Edwards GXS 0-60 SLM User manual

GXS Flow Monitor kit
INSTRUCTION MANUAL
A60027880_A Original instrucons
edwardsvacuum.com
DESCRIPTION ITEM NUMBER
Flow Monitor 0-60 SLM A60027043
Flow Monitor 0-200 SLM A60027044

Copyright noce
©Edwards Limited 2020. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

Contents
1. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1 Scope and denions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Product descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.3 Construcon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.3 Install the Flow Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.1 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7. Appendix A1 - Tube ngs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7.1 Correct use of tube ngs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7.1.1 Connect a tube ng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7.1.2 Reconnect a tube ng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
8. Return the equipment or components for service . . . . . . . . . . . . . . . 16
Page 3

List of Figures
Figure 1: Flow Monitor kit general arrangement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Figure 2: Connect a tube ng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 3: Reconnect a tube ng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Page 4

1. Introducon
1.1 Scope and denions
This manual provides installaon, operaon and maintenance instrucons for the
Edwards GXS Dry Pumping System Nitrogen Flow Monitor, abbreviated to Flow Monitor
in the remainder of this manual. Use the Flow Monitor as specied in this manual. Use
this manual in conjuncon with the GXS pump manual.
Read this manual before you install and operate the Flow Monitor. Important safety
informaon is highlighted as WARNING and CAUTION instrucons; you must obey these
instrucons. The use of WARNINGs and CAUTIONs is dened below.
WARNING:
Warnings are given where failure to observe the instrucon could result in injury or
death to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cauons are given where failure to observe the instrucon could result in minor
injury or damage to the equipment, associated equipment or process.
The abbreviaon slm used in this manual refers to a standard litre per minute, i.e. a ow
of one litre per minute under standard condions of 1 atm pressure at 0° C.
1.2 Product descripon
WARNING:
This Flow Monitor is designed for use with nitrogen purge gas. As an alternave,
Compressed Dry Air (CDA) can be used. It is the user’s responsibility to make sure
that the selected purge gas is compable and safe to use.
CAUTION:
Flow Monitor used in the kit is not designed for rapid pressure changes on its input.
Inrush can damage the Flow Monitor. Install the slow opening solenoid valve to
prevent the Flow Monitor damage.
The Flow Monitor is designed to be externally ed to the GXS dry pumping system.
When installed, the Flow Monitor enables the user to monitor the ow of nitrogen
purge gas to the dry pumping system, and to indicate a no-ow condion.
The Flow Monitor is supplied in two types. 0‑60 SLM type is designed for:
▪GXS160
▪GXS160/1750
▪GXS250
▪GXS450
Page 5
A60027880_A - Introducon

▪ GXS450/2600
0‑200 SLM type is designed for:
▪ GXS450
▪ GXS450/2600
▪ GXS450/4200
▪ GXS750
▪ GXS750/2600
▪GXS750/4200
1.3 Construcon
Refer to Figure: Flow Monitor kit general arrangement on page 10.
The Flow Monitor kit has:
▪Flow Monitor
▪Pipe + adapters
▪Bracket
▪ Screws
▪Label
Page 6
A60027880_A - Introducon

2. Technical data
Table 1
Technical data
Parameter Data
Mass 0.6 kg
Accuracy at 6.2 bar(g) 60 SLM: ± 3.5%
200 SLM: ± 2%
Ambient operang temperature range 5 to 40 °C
Maximum ambient operang humidity 90% RH (non condensing)
Maximum working pressure 6.9 bar(g) (100 psi(g))
Page 7
A60027880_A - Technical data

3. Installaon
3.1 Safety
WARNING:
Obey the safety instrucons and take note of appropriate precauons. Only suitably
trained and supervised technicians may install the Flow Monitor.
WARNING:
The Flow Monitor is not intended to perform a safety funcon, it is not calibrated and
must be used for indicaon only.
▪ Purge and shut down the dry pumping system and disconnect the nitrogen supply
before you start installaon.
▪Disconnect the dry pumping system and the other components in the process
system from the electrical supply so that they cannot be operated accidentally.
▪ If the dry pump system is on, shut it down and allow it to cool to a safe
temperature before you start installaon.
▪Do not allow debris to get into the Flow Monitor system during installaon.
▪ Leak test the system aer installaon is complete and seal the leaks to prevent
further leakage. Leakage rate must be less than 1 x 10-5 mbar l s-1.
▪ Make sure that you connect, disconnect and ghten all tube connecon
components correctly (Refer to Figure: Connect a tube ng on page 14 and
Figure: Reconnect a tube ng on page 15).
▪Obey all naonal and local rules and safety regulaons when you install the Flow
Monitor.
3.2 Unpack and inspect
Remove all packing materials and protecve covers and inspect the Flow Monitor. If it is
damaged, nofy your supplier and the carrier in wring within three days; write the item
number of the Flow Monitor together with your order number and your supplier’s
invoice number. Retain all packing materials for inspecon. Do not use the Flow Monitor
if it is damaged.
If the Flow Monitor is not to be used immediately, ret the protecve packaging and
store the Flow Monitor in suitable condions, as described in Storage on page 12.
Check that your package contains the items listed in Table: Flow Monitor parts list on
page 8. If any of these items are missing, nofy your supplier in wring within three
days.
Table 2
Flow Monitor parts list
Quanty Descripon Check
1 Flow Monitor q
1 Bracket q
Page 8
A60027880_A - Installaon

Quanty Descripon Check
1 Pipe q
2 M5 Screw q
1 N2 Label q
3.3 Install the Flow Monitor
Install the Flow Monitor as shown in Figure: Flow Monitor kit general arrangement on
page 10.
Before you start installaon:
▪Make sure that the electrical power supply to the system is switched o.
▪Refer to Appendix A1 - Tube ngs on page 14 for assembly of all compression
type ngs.
▪Refer to Figure: Flow Monitor kit general arrangement on page 10 for the Flow
Monitor assembly components.
▪Leak check the installaon. Leakage rate must be less than 1 x 10-5 mbar l s-1
Page 9
A60027880_A - Installaon

Figure 1 Flow Monitor kit general arrangement
Item no. Descripon Quanty
1 Flow monitor 1
2 N2 Label 1
3 Flow monitor to Purge manifold pipe 1
4 M5 Screws 2
5 Bracket 1
Page 10
A60027880_A - Installaon

4. Maintenance
4.1 General
Follow the procedure during the maintenance of the dry pumping system:
▪ Make sure that the Flow Monitor is clean and is not damaged.
▪Make sure that the bracket is correctly installed to the pump rear bulkhead at the
Flow Monitor body. If necessary, ghten the screws and nuts of the the bracket.
▪Make sure that the nitrogen ngs are ght.
▪Make sure that the nitrogen pipes and ngs are not damaged or corroded.
Page 11
A60027880_A - Maintenance

5. Storage
If the Flow Monitor is not used immediately, ret any protecve packaging and store in
cool, dry condions unl required. When required for use, install the kit as described in
Install the Flow Monitor on page 9.
Page 12
A60027880_A - Storage

6. Disposal
Dispose of the Flow Monitor and any components in accordance with all local and
naonal safety and environmental requirements.
Page 13
A60027880_A - Disposal

7. Appendix A1 - Tube ngs
7.1 Correct use of tube ngs
Note:
It is recommended to use an addional spanner when you remove or t the tube
connector, to make sure that the ng does not move.
You must know how to correctly t and ghten tube ngs in order to prevent gas
leaks.
7.1.1 Connect a tube ng
To t a tube connector. Refer to Figure: Connect a tube ng on page 14
A. Turn and remove the nut (4) from the tube connector (1). Make sure that the front
(tapered) ferrule (2) and the rear ferrule (3) are correctly orientated with reference
to A, then loosely ret the nut (4) to the (1).
B. Insert the tube (5) through the nut (4) and into the tube ng (1). Make sure that
the tube rests rmly on the shoulder inside the ng, and that the nut (4) is nger
ght. Tighten the nut (4) unl you cannot rotate the tube (5). If the tube cannot be
turned because of the way it is installed, ghten the nut by 1/8 th of a turn.
C. Display the nut (4) at the six o’clock posion.
D. Hold the body of the connector steady, then turn the nut (4) by 1¼ turns (to the
nine o’clock posion) to fully ghten the connecon.
Figure 2 Connect a tube ng
1. Tube ng 2. Front (tapered) ferrule
3. Rear ferrule 4. Nut
5. Tube
1. Tube ng 2. Front (tapered) ferrule
3. Rear ferrule 4. Nut
5. Tube
Page 14
A60027880_A - Appendix A1 - Tube ngs

7.1.2 Reconnect a tube ng
You can achieve an accurate seal against leakage, even if you disconnect the tube
connector several mes and re-connect again.
1. Refer to Figure: Reconnect a tube ng on page 15
A. Shows the tube connector aer disconnecon.
B. Insert the tube (5) with the swaged ferrules (2, 3) into the tube ng (1),
unl the front ferrule (2) is fully in the body of the ng.
C. Tighten the nut (4) by hand.
2. Use a wrench or spanner to turn the nut (4) to its original posion (you will feel an
increase in resistance when the nut is in its original posion), then ghten the nut
slightly.
Figure 3 Reconnect a tube ng
1. Tube ng 2. Front (tapered) ferrule
3. Rear ferrule 4. Nut
5. Tube
1. Tube ng 2. Front (tapered) ferrule
3. Rear ferrule 4. Nut
5. Tube
Page 15
A60027880_A - Appendix A1 - Tube ngs

8. Return the equipment or components for service
Before you send your equipment to us for service or for any other reason, you must
send us a completed Declaraon of Contaminaon of Vacuum Equipment and
Components – Form HS2. The HS2 form tells us if any substances found in the
equipment are hazardous, which is important for the safety of our employees and all
other people involved in the service of your equipment. The hazard informaon also
lets us select the correct procedures to service your equipment.
We provide instrucons for compleng the form in the Declaraon of Contaminaon of
Vacuum equipment and Components – Procedure HS1.
If you are returning a vacuum pump, note the following:
▪If a pump is congured to suit the applicaon, make a record of the conguraon
before returning the pump. All replacement pumps will be supplied with default
factory sengs.
▪Do not return a pump with accessories ed. Remove all accessories and retain
them for future use.
▪ The instrucon in the returns procedure to drain all uids does not apply to the
lubricant in pump oil reservoirs.
Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the
procedure in HS1, ll in the electronic HS2 form, print it, sign it, and return the signed
copy to us.
NOTICE:
If we do not receive a completed HS2 form, your equipment cannot be serviced.

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