Pfeiffer Vacuum TM 700 DN User manual

Translation of the original instructions
Operating Instructions
EN
PT 0356 BEN/C (1203)
TM 700 DN
PM C01 853
D-35614 Asslar
B
A
DeviceNet
remote
accessory
PV.can
RATE
P
1
2
5
MSD
P
LSD
00
22 44
66 8
ADDRESS
TM 700 DN
Electronic Drive Unit

2
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6 Connection "DeviceNet". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.2 Configuring the connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.3 Configuring the data exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.4 LED operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.5 DeviceNet objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 31
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.2 Operating mode display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refer to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu-
um.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Warning of a displayed source of danger in connection with
operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in se-
rious accidents.

4
Safety
2 Safety
2.1 Safety precautions
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●Observe all safety and accident prevention regulations.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
●Regularly check the proper observance off all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
NOTE
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

5
Safety
2.2 Proper use
●The electronic drive unit TM 700 DN operates designated Pfeiffer Vacuum turbo-
pumps and their accessories in a DeviceNet bus system.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is deemed to be all use for purposes deviating from those mentioned above, especially:
●The use of accessories or spare parts, which are not named in this manual.
●The operation of the devices in potentially radioactive areas.
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

6
Product description
3 Product description
3.1 Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
Product features The electronic drive unit TM 700 DN is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Scope of delivery ●CD-ROM for DeviceNet connection with EDS files
3.2 Range of application
Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the
following ambient conditions.
Characteristics TM 700 DN
Connection voltage TC 48 V DC ± 5 %
Connection panel DeviceNet
Turbopump HiPace 300 M, 700 M, 800 M
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure 75 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

7
Product description
3.3 Function
3.4 General connection description
Fig. 1: DeviceNet panel for the TM 700 DN
a Mains connection "DC in"
b Connection "accessory A+B"
c Connection "remote"
d Service connection "PV.can"
g Connection "DeviceNet"
g1 DeviceNet status LED
g2 Device status LED
g3 DeviceNet baudrate switch
g4 DeviceNet address selection switch MSD
g5 DeviceNet address selection switch LSD
accessory
A
B
PV.can
remote
DeviceNet
DC in
RATE
NET MOD
P
1
2
5
MSD
P
LSD
00
22 44
66 8
ADDRESS
b
d
b
c
g2
g4 g5g3
gg1 a
DC in1
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum
mains packs and the electronic drive unit TC.
1. "DC in" and "accessory" are already described in the operating instructions of the tur-
bopump.
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
PV.can2
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur-
poses.
2. The connection "PV.can" serves to service purposes exclusively.
remote
High Density D-sub 26 pole female socket for the connection of a remote control.
DeviceNet
M12 plug (sealed micro) with screw coupling and LEDs for the connection of a De-
viceNet bus system.
Casing socket on the rear side of the electronic drive unit for the connection to the
turbopump.

8
Connections diagram
4 Connections diagram
Fig. 2: Connections diagram and assignment of the TM 700 DN
41
5
23
32
5
14
AC
B
19
10 18
19 26
12
34
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
A
B
C
1
2
3
4
5
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
accessory A
accessory B
remote
DC in PV.can
DeviceNet
Drain
V+
CAN_H
CAN_L
V-
Potential free contacts
n.c.
24 VDC
Accessory B1
FE
Accessory B2
+ UB(+24 / +48 VDC ± 5 %)
FE
GND
n.c.
24 VDC
Accessory A1
FE
Accessory A2
+ 24 VDC* out
DI Motor pump
DI Pumping station
DI Standby
DI1
DI2
DO1
DO2
DI3
AI+ 0-10 VDC
AI- GND
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
Relay 2
Relay 2
Relay 3
Relay 3
AO1 / 0-10 V
DO Remote priority active
RS485 D-
RS485 D+
GND*
All inputs and outputs
in this area are
galvanically seperated
from +UB
Contact load for accessories:
-200 mA max., each connection
-450 mA max., all connections in sum

9
Connection "remote"
5 Connection "remote"
Remote control options are provided via the 26-pole D-Sub connector with the designa-
tion ”remote“ on the electronic drive unit.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible
using the Pfeiffer Vacuum parameter set.
5.1 Pin assignment
19
1018
1926
Pin Function Designation factory settings
1 +24 V DC output (V+) Reference voltage for all digital in- and outputs
2 DI1 Enable venting; open: no; V+: yes
3 DI Motor pump Drive motor; open: off; V+: on
4 DI Pumping station Open: off; V+: on and error acknowledgement
5 DI Standby Standby rotation speed; open: off; V+: on
6 DI2 Heating; open: off; V+: on
7 AI+ Rotation speed setting mode Set value in rotation speed setting mode;
2-10 V DC = 20-100% of the nominal rotation speed
8 DO1 Rotation speed switch point attained;
GND:no; V+: yes (Imax = 50 mA/24 V)
9 DO2 GND: error; V+: no error (Imax = 50 mA/24 V)
10 DI3 Sealing gas; open: off; V+: on
11 AI- Rotation speed setting mode
GND
Set value in rotation speed setting mode; GND
12 AO1 Actual rotation speed;
0-10 V DC is equivalent to 0-100%; RL> 10 kΩ
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priority Control via interface "remote"; open: off
V+: set and priority over other digital inputs
15 Relais 1 Connection to Pin 16 if relay 1 is inactive
16 Relais 1 Rotation speed switchpoint attained;
relay contact 1 (Umax = 50 V DC; Imax = 1 A)
17 Relais 1 Connection to Pin 16 if relay 1 is active
18 Relais 2 Connection to Pin 19 if relay 2 is inactive
19 Relais 2 No error; relay contact 2 (Umax = 50 V DC; Imax = 1 A)
20 Relais 2 Connection to Pin 19 if relay 2 is active
21 Relais 3 Connection to Pin 22 if relay 3 is inactive
22 Relais 3 Warning; relay contact 3 (Umax = 50 V DC; Imax = 1 A)
23 DO Remote priority GND: off; V+: remote priority active
24 RS-485 D+ according to specifications and Pfeiffer Vacuum protocol
25 RS-485 D- according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND) Reference ground for all digital inputs and all outputs

10
Connection "remote"
5.2 Operation via "remote" connection
+24 V DC* Output /
Pin 1 Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with
+24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The
functions are deactivated by "PLC high level" and by "PLC low level".
●PLC high level: +13 V to +33 V
●PLC low level: -33 V to +7 V
●Ri: 7 kΩ
●Imax < 210 mA (with RS-485, if existing)
Inputs The digital inputs at connection "remote" are used to connect various functions of the
electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can
be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully com-
pletes the self-test, the turbopump is placed into operation. During operation, the tur-
bopump can be switched off and on again, while the pumping station remains switched
on. The turbopump is not vented thereby.
V+ : Turbopump motor on
open: Turbopump motor off
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air cooling
unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is
placed in operation. Any ongoing error messages are reset when their cause has been
eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation
speed. Factory setting and recommended operation are 66.7 % of the nominal rotation
speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
CAUTION
Increased wear and damage due to incorrect operation
Active magnetic bearings require a constant power supply. The motor acts as a gener-
ator and supplies the drive electronics in the event of a power failure. Below a speed of
approx. 6500 rpm, the kinetic energy of the rotor will no longer be sufficient to supply the
magnetic bearings. The drive electronics will switch off completely. The rotor will run
down audibly in the safety bearings.
Do not switch off the pump by disconnecting the mains power supply.

11
Connection "remote"
DI2 (Heating) / Pin 6
V+ : Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ : Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ : Reset ongoing error messages when cause has been eliminated with a pulse of
min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ : The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input at the TM 700 DN defines the set rotation speed of the turbopump. An
input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a rotation
speed within the range of 20 - 100% of the nominal rotation speed. If the input is open or
signals fall below 2 V, the pump is accelerated up to nominal rotation speed.
Outputs The digital outputs at the connection "remote" can be loaded with a maximum of 24 V /
50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum pa-
rameter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switch point attained) / Pin 8
Active high after the rotation speed switch point is attained. Rotation speed switch point
1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a
"pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs
24 V DC which means "no errors". Active low in case of error (collective error message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other connected control
panels (e.g. RS-485). With active low, the connection "remote" is ignored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x fNominal) can be
picked up via the analog output (load R ≥10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
f(%)
100
20
210
U(V)

12
Connection "remote"
Relay contacts (in-
vertible) Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point
is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is closed when
the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when a malfunction is present; relay 2
is inactive. The contact between Pin 19 and Pin 20 is closed when operation is malfunc-
tion free; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are active;
relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a warning mes-
sage is present; relay 3 is active.
RS-485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec-
tion "remote" on the electronic drive unit.
●The group address of the electronic drive unit is 964.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
Connecting Pfeiffer Vacuum display and control units or PC
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.
Designation Value
Serial interface RS-485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1..2

13
Connection "DeviceNet"
6 Connection "DeviceNet"
6.1 Connections
The turbopump can be connected to a DeviceNet bus system using the connector (5 -
pin, sealed micro) labelled "DeviceNet" on the electronic drive unit. A supply voltage (V+,
V-) is required to supply this connection in addition to the supply voltage for the electronic
drive unit. The interface is galvanically safe and is isolated from the maximum supply
voltage for the electronic drive unit.
Perform DeviceNet wiring in accordance with the applicable specifications.
Supply the DeviceNet connection with voltage.
6.2 Configuring the connection
To start DeviceNet communication, the TM 700 DN must be configured using the en-
closed EDS files.
Select desired device address
Select desired baud rate
Fit rubber plugs at the address selector switches evenly and as deep as possible to
achieve the stated protection class.
Device address The DeviceNet device address is set manually using the "ADDRESS" selector switches
or via DeviceNet.
Setting the address manually
Set the selector switches to the desired value.
– Once the setting has been made, the device accesses the bus using the new ad-
dress.
Setting the address via DeviceNet
Switch off the pump/electronic drive unit
Set the selector switches to "P".
– When switched on, the system uses the last valid valid address ("63" upon deliv-
ery).
– The address is programmable via DeviceNet object 3.1.1. (see p. 16, chap. 6.5).
12
34
5
Pin Assignment
1Drain
2 V+, 24 V DC referred to V-
3V-
4CAN_H
5CAN_L
MSD
P
LSD
00
22 44
66 8
ADDRESS
Position Meaning
00 to 63 Device address (decimal)
– MSD = multiples of 10 (0x-6x)
– LSD = units (x0-x9)
P Address via DeviceNet

14
Connection "DeviceNet"
Baud rate The DeviceNet baud rate is set manually using the "RATE" selector switches or via De-
viceNet.
Setting the baud rate manually
Set the selector switches to the desired value.
– The change takes effect the next time the system is switched on.
Setting the baud rate via DeviceNet
Switch off the pump/electronic drive unit
Set the selector switches to "P".
– When switched on, the system uses the last valid baud rate (500 kBit/s upon deliv-
ery).
– The baud rate is programmable via DeviceNet object 3.1.2. (see p. 16, chap. 6.5).
6.3 Configuring the data exchange
Depending on the program used to set up DeviceNet communication, you can carry out
the following steps:
Import EDS file (see scope of delivery)
Device-specific data:
Specify the format of the cyclical input/output data
– Specify the cyclically alternating process data using objects "Poll I/O input data
(4.0.100)" and "Poll I/O output data (4.0.101)"
– The format can be changed only if the poll I/O connection is inactive.
Specify system behaviour following termination of the cyclical DeviceNet communica-
tion.
– Use object "Idle Action (9.1.7)" to specify which action is to be carried out if there
is a failure of the cyclical exchange of process data (poll I/O connection).
Specify the remote priority.
– Use object "Permission locked (101.0.17)" to specify whether the electronic drive
unit is to be controlled exclusively via DeviceNet or whether other interfaces (e.g.
RS485) are also permitted.
– This does not restrict write access via other interfaces.
Perform pump configuration.
– To set a configuration that differs from the delivery state, use the EDS file to adjust
individual objects (e.g. accessory configuration).
Master-specific data:
Set up the device in the master scanlist.
Set the format of the cyclical input/output data
Explicit data ex-
change (explicit con-
nection)
This connection can be used to access the individual DeviceNet objects (seep. 16,chap.
6.5). As a rule, this is done using a dedicated configuration program and the EDS file.
This is also used to specify which data is sent during the cyclical data exchange.
RATE
P
1
2
5
Position Meaning
1 125 kBit/s
2 250 kBit/s
5 500 kBit/s
P Baud rate via DeviceNet

15
Connection "DeviceNet"
Cyclical data ex-
change (poll I/O con-
nection)
For the cyclical data exchange, multiple DeviceNet objects are combined to form assem-
blies (4.x.3.). One assembly is selected for each direction (input/output data). The follow-
ing assemblies are available for selection:
Input data (produced data, pump --> PLC)
1: pump status (default)
2: pump status, speed
100: pump status, speed, current
101: pump status, speed, current, temperature
Output data (consumed data, PLC --> pump)
5: pump control (default)
6: pump/speed control
7: pump/speed control, set speed
103: pump/speed control, set speed, vent valve cfg.
Assembly ... Byte Denotation
12100101
0 0 0 0 (BYTE) Exception Status (48.1.12)
– Bit 0: Common alarm
– Bit 1: Device-specific alarm
– Bit 2: Manufacturer-specific alarm
Details for Bit 0-2 s. Exception Detail Alarm (48.1.13)
– Bit 4: Common warning
– Bit 5: Device-specific warning
– Bit 6: Manufacturer-specific warning
Details for Bit 4-6 s. Exception Detail Warning (48.1.14)
1 1 1 1 (BYTE) Speed Status (42.1.39)
– Bit 0: Pump is on, rotation speed > 0
– Bit 1: Motor is off
– Bit 2: Standby rotation speed attained
– Bit 4: Stopped
– Bit 5: Accelerates
– Bit 6: Set rotation speed attained
– Bit 7: Decelerates
2 2 2 2 (BOOL) Pump On Status (8.1.3)
– 0: Pump is off
– 1: Pump is on, rotation speed > 0
- 3-4 3-4 3-4 (INT) Pump Speed (42.1.7)
– Actual rotation speed in rpm/4 (e.g. value 15000 equates to 60000 rpm)
- - 5-6 5-6 (INT) IMC Current (42.1.102)
– Intermediate circuit current in 100 mA (e.g. value 42 equates to 4.2 A)
- - - 7-8 (INT) Bearing Temperature (49.3.6)
– Bearing temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
- - - 9-10 (INT) Pump Temperature (49.101.6)
– Bottom part temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
Assembly ... Byte Denotation
567103
0 0 0 0 (BOOL) Pump On (9.1.3)
– 0: Pumping station off
– 1: Pumping station on
- 1 1 1 (BYTE) Speed Control (42.1.38)
– Bit 0: Pumping station on
– Bit 1: Motor off
– Bit 2: Standby on
- - 2-3 2-3 (INT) Speed Target (42.1.8)
– Set rotation speed in rpm/4 (e.g. value 15000 writing for 60000 rpm)
- - - 4-5 (WORD) Vent Valve Configuration (7.1.4)
– 0: No venting
– 1: Direct venting
– 2: Delayed venting

16
Connection "DeviceNet"
6.4 LED operation
NET
MOD
6.5 DeviceNet objects
Identity
Message Router This object provides no attributes and services.
DeviceNet
Status Meaning Action
Off Device not on bus Supply operating voltage
Wait for address test (approx. 2 s)
Green flashing On bus, no master allocated Create connection with master
Green illuminated On bus, master allocated
Red flashing Connection to master expired Test connection to master
Red illuminated Bus error or duplicate device address
allocated
Check bus
Check device address
Check baud rate
Status Meaning Action
Off No voltage supply Supply operating voltage
Green illuminated Device ready for operation
Red flashing Device error Resolve error
Path Name Data type Service Comment
1.0.1 Revision UINT get
1.0.2 Max Instance UINT get
1.0.3 Number of Instances UINT get
Instance 1
1.1.0 (Instance) USINT res, gaa
1.1.1 Vendor ID UINT get 527 (Pfeiffer Vacuum)
1.1.2 Device Type UINT get 33 (Turbomolecular Vacuum
Pump Device)
1.1.3 Product Code UINT get 5377
1.1.4 Revision STRUCT of get
Major Revision USINT
Minor Revision USINT
1.1.5 Status WORD get
1.1.6 Serial Number UDINT get
1.1.7 Product Name SHORT_STRING get TM 700 DN
1.1.100 Status Code SHORT_STRING get
Path Name Data type Service Comment
3.0.1 Revision UINT get
Instance 1
3.1.0 (Instance) all, re
3.1.1 MAC ID USINT get, (set) set only at switch setting "P"
3.1.2 Baud Rate USINT get, (set) set only at switch setting "P"
3.1.5 Allocation Information STRUCT of get
Allocation Choice Byte BYTE
Master’s MAC ID USINT
3.1.6 MAC ID Switch Changed BOOL get
3.1.7 Baud Rate Switch Changed BOOL get
3.1.8 MAC ID Switch Value USINT get
3.1.9 Baud rate Switch Value USINT get

17
Connection "DeviceNet"
Assembly Path Name Data type Service Comment
4.0.1 Revision UINT get
4.0.3 Number of Instances UINT get
4.0.100 Poll I/O Input Data USINT get, (set) Assembly instance for input data
(pump->master) of Poll I/O con-
nection, set only if connection not
active
4.0.101 Poll I/O Output Data USINT get, (set) Assembly instance for output data
(master->pump) of Poll I/O con-
nection, set only if connection not
active
Instance 1 (default input): pump status
4.1.3 Data ARRAY of get
Exception Status BYTE 48.1.12
Speed Status BYTE 42.1.39
Pump on Status BYTE 8.1.3
Instance 2 (input): pump status, speed
4.2.3 Data ARRAY of get
Exception Status BYTE 48.1.12
Speed Status BYTE 42.1.39
Pump on Status BYTE 8.1.3
Pump Speed 2 x BYTE (INT) 42.1.7
Instance 5 (default output): pump control
4.5.3 Data ARRAY of get, set
Pump On BYTE 9.1.3
Instance 6 (output): pump control
4.6.3 Data ARRAY of get, set
Pump on BYTE 9.1.3
Speed control BYTE 42.1.38
Instance 7 (output): pump/speed control, set speed
4.7.3 Data ARRAY of get, set
Pump On BYTE 9.1.3
Speed Control BYTE 42.1.38
Speed Target 2 x BYTE (INT) 42.1.8
Instance 100 (input): pump status, speed, current
4.100.3 Data ARRAY of get
Exception Status BYTE 48.1.12
Speed Status BYTE 42.1.39
Pump on Status BYTE 8.1.3
Pump Speed 2 x BYTE (INT) 42.1.7
IMC Current 2 x BYTE (INT) 42.1.102
Instance 101 (input): pump status, speed, current, temperatures
4.101.3 Data ARRAY of get
Exception Status BYTE 48.1.12
Speed Status BYTE 42.1.39
Pump on Status BYTE 8.1.3
Pump Speed 2 x BYTE (INT) 42.1.7
IMC Current 2 x BYTE (INT) 42.1.102
Bearing Temperature 2 x BYTE (INT) 49.3.6
Pump Temperature 2 x BYTE (INT) 49.101.6
Instance 103 (output): pump/speed control, set speed, vent valve cfg
4.103.3 Data ARRAY of get, set
Pump On BYTE 9.1.3
Speed Control BYTE 42.1.38
Speed Target BYTE 42.1.8
Vent Valve Cfg. (1) BYTE 7.1.4 (1)

18
Connection "DeviceNet"
Connection
Vent Valve Cfg. (2) BYTE 7.1.4 (2)
Instance 103 (output): pump/speed control, set speed, vent valve cfg
Path Name Data type Service Comment
5.0.1 Revision UINT get
Instance 1: Explicit connection
5.1.1 State USINT get
5.1.2 Instance Type USINT get
5.1.3 Transport Class Trigger BYTE get
5.1.4 DeviceNet Produced
Connection ID
UINT get
5.1.5 DeviceNet Consumed
Connection ID
UINT get
5.1.6 DeviceNet Initial Comm
Characteristics
BYTE get
5.1.7 Produce Connection
Size
UINT get
5.1.8 Consumed Connection
Size
UINT get
5.1.9 Expected Package Rate UINT get, set
5.1.12 Watchdog Timeout Ac-
tion
UINT get, set
5.1.13 Produced Connection
Path Length
USINT get
5.1.14 Produced Connection
Path
UINT get
5.1.15 Consumed Connection
Path Length
Packed EPATH get
5.1.16 Consumed Connection
Path
UINT get
5.1.17 Production Inhibit Time Packed EPATH get
5.1.18 Connection Timeout
Multiplier
USINT get
Instance 2: Poll I/O connection
5.2.1 State USINT get
5.2.2 Instance Type USINT get
5.2.3 Transport Class Trigger BYTE get
5.2.4 DeviceNet Produced
Connection ID
UINT get
5.2.5 DeviceNet Consumed
Connection ID
UINT get
5.2.6 DeviceNet Initial Comm
Characteristics
BYTE get
5.2.7 Produce Connection
Size
UINT get
5.2.8 Consumed Connection
Size
UINT get
5.2.9 Expected Package Rate UINT get, set
5.2.12 Watchdog Timeout Ac-
tion
UINT get
5.2.13 Produced Connection
Path Length
USINT get
5.2.14 Produced Connection
Path
UINT get
5.2.15 Consumed Connection
Path Length
Packed EPATH get
5.2.16 Consumed Connection
Path
UINT get
5.2.17 Production Inhibit Time Packed EPATH get, set
5.2.18 Connection Timeout
Multiplier
USINT get

19
Connection "DeviceNet"
Register
Discrete Input Point
Discrete Output Point
Path Name Data type Service Comment
7.0.1 Revision UINT get
7.0.2 Max Instance UINT get
7.0.3 Number of Instances UINT get
Instance 1
7.1.1 Bad Flag BOOL get 0
7.1.2 Direction BOOL get 1
7.1.3 Size UINT get 16
7.1.4 Data ARRAY of get, set
BITS – 0: No venting
– 1: Direct venting
– 2: Delayed venting
BITS 0
7.1.100 Venting Frequency USINT get, set 40-98 %
7.3.101 Venting Time UINT get, set 6-3600 s
Path Name Data type Service Comment
8.0.1 Revision UINT get
8.0.2 Max Instance UINT get
8.0.3 Number of Instances UINT get
Instance 1
8.1.3 Value BOOL get – 0: Pump off
– 1: Pump on and f > 0
8.1.7 Off-On Cycles UDINT get
Path Name Data type Service Comment
9.0.1 Revision UINT get
9.0.2 Max Instance UINT get
9.0.3 Number of Instances UINT get
Instance 1: Pump On/Off
9.1.3 Value BOOL get, set – 0: Pumping station off
– 1: Pumping station on
9.1.5 Fault Action BOOL get, set – 0: Pumping station off
– 1: Hold last state
9.1.6 Fault Action BOOL get, set 0
9.1.7 Idle Action BOOL get, set – 0: Pumping station off
– 1: Hold last state
9.1.8 Idle Action BOOL get, set 0
Instance 2: TMS/Heating
9.2.3 Value BOOL get, set – 0: TMS/Heating off
– 1: TMS/Heating released
9.2.5 Fault Action BOOL get, set – 0: TMS/Heating off
– 1: Hold last state
9.2.6 Fault Action BOOL get, set 0
9.2.7 Idle Action BOOL get, set – 0: TMS/Heating off
– 1: Hold last state
9.2.8 Idle Action BOOL get, set 0
Instance 3: Sealing gas
9.3.3 Value BOOL get, set – 0: Sealing gas off
– 1: Sealing gas on
9.3.5 Fault Action BOOL get, set – 0: Sealing gas off
– 1: Hold last state
9.3.6 Fault Action BOOL get, set 0
9.3.7 Idle Action BOOL get, set – 0: Sealing gas off
– 1: Hold last state
9.3.8 Idle Action BOOL get, set 0

20
Connection "DeviceNet"
AC/DC Drive
Instance 100: Brake
9.100.3 Value BOOL get, set – 0: Brake off
– 1: Brake released
9.100.5 Fault Action BOOL get, set – 0: Brake off
– 1: Hold last state
9.100.6 Fault Action BOOL get, set 0
9.100.7 Idle Action BOOL get, set – 0: Brake off
– 1: Hold last state
9.100.8 Idle Action BOOL get, set 0
Path Name Data type Service Comment
42.0.1 Revision UINT get
42.0.2 Max Instance UINT get
42.0.3 Number of Instances UINT get
Instance 1
42.1.3 At Reference BOOL get – 0: Set rotation speed not attained
– 1: Set rotation speed attained
42.1.4 Net Ref BOOL get 1
42.1.6 Drive Mode USINT get, set 2
42.1.7 Speed Actual INT get Current rotation speed (rpm/2 speed
Scale) e.g. 15000 read => 60000 rpm
42.1.8 Speed Ref INT get, set Set rotation speed (rpm/2 speed Scale)
e.g. 7500 write for 30000 rpm
42.1.15 Power Actual INT get Current power (W)
42.1.16 Input Voltage INT get Input voltage (V/2 voltage Scale) e.g. 192
read => 24 V
42.1.18 Accel Time UINT get, set Run-up time (ms/2 time Scale) e.g. 2813
read => 6 min
42.1.22 Speed Scale SINT get, set -2
42.1.27 Voltage Scale SINT get, set 3
42.1.28 Time Scale SINT get, set -7
42.1.38 Speed Control BYTE get, set – Bit 0: Pumping station on
– Bit 1: Motor off
– Bit 2: Standby on
42.1.39 Speed Status BYTE get – Bit 0: Pump on and f > 0
– Bit 1: Motor is off
– Bit 2: Standby rotation speed at-
tained
– Bit 4: stopped
– Bit 5: accelerates
– Bit 6: Set rotation speed attained
– Bit 7: decelerates
42.1.41 Max Rated Speed INT get Nominal rotation speed (rpm/2 Max Rated
Speed Scale)
42.1.42 Max Rated Speed Scale SINT get, set -2
42.1.43 Speed Standby INT get, set Standby rotation speed (rpm/2 Speed
Scale)
42.1.46 Drive On Hours DINT get Operating hours drive (h)
42.1.100 Gas Mode USINT get, set – 0: Heavy gases
– 1: light gases
– 2: Helium
42.1.101 Max Power USINT get, set %
42.1.102 IMC Current INT get Intermediate circuit current (100 mA)
e.g. 123 read => 12.3 A
42.1.103 Max Rated Speed Con-
firmation
INT get, set Nominal rotation speed (rpm/2 Max Rated
Speed Scale)
42.1.104 Imbalance INT get Rotor imbalance in %
42.1.105 Bearing Wear INT get Safety bearing stress in %