolation valve between vacuum pump and
vacuum chamber during start-up or shut-down of pump.
If not, debris attached to the inside of pump can be drawn back
to vacuum chamber.
Precautions during restarting of pump
Open inlet to atmosphere before restarting pump.
If not, it can imbalance temperature in pump, resulting in failure.
6.0 Operation
Close isolation valve
during start-up or
shut-down of pump

IM-500B 1/3/07 Page 19 of 26
1. Close isolation valve in order to prevent the drawback of debris attached to the inside
of vacuum pump into vacuum chamber. (Open leak valve when using leak valve).
2. Switch vacuum pump on.
3. Check start-up of vacuum pump and open isolation valve (close leak valve when using
leak valve) and pump the vacuum chamber.
•Continuous pump operation at around ultimate pressure (for example, using as auxiliary pump of turbo
molecular pump) can cause deposits of foreign matter or moisture in pump resulting in failure. Do the air
flush operation, or close isolation valve and open inlet to atmosphere and operate (once a day for a few
minutes) in order to remove foreign matter inside pump.
•Be careful not to damage air flush port (especially air flush filter). If not, it can cause damage or accident.
•During air flush operation (ON), noise level becomes a bit higher (by 7 – 8dB).
•Install pump in an area which is not exposed to debris such as iron, stone, polishing or wood dust. Debris can
clog air mufflers, undercutting air flush effect.
6.2 Shut-down
1. In order to prevent the drawback of debris attached to inside of vacuum pump into
vacuum during operation. Be sure to close isolation valve (open leak valve when using
leak valve).
2. Switch vacuum pump off.
3. Open inlet of vacuum pump to atmosphere.
•When pump stops, atmospheric air is drawn back from air flush port to the inside of pump, and pressure
inside pump becomes about atmospheric pressure. In order to maintain vacuum in vacuum chamber and
prevent the drawback of debris from vacuum pump into vacuum chamber, be sure to close isolation valve to
vacuum chamber and stop pump.
•When operating with air flush OFF (closed), operate as per 6.4.
6.1 Start-up

IM-500B 1/3/07 Page 20 of 26
Never pump hazardous gases.
Do not pump hazardous gases to humans, or explosive, flammable, toxic or corrosive gases or
substances which contain chemicals, solvents or powders. If done, it can cause bodily injury due to
harmful substances, explosion or fire.
DO NOT PUMP:
ØToxic gas
ØExplosive gas
ØFlammable gas
ØCorrosive gas
ØChemicals
ØSolvents
ØPowders
ØWater
ØLiquids
Be careful about entanglement.
Never put your fingers or foreign matter into wind holes of fan cover or motor set or clearance
between cooling fans of FS(1) and FS(2). If done, it can cause bodily injury such as injury of
fingers or foreign matter entering eyes.
Never alter equipment.
Never remove or alter safety equipment or insulation parts.
If done, it can cause electric shock or bodily injury by turning objects.