Omron ZS-HL - User manual

1ZS-HL series
The scalable high-precision laser measurement sensor
ZS-HL series
The ZS laser sensor family provides out-
standing measurement performance on
all kind of materials. Its huge range of
sensor heads and scalable concept
makes it a versatile platform for all high
precision sensing applications.
• Highest resolution and dynamic
sensing range for all surfaces
• Modular and scalable platform
concept for up to 9 sensors
• Easy to use, install and maintain for all
user levels
• Fast response time of 110 µs
• Multi-tasking capability – manages up
to 4 measurement tools in one
controller
Ordering information
Sensors
ZS-HL-series sensor heads
ZS-HL-series sensor heads (for nozzle gaps) also compatible with ZS-L controller
ZS-L-series sensor heads
Optical system Sensing distance Beam shape Beam diameter Resolution*1
*1. Refer to the table of ratings and specifications for details.
Model
Regular reflective models 20±1 mm
Line beam
1.0 mmx20 µm 0.25 µm ZS-HLD2ST
25±2 mm 2.2 mmx45 µm 0.6 µm ZS-HLDS2VT
Diffuse reflective models
50±5 mm 1.0 mmx30 µm 0.25 µm ZS-HLDS5T
100±20 mm 3.5 mmx60 µm 1 µm ZS-HLDS10
600±350 mm 16 mmx0.3 mm 8 µm ZS-HLDS60
1500±500 mm 40 mmx1.5 mm 500 µm ZS-HLDS150
Optical system Sensing distance Beam shape Beam diameter Resolution*1
*1. Refer to the table of ratings and specifications for details.
Model
Regular Reflective 10±0.5 mm Line beam 900x25 µm 0.25 µm ZS-LD10GT
15±0.75 mm ZS-LD15GT
Optical System Sensing distance Beam shape Beam diameter Resolution*1
*1. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse re-
flection mode and glass in the regular reflection mode.
Model
Regular reflective models 20±1 mm Line beam 900x25 µm 0.25 µm
ZS-LD20T
Spot beam 25 µm dia. ZS-LD20ST
40±2.5 mm Line beam 2000x35 µm ZS-LD40T
Diffuse reflective models
50±5 mm Line beam 900x60 µm 0.8 µm ZS-LD50
Spot beam 50 µm dia. ZS-LD50S
80±15 mm Line beam 900x60 µm 2 µm ZS-LD80
130±15 mm Line beam 600x70 µm 3 µm ZS-LD130
200 ±50 mm Line beam 900x100 µm 5 µm ZS-LD200
350 ±135 mm Spot beam 240 µm dia. 20 µm ZS-LD350S
Q19E-EN-02+ZS-HL+Datasheet.fm Seite 1 Mittwoch, 25. Februar 2009 2:19 14

2 Displacement sensors / Width-measuring Sensors
Sensor controllers
Multi controllers
Data storage units
Accessories (Sold separately)
Controller link
Panel mount adapter
Cables for connecting to a Personal Computer
Extension cables for sensor heads
Logging software
Memory card
Safety precautions for using laser equipment
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs ZS-HLDC11
PNP outputs
ZS-HLDC41
ZS-HLDC41A
(incl. USB cable +
Smart Monitor)
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs ZS-MDC11
PNP outputs ZS-MDC41
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs ZS-DSU11
PNP outputs ZS-DSU41
Shape Model
ZS-XCN
Shape Model
ZS-XPM1 For 1st controller
ZS-XPM2 For expansion (from
2nd controller on
Shape Model Type Qty
ZS-XRS2 RS-232C
1
ZS-XUSB2 USB
Cable length Model Qty
1m ZS-XC1A 1
4m ZS-XC4A 1
5m ZS-XC5B
*1,*2
*1. Up to two ZS-XC@B Cables can be connected (22 m max.).
*2. A Robot Cable (ZS-XC5BR) is also available.
1
8m ZS-XC8A 1
10 m ZS-XC10B*1 1
Name Model
Smart Monitor Zero
Professional ZS-SW11E
Model Model
F160-N64S(S) 64 MB
QM300-N128S 128 MB
F160-N256S 256 MB
Attach the following
warning label to the side of
the ZS-L-series Sensor
Head.
Laser Label Indications
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3ZS-HL series
Specifications
Sensor heads
ZS-HL-series sensor heads
Item ZS-HLDS2T ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 ZS-HLDS60 ZS-HLDS150
Applicable
controllers
ZS-HLDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Diffuse
reflection
Diffuse
reflection
Measuring
center distance
20mm 5.2mm 25mm 44mm 50mm 94mm 100mm 600mm 1,500mm
Measuring range ±1 mm ±1 mm ±2 mm ±4 mm ±5 mm ±16 mm ±20 mm ±350 mm ±500 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Clas Visible semiconductor laser
(wavelength 658 nm, 1 mW
max., Class 2)
Beam shape Line beam
Beam diameter*1
*1. Defined as 1/e² (13.5%) of the center optical intensity in the measurement center distance. The beam diameter is sometimes influenced by the ambient conditions
of the workpiece such as leaked light from the main beam.
1.0 mmx20 µm 2.2 mm
x45 µm
1.0 mmx30 µm 3.5 mmx60 µm 0.3 mm
x16 mm
1.5 mm
x40 mm
Linearity*2
*2. This is the error on the measured value with respect to an ideal straight line. Linear curve may change according to the workpiece. The following lists the workpieces
±0.05% F.S. ±0.2 %F.S. ±0.1% F.S. ±0.07 %F.S.
(250 mm to
750 mm)
±0.1% F.S.
(750 mm to
950 mm)
±0.2 %F.S.
Resolution*3
*3. This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement center distance when high-resolution mode and the aver-
age number in the table are set (For ZS-HLDS60, the maximum resolution at 250 mm is also included). The following lists the workpieces.
0.25 µm
(No. of samples to average:
256)
0.5 µm
(No. of sam-
ples to aver-
age: 128)
0.25 µm
(No. of samples to average:
512)
1µm
(No. of samples to average:
64)
8µm
(average 64)
(at 250 mm)
40 µm
(average 64)
(at 600 mm)
500 µm
(average 64)
Temperature
characteristic*4
*4. Value obtained when the sensor part and object part are fixed with an aluminum jig.
0.01% F.S./°C 0.1% F.S./°C 0.01% F.S./°C
Sampling cycle 110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indica-
tors
NEAR
indicator
Lits near the measurement center, and nearer than the measurement center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lits near the measurement center, and further than the measurement center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating
ambient
illumination
Illumination on received light surface 3,000 lx or less (incandescent light) Illumination
on received
light surface
1,000 lx or
less (incan-
descent light)
Illumination
on received
light surface
500 lx or less
(incandes-
cent light)
Ambient
temperature
Operating: 0 to +50°C, storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection
IP64 IP67 Cable length 0.5 m: IP66, cable length 2 m: IP67 IP66 (IEC60529)
Vibration
resistance
(destructive)
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance
(destructive)
150 m/s² 3 times each in six directions (up/down, left/right, forward/backward)
Materials Case: aluminum die-cast, front cover: glass
Cable length 0.5 m, 2 m 2 m 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g Approx. 800 g
F.S.: Full scale of measurement
Model Diffusive reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T/HLDS10 White alumina ceramic Glass
ZS-HLDS60/HLDS150 White alumina ceramic -
ZS-HLDS2VT - Glass
Model Diffusive reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic -
ZS-HLDS2VT - Glass
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4 Displacement sensors / Width-measuring Sensors
ZS-L-series sensor heads
Item Model ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT
Applicable
controllers
ZS-HLDC/LDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular reflection
Measuring center
distance
20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter*1
*1. Defined as 1/e² (13.5%) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900x25 µm 25 µm dia. 2,000x35 µm Approx. 25x900 µm
Linearity*2
*2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and
glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.
±0.1%F.S
Resolution*3
*3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse re-
flection mode and glass in the regular reflection mode.
0.25 µm 0.25 µm 0.4 µm 0.25 µm 0.25 µm
Temperature
characteristic*4
*4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.04% FS/°C 0.04% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle*5
*5. This value is obtained when the measuring mode is set to the high-speed mode.
110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indica-
tors
NEAR
indicator
Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and further than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambi-
ent illumination
Illumination on received light surface: 3,000 lx or less (incandescent light)
Ambient
temperature
Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection
Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
Materials Case: Aluminum die-cast, front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 400 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure Locks (2), instruction sheet Laser safety labels (1 each for JIS/
EN),ferrite cores (2), insure locks
(2)
Item Model ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-
LD350S
Applicable
controllers
ZS-HLDC/LDC series
Optical system
(reflection)
Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse
Measuring center
distance
50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam
Beam diameter*1 900x60 µm 50 µm dia. 900x60 µm 600x70 µm 900x100 µm 240 µm
dia.
Linearity*2 ±0.1%F.S. ±0.25%
F.S.
±0.1%F.S. ±0.25%
F.S.
±0.04%
F.S.
Resolution*3 0.8µm 0.8µm 2µm 3µm 5µm 20µm
Temperature
characteristic*4
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04%
FS/°C
Sampling cycle*5 110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indica-
tors
NEAR
indicator
Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and further than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating
ambient
illumination
Illumination on received light surface: 3,000 lx or less (incandescent light) Illumination on received
light surface: 2,000 lx or
less (incandescent light)
Illumination on received light surface:
3,000 lx or less (incandescent light)
Ambient
temperature
Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
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5ZS-HL series
Sensor controllers
ZS-HLDC11/HLDC41
ZS-MDC11/MDC41 multi-controllers
Basic specifications are the same as those for the
sensor controllers.
The following points, however, are different.
(1) Sensor heads cannot be connected.
(2) A maximum 9 of controllers can be connected.
Control link units are required to connect con-
trollers.
(3) Processing functions between controllers:
Math functions
Degree of
protection
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure Locks (2), instruction sheet
*1. Defined as 1/e² (13.5%) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
*2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and
glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.
*3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse re-
flection mode and glass in the regular reflection mode.
*4. This is the value obtained at the measuring center distance when the sensor and workpiece are fixed by an aluminum jig.
*5. This value is obtained when the measuring mode is set to the high-speed mode.
Sensor controllers Model ZS-HLDC11 ZS-HLDC41
NPN/PNP NPN PNP
No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted sensors 1 per sensor controller
External
interface
Connection method Serial I/O: connector, other: pre-wired (standard cable length: 2 m)
Serial I/O USB 2.0 1 port, full speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps. max.
Output Judgement output HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA max.,
residual voltage 1.2 V max
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max.,
residual voltage 1.2 V max
Linear output Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
Voltage output: .10 to 10 V, output impedance: 40 Ω
Current output: 4 to 20 mA
Inputs Laser OFF,
ZERO reset timing,
RESET
ON: Short-circuited with 0 V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V of
supply voltage.
OFF: Open (leakage current: 0.1 mA max.)
Functions Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal
block output
Sensing: Mode, gain, measurement object, head installation
Measurement point: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank
(switching and clear)
System: Save, initialization, measurement information display, communications settings, key lock, lan-
guage, and data load
Task: Single task or multitask (up to 4)
Status indicators HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (green), and ENABLE (green)
Segment display Main digital 8-segment red LED, 6 digits
Sub-digital 8-segment green LEDs, 6 digits
LCD 16 digitsx2 rows, colour of characters: green, resolution per character: 5x8 pixel matrix
Setting inputs Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max. (when sensor head is connected)
Ambient temperature Operating: 0 to 50°C, storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP20
Materials Case: Polycarbonate (PC)
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet
Item Model ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-
LD350S
Controller Link Unit
Multi-ControllerData Storage Unit Sensor Controllers
Controller link unit
Connection using
the ZS-XCN
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