Pfeiffer Vacuum TC 1200 EC User manual

Translation of the original instructions
Operating Instructions
EN
PT 0455 BEN/A (1411)
TC 1200 EC
Electronic Drive Unit

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.5 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4 Connection diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5 Connection "EtherCAT" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.2 Device identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.3 LED operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.4 Process data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.5 Service data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6 Connection "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.2 Connecting Pfeiffer Vacuum display and control units or PC . . . . . . . . . . 19
6.3 Cross-linking via the connection RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . 20
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 26
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
8 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.2 Operation display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
EC: EtherCAT version
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
EtherCAT® EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Au-
tomation GmbH, Germany.
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

Safety
5
2Safety
2.1 Safety precautions
●Observe all safety and accident prevention regulations.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class I).
●Regularly check the proper observance off all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●The protection class IP 54 is only attained by correctly placed rubber stoppers on the
address selection switches.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

6
Safety
2.2 Proper use
●The electronic drive unit TC 1200 EC operates designated Pfeiffer Vacuum turbo-
pumps and their accessories.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●use of accessories or spare parts, which are not named in this manual
●operation of the devices in areas with ionizing radiation
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

Product description
7
3 Product description
3.1 Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
Product characteris-
tics The electronic drive unit TC 1200 EC is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
* Ampere interrupting capacity
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
Scope of delivery ●CD-ROM for EtherCAT configuration with ESI file
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 1200 EC must be installed and operated in the
following ambient conditions.
Characteristics TC 1200 EC
Connection panel EtherCAT
Turbopump HiPace 1200, 1500, 1800, 2300
Mains requirement: frequency (range) 50/60 Hz
Mains requirement: voltage (range) 100-120/200-240 (± 10%) V AC
Current consumption max. 10 A
Power consumption max. 1350 VA
Mains requirement: internal fuse 10 A, delayed
Breaking capacity (AIC)* 1500 A
Mod.: TC 1200
Mod.-No.: PM C01 810
Input: ~ 100-120V / ~200-240V±10%
10A, 50 - 60 Hz, 1500AIC
Output: 0 - 400V 5A, 0 - 630 Hz
Weight: 3kg
Made in Germany 2012/04
Ser.-No.:79500005
Installation location weather protected (indoors)
Protection category IP 54
Protection class I
Temperature +5 °C to +40 °C
Relative humidity max. 80 %, at T ≤31 °C, max. 50% at T ≤40 °C
Atmospheric pressure: 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

8
Product description
3.3 Function
3.4 General connection description
Fig. 2: View of the panel for TC 1200 EC
a Mains connection "AC in"
b Connection "accessory A+B"
d Service connection "PV.can"
e Connection "RS-485"
h LED "Operating display"
i Connection "EtherCAT"
h
a
b
d
b
j
e
EtherCAT IN
M12 socket (D coded) with threaded coupling and L/A-LED for connecting an in-
coming EtherCAT cable.
EtherCAT OUT
M12 socket (D coded) with threaded coupling and L/A-LED for connecting an Ether-
CAT cable to the next device.
RS-485
M12 socket with screw coupling for the connection of a Pfeiffer Vacuum control unit
or a PC. The use of a Y-connector enables the series connection in a bus system.
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
PV.can
M12 casing socket with screw coupling and LED for the connection of an integrated
pressure measurement and for Pfeiffer Vacuum Service purposes.

Product description
9
3.5 Connecting to the mains power supply
Fig. 3: Pin assignment of the mains connection plug
Order the mains cable separately (see "accessories").
Insert the mains cable into the mains connection AC in.
Lock the mains cable with the mounting bracket.
Connect the mains cable to the mains.
Drive power reduction depending on the mains connection voltage
The power of the electronic drive unit depends on the provided mains voltage.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
1 Phase L
2 Neutral conductor
3n.c.
PE Protective earth
Mains connection voltage Drive power
100 - 120 V AC 700 - 930 W
200 - 240 V AC 1200 W
12
3
PE

10
Connection diagram
4 Connection diagram
Fig. 4: Connection diagram and assignment of the TC 1200 EC
41
5
23
32
5
14
13
4
2
41
23
41
23
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
accessory AEtherCAT INEtherCAT OUT
accessory BPV.canRS-485
24 V DC* out
RS 485 D +
RS 485 D -
n.c.
GND*
CAN-H
GND***
CAN-L
24 V DC***
FE
24 V DC**
FE
n.c.
24 V DC**
FE
n.c.
Tx+
Tx-
Rx-
n.c.
Rx+
Tx+
Tx-
Rx-
n.c.
Rx+
Accessory B1
Accessory B2
Accessory A1
Accessory A2
Contact load for accessories: -200 mA max., each connection -450 mA max., all connections in sum

Connection "EtherCAT"
11
5 Connection "EtherCAT"
5.1 Connections
The turbopump can be connected to an EtherCAT bus system using the connectors (5-
pin, M12, D coded) labeled "EtherCAT" on the electronic drive unit. The interface is gal-
vanically safe and is isolated from the maximum supply voltage for the electronic drive
unit.
Fig. 5: TC 1200 EC, creating an EtherCAT cable connection
Observe the EtherCAT specification.
Insert the incoming cable from the control unit into EtherCATIN.
Connect the bus connection to other devices to EtherCATOUT.
Configuration Use the "TC 1200 EC.xml" ESI file for configuration (included in the scope of supply).
5.2 Device identification
EtherCAT devices are addressed using their position in the bus. There is no need to
make conventional address settings.
ID switch (hexadecimal) for optional selection of device identification.
Set device ID to 0 (0 x 100, 0 x 10, 0 x 1)
Note the configured position in the bus.
Fit rubber plugs at the selector switches level and as deep as possible to achieve the
stated protection class.
Explicit device identification
Preferred method as no additional configuration programs are required.
4
12
3
Pin Assignment
1Tx+
2Rx+
3Tx-
4Rx-
► IN ► IN
◄ OUT
The use of Ethernet switches and hubs is not supported.
Additional identification in the bus
Under certain conditions, it may be beneficial to perform additional (manual) identifica-
tion, e.g. if there is a risk of mixing up multiple similar devices through incorrect cabling.
●Various configuration options exist for this.

12
Connection "EtherCAT"
Select this identification in the device configuration.
Set the device ID to the configured value.
– Hexadecimal 001h - FFFh corresponds to decimal 1 - 4095.
– The new value is transferred from "Voltage on/off".
When replacing a device, use the ID of the older device.
Station alias
A suitable configuration program must be used as a prerequisite.
Select this identification in the device configuration.
Assign "Station alias" to the device online.
– This value applies after a "reset".
Repeat this process when replacing a device.
5.3 LED operation
5.4 Process data
Process output data
●Process output data are defined as follows:
Default RxPDO (control -> TC 1200 EC, "output"), CoE 1600h.1-4 (1 byte)
Process input data
●Process input data are defined as follows:
Default TxPDO (TC 1200 EC -> control, "input"), CoE 1A00h.1-11 (7 byte)
Display L/A (green)
Connection
RUN (green)
EtherCAT status
ERR (red)
EtherCAT error
Off No connection "INIT":
– Initialization, no process or service data
No errors
Rapid flashing - "SAFE OPERATIONAL":
– Process input data (TC 1200 EC -> con-
trol) valid
– Output data (control -> TC 1200 EC) status
is safe
Spontaneous status change
2 x rapid flashing - - Connection lost
Flashing - "PRE_OPERATIONAL":
– Service data only, no process data
Invalid configuration
Permanently on Connection to next device, no
activity
"OPERATIONAL":
– Process input and output data is valid
Bootstrap
Flickering Connection active "BOOTSTRAP" Booting error
Byte.Bit CoE1
1. Hexadecimal, see "Service data" chapter
Meaning
0.0 7000.01 Turbo Start Stop Pumping station (0: off, 1: on)
0.1 7000.02 Turbo Reset Alarm 0->1: Fault acknowledgement
0.2 7000.03 Turbo Low Speed Standby (0: off, 1: on)
0.3-7. - Reserved
Byte.Bit CoE1Meaning
0.0 6000.01 Rotation Pump is rotating > 60 min-1 (0: no, 1: yes)

Connection "EtherCAT"
13
To do this, set "PRE-OPERATIONAL" status each time.
Describe object 1601h.0 or 1A01h.0 with 0.
Describe object 1601h.1-n or 1A01h.1-n with corresponding CoE indices.
– Only objects labeled with "P" can be used.
– Assign sub-index 1-n on a sequential basis only and without gaps
– The data must yield a total number of bytes (use "pad bits " if needed) and start with
whole bytes (exception BOOL).
– Max. 12 objects per PDO
Describe object 1601h.0 or 1A01h.0 with the number n of objects to be used.
Change object 1C12h.1 to 1601h or 1C13h.1 to 1A01h.
In the process data, select the corresponding PDO assignment 1601h or 1A01h.
5.5 Service data
Data types
0.1 6000.02 Normal Normal operation (0: no, 1: yes)
0.2 6000.03 Acceleration Pump is accelerating (0: no, 1: yes)
0.3 6000.04 Deceleration Pump is decelerating (0: no, 1: yes)
0.4 6000.05 Remote / Local Control via EtherCAT (0: yes, 1: no)
0.5 6000.07 Turbo Low Speed Standby (0: off, 1: on)
0.6 6000h.09h Alarm 0: no
1: yes
0.7 6000h.0Ah Warning 0: no
1: yes
1.-2. 6000h.11h Turbo Speed 0.1% of nominal rotation speed
3.-4. 6000h.12h Turbo Current 0.1 A
5.-6. 6000h.13h Turbo Pump Temperature °C
1. Hexadecimal, see "Service data" chapter
Byte.Bit CoE1Meaning
Process data can also be compiled from CoE objects as an alternative.
Fig. 6: Example for output data (incl. 4 padding bits) Fig. 7: Example for input data (incl. 5 padding bits)
Type Description
BOOL Binary value (yes/no)
BYTE() Single byte number
STRING() Character string
USINT Positive integer, 8 bit
UINT Positive integer, 16 bit
UDINT Positive integer, 32 bit
ULINT Positive integer, 64 bit
SINT Integer, 8 bit
INT Integer, 16 bit
DINT Integer, 32 bit
REAL Floating point number, single precision

14
Connection "EtherCAT"
The following CoE objects are available for access to individual data objects (e.g. for con-
figuration):
Administrative data (information about the device, communication)
Input data (TC 1200 EC -> control)
Idx1sIdx Name Type Access2Description
1000 - Device Type UDINT RO
1008 - Manufacturer Device Name STRING() RO
1009 - Manufacturer Hardware Version STRING() RO
100A - Manufacturer Software Version STRING() RO
1010 01 Store Parameters UDINT RW
1011 01 Restore Default Parameters UDINT RW
1018 Identity Object
01 Vendor ID UDINT RO
02 Product Code UDINT RO
03 Revision Number UDINT RO
04 Serial number UDINT RO
10F8 - Timestamp Object ULINT RO
1600 01-04 Default RxPDO Mapping (1-4) UDINT RO See process data
1601 00 User RxPDO Mapping USINT RW See process data
xUDINTRW
1A00 01-0B Default TxPDO Mapping (1-11) UDINT RO See process data
1A01 00 User TxPDO Mapping USINT RW See process data
xUDINTRW
1C00 01-04 Sync Manager Communication Type USINT RO
1C12 00 Sync Manager 2 PDO Assignment USINT RW See process data
01 UINT RW
1C13 00 Sync Manager 3 PDO Assignment USINT RW See process data
01 UINT RW
F000 Semiconductor Device Profile
01 Index Distance UINT RO
02 Maximum Number of Modules UINT RO
F010 Module Profile Lists
01 UDINT RO
F9F0 - Manufacturer Serial Number STRING RO
F9F1 01 CDP Functional Generation Number (1) UDINT RO
F9F2 01 SDP Functional Generation Number UDINT RO
F9F3 - Vendor Name STRING() RO
F9F4 01 Semiconductor SDP Device Name (1) STRING() RO
F9F8 - FW Update Funct. Gen. Number (1) UDINT RO
1. Idx = Index, sIdx = Sub-index, hexadecimal
2. RO = Read only, RW = Read/write, P = Suitable for process data
Idx1sIdx Name Type Access2Description
2000 In Identity/Status
01 Manufacturer STRING() RO
02 Elc.Device Name STRING() RO
03 Elc. Serial Number STRING() RO
05 Firmware Version STRING() RO
08 Status Code UINT RO P 0: No error
1-999: Error 1-999
1001-1999: Warning 1-999
0A Elc. Operating Hours UDINT RO P h
82 Pmp. Device Name STRING() RO
8A Pmp. Operating Hours UDINT RO P h
8D Pmp. Cycles UDINT RO P
BC Rot. Imbalance USINT RO P %
2001 In Operation

Connection "EtherCAT"
15
81 Speed Status USINT RO P 0: Stopped (< 60 min-1)
1: Accelerating
2: At speed
3: Decelerating
82 Actual Speed (rel.) SINT RO P %
83 Actual Speed (abs.) DINT RO P min-1
88 Ready for Process BOOL RO P Rotation speed switchpoint at-
tained
(0: no, 1: yes)
2002 In Pump Power/Temperature
08 Elc. Temperature INT RO P °C
11 Voltage INT RO P 0.1 V
12 Current INT RO P 0.1 A
13 Power INT RO P W
18 Pwr. Temperature INT RO P °C
88 Pmp. Temperature INT RO P °C
98 Mot. Temperature INT RO P °C
A8 Brg. Temperature INT RO P °C
B8 Rot. Temperature INT RO P °C
2004 In Component Identity/Status
52 Prs1.DeviceName STRING() RO
62 Prs2.DeviceName STRING() RO
2005 In Component Operation
51 Prs1.Status USINT RO P 0: valid
1: underrun
2: overrun
3: invalid
53 Prs1.Value REAL RW P actual pressure (hPa)
calibrate sensor
61 Prs2.Status USINT RO P 0: valid
1: underrun
2: overrun
3: invalid
63 Prs2.Value REAL RW P actual pressure (hPa)
calibrate sensor
2006 In Component
Power/Temperature
08 Htg. Temperature INT RO P °C
0A Htg. Status USINT RO P
6000 Turbo Status and Sensor Value
01 Rotation BOOL RO P Pump is rotating > 60 min-1 (0: no,
1: yes)
02 Normal BOOL RO P Normal operation from rotation
speed switchpoint (0: no, 1: yes)
03 Acceleration BOOL RO P Pump is accelerating (0: no, 1:
yes)
04 Deceleration BOOL RO P Pump is decelerating (0: no, 1:
yes)
05 Remote/Local BOOL RO P Control via EtherCAT (0: yes, 1:
no)
06 Motor off BOOL RO P 0: Motor on, 1: Motor off
07 Turbo Low Speed BOOL RO P Standby (0: off, 1: on)
09 Alarm BOOL RO P 0: no
1: yes
0A Warning BOOL RO P 0: no
1: yes
11 Turbo Speed INT RO P 0.1% of nominal rotation speed
12 Turbo Current INT RO P 0.1 A
13 Turbo Pump Temperature INT RO P °C
Idx1sIdx Name Type Access2Description

16
Connection "EtherCAT"
Output data (control -> TC 1200 EC)
F380 - Active Exception Status USINT RO P BIT 0/1: Warning
Bit 2/3: Errors
Bit 4-7: Reserved
F381 01 Active Device Warning Details UDINT RO P Bit 0: Loss of voltage
Bit 1: Pump excess temperature
Bit 2: Overspeed
Bit 3: Pump excess current
Bit 4: Drive excess temperature
Bit 5: Drive excess current
Bit 6: Drive excess voltage
Bit 7: Drive
Bit 8: Controller
Bit 9: Unable to start
Bit 10: Run-up time
Bit 11: Braking time
Bit 12: Bearing
Bit 13: Bearing sensor
Bit 14: Heating excess tempera-
ture
Bit 15: Heating sensor
Bit 16: Heating
Bit 17: Valve
Bit 18: Other
Bit 19-31: Reserved
F383 01 Active Device Error Details (1) UDINT RO P See F381.01
F390 - Latched Exceptions USINT RO P See F380
F391 01 Latched Device Warning Details (1) UDINT RO P See F381.01
F393 01 Latched Device Error Details (1) UDINT RO P See F381.01
F6F0 01 Input Latch Local Timestamp (1) UDINT RO
F9F5 01 Output Identifier (1) USINT RW P
F9F6 - Time since power on UDINT RO P s
F9F7 - Total Time Powered UDINT RO P s
1. Idx = Index, sIdx = Sub-index, hexadecimal
2. RO = Read only, RW = Read/write, P = Suitable for process data
Idx1sIdx Name Type Access2Description
Idx1sIdx Name Type Access2Description
3005 Out Component Operation
01 Htg. Enable BOOL RW P Enable heating (0: no, 1: yes)
11 Vnt. Enable BOOL RW P Enable venting (0: no, 1: yes)
21 Slg. Enable BOOL RW P Enable sealing gas (0: no, 1: yes)
31 Brk. Enable BOOL RW P Enable brake (0: no, 1: yes)
51 Prs.Enable USINT RW P Enable HV sensor
0 = off
1 = on
2 = on, when rotary speed
switchpoint attaind
3 = on, when pressure switch-
point underrun
7000 Turbo Control
01 Turbo Start Stop BOOL RW P Pumping station (0: off, 1: on)
02 Turbo Reset Alarm BOOL RW P 0->1: Fault acknowledgement
03 Turbo Low Speed BOOL RW P Standby (0: off, 1: on)
04 Motor off BOOL RW P Motor (0: on, 1: off)
FBF0 Device Reset Command
01 command BYTE() RW Only if pump off and stopped
{74h, 65h, 73h, 65h, 72h, ...
...0x00}: standard reset
...0x66}: factory reset
02 status USINT RO
03 response BYTE() RO

Connection "EtherCAT"
17
Configuration data (control -> TC 1200 EC)
FBF1 Exception Reset Command
01 command BYTE() RW {74h, 65h, 73h, 65h, 72h}
02 status USINT RO
03 response BYTE() RO
FBF2 Store Parameters Command
01 command BYTE() RW
02 status USINT RO
03 response BYTE() RO
FBF3 Calculate Checksum Command
01 command BYTE() RW RH: 81 00 00 00
WH: 01 00 00 00
02 status USINT RO
03 response BYTE() RO
1. Idx = Index, sIdx = Sub-index, hexadecimal
2. RO = Read only, RW = Read/write, P = Suitable for process data
Idx1sIdx Name Type Access2Description
Idx1sIdx Name Type Access2Description
4001 Cfg Pump Operation
21 Intf. Configuration USINT RW 0: Relay standard
1: Inverted
84 Nominal Speed UDINT RW min-1
85 Process Gas USINT RW P 0: Heavy gases
1: Light gases
2: Helium
86 Cfg Ready for Process USINT RW P 0: Switchpoint 1
1: Switchpoint 1 and 2
87 Speed Switchpoint 1 USINT RW P % of nominal rotation speed
88 Speed Switchpoint 2 USINT RW P % of nominal rotation speed
89 Enable Run-up Timer BOOL RW P
8A Run-up Time USINT RW P min
4002 Cfg Pump Power/Temperature
11 Max. Power USINT RW P %
4005 Cfg Component Operation
02 Htg. Setpoint INT RW P °C
11 Vnt. Configuration USINT RW P 0: Delayed venting
1: Do not vent
2: Vent directly
12 Vnt. Start Speed USINT RW P % of nominal rotation speed
13 Vnt. Stop Time UINT RW P s
41 Bkp. Configuration USINT RW P 0: Continuous operation
1: Interval mode
2: Delayed switching on
42 Bkp. Start Power UINT RW P W
43 Bkp. Stop Power UINT RW P W
55 Prs1.Correction factor REAL RW P
57 Prs1.Switchpoint REAL RW P hPa
65 Prs2.Correction factor REAL RW P
67 Prs2.Switchpoint REAL RW P hPa
81 ACC A1 Configuration USINT RW 0: Fan (continuous operation)
1: Venting valve
2: Heating
3: Backing pump
4: Fan (temperature regulated)
5: Sealing gas
6: Always 0
7: Always 1
8: Power failure venting unit
91 ACC B1 Configuration USINT RW See 4005.81

18
Connection "EtherCAT"
A1 ACC A2 Configuration USINT RW See 4005.81
B1 ACC B2 Configuration USINT RW See 4005.81
4009 Cfg Interface Operation
01 DI1 Configuration USINT RW 0: Deactivated
1: Enable venting
2: Heating
3: Sealing gas
4: Run-up time monitoring
5: Rotation speed setting mode
11 DI2 Configuration USINT RW See 4009.01
21 DI3 Configuration USINT RW See 4009.01
41 DO1 Configuration USINT RW 0: Rotation speed switchpoint at-
tained
1: No error
2: Errors
3: Warning
4: Error and/or warning
5: Set rotation speed attained
6: Pump on
7: Pump accelerates
8: Pump decelerates
9: Always 0
10: Always 1
11: Remote priority active
12: Heating
13: Backing pump
14: Sealing gas
15: Pumping station
16: Pump rotating
17: Pump has stopped
51 DO2 Configuration USINT RW See 4009.41
81 AI1 Configuration USINT RW 0: Switched off
1: Default in speed control mode
A1 AO1 Configuration USINT RW 0: Actual speed
1: Power
2: Current
3: Always 0 V
4: Always 10 V
5: Follows AI1
C1 Relais1 Configuration USINT RW See 4009.41
D1 Relais2 Configuration USINT RW See 4009.41
E1 Relais3 Configuration USINT RW See 4009.41
8001 Turbo Parameter Setting
01 Turbo Safe State UINT RW P For INIT, PREOP, SAFEOP and
interruption of communication
0: Maintain status
1: 7000.01-04-> 0 (pump off)
2: To normal operation
02 Low Speed Setpoint UINT RW P 0.1% of nominal rotation speed
03 Normal Speed Setpoint UINT RW P 0.1% of nominal rotation speed
F3A1 01 Device Warning Mask (1) UDINT RW P Format, see F381.01, events are
placed in F381.01 if bit 1 is set ac-
cordingly here
F3A3 01 Device Error Mask (1) UDINT RW P Format, see F381.01, events are
placed in F383.01 if bit 1 is set ac-
cordingly here
1. Idx = Index, sIdx = Sub-index, hexadecimal
2. RO = Read only, RW = Read/write, P = Suitable for process data
Idx1sIdx Name Type Access2Description

Connection "RS-485"
19
6 Connection "RS-485"
6.1 Connections
A Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected to the electronic drive unit via the connection designated "RS-485". The inter-
face is electrically isolated from the maximum supply voltage of the electronic drive unit.
The electrical couplings are optically decoupled internally.
6.2 Connecting Pfeiffer Vacuum display and control units or PC
Use the connection cable supplied with the control panel or from the range of acces-
sories.
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
Fig. 8: Optional connection possibilities for interface RS-485
Designation Value
Serial interface RS-485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1..2
12
34
5
Pin Assignment
1 RS-485: D+
2 +24 V output, loadable with ≤210 mA (with remote - pin 1)
3GND
4 RS-485: D-
5 not connected
DCU 002
HPU 001
RS485
USB/RS485-converter

20
Connection "RS-485"
6.3 Cross-linking via the connection RS-485
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
●The group address of the electronic drive unit is 962.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
USB/RS485-converter
M12
TC TC
D+
D-
USB/RS485-converter
RS 485
USB
PC
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.