Pfeiffer Vacuum TC 400 E74 User manual

PT 0302 BEN/E (1711)
E74
43
OPERATING INSTRUCTIONS EN
Translation of the original instructions
TC 400 E74
Electronic Drive Unit

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Connection diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 Connection "E74" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6 Connection "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6.2 Connecting Pfeiffer Vacuum display and control units or PC . . . . . . . . . . 11
6.3 Cross-linking via the connection RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . 12
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 17
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
8 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
8.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
9.2 Operation display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

Safety
5
2Safety
2.1 Safety precautions
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●Observe all safety and accident prevention regulations.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
●Regularly check the proper observance of all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so that you can disconnect it at
any time.

6
Safety
2.2 Proper use
●The electronic drive unit TC 400 E74 operates designated Pfeiffer Vacuum turbo-
pumps and their accessories.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●use of accessories or spare parts, which are not named in this manual
●operation of the devices in areas with ionizing radiation
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

Product description
7
3 Product description
3.1 Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
Product characteris-
tics The electronic drive unit TC 400 E74 is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 400 E74 must be installed and operated in the
following ambient conditions.
Characteristics TC 400
Connection voltage TC 24 V DC ±10 % 48 V DC ±10 %
Connection panel Standard (RS-485) Standard (RS-485)
Turbopump HiPace 300, 400, 700, 800 300, 400, 700, 800
TC 400
Made in Germany
Input:
Output:
Ser.-No.: 12345678
Mod.:
M.-No.:
24 V / 48 V ±10% 15 A
PM C01 800 A
0 - 48 V 12 A 0 - 1000 Hz
2017/08
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure 750 hPa - 1060 hPa
Installation altitude 5000 m max.
Degree of pollution 2
Overvoltage category II

8
Product description
3.3 Function
3.4 General connection description
Fig. 2: Connection panel for electronic drive unit TC 400 E74
a Mains connection "DC in"
b Connection "accessory A+B"
d Service connection "PV.can"
e Connection "RS485"
i Connection "E74"
accessory
A
B
RS485
E74
PV.can
DC in
bd
i
ea
DC in1
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum
mains packs and the electronic drive unit.
1. "DC in" and "accessory" are already described in the operating instructions of the tur-
bopump.
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
PV.can
M12 casing socket with screw coupling and LED for the connection of an integrated
pressure measurement and for Pfeiffer Vacuum Service purposes.
E74
D-sub 26 pole female socket for the connection of a remote control in dependence
on SEMI E74.
RS-485
M12 socket with screw coupling for the connection of a Pfeiffer Vacuum control unit
or a PC. The use of a Y-connector enables the series connection in a bus system.
Casing socket on the rear side of the electronic drive unit for the connection to the
turbopump.

Connection diagram
9
4 Connection diagram
Fig. 3: Connection diagram and assignment of the TC 400 E74
AC
B
41
5
23
32
5
14
13
4
2
A
B
C
DC in
4 ... 27 V DC 4 ... 27 V DC
Imax = 100 mA
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
6
7
8
9
1
(+)
9(-)
(+)
(-)
(+)
(-)
(+)
(-)
1
9
10
11
12
13
14
15
accessory A
E74
accessory BPV.canRS485
24 V DC* out
RS 485 D +
RS 485 D -
n.c.
GND*
CAN-H
GND***
CAN-L
24 V DC***
FE
start / stop (+)
24 V DC**
FE
n.c.
24 V DC**
FE
n.c.
acceleration status (+)
normal status (+)
deceleration status (+)
AO1 (-)
alarm staus (+)
~ alarm status (+)
remote / local status (+)
start / stop (-)
acceleration status (-)
normal status (-)
deceleration status (-)
AO1 (+)
alarm staus (-)
remote / local status (-)
Pin 3 ... 8
Pin 11 ... 15
Pin 3 ... 8
Pin 11 ... 15
+ UB(+24 / +48 VDC ± 10 %)
FE
GND
or
or
Accessory B1
Accessory B2
Accessory A1
Accessory A2
Contact load for accessories: -200 mA max., each connection -450 mA max., all connections in sum

10
Connection "E74"
5 Connection "E74"
The connection "E74" on the TC 400 E74 with 15-pole female plug contains besides the
signals, described in the SEMI E74-0301 standard, an additional inverted alarm signal
and an analog output.
The signal (-) leads of the "alarm status (+)" and "~alarm status (+)" are combined in the
signal "alarm status (-)".
5.1 Pin assignment
Signal description
AO1 Analog output
0-10 V DC / Pin 2, 10 A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x fNominal) can be
picked up via the analog output (load R ≥10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
15 9
81
signal (+)
signal (-)
signal (+)
signal (-)
Input signal Output signal
Pin Assignment
1 start/stop (+)
2AO1(-)
3 acceleration status (+)
4 normal status (+)
5 deceleration status (+)
6 alarm status (+)
7 remote/local status (+)
8 ~alarm status (+)
9 start/stop (-)
10 AO1 (+)
11 acceleration status (-)
12 normal status (-)
13 deceleration status (-)
14 alarm status (-)
15 remote/local status (-)
Signal (+) Pin (-) Pin Function if closed Function if open
start / stop 1 9 – Setting E74 priority
– Malfunction acknowledgement
– Motor ON (refer to [P:023])
– Pumping station ON (refer to [P:010])
– Resetting E74 priority (Operation possible
via other interfaces)
– Pumping station OFF (refer to [P:010])
Signal (+) Pin (-) Pin Meaning if closed Meaning if open
acceleration status 3 11 Pump accelerates Pump does not accelerate
normal status 4 12 Switch point attained Switch point not attained
deceleration status 5 13 Pump decelerates Pump does not decelerate
alarm status 6 14 No malfunction Malfunction
remote / local status 7 15 Unit remote controlled Unit locally controlled
~alarm status 8 14 Malfunction No malfunction

Connection "RS-485"
11
6 Connection "RS-485"
6.1 Connections
A Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected to the electronic drive unit via the connection designated "RS-485". The inter-
face is electrically isolated from the maximum supply voltage of the electronic drive unit.
The electrical couplings are optically decoupled internally.
6.2 Connecting Pfeiffer Vacuum display and control units or PC
Use the connection cable supplied with the control panel or from the range of acces-
sories.
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
Fig. 4: Optional connection possibilities for interface RS-485
Designation Value
Serial interface RS-485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1
12
34
5
Pin Assignment
1 RS-485: D+
2 +24 V output, loadable with 210 mA (with remote - pin 1)
3GND
4 RS-485: D-
5 not connected
DCU 002
DCU 310 / 400
TC 400 / TM 700
HPU 001
RS-485
USB/RS-485-converter

12
Connection "RS-485"
6.3 Cross-linking via the connection RS-485
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
●The group address of the electronic drive unit is 962.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
USB/RS-485-converter
TC 600 / 750
M12
RJ45
TC/TM TC/TM
D+
D-
USB/RS-485-converter
RS 485
USB
PC
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.

The Pfeiffer Vacuum parameter set
13
7 The Pfeiffer Vacuum parameter set
7.1 General
All function-relevant variables of a turbopump are anchored in the electronic drive unit as
parameters. Each parameter has a three-digit number and a designation. Parameters
can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer
Vacuum protocol.
Conventions Parameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version
7.2 Parameter overview
Annotation
Operation with DCU
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices)
there are additional parameters fixed in the respective Pfeiffer Vacuum display and con-
trol unit.
Please consider the respective operating instructions.
#Three figure number of the parameter
Display Display of the parameter name in the LCD
* = Representation as a symbol, if necessary
Designation Short description of the parameter
Functions Functional description of the parameter
Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
tocol
Access method R: read access; W: write access
Unit Physical unit of the described characteristic
min / max Permissible limits for value input
default Factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
used after resetting of the mains supply.
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default.
Furthermore the DCU contains parameters, which are not positioned in the electronic
drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
# Display Designation Functions
Data type Access
Unit min max default 
340 Pressure Pressure value (ActiveLine) 7 R hPa 1E-
10
1E3
350 Ctr Name Type of display and control unit 4 R
351 Ctr Software Software of display and control unit 4 R
738 Gaugetype Type of pressure gauge 4 RW
794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
7RW 0 1 0
795 Servicelin Insert service line 7 RW 795

14
The Pfeiffer Vacuum parameter set
Control commands
# Display Designation Functions
Data type Access
Unit min max default 
001 Heating Heating 0 = off
1 = on
0RW 0 1 0 x
002 Standby Standby 0 = off
1 = on
0RW 0 1 0 x
004 RUTimeCtrl Run-up time control 0 = off
1 = on
0RW 0 1 1 x
009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1
010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement
0RW 0 1 0 x
012 EnableVent Enable venting 0 = no
1 = yes
0RW 0 1 0 x
017 CfgSpdSwPt Configuration rotation speed switchpoint 0 = Rotation speed switchpoint 1
1 = Rotation speed switchpoint 1&2
7RW 0 1 0 x
019 Cfg DO2 Configuration output DO2 no function
023 MotorPump Motor pump 0 = off
1 = on
0RW 0 1 0 x
024 Cfg DO1 Configuration output DO1 no function
025 OpMode BKP Operation mode backing pump 0 = Continous operating
1 = Intermittend mode
2 = Delayed switch-on
7RW 0 2 0 x
026 SpdSetMode Rotation speed setting mode 0 = off
1 = on
7RW 0 1 0 x
027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium
7RW 0 2 0 x
030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting
7RW 0 2 0 x
035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
12 = second venting valve
7RW 0 12 0 x
036 Cfg Acc B1 Configuration accessory connection B1 Options see [P:035] 7RW 0 12 1 x
037 Cfg Acc A2 Configuration accessory connection A2 Options see [P:035] 7RW 0 12 3 x
038 Cfg Acc B2 Configuration accessory connection B2 Options see [P:035] 7RW 0 12 2 x
045 Cfg Rel R1 Configuration Relay 1 no function
046 Cfg Rel R2 Configuration Relay 2 no function
047 Cfg Rel R3 Configuration Relay 3 no function
050 SealingGas Sealing gas 0 = Off
1 = On
0RW 0 1 0 x
055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
5 = follows AI1
6 = Pressure value 1
7 = Pressure value 2
8 = Control fore-vacuum
7RW 0 8 0 x
057 Cfg AI1 Configuration Input AI1 no function
060 CtrlViaInt Control via interface 1 = Remote
2 = RS-485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection
7 RW 1 255 2 x
061 IntSelLckd Interface selection locked 0 = off
1 = on
0RW 0 1 0 x
062 Cfg DI1 Configuration input DI1 no function
063 Cfg DI2 Configuration input DI2 no function
064 Cfg DI3 Configuration input DI3 no function

The Pfeiffer Vacuum parameter set
15
Status requests
Set value settings
# Display Designation Functions
Data type Access
Unit min max default 
300 RemotePrio Remote priority 0 = no
1 = yes
0R 0 1
302 SpdSwPtAtt Rotation speed switchpoint attained 0 = no
1 = yes
0R 0 1
303 Error code Error code 4R
304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes
0R 0 1
305 OvTempPump Excess temperature pump 0 = no
1 = yes
0R 0 1
306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
0R 0 1
307 PumpAccel Pump accelerates 0 = no
1 = yes
0R 0 1
308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999
309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999
310 DrvCurrent Drive current 2 R A 0 9999.99
311 OpHrsPump Operating hours pump 1 R h 0 65535 x
312 Fw version Firmware version electronic drive unit 4 R
313 DrvVoltage Drive voltage 2 R V 0 9999.99
314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x
315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999
316 DrvPower Drive power 1 R W 0 999999
319 PumpCycles Pump cycles 1 R 0 65535 x
324 TempPwrStg Temperature power stage 1 R °C 0 999999
326 TempElec Temperature electronic 1 R °C 0 999999
330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999
336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999
342 TempBearng Temperature bearing 1 R °C 0 999999
346 TempMotor Temperature motor 1 R °C 0 999999
349 ElecName Name of electronic drive unit 4 R
354 HW Version Hardware version electronic drive unit 4 R
360 ErrHist1 Error code history, pos. 1 4 R x
361 ErrHist2 Error code history, pos. 2 4 R x
362 ErrHist3 Error code history, pos. 3 4 R x
363 ErrHist4 Error code history, pos. 4 4 R x
364 ErrHist5 Error code history, pos. 5 4 R x
365 ErrHist6 Error code history, pos. 6 4 R x
366 ErrHist7 Error code history, pos. 7 4 R x
367 ErrHist8 Error code history, pos. 8 4 R x
368 ErrHist9 Error code history, pos. 9 4 R x
369 ErrHist10 Error code history, pos. 10 4 R x
384 TempRotor Temperature rotor 1 R °C 0 999999
397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999
398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999
399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
# Display Designation Functions
Data type Access method
Unit min max default 
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x
701 SpdSwPt1 Rotation speed switchpoint 1 1 RW % 50 97 80 x
707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x
708 PwrSVal Set value power consumption 7 RW % 10 100 1001x
710 Swoff BKP Switching off threshold backing pump in intermit-
tend mode
1 RW W 0 1000 0 x
711 SwOn BKP Switching on threshold backing pump in intermit-
tend mode
1 RW W 0 1000 0 x
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x
719 SpdSwPt2 Rotation speed switchpoint 2 1 RW % 5 97 20 x
720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x
721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x
777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x
797 RS485Adr RS-485 device address 1 RW 1 255 1 x
1. depending on the pump type

16
The Pfeiffer Vacuum parameter set
7.3 Configuring the connections
The electronic drive unit is pre-configured in the factory. Thereby the turbopump is im-
mediately operational with the necessary functions. The connections of the electronic
drive unit can be configured to suit individual requirements using the parameter set.
Accessory connec-
tion
Configuration via parameters [P:035], [P:036], [P:037] or [P:038].
Analog output on
"E74"
Configuration via parameter [P:055].
Option Description
0 = Fan (continous operation) Control via parameter Pumping station
1 = Venting valve, normally closed Control via parameter Enable venting, when using a venting
valve which is normally closed.
2 = Heating Control via parameters Heating and Rotation speed switch-
pont attained
3 = Backing pump Control via parameters Pumping station and operation mode
backing pump
4 = Fan (temperature controlled) Control via parameters Pumping station and temperature
thresholds
5 = Sealing gas Control via parameters Pumping station and Sealing gas
6 = always 0 GND for the control of an external device
7 = always 1 +24 V DC for the control of an external device
8 = Power failure venting unit Control via parameter Enable venting, when using a power
failure venting unit.
12 = second venting valve Control via parameter Enable venting and underrunning 50
% of the nominal rotation speed, when using a venting valve
which is normally closed.
13 = Sealing gas monitoring Control via parameters Pumping station and Sealing gas.
Option Description
0 = Rotation speed Rotation speed signal; 0 - 10 V DC = 0 - 100 % x fNominal
1 = Power Power signal; 0 - 10 V DC = 0 - 100 % x Pmax
2 = Current Current signal; 0 - 10 V DC = 0 - 100 % x Imax
3 = always 0 V Always GND
4 = always 10 V Output of continously 10 V DC
5 = follows AI1 Follows the analog input 1
6 = Pressure value 1 Pressure value signal;
0 V: error
1 V: underrange
1,5 - 8,5 V for sensor RPT p (hPa) = 10(U-5.5 V)
1,5 - 8,5 V for sensor IKT p (hPa) = 10(U-10.5 V)
9 V: overrange
7 = Pressure value 2
8 = Control fore-vacuum Fore-vacuum signal; control of Pfeiffer Vacuum
turbo pumping stations

The Pfeiffer Vacuum parameter set
17
7.4 Operation with the Pfeiffer Vacuum parameter set
Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-
able turbopump operation without the need for additional configuration.
Checking the adjust-
ments
Before operating with parameters, check set values and control commands for their
suitability for the pumping process.
Remove the remote plug from electronic drive unit if required.
Gas type dependent
operations Friction causes the rotor to heat up severely under gas load and high rotation speed. To
avoid overheating, the electronic drive unit has implemented power-rotation speed-char-
acteristics, whereby the pump can be operated at every rotation speed with the maxi-
mum allowable gas load without danger of damage. The maximum power consumption
depends on the gas type. Three characteristics are available in order to completely ex-
haust the pump's capacity for each gas type.
●Gas mode "0" for gases with the molecular mass >39, e.g. argon.
●Gas mode "1" for gases with the molecular mass 39.
●Gas mode "2" for helium.
●Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
Fig. 5: Principle of power characteristics lines for gas type dependent operations,
e.g. gas mode = 0
The turbopump runs up with maximum power consumption. When the nominal and/or set
rotation speed is reached, the pump automatically switches over to the chosen power
characteristic of the selected gas mode. Increasing gas load is initially compensated by
a rise in power consumption in order to keep the rotation speed constant. Increasing gas
friction, however, causes the turbopump to heat up more severely. When the gastype-
dependent maximum power is exceeded, the rotation speed of the turbopump is reduced
until an equilibrium between permissible power and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-
what lower frequency in rotation speed setting mode.
NOTICE
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de-
struction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
[P:708]
D
F
B
A
C
E
Pmax
fN
Run-up
Rotation speed
Power
C-D = gas mode "0"
A-B = gas mode "1"
E-F = gas mode "2"

18
The Pfeiffer Vacuum parameter set
Set value power con-
sumption
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time prolongs. To
avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-
ingly.
Run-up time The run-up of the turbopump is time-monitored ex factory. There are various causes of
prolonged run-up times, e.g.:
●Too high gas loads
●Leakage in the system
●The set value run-up time is too low
Eliminate any external and application-related causes.
Adjust the run-up time via parameter [P:700].
Adjustingtherotation
speed switchpoint The rotation speed switchpoint can be used for the message "Pump operational for the
process". Overrunning or underrunning the active rotation speed switchpoint activates or
deactivates a signal at the pre-configured output on the electronic drive unit and at the
status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.
Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation speed
switchpoint 1 [P:701].
Fig. 6: Example for the configuration rotation speed switchpoint 1 active
Rotation speed switchpoint 1 & 2
Adjust the parameter [P:701] to the desired value in %.
Adjust the parameter [P:719] to the desired value in %.
Parameter [P:017] = 1
When the pumping station [P:010] is switched on, the rotation speed switchpoint 1 is the
signal generator. When the pumping station is switched off, signal output and status que-
ry are based on the rotation speed switchpoint 2. The signal output is governed by the
hysteresis between the two switchpoints.
Process
f(%)
t
t
t
[P:010]
[P:302]
[P:701]
[P:017] = 0
0
1
0
1

The Pfeiffer Vacuum parameter set
19
Fig. 7: Example for the configuration rotation speed switchpoint 1+2 active; [P:701] > [P:719]
Fig. 8: Example for the configuration rotation speed switchpoints 1+2 active; [P:701] < [P:719]
Rotation speed set-
ting mode The rotation speed setting mode reduces the rotation speed and hence the throughput
of the turbopump. The pumping speed of the turbopump changes proportional to rotation
speed. Standby mode is ineffective during rotation speed setting mode. The set rotation
speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation
speed switchpoint varies with the set rotation speed. Underrunning or overrunning the
set value in rotation speed setting mode activates and deactivates the status signal
[P:306] SetSpdAtt respectively.
Adjust the parameter [P:707] to the desired value in %.
Parameter [P:026] = 1
Read the parameters [P:308]/[P:397].
Process
f(%)
t
t
t
[P:010]
[P:302]
[P:701]
[P:719]
[P:017] = 1
0
1
0
1
Process
f(%)
t
t
t
[P:010]
[P:302]
[P:719]
[P:701]
[P:017] = 1
0
1
0
1
Permissible rotation speed range of the turbopump
Adjustments in the rotation speed setting mode or in the standby mode are subject to
the permissible rotation speed range of the respective turbopump. Underrunning the
minimum permissible value causes the warning message Wrn100. The electronic drive
unit resets the set rotation speed automatically to the next valid value.
Maintain the permissible rotation speed range of the turbopump (please refer to the
technical data in the operating instructions for the respective turbopump).

20
The Pfeiffer Vacuum parameter set
Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and pro-
duction stops. When standby mode is active, the electronic drive unit reduces the rotation
speed of the turbopump. Standby mode is ineffective during rotation speed setting mode.
The factory setting for the set value in standby mode is 66.7 % of the nominal rotation
speed. Underrunning or overrunning the set speed in standby mode activates or deacti-
vates the status signal [P:306] SetSpdAtt.
Adjust the parameter [P:717] to the desired value in %.
Parameter [P:002] = 1
Read the parameters [P:308]/[P:397].
Rotation speed set
value The typical nominal rotation speed of a turbopump is factory-set in the electronic drive
unit. If the electronic drive unit is replaced or a different pump type is used, the reference
set value of the nominal rotation speed must be confirmed. This procedure is part of a
redundant safety system for avoiding excess rotation speeds.
Adjust the parameter [P:777] according to the pump type.
Once the nominal rotation speed is attained, the pump will run idle unless additional gas
loads are entered. Depending on process or application requirements, the nominal rota-
tion speed can be reduced in rotation speed setting mode or standby mode.
Operation mode
backing pump Operation of a connected backing pump via the electronic drive unit depends on the
backing pump type.
Adjust the parameter [P:025] to the desired value.
Continous operation
With "pumping station on", the electronic drive unit sends a signal to the configured ac-
cessory connection to switch on the backing pump. This signal can also be used for con-
trolling a fore-vacuum safety valve.
Intermittend operation (diaphragm pumps only)
Intermittend operation can extend the life expectancy of the membrane of a connected
diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an inter-
connected relay box with semiconductor relay is required for intermittend operation. The
backing pump is switched on and off in dependence of the turbopump's power consump-
tion. A relation to the supplied fore-vacuum pressure is derived from the power consump-
tion. The switching off and switching on thresholds for the backing pump are adjustable.
Fluctuations in the power consumption of idling turbopumps and type-dependent varying
fore-vacuum pressures of the backing pumps require the switching thresholds to be set
separately for the intermittend mode.
Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 hPa. A pressure
gauge and a dosing valve are required to set the switching thresholds.
Switch on the vacuum system via the function "pumping station" and await the run-up.
Generate a fore-vacuum pressure of 10 hPa by gas inlet via dosing valve.
Read and note the parameter [P:316].
Adjust the switch on threshold backing pump via parameter [P:711] to the determined
drive power for a fore-vacuum pressure of 10 hPa.
Reduce the fore-vacuum pressure to 5 hPa.
Read and note the parameter [P:316].
HiPace Nominal rotation speed confirmation [P:777]
300 1000 Hz
400 / 700 / 800 820 Hz
Operation mode [P:025] recommended backing pump
"0" continous operation all kinds of backing pumps
"1" Intermittend operation diaphragm pumps only
"2" Delayed switching on all kinds of backing pumps