Anest Iwata ISP-250C Series User manual

II
ANEST
I~TA
I nstruction Manual
C€
ISO 9001
Jisa 9001
JAa
OMS Accredl l ation
R005
I Oil-free Scroll Vacuum Pump
ISP-250C
ISP-500C
LR104996
OJr prDl1K:I have SIt CSA
approval tanadi~ standards
associatiool
This instruction manual includes very important warnings, cautions and operating
procedure
in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it
in a convenient place for immediate and future reading.
*Before use, be sure to fill in the blank spaces below for future repair and after-service.
Serial No.
Who sold
it to you
Purchase date
When you began
operation

Declaration of Conformity
We , ANEST rNAT A Corporation
3176, Shinyoshida-cho, Kohoku-ku, Yokohama 223-8501, Japan
declare
in our sole responsibility that the products
Type : Scroll Vacuum Pump
Models
ISP-250C
3-phase ,200 /208/230/380/400/415/ 460V, 50/60Hz
1-phase , 100/1151200/ 230V, 50/60Hz
ISP-500C
3-phase ,200 /208/230/380/400/415/460V,50/60Hz
1-phase , 100/1151200/ 230V, 50/60Hz
Note: 1-phase motor provides thermal protector.
to which this declaration applies, complies with these normative document s:
98 /37/ EC : Machinery Directive
EN 1012-2:1996: Compressors and Vacuum Pumps-Safety
Requirements, Part 2: Vacuum Pumps
This Declaration is based on :
Third party testing, performed
by the Notified Body
TUV Rheinland Product Safety GmbH - Am Grauen Stein -D-51105 Koln
TamirtSULtiioka ,
Manager of Vacuum Pump
Dept
Jan, 28, 2008 YOKOHAMA
Date and Place

Important information
~~~~~~~~~~
Be sure to read this instruction manual to understand how to operate equipment
correctly. Only operators, who fully understand warnings, cautions and instructions,
are to operate the equipment. Improper operation (mishandling) can cause serious
bodily injury, death, fire or explosion.
G Store this manual in a convenient place for immediate and future reference.
[ ~~~g:ar~iri~ : ~!~i : !
· The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws and regulations pertaining to fire, electricity, and
other safety regulations, as well as corporate regulations.
· Pay special attention to items which are shown by the below marks and symbols.
· Symbols and marks have the following meanings.
Examples of marks
it
WARNING Indicates a potentially hazardous situation which, if not
avoided, may result
in serious injury or loss of life.
it
Indicates a potentially hazardous situation which, if not
CAUTION avoided, may result
in minor or moderate injury or property
damage.
Examples of symbols
& Indicates [Beware]. We will explain briefly
in or near the symbol.
(The example on the left is [Beware of electric shock]).
@ Indicates [Prohibited action].
We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
e Indicates [Required action].
We will explain briefly in or near the symbol.
(The example on the left is [Be sure to ground]).
. .
* We shall not be responSible for any Injury or damage caused by disregard of
warnings, cautions or instructions.
Supplementary notes
Important Indicates notes which we ask you to observe. They are helpful to
achieve full performance and functionality of the equipment.
-1-

For safe operation
~~~~~~~~~~
Below is very important information about how to safely operate the equipment.
Before operation, be sure to read and fully understand the contents.
WARNING
o
Be careful about
lifting
o
Install at a safe
site
Turn off electric
source
o
Danger of cargo collapse
Be careful 10 install vacuum pump using
mo tor handle (ISP-250C mass
25kgs/1-phase, 23kgs/3-phase), or using
mo lor eyeboll and crane with su fficie nt
allowable load c apa city (I SP-500C mass
44kgs/1-phase, 38kgs/3-phase) while
paying allent l on to stability 01 suspended
load. II no t, it can cause damage , failure
or bodily injury fr om falling cargo due to
hOisting failure, or by being caught
between suspended cargo and other
material.
Danger of explosion . fire and
accident
Install in an area fr ee fr om explosive,
fl ammable or cor rosive substances.
If not, it can cause explosion, fire or
accident
Danger of electric shock and
entangle
ment
Be sure to tum off electric source on
building site before wiring. II not, it can
cause electric shock or bodily injury due to
turning objects.
Danger of accident , fire or failure
Be sure to install an electric source
emergency stop switch (or protective
device that can urgently stop).
Install If equipme nt Is no t stopped in an
emergency stop eme r gency . it can cause accident. fire or
switch failure.
Danger of electric fire and electric
shock
o Install overload protective
device to protect
Install overload
protective device
to protect motor
moto r.
If not, it can cause bodily injury due to
electric fire
or electric shock.
- 2-
o
Avoid moisture
o
Ask qualified
electrician
o
Install
overcurrent
protective device
o
Install short
circuit protective
device
o
Be careful about
wiring
Dang er of electric s hoc k
Install In an area which is not exposed to
moisture such
as rain or steam. If moisture
comes Into and tact with the electric
source connection, it
can cause fire or
bodily injury
due to short-circuit or electr ic
shock .
Danger of short~ircuit and
electric
shock
Ask a qualified electrician to perform
electr
ic wiring.
If not, short-circuit or electric shock can
cause fire or bodily injury.
Dang er of accident , fire and
failure
Be sure to install protective device to
protect cir
CUitry.
We recommend overcurrent protective
device (rated 15A for ISP-250C and rated
15A for ISP-50OC (rated 20A
100/1 1
5V/ lp hase») to protect branch
circuit.
11 equipment is not stopped in an
emergency, it can cause accident, fire or
failure.
Dang er of fire and electric shock
Install short circuit protective device.
If not, it can cause bodily injury due to fire
or electr ic shock.
Danger of short~ircuit and
electric shock
We recommend an electric source cable
of more than 2mm 2{more than rat ed
10Al1 phase 7A13phase for ISP-250C and
mor e than rated 18A1 1phase 15A13phase
for I
SP-500cl cross section area for
electric source cable and ground
cable . Be
careful to avoid voltage drop considering
local situation.
If not, it can cause a short-circuit fire and
may result in bodily injury from elec tr ic
shock.

For safe operation
~~~~~~~~~~
I WARNING
Danger of short-circuit and 0 Danger of short-<:ircuit and
0
electric shock
electric shock
Fit firmly proper rou nd type crimp-styte Be s ur e 10 fit cable-gland to ho le of
terminal 10 electric source cable usi ng
6 2 0mm al moto r t ermin al box.
crimp tool and connect to molor terminal
Protect cable II
not, it can cause sho rt-circuit fire or
Use crimp-<;tyle section.
from being bodily injury from el
ec tric shock.
terminal If nol, it c
an cause short-<:ircuit f ire or
bodily inju
ry from electric shock due to pulled
looseness or disc on nect i on .
Danger of electric shock Danger of ex plo s ion a nd ignition
e
Connect gro u nd cable to ground terminal
(9
Do no l evacuate gas which is hazardous
in
molor terminal box. 10 humans or explosive, flammable, or
If not, 11can cause bodily injury from corrosive. Do not evacuate with
e
le ctric shock. substances containing chemicals,
Be sure to Never evacuate
solvents, and powders.
ground hazardous gas
If done, it can cause failure or bodily
injury by gas, explosion or
ig nition.
Danger of entanglement and Danger of ele c tric shock and
foreign matter dispersal entanglement
(9
Never put finger or foreign mailer Into air
(9
Do not remove or alter safeguards or
hole of f an cover, air hole of motor or insulation parts.
clearance between FS(1)
and FS(2) If don
e, it can cause bodily in jury from
Avoid foreign
cooli ng fins. elect
ric shock or turni ng section and it
If done, it can cause bodily injury from Never alter can cause deteriorated performance and
matter
entanglement with turni ng section, or operati ng tiletlme, and invalidate
foreign matter dispersal. guarantee.
0
Danger of failure and bodily injury
0
Dange r of failu re and bodily injury
Change alr-flush port only after vacuum Conduct periodic
al maintenance and
pump is stopped. If you change it during inspection.
vacuum pump operation, it can cause
Conduct
If not, It can cause Insufficient
Change after vacuum pump failure and bodily Injury. performance, lallure 01vacuum pump, and
vacuum pump is
periodical
bodily injury.
maintenance and
stopped
inspection
Danger of burns Danger of electric shock
& Conduct maintenance and Inspect
io n only S Be su re to conduct maintenance and
after vacuum pump becomes cool enough. inspection a
ft er you lurn off el ectric
Maintenance and inspection soon after source. If not, it can cause bodily injury
vacuum pump stops can cause burn injury. from electric shock or turning object.
Be careful about Turn off electr ic
hi gh temperature
source
Danger 01 accident , fa ilure and
0
Danger of restart
0
shorter operating lifet i me
Be sure to switch o ff electric source before
Ask special
is t 10 perform repairs. maintenance or inspection.
Defective repairs can cause accident, With a thermal Single-phase motor has a thermal
failure or shorter operating lifetime. protector.
Ask specialist to
protector
Vacuum pump restarts become cool
[Only without warning after vacuum pump.
perform repairs
singlell hase
motor)
-3-

For safe operation
~~~~~~~~~~
o
Use at
designated
temperature
o
Avoid dust
o
Avoid direct
sunlight
o
I nspec t cause of
pr oblem
o
Prevent fore i gn
matter from
entering
o
Start or stop
after closing
isolation valve
Da nger of overheating
Operate at ambient temperature of 5"C-
40"C.
Operating al a temperature ra nge other
than that designated can cause accident,
failure or bodily injury such as burns due to
overheating.
Da nger of du st
Be su re site is free from dust.
Sucking in of dust can cause failure.
Danger of overheating
Inslall where equipment is not exposed to
direct sunlight.
Vacuum pump exposed to dir ec t sunlight
can overheat, resulting in failure.
Danger of probl em rec urr ence
and fa ilure
If protective device or thermal protector
activates, be sure to
tum oft electric
source and inspect causes to solve the
problem.
Do not operate until problem is
solved. Operation while problem is le ft
unsolved can cause problem recurren ce
and failure.
Danger of forei gn matt er ent er ing
in let
When checking turning direction, be
careful not to enter foreign matter into
an
inlet. Foreign mailer entering inl el can
cause failure.
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and va
cu um system
(chamber) during startup and stop.
Start-1Jp or stop with isolation valve in lhe
open position
ca n draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, r
es ulting in vacuum break and
pollution on vacuum chamber side.
CAUTION
Pay attention
to
ventilation
o
Install on a
s
olid , level
floor
0
Check voltage
o
Remove blank
flange
o
Pay attent ion to
exhaust
r esist a nce
o
Open air
inlet
-4-
Danger of overhea ting
Install in a well""""'lent ilated area. Poor ventilation
can disrupt cooling and c
au se accident, failu re or
bodily injury such as bu rn s since this vacuum
pump is an air-cooled type.
Danger of unbalanc e
Be su re to Install on solid and level floor (less Ih Cin
5D inclination).
Uneven installation can cause failure and
movement of vacuum pump.
If installat io n floor is
unstable, fix pump base with 4
-0 11 holes of pump
leg (ISP-25OC)
or 4-M10 tap section pump base
(ISP-50OC).
Mo tor burnout
Belore doing any wiring, check electric source and
vollage. Single-phase is a multi vollage type of
AC 100V/AC200V. Three-phase is a multi voltage
type
of AC200V!AC400V. Voltage can be changed
at terminal block. This
!;1um!;1 is wired to 200V
when delivered to you. Check your electric source,
vo llage, and wire correctly to terminal block.
Impruper wiring and Incorrect voltage can cause
motor burnout.
Danger of exhaust d isr upt ion
Remove blank flange from Inlet and outlet.
Operation with blank flange being filled can disrupt
exhaust or cause blank flange to Ily by exhaust
Impe
tu s, resulling in accident, fa ilure, or bodily
Injury from contact with flylng objects.
Danger of exh aust d isr up tio n
When connecting exhaust piping to vacuum pump
and when combining piping with another vacuum
pump. pay allention to piping size and length so
that it does not cause exhaust resistance. Exhaust
resistance can disrupt air flow, resulting in faiture
and over-currenl.
Danger of abnormal sound and fail ur e
Open inlet to atmosphere lor about 5 seconds
before restarting vacuum pump.
II not, it can unbalance temperature Inside vacuum
pump,
re sulting in fa ilure.

For safe operation
CAUTION
o
Beware
temperature
of intake gas
o
Beware of intake
gas volume
Danger of exceeding permissible
temperature of intake gas
If intake gas te m pera ture is over SO"C , be
sure to ins tall a chiller or trap between
vac
uu m pump and vacuum chamber so
thai gas intake temperature of vacuum
pump keeps below
50"C . If nol, vacuum
pump temperature can increase,
resul li ng
in failure.
Danger of exceeding permissible
Intake ga s volume
When sending N2gas or dry air into
air-llush port, pressure should be the
same as atmospheric pressure and f low
rate should be less than 10NLJmin.lf not,
il can increase pressure inside vacuum
pump, resulting in failure.
-5-
o
Caution after
exhausting vapor
o
Operate while
opening air41ush
port
Danger of Insufficient vapor
exhaust
After ev acuating vapor, do air-flush
operation lor at least one hour. II you close
air-flush port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Danger 01 remaining moisture
When evacuating mo is tu re , be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port Is
closed, condensed moistu re will remain
inside vacuum pump and cause
fa ilure.

Where to attach warning stickers
Where to attach warning stickers
Always keep warning stickers clean and legible. If they become dirty or detached,
replace them with new ones. If you need replacement stickers, contact the dealer
who sold the vacuum pump to you.
ISP-250C
Single-phase
ISP-250C
Three-phase
ISP-500C
Single-phase
ISP-500C
Three-phase
Pr otect ion cover
-6 -
~ Ccmd"ns,er cover
Hour Counter cover
ofi!iec:tric shock Hour Counter cover
H our Counte r cover
o'iE;je;;~ric shock
Condenser cove r
Beware of';fect.ic shock
Hour Counter cover

Contents
Important information ............ .. ............................................. .. ... .... .. ...... .... .. ... .. ... ...... ...... .. ..... 1
For safe
operation ........................... .. .............................................•........ .. .............................. 2
Contents .............................................. .. ......................................................... .. ........ .. ............... .. 7
1. Before use .. ................................................................. .. ....................................................... .. . 8
1.1
Check the product .............................................................. .. ............................................ 8
2. Name and structure of each section .................................................................................. 11
3. Installation .......................... .. ................................................... .. ............ .. ................ .. . ... ........ 12
3.1 Wiring ....... ... .. ........ .. .................. .. ... .. ...... .. ...................... ... ...... ... ... .. .......... .. ..................... 13
3.2 Test operation .. . .... .. ................ .. .. .. .. .... ........... .. ... .. .. ........ ... .... ............. .... ... . .. . ... . ... .. ........ 17
3.3
Connection to vacuum system (chamber)............................ .... ......... .. ...................... .. 18
4. Operation...............................................................................................................................19
4.1 Standard operation......................................................................................................... 21
4.1.1 Start-up...................................................................................................................... 21
4.1.2 Shut-down ...... ... . .. ..................... .. ............ ... . .... ..... .. ........ ... .. .. ... .. ........ .. ...... .. . .. .......... 21
4.2 Air-flush operation .................. .. ..................................... .. ......................................... .. .... 22
4.2.1 Preparation...................................................................... .. ......................... .. ............. 22
4.2.2
Startup and shut-down ........................................ .. .................................................. 23
4.2.3 When returning to standard operation .............. .. ........................................ ... ....... 23
5. Maintenance and inspection .. .... .. ....... ... .... .. .......... .. .. ....... .. ............................. .. ................. 25
5.1 Daily maintenance and inspection ................... .. ...................•••...... .. ............................. 25
5.2 Maintenance ........................
.. .................................. .. ............................ .. ...................... .. 26
6. Problems and remedies .. ............................................. .. . .. .. ................. .. ............... .. .............27
7. Speci
fications ........ .. ............................... .. .. ...... .. ........ .. ...... .. .......................... .. .................. .. 28
7.1 Specifications ......... .. .................................... .. ....................... .. ................ .. ............ .. ........ 28
7. 1.1 ISP-250C.... .. ... ........ .. .... .. ................................ .. ................................... .. .................... 28
7.1.2ISP-500C.. .. ..... ... . ... .. ............................ .. .......... .. . ... ....... ...... ..... .. ..... .. . .. ........ ... . .. ... ..... 29
7.2 Dimens i ons .... .. ........................... .. .............. ... ....................... .... ............. .. .. .... .. . .. ..... .... .... 30
7. 2.1 ISP-250C ...................... .. ...............•................................................... ... .... .. ................ 30
7.2.2 ISP-500C.....................................................•..............................................................30
7.3 Performance data....................................................... .. .. .. .............. ... .... .. ........... .. ........... 31
-7-

1. Before use
1.1 Check the product
• Check that the package is right-side-up before opening.
• Check that the model of the product is the same as the one you ordered.
How
to read model name
liSP : model I p
s p
Displacement (swept volume)
250C : 250 L/min at 50Hz Motor
500C : 500
L/m in at 50Hz Motor
Motor
S : Single
ph ase
T : Three phase
Inlet direction
H : horizontal
V: vertical
2 5
5 o
I SP-5 00 C- TH
I S P - 500 C - TV
I S P- 5 00 C-S H I S P - 5
00 C- S V
• Check that there is no damage.
o
o C
C S T
-
V
H
I SP - 25 0 C- T V
IS P - 25 0 C-SV
If there is any damage, contact either the dealer who sold it to you or us.
• Check the following accessories.
Instruction manual (this one)
Air-muffler for air-flush
(ISP-250C
is attached to handle of motor. ISP-500C is attached to eyebolt of
moto
r. )
-8-

·ISP-250C
Vinyl bag
(Air muffler is co ntained in side)
~~
Serial number
Alphabetic Numeric
Year
of ma nuf ac ture
·ISP-500C
Vinyl bag
(A ir muff ler is contained ins i de)
/"
Serial number
Alphabetic Numeric
Year of manufacture
l8:: Please prepare electric source cords, crimp~tyle terminal, protective devices,
piping to inlet, and piping from outlet
on customer side.
- 9-

Open package
6 WARNING
Danger of cargo collapse
Be careful to install vacuum pump using motor handle (ISP-250C mass 0
25kgs/ l-phase , 23kgs/3-phase), or using motor eyebolt and crane with sufficient
allowable load capacity (ISP-l;OOC mass 44kgs/1-phase, 38kgs/3-phase) while
paying attention to stability of suspended load. Be careful about
If not, it ca n c au se damag e, failure or bodily injury from falling ca r go du e to hoi st ing
lifting
fa ilur e, or by b ein Qcau Qht between suspen de d ca rQ o an d o th er ma teria l.
~ I ns tr uc ti on Manual
I
l
LJ Upper Cover
---- Oil-fr ee Scro ll Vacuum Pum p
Box
-10 -

2. Name and structure of each section
·ISP- 250C Inlet NW25
Turning Direction Plate
Motor
Hour Counter
Ou tl et NWt6
Air Flush Port (Rc 1181
. ISP -5 00C
Inlet NW40
IN Plate
OUT Plate NW25
Evebolt
T urning Direl
Motor Base Fan Cover Hour Counter
-11-

Cooling Fan Cooling Fan
, , ~~ O D O
o 0
Orbiting Scro ll OS
Fixed Sc ro ll FS(2)
Fi xe d Sc ro ll FS( 1) = =
Structure of vacuum pump
3. Installation 6 WARNING
Danger of electric shock
0
Install in an area which is not exposed to moisture such as rain or ste am .
If moistur e c omes into a nd t ac t with th e e le c tri c sour ce co nn ec ti on, it ca n ca u se fi re or
bodi ly injury du e to sho rt - <:i rc ui t or electric shock. Avoid moistu
re
Dange r of explosion , fire or accident
0
Insta ll in an area free from explosive, flammable or corrosive substances.
If not, it ca nc au se exp lo sion, fi re or a cci de nt.
Install at a sa fe site
6 CAUTION
Danger of overheating
0
Operate at ambient temperature of S "C- 40"C.
Operating at a temperature range other than that designated ca n cause a CC ident, failure
or bodily injury such as burns due to overheating. Use at designated
temperature
Danger of overheating
Install in a well-venlilated area (refer to below chart).
~
Poor ventilation ca n disrupt c oo ling and cause aCCident , failure or bodily injury such as
burns s in ce this vacuum pump is an a i r ~ oo l ed type.
Necessary ventilated air volume
Pay atlen t ion to
ISP-250C
[ ISP~OOC
ven t ila t ion
Over 4 m" 'm in I Over 8 m" 'min
-1 2-

Danger of dust
Be sure site is free from dust.
Sucking in of dust can cause failure.
Danger of unbalan ce
Be sure to install on solid and level floor (less than 5° inclination).
Uneven installation can cause failure and movement of v acuum pump . If insta l lation
floor is unstable, fix pump base with 4-q, 11 holes of pump leg (ISP-250C) or 4~1 0 tap
section pump base (ISP-500C).
MID tap section
Danger of overheating
less than 5~
incl ination
Install where equipment is not exposed to direct sunlight.
Vacuum pump exposed to direct sunlight can overheat, resu l ting in failure .
Important
o
Av o id dust
o
Install on a
solid , level floor
o
Avoid direct
r h
.
When building vacuum pump into vacuum system, pay attention to space for maintenance,
ambient temperature and piping.
uestions, contact the dealer who sold it to ou or us .
31 W· .
. iring 6 WARNING
Danger of shorH:ircuit and electric shock
0
Ask a qualified electrician to perform electric wiring.
If not, short- drcuit or electric shock can cause fire or bodily injury. Ask qualified
electrician
Danger of electric shock and entanglement
S
Be sure to turn off electric source on building site before wiring .
If not, it can cause electric shock or bodily injury due to turning objects. Turn off electric
source
Danger of accident, fire and failure
0
Be sure to install protective device to protect circuitry. We recommend
overcurrent pr otective device (rated 15A for ISP-250C and rated 15A for ISP-500C
(rated 20A 1OO/115V/l phase)) to protect branch circuit . Install overcurrent
If equipment is not stopped in an emergency, it can cause accident, fire or failure. protective
device
Danger of accident, fire or failure
0
Be sure to install an electric source emergency stop switch (or protective device
that can urgently stop)_ Install emergency
If equipment is not stopped in an emergency, it can cause accident, fire or failure.
stop switch
Danger of fire and electric shock
0
Install short circuit protective device.
If not, it can cause bodily injury due to fire or electric shock. Install
short circuit
protective device
-13-

Install overload protective device (refer to chart 1 on page 15) to protect
motor
If not, it can cause bodily injury due to electric fire or electric shock.
Danger of short~ircuit and electric shock
careful to avoid voltage drop considering local situation.
If not, it can cause a short-circuit fire and rna result in bodil in 'u from electric shock.
Danger of short~ircuit and electric shock
Fit firmly proper round type crimp-style terminal to electric source cable using
crimp tool and connect to motor terminal section .
II not, it can cause short~ircuit fire or bodily injury from electric shock due to loosen es s
or disconnection.
Danger of short~ircuit and electric shock
Be sure to fit cableilland to hole of 4> 20mm at motor terminal box.
If not, it can cause short-circuit fire or bodily injury from electric shock.
Danger of electric shock
Connect ground cable to ground terminal in motor terminal box .
If not, it can cause bodily injury from electric shock.
Danger of restart
Be sure to switch off electric source before maintenance or inspection.
Single-phase motor has a thermal protector ..
Vacuum pump restarts become cool without warning after vacuum pump.
CSA Requirement
o
Install overload
protective device to
rotect motor
o
Be careful about
wiring
o
Use crimp-style
terminal
o
Protect cable from
bein ulled
e
Be sure to round
o
With a thermal
protector
[Only single-phase
motor
3 phase motor not protected-external protection in accordance with CE code, part I , must be provided.
Min. circuit ampacity of conductor is
ISP-250C-I phase lOA /3phase 7A, ISP -500C- I phase ISA /3phase 15A
Max. branch circuit breaker is
ISP-250C-15A, ISP-500C-15A (I phase I OO/115V is 20A)
When you used this pump in Europe.
This vacuum pump must be equipped with a main disconnect device in accordance with requirements of
EN60204-1, clause 5.3. 2. It is recommended to use a circuit breaker as rnain breaker which is suitable for
isolation according to EN60947-2 and is equipped with an operating handle which is lockable in OFF position
and com lies with the other
re uirements of EN60204-I, clause 5.3.
~
CAUTION
Motor burnout
Before doing any wiring , check electric source and voltage. 0
Single-phase is a multi voltage type of ACIOOV/AC200V. Three-phase is a multi
voltage type of AC200V/AC400V.
Voltage can be changed at terminal
block.
This I!uml! is wired to 200V when delivered to ]lou.
Check voltage
Check your electric source, voltage, and wire correctly to terminal block.
Improper wiring and incorrect voltage can cause motor burnout.
- 14-

Danger of problem recurrence and failure
If protective device or thermal protector activates, be sure to turn off electric
source and inspect causes to solve the problem. o
Do not operate until problem is solved.
Ooeration while oroblem is left unsolved can cause oroblem recurrence and failure. Inspect cause
of
problem
This shows three-phase 200V connection for ISP-500C.
Ground Terminal
MS Bolt
Cable1l
land
El ectric Source o
o
o
o
o
e
Activate the emergency stop by electric source
switch
or protective device.
Avoid motor burnout by protective device (chart 1).
Use rated electric source cable and ground cable.
{over
rated 1ON11lhase, 7N31lhase for ISP-2S0C }
over
rated 1BN11lhase, 1SN31lhase for ISP-500C
Use round type termina l.
Fit cable1Jland.
Connect ground cord to ground terminal.
Chart-1
Single-phase specifications Three-phase specifications
Recommended Recommended
Voltage Frequency protective device (or Voltage Frequency protective device (or
breaker) capacity breaker) capacity
V Hz
A V
Hz
A
ISP-250C ISP-500C ISP-250C ISP-500C
100 50 6.0 10.7 200 50 1.8 3 .1
100 60 6.0 12.5 200 60 2.2 3.2
115 60 5.4 10.8 208 60 2.2 3.0
200 50 3.0 5.4 230 60 2.2 2.9
200 60 3.2 6.0 380 50 1.1 1.8
230 50 2.7 4.9 400 50 1
.1 1.8
230 60 2 .7 5.0 415 50 1.2 1.9
460 60 1.2 1
.7
-15-

!How to wire !
Q) Remove 4pcs. of M5 bolt at motor terminal box and remove protection cover.
* Be careful not to lose removed M5 bolts and washer.
® Wiring diagram is shown inside protection cover.
Single1)hase specifications
You can change to a 100V or 200V connection by changing terminal plate (2pcs
.) .
* It is wired to 200V when delivered to you.
If you want to change to a 1 OOV connection, remove M4 nut of electric source
terminal and change terminal plate as illustrated below.
Insert electric source cord through cable1Jland
on the right side of terminal bo x.
El ect ri c So ur ce
Terminal M4 Nu
Terminal Block
Three1)hase specifications
Terminal plate ( 2pC5 )
200V Connec
ti on
(When delivered to you)
Ground Terminal
MS Bolt
o o
100V Co nn ection
You can change to a 200V or 400V connecti on by changing terminal plate (3pcs.).
* It is wired to 200V when delivered to you.
If you want to change to a 400V connection, remove M4 nut of electric source
terminal and change terminal plate as illustrated below.
Insert electric source cord through cable1Jland on the bottom side of terminal box.
Connect each phase L
1-t.2-t.3 to each electric source terminal respectively in
accordance with the below wiring diagram.
Ground Terminal
MS Bolt
Electric Source
I
200V Co nn ection
(When de
li vered to you)
- 16 -
0 ;--- _____ 0
400V Co nn ection

32T . est operation
~
CAUTION
Danger of exhaust disruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted can disrupt air flow or cause blank flange to fly
by exhaust impetus, resulting in accident, failure, or bodily injury from contact with flying
objects.
Danger of foreign matter entering inlet
When checking turning direction, be careful not to enter foreign matter into an
inlet. Foreign matter entering inlet can cause failure.
I Test operation I
CD Open inlet and outlet
Remove blank flanges
(2 places)
from inlet and outlet of
vacuum pump.
~ Check turning direction
Blank Flange
O-fing
0
Remove blank
flange
0
Prevent foreign
matter from
enterin~
Open inlet, turn on electrical source
to start operating vacuum pump.
Vacuum pump turns clockwise
when viewed from motor side. Di",cticm plate
Turning
Check that comes out of air outlet.
If air does not come out from outlet, vacuum pump of three-phase motor may turn
in reverse.
In that case, stop vacuum pump, turn off main electrical source and change 2 out
of 3 wires of electric source connection and change turning direction to correct one.
If you fit pump to vacuum system and control operation of vacuum pump by
-17-

remote control, first check pump itself for turning direction and then fit it to
vacuum system.
1m ortant
Vacuum pump turns clockw i se when viewed f rom motor side.
II pump turns counter-clockwise. stop vacuum pump, turn off electrical source and change 2 out of 3 wi r es of
electrical source connection.
3.3 Connection to vacuum system (chamber)
Inlet of ISP-250C is NW25 and outlet is NW16.
Inlet of ISP-500C is NW40 and outlet is NW25.
~
CAUTION
Danger of exhaust disruption
When connecting exha ust piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping size and length
so that it does
not cause exhaust resistance.
Exhaust resistance can disrupt air flow. resultinq in fai lure and over-current.
Important
Use l isolation valv~ between vacuum system and inlet.
0
Pay attention to
exhaust resistance
Isolation valve is necessary to prevent the drawback of debr is attached to the inside of vacu um pump into the
vacuum chamber durin start-up and shut~own. (We recommend the use of leak valve also). We recommend
the use of an utomatic valv as the isolation valve which closes during power failure in order to prevent
the drawback of debris inside pump into the vacuum chamber during power failure.
Use the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the u se of a flexible tube between inlet of vacu um pump and vacuum chamber so that vibration
of
pump does not transmit to vacuum chambe r.
When connecting exhaust piping to outlet of vacuum pump, refer to the following size and length .
.
It is recommended in the case of ISP -2 50C , max. 5m direct pipe length for exha ust pipe size NW16 (inner dia. 16)
. It is recomm ended in the case of ISP."OOC , max . 15m direct pipe length for exhaust pipe size NW25 (inner
dia.25)
But if pipe leng th becomes longer. use a larger size exhaust pipe.
Make sure that exhaust piping is not clogged during pump operation.
Make sure that ressure at outlet does not exceed atmos
Chamber
Leak
valve
< 7
x
------------------
,
Vacuum pump :
,
'------Jf-------i[><Jf-----'":-~ _~--II ~ ~*'--T-, __ 0 --lu~ ct
Isolation valve
(Automatic valve)
-18-
Inlet Outlet :
,
- - _______ - - - - _____ I
ISP-250C
ISP~OOC