Pfeiffer Vacuum TM 700 DN User manual

Translation of the original instructions
Operating Instructions
EN
PT 0356 BEN/C (1203)
TM 700 DN
PM C01 853
D-35614 Asslar
B
A
DeviceNet
remote
accessory
PV.can
RATE
P
1
2
5
MSD
P
LSD
00
22 44
66 8
ADDRESS
TM 700 DN
Electronic Drive Unit

2
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6 Connection "DeviceNet". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.2 Configuring the connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.3 Configuring the data exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.4 LED operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.5 DeviceNet objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 31
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.2 Operating mode display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refer to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu-
um.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Warning of a displayed source of danger in connection with
operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in se-
rious accidents.

4
Safety
2 Safety
2.1 Safety precautions
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●Observe all safety and accident prevention regulations.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
●Regularly check the proper observance off all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
NOTE
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

5
Safety
2.2 Proper use
●The electronic drive unit TM 700 DN operates designated Pfeiffer Vacuum turbo-
pumps and their accessories in a DeviceNet bus system.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is deemed to be all use for purposes deviating from those mentioned above, especially:
●The use of accessories or spare parts, which are not named in this manual.
●The operation of the devices in potentially radioactive areas.
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

6
Product description
3 Product description
3.1 Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
Product features The electronic drive unit TM 700 DN is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Scope of delivery ●CD-ROM for DeviceNet connection with EDS files
3.2 Range of application
Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the
following ambient conditions.
Characteristics TM 700 DN
Connection voltage TC 48 V DC ± 5 %
Connection panel DeviceNet
Turbopump HiPace 300 M, 700 M, 800 M
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure 75 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

7
Product description
3.3 Function
3.4 General connection description
Fig. 1: DeviceNet panel for the TM 700 DN
a Mains connection "DC in"
b Connection "accessory A+B"
c Connection "remote"
d Service connection "PV.can"
g Connection "DeviceNet"
g1 DeviceNet status LED
g2 Device status LED
g3 DeviceNet baudrate switch
g4 DeviceNet address selection switch MSD
g5 DeviceNet address selection switch LSD
accessory
A
B
PV.can
remote
DeviceNet
DC in
RATE
NET MOD
P
1
2
5
MSD
P
LSD
00
22 44
66 8
ADDRESS
b
d
b
c
g2
g4 g5g3
gg1 a
DC in1
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum
mains packs and the electronic drive unit TC.
1. "DC in" and "accessory" are already described in the operating instructions of the tur-
bopump.
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
PV.can2
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur-
poses.
2. The connection "PV.can" serves to service purposes exclusively.
remote
High Density D-sub 26 pole female socket for the connection of a remote control.
DeviceNet
M12 plug (sealed micro) with screw coupling and LEDs for the connection of a De-
viceNet bus system.
Casing socket on the rear side of the electronic drive unit for the connection to the
turbopump.

8
Connections diagram
4 Connections diagram
Fig. 2: Connections diagram and assignment of the TM 700 DN
41
5
23
32
5
14
AC
B
19
10 18
19 26
12
34
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
A
B
C
1
2
3
4
5
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
accessory A
accessory B
remote
DC in PV.can
DeviceNet
Drain
V+
CAN_H
CAN_L
V-
Potential free contacts
n.c.
24 VDC
Accessory B1
FE
Accessory B2
+ UB(+24 / +48 VDC ± 5 %)
FE
GND
n.c.
24 VDC
Accessory A1
FE
Accessory A2
+ 24 VDC* out
DI Motor pump
DI Pumping station
DI Standby
DI1
DI2
DO1
DO2
DI3
AI+ 0-10 VDC
AI- GND
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
Relay 2
Relay 2
Relay 3
Relay 3
AO1 / 0-10 V
DO Remote priority active
RS485 D-
RS485 D+
GND*
All inputs and outputs
in this area are
galvanically seperated
from +UB
Contact load for accessories:
-200 mA max., each connection
-450 mA max., all connections in sum

9
Connection "remote"
5 Connection "remote"
Remote control options are provided via the 26-pole D-Sub connector with the designa-
tion ”remote“ on the electronic drive unit.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible
using the Pfeiffer Vacuum parameter set.
5.1 Pin assignment
19
1018
1926
Pin Function Designation factory settings
1 +24 V DC output (V+) Reference voltage for all digital in- and outputs
2 DI1 Enable venting; open: no; V+: yes
3 DI Motor pump Drive motor; open: off; V+: on
4 DI Pumping station Open: off; V+: on and error acknowledgement
5 DI Standby Standby rotation speed; open: off; V+: on
6 DI2 Heating; open: off; V+: on
7 AI+ Rotation speed setting mode Set value in rotation speed setting mode;
2-10 V DC = 20-100% of the nominal rotation speed
8 DO1 Rotation speed switch point attained;
GND:no; V+: yes (Imax = 50 mA/24 V)
9 DO2 GND: error; V+: no error (Imax = 50 mA/24 V)
10 DI3 Sealing gas; open: off; V+: on
11 AI- Rotation speed setting mode
GND
Set value in rotation speed setting mode; GND
12 AO1 Actual rotation speed;
0-10 V DC is equivalent to 0-100%; RL> 10 kΩ
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priority Control via interface "remote"; open: off
V+: set and priority over other digital inputs
15 Relais 1 Connection to Pin 16 if relay 1 is inactive
16 Relais 1 Rotation speed switchpoint attained;
relay contact 1 (Umax = 50 V DC; Imax = 1 A)
17 Relais 1 Connection to Pin 16 if relay 1 is active
18 Relais 2 Connection to Pin 19 if relay 2 is inactive
19 Relais 2 No error; relay contact 2 (Umax = 50 V DC; Imax = 1 A)
20 Relais 2 Connection to Pin 19 if relay 2 is active
21 Relais 3 Connection to Pin 22 if relay 3 is inactive
22 Relais 3 Warning; relay contact 3 (Umax = 50 V DC; Imax = 1 A)
23 DO Remote priority GND: off; V+: remote priority active
24 RS-485 D+ according to specifications and Pfeiffer Vacuum protocol
25 RS-485 D- according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND) Reference ground for all digital inputs and all outputs

10
Connection "remote"
5.2 Operation via "remote" connection
+24 V DC* Output /
Pin 1 Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with
+24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The
functions are deactivated by "PLC high level" and by "PLC low level".
●PLC high level: +13 V to +33 V
●PLC low level: -33 V to +7 V
●Ri: 7 kΩ
●Imax < 210 mA (with RS-485, if existing)
Inputs The digital inputs at connection "remote" are used to connect various functions of the
electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can
be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully com-
pletes the self-test, the turbopump is placed into operation. During operation, the tur-
bopump can be switched off and on again, while the pumping station remains switched
on. The turbopump is not vented thereby.
V+ : Turbopump motor on
open: Turbopump motor off
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air cooling
unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is
placed in operation. Any ongoing error messages are reset when their cause has been
eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation
speed. Factory setting and recommended operation are 66.7 % of the nominal rotation
speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
CAUTION
Increased wear and damage due to incorrect operation
Active magnetic bearings require a constant power supply. The motor acts as a gener-
ator and supplies the drive electronics in the event of a power failure. Below a speed of
approx. 6500 rpm, the kinetic energy of the rotor will no longer be sufficient to supply the
magnetic bearings. The drive electronics will switch off completely. The rotor will run
down audibly in the safety bearings.
Do not switch off the pump by disconnecting the mains power supply.