Pfeiffer Vacuum TC 1200 E74 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
TC 1200 E74
Electronic drive unit

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/48

Table of contents
1 About this manual 7
1.1 Validity 7
1.2 Applicable documents 7
1.3 Target group 7
1.4 Conventions 7
1.4.1 Instructions in the text 7
1.4.2 Pictographs 7
1.4.3 Product labels 8
1.4.4 Abbreviations 8
2 Safety 9
2.1 General safety information 9
2.2 Safety instructions 9
2.3 Safety precautions 10
2.4 Limits of use of the product 11
2.5 Proper use 12
2.6 Foreseeable misuse 12
3 Product description 13
3.1 Identifying the product 13
3.2 Product features 13
3.3 Function 13
3.4 Scope of delivery 14
3.5 Connections 14
4 Installation 15
4.1 Connecting diagram 15
4.2 Connection "E74" 17
4.3 "RS-485" connector 17
4.4 Mains power supply 18
5 Interfaces 20
5.1 Interface E74 20
5.1.1 Signal description 20
5.1.2 Analog output AO1 20
5.2 Interface RS-485 20
5.3 Pfeiffer Vacuum protocol for RS-485 interface 22
5.3.1 Telegram frame 22
5.3.2 Telegram description 22
5.3.3 Telegram example 1 22
5.3.4 Telegram example 2 23
5.3.5 Data types 23
6 Parameter set 24
6.1 General 24
6.2 Control commands 24
6.3 Status requests 27
6.4 Reference value inputs 28
6.5 Additional parameters for the control unit 29
7 Operation 31
7.1 Configuring the connections with the Pfeiffer Vacuum parameter set 31
7.1.1 Configuring connection "E74" 31
7.1.2 Configuring the accessory connections 31
7.1.3 Select interfaces 32
7.2 Operating modes 32
7.2.1 Gas type-dependent operation 32
Table of contents
3/48

7.2.2 Set value power consumption 33
7.2.3 Run-up time 33
7.2.4 Rotation speed switch points 33
7.2.5 Rotation speed setting mode 35
7.2.6 Standby 35
7.2.7 Confirming speed specification 35
7.2.8 Backing pump operating modes 36
7.2.9 Backing pump standby mode 37
7.2.10Operation with accessories 37
7.2.11Venting modes 37
7.3 Switching on the turbopump 38
7.4 Switching off the turbopump 38
7.5 Operation monitoring 38
7.5.1 Operating mode display via LED 38
7.5.2 Temperature monitoring 39
8 Malfunctions 40
8.1 General 40
8.2 Error codes 40
8.3 Warning and malfunction messages when operating with control units 43
9 Service solutions by Pfeiffer Vacuum 44
EC Declaration of Conformity 46
UK Declaration of Conformity 47
Table of contents
4/48

List of tables
Tbl. 1: Product labels 8
Tbl. 2: Abbreviations used in this document 8
Tbl. 3: Permissible ambient conditions 11
Tbl. 4: Features of the device variant 13
Tbl. 5: Delivered drive power depending on the supplied mains voltage 13
Tbl. 6: Connection description of the electronic drive unit 14
Tbl. 7: Terminal layout of the 15-pin connection "E74" 17
Tbl. 8: Terminal layout of the RS-485 connecting socket M12 17
Tbl. 9: Terminal lay-out of the power supply connector 19
Tbl. 10: Signal description of interface E74 Start/Stop 20
Tbl. 11: Signal description of interface E74 Status 20
Tbl. 12: Features of the RS-485 interface 21
Tbl. 13: Terminal layout of the RS-485 connecting socket M12 21
Tbl. 14: Explanation and meaning of the parameters 24
Tbl. 15: Control commands 27
Tbl. 16: Status requests 28
Tbl. 17: Reference value inputs 29
Tbl. 18: Parameters for control unit functions 30
Tbl. 19: Settings for the analog output of interface "E74" 31
Tbl. 20: Accessory connections 32
Tbl. 21: Parameter [P:060] 32
Tbl. 22: Parameter [P:061] 32
Tbl. 23: Characteristic nominal rotation speeds of the turbopumps 36
Tbl. 24: Backing pump operating modes 36
Tbl. 25: Behavior and meaning of the LEDs on the electronic drive unit 39
Tbl. 26: Error messages of the electronic drive unit 42
Tbl. 27: Warning messages of the electronic drive unit 43
Tbl. 28: Warning and malfunction messages 43
List of tables
5/48

List of figures
Fig. 1: Connection panel TC 1200 E74 13
Fig. 2: Diagram and assignments of the connection panel 16
Fig. 3: Connecting RS-485 devices 18
Fig. 4: Interface "E74" 20
Fig. 5: Networking of several electronic drive units in RS-485 Bus 21
Fig. 6: Schematic diagram of power characteristics, example of heavy gases
[P:027] = 0
33
Fig. 7: Rotation speed switch point 1 active 34
Fig. 8: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] 34
Fig. 9: Rotation speed switch points 1 & 2 active, [P:701] < [P:719] 34
List of figures
6/48

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.2 Applicable documents
TC 1200 E74 Operating instructions
Declaration of conformity A component of these instructions
You can find this document in the Pfeiffer Vacuum Download Center.
1.3 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.4 Conventions
1.4.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.4.2 Pictographs
Pictographs used in the document indicate useful information.
About this manual
7/48

Note
Tip
1.4.3 Product labels
This section describes all the labels on the product along with their meaning.
Mod: TC 1200 E74
Mod.-Nr.: PM C 01 814
Input: ~ 100-120V / ~200-240V±10%
10A, 50 - 60 Hz, 1500AIC
Output: 0 - 400V 5A, 0 - 630 Hz
Masse: 3kg
Made in Germany 2017/10
Ser.-Nr.:1234567
Rating plate
The rating plate is located on the side of the
electronic drive unit.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging
or removing a closure seal results in loss of
the warranty.
Tbl. 1: Product labels
1.4.4 Abbreviations
Abbreviation Meaning in this document
AI / AO Analog Input / Analog Output
AIC Ampere Interrupting Capacity
DCU Display Control Unit (Pfeiffer Vacuum display and control unit)
DI / DO Digital Input / Digital Output
E74 Version in compliance with SEMI E74
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring pump parameters
IElectric amperage
LED Illuminating diode
[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in
square brackets. Frequently displayed in conjunction with a short description
Example: [P:312] software version
PElectrical power
PE Earthed conductor (protective earth)
RElectrical resistance
RS-485 Standard for a physical interface for asynchronous serial data transmission (Recom-
mended Standard)
tTime
TC Electronic drive unit (Turbo Controller)
TMS Temperature Management System
UElectric voltage
Tbl. 2: Abbreviations used in this document
About this manual
8/48

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-
uct were taken into account.
Risks during installation
DANGER
Danger to life from electric shock
When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC
60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-
tric shock at the communication interfaces.
►Connect only suitable devices to the bus system.
Safety
9/48

DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
Risks in the event of malfunctions
WARNING
Risk of injury from parts moving after a power failure or troubleshooting
The "pumping station" function of the electronic drive unit will remain active after a power failure or if
errors occur that shut down the vacuum pump or the system. When power is restored or after ac-
knowledging a fault, the vacuum pump runs up automatically. There is a risk of injury to fingers and
hands if they enter the operating range of rotating parts.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
►Remove present mating plugs or bridges from the electronic drive unit possibly before the mains
power returns, as these can cause an automatic run-up.
►Switch the pump off using the "Pumping station" function (parameter [P:010]).
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Safety
10/48

Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
Check safety system for excess rotation speed prevention
Prevent malfunctions. Restart the unit from a standstill at least once a year to make sure
that the function to prevent excess rotation speed is working correctly in the integrated
safety system.
1. Turn off the unit.
2. Wait until the vacuum pump comes to a complete standstill (rotation speed = 0 Hz).
3. Start the unit according to the corresponding operating instructions.
General safety precautions when handling the product
►Before performing all work on the product, disconnect all installations connected to it safely from
the mains voltage.
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Recommendation: Establish a secure connection to the earthed conductor (PE); protection class I.
►Never disconnect plug connections during operation.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection degree prior to installation or operation in other environments.
►Observe the protection degree specified by ensuring the correct seating of the present sealing
plugs.
►Disconnect the electronic drive unit only once everything has come to a complete standstill and
when the mains power supply of the turbopump is interrupted.
2.4 Limits of use of the product
Installation location weatherproof (internal space)
Air pressure 750 hPa to 1060 hPa
Installation altitude max. 2000 m
Rel. air humidity max. 80%, at T < 31°C,
up to max. 50% at T < 40°C
Protection class I
Excess voltage category II
Degree of contamination 2
Ambient temperature +5 °C to +40 °C
Tbl. 3: Permissible ambient conditions
Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible backing pressure or at maximum gas throughput, depending on the
cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitor-
ing.
●The reduction in backing pressure or gas throughput permits operation of the turbo-
pump at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit first reduces the drive output and then switches it off where neces-
sary.
Safety
11/48

2.5 Proper use
●The electronic drive unit is used exclusively for the operation of Pfeiffer Vacuum turbopumps and
their accessories.
2.6 Foreseeable misuse
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Connection to the current supply that do not comply with the provisions of IEC 61010 or
IEC 60950
●Operation with excessively high radiated heat output
●Use in areas with ionizing radiation
●Operation in explosion-hazard areas
●Use of accessories or spare parts that are not listed in these instructions
Safety
12/48

3 Product description
3.1 Identifying the product
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
►Learn about certifications through test seals on the product or at www.certipedia.com with compa-
ny ID no. 000021320.
3.2 Product features
The electronic drive unit of type TC 1200 E74 represents a fixed component of the Turbopump. The
purpose of the electronic drive unit is to drive, monitor and control the entire turbopump. The electronic
drive unit is equipped with an integrated extended voltage supply. The output of the electronic drive unit
depends on the mains voltage provided locally.
Feature TC 1200 E74
Connection panel E74
Turbopump HiPace 1200, 1500, 1800, 2300
Mains power supply 100 to 120 / 200 to 240 V AC (± 10 %) 50/60 Hz
Current draw max. 10 A
Max. power consumption 1350 VA
Internal fuse (mains connection) 10 A, slow blow
Interruption rating (AIC) 1500 A
Tbl. 4: Features of the device variant
Mains voltage ± 10% Motor input power of the electronic drive unit
100 to 120 V AC 700 to 930 W
200 to 240 V AC 1200 W
Tbl. 5: Delivered drive power depending on the supplied mains voltage
3.3 Function
accessory
A
B
RS485
E74
PV.can
DC in
}
1 2 3 4
56
Fig. 1: Connection panel TC 1200 E74
1 Connection "accessory A+B" 4 Mains connection "AC in"
2 Service connection "PV.can" 5 Connection "E74"
3 Connection "RS485" 6 LEDs Operating mode display
Product description
13/48

3.4 Scope of delivery
●TC 1200 E74
●Operating instructions
3.5 Connections
Connection Description
1
2 3
PE
AC in
Housing plug HAN 3A for the voltage supply
accessory1)
M12 socket with screw lock for the connection of Pfeiffer Vacuum accessories. The
use of a Y-distributor permits the double allocation of a connection.
PV.can
M12 bushing with threaded coupling and LED for Pfeiffer Vacuum service purpos-
es.
E74
D-Sub socket with 15 pins for the connection and configuration of a remote control
in compliance with SEMI E74.
RS-485
M12 socket with screw lock for the connection of Pfeiffer Vacuum control panels or
PC. The use of a Y-distributor permits the integration into a bus system.
Tbl. 6: Connection description of the electronic drive unit
1) The "accessory" connection is described in the operating instructions of the Turbopump.
Product description
14/48

4 Installation
4.1 Connecting diagram
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
DANGER
Danger to life from electric shock
When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC
60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-
tric shock at the communication interfaces.
►Connect only suitable devices to the bus system.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
Contact load for the accessory connections to "accessory"
1. Maintain the maximum contact load of 200 mA per connection.
2. However, do not exceed the total sum of the load of all connections of 450 mA.
Installation
15/48

4 1
5
23
32
5
1 4
13
4
2
4 – 27 V DC 4 – 27 V DC
I = 100 mA
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
6
7
8
9
1
(+)
9
(-)
(+)
(-)
(+)
(-)
(+)
(-)
1
9
10
11
12
13
14
15
accessory A
E74
accessory BPV.canRS485
24 V DC* out
RS 485 D +
RS 485 D -
n.c.
GND*
CAN-H
GND***
CAN-L
24 V DC***
start / stop (+)
24 V DC**
n.c.
24 V DC**
n.c.
acceleration status (+)
normal status (+)
AO1 (-)
alarm staus (+)
~ alarm status (+)
remote / local status (+)
start / stop (-)
acceleration status (-)
normal status (-)
AO1 (+)
alarm staus (-)
remote / local status (-)
Pin 3 – 8
Pin 11 – 15
Pin 3 – 8
Pin 11 – 15
FE
FE FE
deceleration status (+)
deceleration status (-)
max
or
or
Accessory B1
Accessory B2
Accessory A1
Accessory A2
Fig. 2: Diagram and assignments of the connection panel
Installation
16/48

4.2 Connection "E74"
Besides the signals defined in the Directive SEMI E74-0301, connection "E74" with 15-pin female con-
nector is provided with an inverted alarm signal and an analog output.
Pin Assignment
18
915
1 start/stop (+)
2 AO1 (-)
3 acceleration status (+)
4 normal status (+)
5 deceleration status (+)
6 alarm status (+)
7 remote/local status (+)
8 ~alarm status (+)
9 start/stop (-)
10 AO1 (+)
11 acceleration status (-)
12 normal status (-)
13 deceleration status (-)
14 alarm status (-)
15 remote/local status (-)
Tbl. 7: Terminal layout of the 15-pin connection "E74"
4.3 "RS-485" connector
The interface designated “RS-485” on the electronic drive unit is intended for connecting a Pfeiffer Vac-
uum control unit or an external PC. The connections are galvanically safe and are isolated from the
maximum supply voltage for the electronic drive unit. The electrical connections are optically decoupled
internally.
Pin Assignment
1 2
34
5
1 RS-485 D+
2 +24 V output, ≤ 210 mA loading capacity
3 GND
4 RS-485 D-
5 not connected
Tbl. 8: Terminal layout of the RS-485 connecting socket M12
Installation
17/48

1
2
3
4
5
Fig. 3: Connecting RS-485 devices
1 USB/RS-485 converter 4 Control unit with power supply pack
2 PC 5 RS-485 interface connection
3 Electronic drive unit
Connecting RS-485 devices
One external control unit each can be connected at the RS-485 interface.
1. Use corresponding connection cables from the control unit scope of delivery or from the range of
accessories.
2. Use the option to connect a PC via the USB/RS-485 converter.
4.4 Mains power supply
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
Installation
18/48

Pin Assignment
1
2 3
PE
1 Phase L
2 Neutral conductor
3 not connected
PE Earthed conductor
Tbl. 9: Terminal lay-out of the power supply connector
Establishing mains connection
1. Order a corresponding power supply cable from the Pfeiffer Vacuum accessories range.
2. Assemble your own power supply cable using the HAN 3A connecting socket from the shipment.
3. Plug mains cable into the mains connection "AC in".
4. Secure the mains cable using a mounting bracket.
5. Connect the mains cable to the mains.
Installation
19/48

5 Interfaces
5.1 Interface E74
The signal (-) lines of the "alarm status (+)" and "~alarm status (+)" are grouped for the "alarm status (-)"
signal.
signal (+)
signal (-)
signal (+)
signal (-)
Input signal Output signal
Fig. 4: Interface "E74"
5.1.1 Signal description
Signal Pins Function when closing Function when opening
start / stop 1, 9 Set E74 priority
Fault acknowledgement
Motor ON (see [P:023])
Pumping station ON (see [P:010])
Reset E74 priority (operation possible via
other interfaces)
Pumping station OFF (see [P:010])
Tbl. 10: Signal description of interface E74 Start/Stop
Signal Pins Meaning when closed Meaning when open
acceleration status 3, 11 Pump accelerating Pump is not accelerating
normal status 4, 12 Switching point reached Switching point not reached
deceleration status 5, 13 Pump is decelerating Pump is not decelerating
alarm status 6, 14 No errors Defect
remote / local status 7, 15 Equipment remote controlled Equipment not remote controlled
~alarm status 8, 14 Defect No errors
Tbl. 11: Signal description of interface E74 Status
5.1.2 Analog output AO1
A speed-proportional voltage (0 bis 10 V DC equals 0 to 100 % × fNominal) can be tapped up via the ana-
log output AO1 (Pins 2 and 10) (load R ≥ 10 kΩ). Additional functions (optionally current/power) can be
assigned to the analog output via DCU, HPU or PC.
5.2 Interface RS-485
DANGER
Danger to life from electric shock
When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC
60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-
tric shock at the communication interfaces.
►Connect only suitable devices to the bus system.
The interface designated “RS-485” on the electronic drive unit is intended for connecting a Pfeiffer Vac-
uum control unit or an external PC. The connections are galvanically safe and are isolated from the
Interfaces
20/48