Edwards CDP User manual

A386-11-880
Issue E Original
Instruction Manual
CDP/QDP/iQDP accessories:
Exhaust-Silencers
Description Item Number
CDP Exhaust-Silencer A386-11-000
QDP/iQDP Exhaust-Silencer A528-19-000

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© Edwards Limited 2008. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
A386-11-880 Issue E
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
1.3 Construction .............................................................................................................. 1
1.4 Principle of operation ................................................................................................... 1
2 Technical Data ....................................................................................3
2.1 Mechanical data .......................................................................................................... 3
2.2 Performance .............................................................................................................. 3
2.3 Operating and storage conditions ..................................................................................... 3
2.4 Construction materials .................................................................................................. 3
3 Installation .........................................................................................5
3.1 Safety ......................................................................................................................5
3.2 System requirements .................................................................................................... 5
3.3 Unpack and inspect ...................................................................................................... 6
3.4 Remove the old Exhaust-Silencer (if necessary) .................................................................... 6
3.5 Fit the new Exhaust-Silencer .......................................................................................... 9
3.5.1 Fit the new Exhaust-Silencer to a QDP, iQDP or CDP i, Ei or Si pump ........................................... 9
3.5.2 Fit the new Exhaust-Silencer to a CDP Ni pump ...................................................................10
3.6 Leak-test the installation ..............................................................................................14
4 Maintenance ..................................................................................... 15
4.1 Introduction .............................................................................................................15
4.1.1 Safety information ......................................................................................................15
4.1.2 Overheated fluorinated materials ....................................................................................15
4.2 Frequency of maintenance ............................................................................................15
4.3 Inspect and clean the Exhaust-Silencer .............................................................................16
5 Storage and Disposal ........................................................................... 17
5.1 Storage ...................................................................................................................17
5.2 Disposal ...................................................................................................................17
6 Spares and Accessories ........................................................................ 19
6.1 Introduction .............................................................................................................19
6.2 Spares .....................................................................................................................19
For return of equipment, complete the HS Forms at the end of this manual.
edwards JP 07/09

A386-11-880 Issue E
Page ii © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 Components of the Exhaust Silencer ................................................................................. 2
2 Dimensions (mm) (CDP Exhaust-Silencer shown) ................................................................... 3
3 Correct and incorrect installation configurations .................................................................. 7
4 QDP pump services ...................................................................................................... 8
5 Correct mounting clamp orientation (CDP pump shown) .........................................................10
6 Installation of the Exhaust-Silencer on CDP i, Ei and Si pumps ..................................................11
7 Installation of the Exhaust-Silencer on QDP and iQDP pumps ...................................................12
8 Installation of the Exhaust-Silencer on CDP Ni .....................................................................13
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400-40-100

© Edwards Limited 2008. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
A386-11-880 Issue E
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards CDP and QDP/iQDP
Exhaust-Silencers. You must use the Exhaust-Silencer as specified in this manual.
Read this manual before you install the Exhaust-Silencer. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The units used throughout this manual conform to the SI international system of units of measurement.
1.2 Description
Two models of Exhaust-Silencer are available, one model for use with the Edwards CDP range of pumps and one model
for use with the Edwards QDP and iQDP ranges of pumps. The two models are identical, except that the Exhaust-
Silencer for the CDP pumps has mounting hooks (Figure 1, item 14).
The Exhaust-Silencer attenuates the pulses in the exhaust pressure from the pump and reduces pump-induced
resonance in your exhaust-extraction system.
The Exhaust-Silencer is suitable for use with all of the corrosive and particulate gases typically used in semiconductor
applications and is designed for ease of maintenance.
1.3 Construction
Refer to Figure 1 in the following description.
The body of the Exhaust-Silencer (5) has a two-stage expansion chamber (6, 9) which is separated by a baffle-plate
(8) at one end of the body. Both ends of the body of the Exhaust-Silencer have an end-cover plate (3, 12) which is
retained by cap-head bolts (1) and sealed by a fluoroelastomer ‘O’ ring (4, 10).
Inlet and outlet connections (15, 13) to the Exhaust-Silencer are standard NW40 flanges.
1.4 Principle of operation
Exhaust gases from the pump-outlet enter the Exhaust-Silencer through the inlet (15) and pass into the first-stage
expansion chamber (9). The gases then pass through the transfer tube (7) into the second-stage expansion chamber
(6) and then pass through the outlet tube (16) to the outlet of the Exhaust-Silencer (13).
The internal transfer and outlet tubes (6, 16) provide a long attenuation path for the exhaust gases.
Materials which sublime from the pump exhaust gases will collect in the expansion chambers of the Exhaust-Silencer.
These materials must be removed regularly from the Exhaust-Silencer to maintain its efficiency (refer to Section 4).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.