MICRO-EPSILON capaNCDT 6630 User manual

MI CRO- EPSI LON
SENSORS & SYSTEMS
capaNCDT 6630
Betriebsanleitung
Instruction manual

MICRO-EPSILON
MESSTECHNIK
GmbH & Co. KG
Königbacher Strasse 15
D-94496 Ortenburg
Tel. [phone]
Fax [phone]
e-mail [email protected]
www.micro-epsilon.de
DIN EN ISO 9001: 2000
Zertificated acc. to
Zertifiziert nach
Berührungsloses kapazitives Wegmesssystem
Non-Contact Capacitive Displacement Measurement

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English
MICRO-EPSILON
Contents
1. Safety ........................................................................................................... 23
1.1 Symbols Used.................................................................................................................23
1.2 Warnings ......................................................................................................................... 23
1.3 Notes on CE-Identification .............................................................................................. 24
1.4 Proper Use ...................................................................................................................... 25
1.5 Proper Environment ........................................................................................................ 25
2. Functional Principle, Technical Data.......................................................... 26
2.1 Measuring Principle ......................................................................................................... 26
2.2 Structure.......................................................................................................................... 27
2.2.1 Controller ........................................................................................................................ 27
2.2.2 Sensors ........................................................................................................................... 28
2.3 Technical Data ................................................................................................................. 28
3. Delivery ....................................................................................................... 30
3.1 Unpacking....................................................................................................................... 30
3.2 Storage ........................................................................................................................... 30
4. Installation and Assembly .......................................................................... 31
4.1 Precautionary Measures .................................................................................................. 31
4.2 Sensor ............................................................................................................................. 31
4.3 Electronics, Ground Connection, Earthing ..................................................................... 33
4.4 Signal Output .................................................................................................................. 33

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5. Operation..................................................................................................... 33
5.1 Starting Up ...................................................................................................................... 33
5.2 Zero Point and Gain........................................................................................................ 33
6. Operation and Maintenance ....................................................................... 34
7. Warranty ...................................................................................................... 35
8. Appendix...................................................................................................... 36
8.1 Accessories and Spare Parts .......................................................................................... 36
8.2 Sensor Dimensions ......................................................................................................... 36
8.3 PIN-Assignment ............................................................................................................... 37

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MICRO-EPSILON
Safety
1. Safety
1.1 Symbols Used
Knowledge of the operating instructions is a prerequisite for equipment operation. The following symbols are
used in this instruction manual:
DANGER! - imminent danger
WARNING! - potentially dangerous situation
i
IMPORTANT! - useful tips and information
1.2 Warnings
 Disconnect the power supply before touching the sensor surface
ðStatic discharge - danger of injury
ðDanger of injury
 The power supply and the display/output device must be connected in accordance with the safety
regulations for electrical equipment
ðDanger of injury
ðDamage to or destruction of the sensor and/or controller
 Avoid banging and knocking the sensor and controller
ðDamage to or destruction of the sensor and/or controller

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Safety
 The power supply may not exceed the specified limits
ðDamage to or destruction of the sensor and/or controller
ðDanger of injury
 Protect the sensor cable against damage
ðDestruction of the sensor
ðFailure of the measuring device
1.3 Notes on CE-Identification
The following applies to the capaNCDT series 6630: EC regulation 89/336/EEC
Products which carry the CE mark satisfy the requirements of the EC regulation EC 89/336/EEC
Electromagnetic Compatibility and the European standards (EN) listed therein. The EC declaration of
conformity is kept available according to EC regulation, article 10 by the authorities responsible at
MICRO-EPSILON MESSTECHNIK
GmbH & Co. KG
Koenigbacher Straße 15
D-94496 Ortenburg
Germany
The system is designed for use in industry and satisfy the requirements of the standards
 EN 50 081-1 RFI emission
 EN 61 000-6-2 Immunity to interference
The systems satisfy the requirements if they comply with the regulations described in the instruction manual
for installation and operation.

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MICRO-EPSILON
Functional Principle, Technical Data
1.4 Proper Use
The capaNCDT series 6630 measuring system is designed for use in industrial areas.
It is used for
- displacement, distance, thickness and movement measurement
- position measuring of parts or machine components
The systems may only be operated within the limits specified in the technical data (see chap. 2.3).
The system should only be used in such a way that in case of malfunction or failure personnel or machinery
are not endanged.
Additional precautions for safety and damage prevention must be taken for safety-related applications.
1.5 Proper Environment
 Protection class for sensor, cable
and preamplifier: IP 54
 Operating temperature sensor: -50 to +150 °C (-58 to +302 °F)
controller: +10 to +40 °C (+50 to +104 °F)
 Storage temperature: -10 to +75 °C (+14 to 167 °F)
 Humidity: 5 - 95% (non condensing)
 Ambient pressure: atmospheric pressure
 The space gap between the sensor face and the target must have an unvarying dielectric constant
 The space gap between the sensor face and the target may not be contaminated (e.g. water, rubbed-off
parts, dust, etc.)
 Vibration According to IEC 68-2-6
 Mechanical shock According to IEC 68-2-27
 EMC: Acc. to EN 50 081-1 RFI emission
EN 61 000-6-2 Immunity to interference

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Functional Principle, Technical Data
2. Functional Principle, Technical Data
2.1 Measuring Principle
The principle of capacitive distance measurement with the capaNCDT system is based on the parallel plate
capacitor. If a constant AC current Icflows through the sensor capacitor, the amplitude of the AC voltage Ucat
the sensor is proportional to the distance dbetween the capacitor electrodes.
The two plate electrodes are formed by the
sensor and the target opposite. The
measured AC voltage is compared with a
compensating voltage, rectified, amplified
and output as an analog voltage.
The sensor design with guard ring electrodes
guarantees that the ideally necessary
homogenous electrical field is realized for all
practical purposes.
The linear characteristic of the measuring
signal is achieved without extra electronic
linearization efforts when measuring on
targets made of electrically conductive
materials (metals). Small changes in the
conductivity or magnetic properties do not
affect the sensitivity or linearity.
d
Uc
ground
screening electrode (guardring)
measuring electrode
target: electrical conductor
Fig. 2.1: Functional principle of the guardring capacitor
eoer
C = A
d
Uc
Xc = =
Ic
1
wCUc = >> Uc d
Ic
weoerA
d~
i
IMPORTANT!
A small target and
bent (uneven)
surfaces cause a
nonlinear
characteristic.

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MICRO-EPSILON
Functional Principle, Technical Data
2.2 Structure
The capaNCDT 6630 is a multi-channel non-contact displacement measuring system for 19 " rack mounting.
All functions such as display and demodulator are pluggable. One measuring channel consists of a sensor
with connecting cable and the controller which comprise the oscillator and demodulator modules. The
electronic modules are Euro size cards and are designed for use in an Eurocard cabinet. The measuring
system has already been calibrated for metal targets.
2.2.1 Controller
The oscillator a part of the controller supplies the sensor with a frequency and amplitude-stable sinusoidal
voltage. The frequency is 31.25 kHz. The oscillator has no
controls and potentiometers.
Demodulation, linearization and amplification of the
distance-dependent measuring signal are the tasks of the
demodulator module. The trimmers (see fig. 2.2)
 Gain
 Zero
are used for setting gain and zero point of the complete
measuring channel (see chap. 5.2).
The analog demodulator output voltage (channel output)
can be set within the range from -10 to +10 Volts at a
maximum output current of 10 mA. The output is short-circuit
proof. The output impedance is less than 10 Ohms.
Zero Gain
Fig. 2.2: DT 6630 with potentiometers

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Functional Principle, Technical Data
2.2.2 Sensors
The sensors are connected to the controller with a 1.6 m (5 ft) long triaxial cable. In order to obtain accurate
measuring results, the surface of the sensor must be kept clean and free from damage.
The capacitive measuring process is area-related. A minimum area is required depending on the sensor
model and measuring range.
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2.3 Technical Data
DT 6630-S600-1(02)-C1,6 DT 6630(01)-S600-1(02)-C1,6 DT 6630(15)-S600-1(02)-C1,6
200 µm 400 µm 100 µm
50 µm 100 µm 70 µm
calibrated 1±0.1 µm ±0.4 µm ±0.05 µm
uncalibrated 2±0.4 µm ±1.6 µm ±0.2 µm
static30.1 nm 0.2 nm 0.1 nm
dynamic (1 kHz) 10 nm 20 nm 5 nm (4 kHz)
Repeatability static 0.0004 µm 0.0015 µm 0.0004 µm
Model
Measuring range
SMR
Linearity
Resolution
SMR = Start of
measuring range