Pfeiffer Vacuum TC 1200 E74 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
TC 1200 E74
Electronic drive unit

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.2 Applicable documents 7
1.3 Target group 7
1.4 Conventions 7
1.4.1 Instructions in the text 7
1.4.2 Pictographs 7
1.4.3 Product labels 8
1.4.4 Abbreviations 8
2 Safety 9
2.1 General safety information 9
2.2 Safety instructions 9
2.3 Safety precautions 10
2.4 Limits of use of the product 11
2.5 Proper use 12
2.6 Foreseeable misuse 12
3 Product description 13
3.1 Identifying the product 13
3.2 Product features 13
3.3 Function 13
3.4 Scope of delivery 14
3.5 Connections 14
4 Installation 15
4.1 Connecting diagram 15
4.2 Connection "E74" 17
4.3 "RS-485" connector 17
4.4 Mains power supply 18
5 Interfaces 20
5.1 Interface E74 20
5.1.1 Signal description 20
5.1.2 Analog output AO1 20
5.2 Interface RS-485 20
5.3 Pfeiffer Vacuum protocol for RS-485 interface 22
5.3.1 Telegram frame 22
5.3.2 Telegram description 22
5.3.3 Telegram example 1 22
5.3.4 Telegram example 2 23
5.3.5 Data types 23
6 Parameter set 24
6.1 General 24
6.2 Control commands 24
6.3 Status requests 27
6.4 Reference value inputs 28
6.5 Additional parameters for the control unit 29
7 Operation 31
7.1 Configuring the connections with the Pfeiffer Vacuum parameter set 31
7.1.1 Configuring connection "E74" 31
7.1.2 Configuring the accessory connections 31
7.1.3 Select interfaces 32
7.2 Operating modes 32
7.2.1 Gas type-dependent operation 32
Table of contents
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7.2.2 Set value power consumption 33
7.2.3 Run-up time 33
7.2.4 Rotation speed switch points 33
7.2.5 Rotation speed setting mode 35
7.2.6 Standby 35
7.2.7 Confirming speed specification 35
7.2.8 Backing pump operating modes 36
7.2.9 Backing pump standby mode 37
7.2.10Operation with accessories 37
7.2.11Venting modes 37
7.3 Switching on the turbopump 38
7.4 Switching off the turbopump 38
7.5 Operation monitoring 38
7.5.1 Operating mode display via LED 38
7.5.2 Temperature monitoring 39
8 Malfunctions 40
8.1 General 40
8.2 Error codes 40
8.3 Warning and malfunction messages when operating with control units 43
9 Service solutions by Pfeiffer Vacuum 44
EC Declaration of Conformity 46
UK Declaration of Conformity 47
Table of contents
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List of tables
Tbl. 1: Product labels 8
Tbl. 2: Abbreviations used in this document 8
Tbl. 3: Permissible ambient conditions 11
Tbl. 4: Features of the device variant 13
Tbl. 5: Delivered drive power depending on the supplied mains voltage 13
Tbl. 6: Connection description of the electronic drive unit 14
Tbl. 7: Terminal layout of the 15-pin connection "E74" 17
Tbl. 8: Terminal layout of the RS-485 connecting socket M12 17
Tbl. 9: Terminal lay-out of the power supply connector 19
Tbl. 10: Signal description of interface E74 Start/Stop 20
Tbl. 11: Signal description of interface E74 Status 20
Tbl. 12: Features of the RS-485 interface 21
Tbl. 13: Terminal layout of the RS-485 connecting socket M12 21
Tbl. 14: Explanation and meaning of the parameters 24
Tbl. 15: Control commands 27
Tbl. 16: Status requests 28
Tbl. 17: Reference value inputs 29
Tbl. 18: Parameters for control unit functions 30
Tbl. 19: Settings for the analog output of interface "E74" 31
Tbl. 20: Accessory connections 32
Tbl. 21: Parameter [P:060] 32
Tbl. 22: Parameter [P:061] 32
Tbl. 23: Characteristic nominal rotation speeds of the turbopumps 36
Tbl. 24: Backing pump operating modes 36
Tbl. 25: Behavior and meaning of the LEDs on the electronic drive unit 39
Tbl. 26: Error messages of the electronic drive unit 42
Tbl. 27: Warning messages of the electronic drive unit 43
Tbl. 28: Warning and malfunction messages 43
List of tables
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List of figures
Fig. 1: Connection panel TC 1200 E74 13
Fig. 2: Diagram and assignments of the connection panel 16
Fig. 3: Connecting RS-485 devices 18
Fig. 4: Interface "E74" 20
Fig. 5: Networking of several electronic drive units in RS-485 Bus 21
Fig. 6: Schematic diagram of power characteristics, example of heavy gases
[P:027] = 0
33
Fig. 7: Rotation speed switch point 1 active 34
Fig. 8: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] 34
Fig. 9: Rotation speed switch points 1 & 2 active, [P:701] < [P:719] 34
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.2 Applicable documents
TC 1200 E74 Operating instructions
Declaration of conformity A component of these instructions
You can find this document in the Pfeiffer Vacuum Download Center.
1.3 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.4 Conventions
1.4.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.4.2 Pictographs
Pictographs used in the document indicate useful information.
About this manual
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Note
Tip
1.4.3 Product labels
This section describes all the labels on the product along with their meaning.
Mod: TC 1200 E74
Mod.-Nr.: PM C 01 814
Input: ~ 100-120V / ~200-240V±10%
10A, 50 - 60 Hz, 1500AIC
Output: 0 - 400V 5A, 0 - 630 Hz
Masse: 3kg
Made in Germany 2017/10
Ser.-Nr.:1234567
Rating plate
The rating plate is located on the side of the
electronic drive unit.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging
or removing a closure seal results in loss of
the warranty.
Tbl. 1: Product labels
1.4.4 Abbreviations
Abbreviation Meaning in this document
AI / AO Analog Input / Analog Output
AIC Ampere Interrupting Capacity
DCU Display Control Unit (Pfeiffer Vacuum display and control unit)
DI / DO Digital Input / Digital Output
E74 Version in compliance with SEMI E74
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring pump parameters
IElectric amperage
LED Illuminating diode
[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in
square brackets. Frequently displayed in conjunction with a short description
Example: [P:312] software version
PElectrical power
PE Earthed conductor (protective earth)
RElectrical resistance
RS-485 Standard for a physical interface for asynchronous serial data transmission (Recom-
mended Standard)
tTime
TC Electronic drive unit (Turbo Controller)
TMS Temperature Management System
UElectric voltage
Tbl. 2: Abbreviations used in this document
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-
uct were taken into account.
Risks during installation
DANGER
Danger to life from electric shock
When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC
60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-
tric shock at the communication interfaces.
►Connect only suitable devices to the bus system.
Safety
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DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
Risks in the event of malfunctions
WARNING
Risk of injury from parts moving after a power failure or troubleshooting
The "pumping station" function of the electronic drive unit will remain active after a power failure or if
errors occur that shut down the vacuum pump or the system. When power is restored or after ac-
knowledging a fault, the vacuum pump runs up automatically. There is a risk of injury to fingers and
hands if they enter the operating range of rotating parts.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
►Remove present mating plugs or bridges from the electronic drive unit possibly before the mains
power returns, as these can cause an automatic run-up.
►Switch the pump off using the "Pumping station" function (parameter [P:010]).
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Safety
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