Nordson AP-300 Instruction manual

AP-300/AP-600
HMI Quick User Guide

START THE PLASMA UNIT
32
1
1) Start the vacuum pump (vacuum pump could be adifferent type) Start the pump 15 minutes prior using the plasma system.
2) Check by rotating counter clockwise the EMO button is released
3) Press the green On button to power-up the Plasma system.

HOW TO LOGIN
1
2
After the system has been powered and
initialized press (1) to goto the Main
Screen.
Press the Logout indicator box (2)
The Password Pop-up Screen appears.
Type in the password for the desired user
level and click ENT (3) to submit de code
System Default passwords per level
below;
Engineer: xxxxxxxxx
Technician:55555555
Operator2: 88888888
Operator1: 99999999
(8 * x)
(8 * 5)
(8 * 8)
(8 * 9)
3

7
IPC
8
9
CREATE/DEVELOP A RECIPE (1/3)
•After power up and initializing stage
press (1) to goto the Main overview
screen.
• Press Recipe Name(2) to access the
recipes screen
•Select an empty memory storage
location or a recipe to overwrite(3)
• Press Overview (4) to return to the
Main overview screen
•Press Manual (5) to open the Manual
control screen
•Toggle the read/write switch (6) so
the system is in write mode. All fields
which can be changed will have a
blue cadre.
•IPC: Make sure the IPC has been
toggles into manual mode(7)(8) and
the IPC open% (9) has been set to
100%. See “How to use the IPC
control” for running the tool with in
depended pressure control
functionality.
•Press Return to go back to the
Manual control screen
3
2
4
1
5
6
10

CREATE/DEVELOP A RECIPE (2/3)
•Make sure the system is in write
mode(1)
•Make sure the system is in manual
mode. Stop (7) should have agreen
cadre prior the Manual (2) can be
activated in case it is off.
•Apply vacuum(3), gas(4) and RF(6)
accordingly.
•Settings can be directly changed on
the fly. Make sure the manual mode
alarms are disabled (!) in the
Parameters screen.
! In case settings are or system state is
incorrect the system doesn’t allow
activation of a function (button stays with
red cadre) or changes into a yellow cadre
which means the command will be
executed once the system is in the right
state.
1
2
3
4
5
6
7
STOP / NOK /
INACTIVE
WAITING PRIOR
EXECUTING
ACTIVE / OK /
RUNNING
CAN BE SELECTED
TO EDIT / INPUT
------------------- INTERFACE COLOUR LEGENDA ---------------------
!
Reminder, where to find the
manual mode alarms switch:

CREATE/DEVELOP A RECIPE (3/3)
Parameters Info:
FWD: Forwarded Power, Power applied
to the electrode(s)
REF: Reflected Power, should be ≤7
Watts. When tuning in Auto mode
automatically reduced to minimum
value,ideal 0Watt.
RF TIME: RF on time while reflected
power ≤ 7 Watts in seconds
PRESSURE: Without IPC the expected
average system pressure. With IPC the
set value to reach. Standard in m T.
GAS x: Gas flow in standard cubic
centimeter per minute (SCCM)
RANGE: The allowed plus/minus
pressure swing around the set system
pressure.
BASE: is the vacuum level the system
will pump to prior starting the gas flow.
RF will turn on after the gas stable time
set by the gas stable timer. The gas
stable timer can be found Main Screen->
Parameters -> Gas stable Time.

SHUTDOWN THE PLASMA UNIT WITH CHAMBER UNDER VACUUM
1
2
3
5
4
1) From the Main screen press Manual
2) In the Manual screen press Manual when the buttons cadre is not green
3) Press Vacuum to pull the chamber vacuum. When the pressure reading is <100mT press the EMO button(4) to shutdown the plasma unit
5) Switch the vacuum pump off.