Olympus AL120-12 Series User manual

Operation Manual
AL120-12 Series
300mm Semiconductor Wafer Loader
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
AM5059-01

This page intentionally left blank.

Operation/Maintenance Manual Introduction
i-1
Page
i Introduction
AL120 Series Lineup
This product is an auto loader to transfer the wafer from the cassette to the microscope. The macro
observation is available while transferring wafers.
AL120 series products consist of a model name and an applicable wafer size.
Note that only the AL120 series products with the same wafer size can be combined.
(The remote controller is common to all the AL120 series products.)
AL120 series
Stage
The AL120 series consists of a wafer loader, a vacuum stage, and other products.
This manual does not cover custom-order specifications or microscopes.
To acquire a comprehensive understanding of both your loader and microscope, please refer to your
microscope operation manual.
Please prepare the cassettes and wafers at your side.
Wafer Loader
AL120-LMB12-F
AL120-LMB12-LP3
Option
Microscope
MX61L
MX63L
Vacuum Stage
AL120-VS12
Option
Remote Controller
AL120-RC
Series name
Model name
Wafer size
Cassette type
LMB
AL120-
LMB:Type of Wafer Loader
12
-LP3
-F
：
FOSB specification
-LP3：FOUP opener specification
Series name
Model name
Wafer size
VS
AL120-
12

Introduction/Precautions Operation/Maintenance Manual
i-2
Page
1. Precautions
Operators must follow the instructions in the Operation/Maintenance Manual. If these instructions are not
followed, safety can not be assured, and malfunctions may occur.
The following 3 types of symbols are used in this Manual to draw operators' attention.
: Indicates a potentially hazardous situation which, if not avoided, may result in
minor or moderate injury.
: Indicates a potentially hazardous situation which, if not avoided, may result in
damage to the product or other property and/or may cause problems.
2. Safety Precautions
1. Always use the power cord provided by Olympus. If no power cord is provided
, please select the power cord by referring to the section “PROPER SELECTION
OF THE POWER SUPPLY CORD” at the end of this chapter. If the proper power cord
is not used, Olympus can no longer warrant the electrical safety performance of
the equipment. Layout the power cord at a sufficient distance from the sources of
heat such as the power supply unit/light source and lamp housing to avoid
contact with these heat sources.
2. Use the device within the scope of the specifications.
3. When you move equipment, notify Olympus distributor.
4. Always Install the product at the location where you can reach the power cord at hand
to disconnect it quickly. In case the abnormality is found with the loader, pull out the
power cord immediately from the back side of the loader.
5. Bundle cables or tubes to the table legs, etc. to prevent your legs from getting caught
in cables or tubes.
6. Be sure to connect the ground terminal of the power cord and that of the power outlet.
Otherwise, the electric safety performance intended by Olympus cannot be assured.
7. Never place a metallic object in the ventilation. This could cause an electrical shock or
malfunction.
8. Maintenance works must be done by well-trained person.
9. When it cleans a broken wafers, it is use with protection gloves etc.
10. In case the vacuum supply is stopped, a risk of dropping the wafer may be caused
during the test. It is recommended to connect the check valve or the buffer tank in
order to maintain the vacuum in case the vacuum supply is stopped. The check valve
ＣＡＵＴＩＯＮ
ＮＯＴＩＣＥ
ＣＡＵＴＩＯＮ

Operation/Maintenance Manual Introduction/Safety Precautions
i-3
Page
or the buffer tank is not provided with this product. If you need them, contact
Olympus.
11. Be careful, if you transfer the wafer in the down-flow status that may allow the wafer
to sway, the risk may be caused in transferring the wafer.
12. Be sure to use the cassette complied with SEMI standards. Using the distorted
cassette may cause the risk of damaging the wafer, etc.
13. To allow each microscope manifest its full performance, reserve an installation space
having the minimum dimensions described below before assembly and installation
of the microscope.
*The dimensions of the area enclosed in alternate long and two short dashes lines
indicate the stage movement range.*When maintenance is required, a larger work
space can be prepared by changing the observation tube orientation or moving
the stage.
*The following installation space is set according to the SEMI standard guidelines
(SEMI S8-1016).It is recommended that you set the optimum installation space
for each customer by referring to the following installation space data as well as
the appearance of the system, eye point height, etc.
14. FOUP opener is equipped with a power shut-off switch, located near the top edge of
the open door.
This switch is mechanically coupled with the window opening/closing system.
The switch is exposed on the upper position of the door while the window is open
,and stored in a position where it does not touch the door while the window is closed.
If the door of the FOUP opener closes while the window is open, the switch is turned off
and the power of the FOUP opener is shut off.This system prevents injuries from getting
hands caught in the door.

Introduction/Safety Precautions Operation/Maintenance Manual
i-4
Page
AL120-LMB12-F extermal view,eye point and center of gravity
Unit:mm
AL120-LMB12-F installation space Unit:mm
Stage movement range
installation space
Center of gravity
Center of gravity
Eye Point

Operation/Maintenance Manual Introduction/Safety Precautions
i-5
Page
AL120-LMB12-LP3 extermal view,eye point and center of gravity
Unit:mm
AL120-LMB12-LP3 installation space Unit:mm
installation space
Stage movement range
Center of gravity
Center of gravity
Eye Point

Introduction/Safety Precautions Operation/Maintenance Manual
i-6
Page
Earthquake Protection
Please fix the equipment to the supporting floor so as not to be moved by unexpected force such as an
earthquake using stoppers or equivalent means as per the requirements.
Quakeproof fixed parts (Option)
Material: Stainless Steel
Plate Thickness: 9mm
Fixing bolts: M10

Operation/Maintenance Manual Introduction/Safety Precautions
i-7
Page
Safety Symbols
The following symbols are affixed to the device. In order to safely operate this device, be sure to familiarize
yourself with the meanings of individual symbols.
Warning Indications
Warning indications are attached on the part which the special attention should be paid to the safety when
operating/using the equipment.
Follow the instructions surely.
If these symbols become dirty or peel off, contact your nearest OLYMPUS distributor for exchange and
servicing.
DANGER
MECHANICAL HAZARD
KEEP HANDS AND GARMENTS.
CLEAR OF MOVING PARTS.
CONSULT MANUAL FOR SERVICING INSTRUCTIONS.
Warning indications position:
Each arm of this device is electric drive.
The whole device movement is attention not to put a hand and a face in a device.
MECHANICAL HAZARD
Contact with moving parts causes injury by getting caught
or pinched.
Keep hands and garments away from moving parts.
Consult manual for servicing instructions.
|
○
This symbols indicate the presence of mechanical parts that can result in pinching,
crushing or other bodily injury.
Indicates that the main switch is ON.
Indicates that the main switch is OFF.
CAUTION

Introduction/Before Starting Operations Operation/Maintenance Manual
i-8
Page
3. Before Starting Operations
In order to get the best performance from the loader, as well as to ensure safety, please follow the 3
points listed below.
1. Never put your hands in the loader.
2. Do not deliberately place wafers or other objects in or remove from the loader
while it is in operation.
If excess force is applied to the wafer under inspection, it could lose its
adhesiveness and could be damaged.
3. Make sure that the main switch is turned off before removing a wafer for
unavoidable reasons such as malfunctions.
4. Maintenance and Storage
Be sure to set the main stich to
○
(OFF) and disconnect the power cord from the
back side of the loader before starting following operations.
1. Wipe each part of the loader using a soft cloth moistened with pure water.
Wipe heavy dirt or stains with a clean paper moistened with commercially
available absolute alcohol.
Never place absolute alcohol close to a flame as it is highly flammable.
Take care not to cause sparks by turning on or off an electric appliance or
fluorescent lamp.
2. Wear gloves to protect your hands while cleaning the loader when for example a
wafer is damaged.
3. Periodically check the loader for wear (a wafer loading arm and deterioration of
the drive mechanism), and replace the parts as needed. Contact your nearest
OLYMPUS distributor for repair.
1. Never disassemble the loader unnecessarily. This could affect the performance
and function of the loader.
2. Contact your nearest OLYMPUS distributor if you need MSDS.
3. Confirm and observe your local municipal ordinances or regulations when you
dispose of the loader.
If you have any questions, contact your nearest OLYMPUS distributor.
4. Lenses and solders used by this system are lead-free.
ＣＡＵＴＩＯＮ
ＣＡＵＴＩＯＮ
ＮＯＴＩＣＥ

Operation/Maintenance Manual Introduction/Daily Check
i-9
Page
AL120-LMB12-LP3 ALL
Press Start button
No |Size |Thick |Comment
1. |300 |775-500 |
Recall Wafer Setting Memory
5. Daily Check
1. Confirm the following points before operating the loader.
(1) Vacuum supply pressure: -67KPa to -80KPa
When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor.
(2) Clean dry air supply pressure : 0.5MPa to 0.6MPa. [AL120-LMB12-LP3]
(3) Make sure that there are no wafers or tools inside the wafer loader
2. Confirm the following points before starting the inspection.
(1) Make sure that the power is on (Check the liquid crystal panel)
Turn the main switch ON and make sure that each arm position is
initialized and the model name is shown on the liquid crystal panel.
The loader may have been set to skip initialization when the power
is turned on. This is not a malfunction. The loader executes
initialization when the [Start] button is pressed.
(2) Check the Emergency Off Switch
When the Emergency Off Switch is pressed, make sure that the power supply shuts down and the main
switch turns OFF.
(3) Confirmation of automatic power supply interception of FOUP opener
Open the observation window, and select [Test Program] -> [Test No.1] -> <Menu2>[M2], and then start
<Z axis movement check> by pressing the start switch.
Make sure that the door of the FOUP opener rises and the power of the FOUP opener is shutoff by the
interlock switch.
(4) Please make sure to close the observation window for macroinspection before turn on the power.
Please never put the hand in the FOUP door while this device is working
ＣＡＵＴＩＯＮ

Introduction/Conformity Standards Operation/Maintenance Manual
i-10
Page
6. Conformity Standards
(1) This equipment is carrying out conformity or evaluation to the following standard.
(2) Although this equipment aims at using in the industrial environment, since it may not satisfy
a performance when not used by the right operation method, please carry out the proper
handling according to this manual.
FCC
This product has been tested and found to comply with the limits for a Class A digital device, pursuant to
Part 15 of the FCC rules. These limits are designed to provide reasonable protection against harmful
interference when the product is operated in a commercial environment. This product generates, use,
and can radiate radio frequency energy and, if not installed and used in accordance with the instruction
manual, may cause harmful interference to radio communications.
Operation of this product in a residential area is likely to cause harmful interference in which case the
user will be required to correct the interference at his own expense.
SEMI
This equipment is carrying out evaluation to the guideline of the following SEMI standard.
・S2-1016: Safety Guidelines for Semiconductor Manufacturing Equipment
・S8-1016: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
For Korea only
이기기는 업무용 환경에서 사용할 목적으로 적합성평가를 받은 기기로서 가정용
환경에서 사용하는 경우 전파간섭의 우려가 있습니다.
ＣＡＵＴＩＯＮ
This equipment is an object for industrial environment (Class A). Other
equipment may be affected if it is used in a housing environment.
FCC WARNING:
Changes or modifications not expressly approved by the party responsible for
compliance could void the user's authority to operate the product.
ＣＡＵＴＩＯＮ
FCC Supplier's Declaration of Conformity
Hereby declares that the product
Product name: Semiconductor Wafer Loader, Semiconductor Wafer Loader and Accessory
Model Number: AL120-LMB12-LP3
Conforms to the following specifications:
FCC Part 15, Subpart B, Section 15.107 and Section 15.109
Supplementary Information:
This device complies with part 15 of the FCC Rules. Operation is subject to the following two
conditions: (1) This device may not cause harmful interference, and (2) this device must
accept any interference received, including interference that may cause undesired operation.
Responsible Party Name: Olympus Scientific Solutions Americas Corp.
Address: 48 Woerd Ave Waltham, MA 02453, U.S.A.
Phone Number: 781-419-3900

Operation/Maintenance Manual Introduction/Conformity Standards
i-11
Page

Introduction/Conformity Standards Operation/Maintenance Manual
i-12
Page

Operation Manual
Table of Contents
C-1
Page
1 Nomenclature 1-1
1-1 Wafer Loader Main Body······················································1-
１
1-1-1 AL120-LMB12-F ··········································································· 1-１
1-1-2 AL120-LMB12-LP3·········································································1-2
1-1-3 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-F] ·······························1-3
1-1-4 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-LP3]···························· 1-3
1-1-5 OPERATION PANEL ··········································································1-4
1-1-6 FOUP OPENER OPERATION DISPLAY PANEL·············································1-4
1-2 Remote Controller (Option) ·················································· 1-5
2 Outline of Operation Procedures 2-1
1Description of Symbols 2-1
2Operation Procedure 2-1
2-1 Procedure before Starting Transfer ······································· 2-3
Preparation 2-3
1Turning the Main Switch ON: Main Switch 2-3
2Cassette Setting 2-3
3FOUP OPENER(AL120-LMB12-LP3) 2-4
4Selecting the Type of Inspection Wafer: 4-way button 2-5
5 Setting the Sequence (Inspection Type: [Observation] Button 2-6
6Setting the Inspection Mode 2-7
7Selecting Wafers for Inspection: Wafer No. Selector Button 2-9
8Setting the Orientation Flat and Notch Positions on the Microscope: [Wafer
alignment] Position Control 2-10
9Setting the Inspection Time: [Inspection Time] Control 2-10
10 Detailed Settings for the Top Macro Inspection: [Top macro spin direction] and
[Topmacro spin speed] Controls 2-10
11 Setting Wafer Alignment when Unloading a Wafer 2-11
2-2 Vacuum Stage ·································································· 2-13
1How to Move the Vacuum Stage 2-13
2How to Use the Grip Handle 2-13
3How to Use the Wafer Rotating Knob 2-13
2-3 Start of Transfer································································ 2-14
1Start of Transfer: [Start] Button 2-14
2Status of the Loader in Operation 2-14

Operation Manual
Table of Contents
C-2
Page
3Top Macro Inspection 2-15
4Back Macro Inspection and 2nd Back Macro Inspection: Setting the Back Macro
Tilt Angle 2-15
5Observation window for macro inspection （AL120-LMB12-LP3）2-16
6Transferring a Wafer onto the Vacuum Stage 2-17
7Temporarily Registering the Inspection Results: [Registration] Button 2-18
2-4 Stoppage of Transfer ························································· 2-19
1Temporarily Stopping the Loader during Inspection: [Pause] Button 2-19
2Removing a Wafer with Tweezers during Inspection: [Wafer Reject] Button 2-19
3Unloading a Wafer during Inspection: [Unload] Button 2-20
4EMO: [EMERGENCY OFF] Button 2-20
5Terminating the Inspection: [Quit] Button 2-20
3
Inspections 3-1
3-1 Preparations ·······································································3-1
3-2 Inspection Operations··························································3-1
3-2-1 MICROSCOPE INSPECTION ······························································· 3-1
3-2-2 TOP MACRO INSPECTION································································· 3-3
3-2-3 BACK MACRO INSPECTION ······························································· 3-4
3-2-4 BACK MACRO INSPECTION +2ND BACK MACRO INSPECTION······················ 3-5
3-2-5 TOP MACRO INSPECTION +MICROSCOPE INSPECTION ····························· 3-6
3-2-6 BACK MACRO INSPECTION +MICROSCOPE INSPECTION ··························· 3-8
3-2-7 TOP MACRO INSPECTION +BACK MACRO INSPECTION ····························3-10
3-2-8 MICROSCOPE INSPECTION +TOP MACRO INSPECTION +BACK MACRO
INSPECTION +2ND BACK MACRO INSPECTION ······································3-11
3-3 Special Operations ···························································· 3-13
3-3-1 CHANGING THE WAFER SELECTION SETTING········································3-13
4
Specifications 4-1
5
Problems during Use and Solutions 5-1
5-1 When Warning Codes Are Displayed ······································5-1
5-2 When Error Codes Are Displayed ··········································5-4
5-3 How to Reset the Circuit Breaker········································· 5-12
5-4 Emergency Off ·································································· 5-12

Operation Manual
Table of Contents
C-3
Page
5-5 Power Failure ··································································· 5-12
5-6 Automatic Unloading························································· 5-13
1During the Top Macro Inspection 5-14
2During the Back Macro Inspection 5-14
3When a Wafer is on the F-arm 5-15
4When a Wafer is on the A-arm 5-15
5When a Wafer is on the Vacuum Stage 5-16

Operation Manual
Table of Contents
C-4
Page
This page intentionally left blank.

Operation/Maintenance Manual Nomenclature
1-1
Page
1 Nomenclature
1-1 Wafer Loader Main Body
1-1-1 AL120-LMB12-F
Power Switch
Lo
ck ring
Joystick
EMO
Cassette base
Operation Panel
Warning label
Hand guard
Warning label
A
-arm
Stage operation permission LED
F1
-arm
F2
-arm
Macro table
Notch alignment sensor
L
-arm
Cover
Back Macro tilt angle control buttons

Nomenclature/Wafer Loader Main Body Operation/Maintenance Manual
1-2
Page
1-1-2 AL120-LMB12-LP3
Inspection view window
FOUP O
pener
FOUP opener operation LED
Hand guard
Opening permission LED of the window