Pfeiffer Vacuum TC1200 User manual

PT 0239 BEN/P (1704)
OPERATING INSTRUCTIONS EN
Translation of the original instructions
TC 1200
Electronic Drive Unit

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.1 Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.3 Instructions in the text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.4 Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1.1 Product characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.5 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4 Connection diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2.1 +24 V DC* Output / Pin 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2.2 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.2.3 Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2.4 Relay contacts (invertible). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2.5 RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6 Connection "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
6.2 Connecting Pfeiffer Vacuum display and control units or PC . . . . . . . . . . 15
6.3 Cross-linking via the connection RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . 16
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.1.1 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.2.1 Annotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.2.2 Operation with DCU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.2.3 Control commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
7.2.4 Status requests . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
7.2.5 Set value settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7.3.1 Accessory connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.3.2 Digital outputs and relays on "remote" . . . . . . . . . . . . . . . . . . . . . 21
7.3.3 Digital inputs on "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.3.4 Analog output on "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.3.5 Analog input on "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.3.6 Control via interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 23
7.4.1 Factory settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
7.4.2 Checking the adjustments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
7.4.3 Gas type dependent operations . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Table of contents
3
7.4.4 Set value power consumption . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.4.5 Run-up time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.4.6 Adjusting the rotation speed switchpoint. . . . . . . . . . . . . . . . . . . . 24
7.4.7 Rotation speed setting mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.4.8 Standby . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.4.9 Rotation speed set value. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.4.10 Operation mode backing pump . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.4.11 Standby mode for the backing pump. . . . . . . . . . . . . . . . . . . . . . . 27
7.4.12 Operation with accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
7.4.13 Vent modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.4.14 Monitoring the thermal load. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.5.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.5.2 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2.1 Example 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2.2 Example 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9.2 Operation display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9.3.1 Operation with DCU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

4
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
1.2.1 Safety instructions
The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

About this manual
5
1.2.2 Pictographs
1.2.3 Instructions in the text
Work instruction: here you have to do something.
1.2.4 Abbreviations
DCU: Display Control Unit
HPU: Handheld Programming Unit
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
[P:000]: Parameter of the electronic drive unit with number
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

6
Safety
2Safety
2.1 Safety precautions
●Observe all safety and accident prevention regulations.
●Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
●Regularly check the proper observance of all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so that you can disconnect it at
any time.

Safety
7
2.2 Proper use
●The electronic drive unit TC 1200 operates designated Pfeiffer Vacuum turbopumps
and their accessories.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●connection to mains supplies, which do not confirm to the regulations IEC 61010 or
IEC 60950
●operation of the devices in areas with ionizing radiation
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

8
Product description
3 Product description
3.1 Product identification
3.1.1 Product characteristics
The electronic drive unit TC 1200 is an integrated component of the turbopump. It's pur-
pose is to drive, monitor and control the entire pump.
* Ampere interrupting capacity
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 1200 must be installed and operated in the fol-
lowing ambient conditions.
Characteristics TC 1200
Connection panel Standard (RS485)
Turbopump HiPace 1200, 1500, 1800, 2300
Mains requirement: frequency (range) 50/60 Hz
Mains requirement: voltage (range) 100-120/200-240 (± 10%) V AC
Current consumption max. 10 A
Power consumption max. 1350 VA
Mains requirement: internal fuse 10 A, delayed
Breaking capacity (AIC)* 1500 A
Mod.: TC 1200
Mod.-No.: PM C01 810
Input: ~ 100-120V / ~200-240V±10%
10A, 50 - 60 Hz, 1500AIC
Output: 0 - 400V 5A, 0 - 630 Hz
Weight: 3kg
Made in Germany 2012/04
Ser.-No.:79500005
Installation location weather protected (indoors)
Protection category IP 54
Protection class I
Temperature +5 °C to +40 °C
Relative humidity max. 80 %, at T 31 °C, max. 50% at T 40 °C
Atmospheric pressure: 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

Product description
9
3.3 Function
3.4 General connection description
Fig. 2: Standard panel for the TC 1200
a Mains connection "AC in"
b Connection "accessory A+B"
c Connection "remote"
d Service connection "PV.can"
e Connection "RS485"
h LED "Operating display"
bd
c
h
ea
}
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
PV.can
M12 casing socket with screw coupling and LED for the connection of an integrated
pressure measurement and for Pfeiffer Vacuum Service purposes.
remote
High Density D-sub 26 pole female socket for the connection and configuration of
a remote control.
RS-485
M12 socket with screw coupling for the connection of a Pfeiffer Vacuum control unit
or a PC. The use of a Y-connector enables the series connection in a bus system.

10
Product description
3.5 Connecting to the mains power supply
Fig. 3: Pin assignment of the mains connection plug
Order the mains cable separately (see "accessories").
Insert the mains cable into the mains connection AC in.
Lock the mains cable with the mounting bracket.
Connect the mains cable to the mains.
Drive power reduction depending on the mains connection voltage
The power of the electronic drive unit depends on the provided mains voltage.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so that you can disconnect it at
any time.
1 Phase L
2 Neutral conductor
3n.c.
PE Protective earth
Mains connection voltage Drive power
100 - 120 V AC 700 - 930 W
200 - 240 V AC 1200 W
12
3
PE

Connection diagram
11
4 Connection diagram
Fig. 4: Connection diagram and assignment of the TC 1200
41
5
23
32
5
14
13
4
2
19
10 18
19 26
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
accessory A
accessory B
remote
PV.canRS485
24 V DC* out
RS 485 D +
RS 485 D -
n.c.
GND*
CAN-H
GND***
CAN-L
24 V DC***
+ 24 V DC* out
RS485 D-
RS485 D+
GND*
24 V DC**
n.c.
24 V DC**
n.c.
FE
FE FE
Potential free contacts
n.c.
Accessory B1
Accessory B2
Accessory A1
Accessory A2
DI Motor pump
DI Pumping station
DI Standby
DI1
DI2
DO1
DO2
DI3
AI+ 0-10 V DC
AI- GND
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
Relay 2
Relay 2
Relay 3
Relay 3
AO1 / 0-10 V DC
DO Remote priority active
Contact load for accessories: -200 mA max., each connection -450 mA max., all connections in sum

12
Connection "remote"
5 Connection "remote"
Remote control is possible via the 26-pin D-sub connector labelled "remote" on the elec-
tronic drive unit. The accessible individual functions are mapped to "PLC levels".
Remove the remote plug from the TC 1200 and connect a remote control unit. Pin as-
signment of the connector according to table.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible
using the Pfeiffer Vacuum parameter set.
5.1 Pin assignment
5.2 Operation via "remote" connection
5.2.1 +24 V DC* Output / Pin 1
Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with
+24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The
functions are deactivated by "PLC high level" and by "PLC low level".
●PLC high level: +13 V to +33 V
●PLC low level: -33 V to +7 V
●Ri: 7 kΩ
●Imax < 200 mA (with RS-485, if existing)
19
1018
1926
Pin Function Designation factory settings
1 +24 V DC output (V+) Reference voltage for all digital in- and outputs
2 DI1 Enable venting; open: no; V+: yes
3 DI Motor pump Drive motor; open: off; V+: on
4 DI Pumping station Open: off; V+: on and error acknowledgement
5 DI Standby Standby rotation speed; open: off; V+: on
6 DI2 Heating; open: off; V+: on
7 AI+ Rotation speed setting mode Set value in rotation speed setting mode;
2-10 V DC = 20-100% of the nominal rotation speed
8 DO1 Rotation speed switch point attained;
GND:no; V+: yes (Imax = 50 mA/24 V)
9 DO2 GND: error; V+: no error (Imax = 50 mA/24 V)
10 DI3 Sealing gas; open: off; V+: on
11 AI- Rotation speed setting mode
GND
Set value in rotation speed setting mode; GND
12 AO1 Actual rotation speed;
0-10 V DC is equivalent to 0-100%; RL> 10 kΩ
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priority Control via interface "remote"; open: off
V+: set and priority over other digital inputs
15 Relais 1 Connection to Pin 16 if relay 1 is inactive
16 Relais 1 Rotation speed switchpoint attained;
relay contact 1 (Umax = 50 V DC; Imax = 1 A)
17 Relais 1 Connection to Pin 16 if relay 1 is active
18 Relais 2 Connection to Pin 19 if relay 2 is inactive
19 Relais 2 No error; relay contact 2 (Umax = 50 V DC; Imax = 1 A)
20 Relais 2 Connection to Pin 19 if relay 2 is active
21 Relais 3 Connection to Pin 22 if relay 3 is inactive
22 Relais 3 Warning; relay contact 3 (Umax = 50 V DC; Imax = 1 A)
23 DO Remote priority GND: off; V+: remote priority active
24 RS-485 D+ according to specifications and Pfeiffer Vacuum protocol
25 RS-485 D- according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND) Reference ground for all digital inputs and all outputs

Connection "remote"
13
5.2.2 Inputs
The digital inputs at connection "remote" are used to connect various functions of the
electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can
be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully com-
pletes the self-test, the turbopump is placed into operation. During operation, the tur-
bopump can be switched off and on again, while the pumping station remains switched
on. The turbopump is not vented thereby.
V+ : Turbopump motor on
open: Turbopump motor off
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air cooling
unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is
placed in operation. Any ongoing error messages are reset when their cause has been
eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation
speed. Factory setting and recommended operation are 66.7 % of the nominal rotation
speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
DI2 (Heating) / Pin 6
V+ : Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ : Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ : Reset ongoing error messages when cause has been eliminated with a pulse of
min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ : The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive

14
Connection "remote"
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input defines the set rotation speed of the turbopump. An input signal of 2 -
10 V between AI+ (Pin 7) and GND (Pin 11) corresponds to a rotation speed within the
range of 20 - 100% of the nominal rotation speed. If the input is open or signals fall below
2 V, the pump is accelerated up to nominal rotation speed.
5.2.3 Outputs
The digital outputs at the connection "remote" can be loaded with a maximum of 24 V /
50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum pa-
rameter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switchpoint attained) / Pin 8
Active high after the rotation speed switchpoint is attained. Rotation speed switchpoint 1
is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a
"pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs
24 V DC which means "no errors". Active low in case of error (collective error message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other connected control
panels (e.g. RS-485). With active low, the connection "remote" is ignored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x fNominal) can be
picked up via the analog output (load R ≥10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
5.2.4 Relay contacts (invertible)
Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point
is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is closed when
the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when a malfunction is present; relay 2
is inactive. The contact between Pin 19 and Pin 20 is closed when operation is malfunc-
tion free; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are active;
relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a warning mes-
sage is present; relay 3 is active.
5.2.5 RS-485
One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec-
tion "remote" on the electronic drive unit.
Establish the connections according to the specification of the interface RS-485.
f(%)
100
20
210
U(V)

Connection "RS-485"
15
6 Connection "RS-485"
6.1 Connections
A Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected to the electronic drive unit via the connection designated "RS-485". The inter-
face is electrically isolated from the maximum supply voltage of the electronic drive unit.
The electrical couplings are optically decoupled internally.
6.2 Connecting Pfeiffer Vacuum display and control units or PC
Use the connection cable supplied with the control panel or from the range of acces-
sories.
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
Fig. 5: Optional connection possibilities for interface RS-485
Designation Value
Serial interface RS-485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1
12
34
5
Pin Assignment
1 RS-485: D+
2 +24 V output, loadable with 210 mA (with remote - pin 1)
3GND
4 RS-485: D-
5 not connected
DCU 002
HPU 001
RS485
USB/RS485-converter

16
Connection "RS-485"
6.3 Cross-linking via the connection RS-485
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
●The group address of the electronic drive unit is 963.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
USB/RS485-converter
M12
TC TC
D+
D-
USB/RS485-converter
RS 485
USB
PC
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.

The Pfeiffer Vacuum parameter set
17
7 The Pfeiffer Vacuum parameter set
7.1 General
All function-relevant variables of a turbopump are anchored in the electronic drive unit as
parameters. Each parameter has a three-digit number and a designation. Parameters
can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer
Vacuum protocol.
7.1.1 Conventions
Parameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version
7.2 Parameter overview
7.2.1 Annotation
7.2.2 Operation with DCU
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices)
there are additional parameters fixed in the respective Pfeiffer Vacuum display and con-
trol unit.
Please consider the respective operating instructions.
#Three figure number of the parameter
Display Display of the parameter name in the LCD
* = Representation as a symbol, if necessary
Designation Short description of the parameter
Functions Functional description of the parameter
Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
tocol
Access method R: read access; W: write access
Unit Physical unit of the described characteristic
min / max Permissible limits for value input
default Factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
used after resetting of the mains supply.
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default.
Furthermore the DCU contains parameters, which are not positioned in the electronic
drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
# Display Designation Functions
Data type Access method
Unit min max default 
340 Pressure Pressure value (ActiveLine) 7 R hPa 1E-10 1E3
350 Ctr Name Type of display and control unit 4 R
351 Ctr Software Software of display and control unit 4 R
738 Gaugetype Type of pressure gauge 4 RW
794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
7RW 010
795 Servicelin Insert service line 7 RW 795

18
The Pfeiffer Vacuum parameter set
7.2.3 Control commands
# Display Designation Functions
Data type Access
Unit min max default 
001 Heating Heating 0 = off
1 = on
0RW 0 1 0 x
002 Standby Standby 0 = off
1 = on
0RW 0 1 0 x
004 RUTimeCtrl Run-up time control 0 = off
1 = on
0RW 0 1 1 x
009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1
010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement
0RW 0 1 0 x
012 EnableVent Enable venting 0 = no
1 = yes
0RW 0 1 0 x
013 Brake Brake 0 = off
1 = on
0RW 0 1 0 x
017 CfgSpdSwPt Configuration rotation speed switchpoint 0 = Rotation speed switchpoint 1
1 = Rotation speed switchpoint 1&2
7RW 0 1 0 x
019 Cfg DO2 Configuration of output DO2 0 = Rotation speed switch point attained
1 = No errors
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set rotation speed attained
6 = Pump on
7 = Pump accelerating
8 = Pump decelerating
9 = Always 0
10 = Always 1
11 = Remote priority active
12 = Heater
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotating
17 = Pump has stopped
18 = TMS engaged
19 = Switching point 1 not reached
20 = Switching point 2 not reached
21 = Fore-vacuum valve, delayed
22 = Standby backing pump
7RW 0 22 1 x
023 MotorPump Motor pump 0 = off
1 = on
0RW 0 1 0 x
024 Cfg DO1 Configuration output DO1 Options see [P:019] 7RW 0 21 0 x
025 OpMode BKP Operation mode backing pump 0 = Continous operating
1 = Intermittend mode
2 = Delayed switch-on
7RW 0 2 0 x
026 SpdSetMode Rotation speed setting mode 0 = off
1 = on
7RW 0 1 0 x
027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium
7RW 0 2 0 x
028 Cfg Remote Configuration remote 0 = Standard
4 = Relais inverted
7RW 0 4 0 x
030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting
7RW 0 2 0 x
035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
9 = TMS heating
10 = TMS cooling
12 = second venting valve
13 = Sealing gas monitoring
7RW 0 13 5 x
036 Cfg Acc B1 Configuration accessory connection B1 Options see [P:035] 7RW 0 12 1 x
037 Cfg Acc A2 Configuration accessory connection A2 Options see [P:035] 7RW 0 12 3 x
038 Cfg Acc B2 Configuration accessory connection B2 Options see [P:035] 7RW 0 12 2 x

The Pfeiffer Vacuum parameter set
19
7.2.4 Status requests
041 Press1HVen Enable integrated HV Sensor (IKT only) 0 = off
1 = on
2 = on, when rotation speed switchpoint
attained
3 = on, when pressure switchpoint
underrun
7RW 0 3 2 x
045 Cfg Rel R1 Configuration Relay 1 Options see [P:019] 7RW 0 21 0 x
046 Cfg Rel R2 Configuration Relay 2 Options see [P:019] 7RW 0 21 1 x
047 Cfg Rel R3 Configuration Relay 3 Options see [P:019] 7RW 0 21 3 x
050 SealingGas Sealing gas 0 = Off
1 = On
0RW 0 1 1 x
055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
5 = follows AI1
6 = Pressure value 1
7 = Pressure value 2
8 = Control fore-vacuum
7RW 0 8 0 x
057 Cfg AI1 Configuration input AI1 0 = Disconnected
1 = Set value rot. speed setting mode
7RW 0 1 1 x
060 CtrlViaInt Control via interface 1 = Remote
2 = RS-485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection
7 RW 1 255 2 x
061 IntSelLckd Interface selection locked 0 = off
1 = on
0RW 0 1 0 x
062 Cfg DI1 Configuration input DI1 Settings [P:063/064]
0 = deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
7 = Enable HV sensor
7RW 0 7 1 x
063 Cfg DI2 Configuration input DI2 Options see [P:062]
Settings [P:062/064] 7RW 0 7 2 x
064 Cfg DI3 Configuration input DI3 Options see [P:062]
Settings [P:062/063] 7RW 0 7 3 x
# Display Designation Functions
Data type Access
Unit min max default 
# Display Designation Functions
Data type Access
Unit min max default 
300 RemotePrio Remote priority 0 = no
1 = yes
0R 0 1
301 OpFluidDef Operating fluid deficiancy 0 = no
1 = yes
0R 0 1
302 SpdSwPtAtt Rotation speed switchpoint attained 0 = no
1 = yes
0R 0 1
303 Error code Error code 4R
304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes
0R 0 1
305 OvTempPump Excess temperature pump 0 = no
1 = yes
0R 0 1
306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
0R 0 1
307 PumpAccel Pump accelerates 0 = no
1 = yes
0R 0 1
308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999
309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999
310 DrvCurrent Drive current 2 R A 0 9999.99
311 OpHrsPump Operating hours pump 1 R h 0 65535 x
312 Fw version Firmware version electronic drive unit 4 R
313 DrvVoltage Drive voltage 2 R V 0 9999.99

20
The Pfeiffer Vacuum parameter set
7.2.5 Set value settings
7.3 Configuring the connections
The electronic drive unit is pre-configured in the factory. Thereby the turbopump is im-
mediately operational with the necessary functions. The connections of the electronic
drive unit can be configured to suit individual requirements using the parameter set.
314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x
315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999
316 DrvPower Drive power 1 R W 0 999999
319 PumpCycles Pump cycles 1 R 0 65535 x
324 TempPwrStg Temperature power stage 1 R °C 0 999999
326 TempElec Temperature electronic 1 R °C 0 999999
330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999
331 TMSactTemp active temperature of TMS heating 1 R °C 0 999999
333 TMS steady TMS temperature engaged 0 R 0 1
336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999
337 SealGasFlw Sealing gas flow 1 R sccm 0 999999
342 TempBearng Temperature bearing 1 R °C 0 999999
346 TempMotor Temperature motor 1 R °C 0 999999
349 ElecName Name of electronic drive unit 4 R
354 HW Version Hardware version electronic drive unit 4 R
360 ErrHist1 Error code history, pos. 1 4 R x
361 ErrHist2 Error code history, pos. 2 4 R x
362 ErrHist3 Error code history, pos. 3 4 R x
363 ErrHist4 Error code history, pos. 4 4 R x
364 ErrHist5 Error code history, pos. 5 4 R x
365 ErrHist6 Error code history, pos. 6 4 R x
366 ErrHist7 Error code history, pos. 7 4 R x
367 ErrHist8 Error code history, pos. 8 4 R x
368 ErrHist9 Error code history, pos. 9 4 R x
369 ErrHist10 Error code history, pos. 10 4 R x
384 TempRotor Temperature rotor 1 R °C 0 999999
397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999
398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999
399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
# Display Designation Functions
Data type Access
Unit min max default 
# Display Designation Functions
Data type Access
Unit min max default 
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x
701 SpdSwPt1 Rotation speed switchpoint 1 1 RW % 50 97 80 x
704 TMSsetTemp Temperature set value TMS heating 1 RW °C 30 75 40 x
707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x
708 PwrSVal Set value power consumption 7 RW % 10 100 1001x
710 Swoff BKP Switching off threshold backing pump in intermittend
mode
1 RW W 0 1000 0 x
711 SwOn BKP Switching on threshold backing pump in intermittend
mode
1 RW W 0 1000 0 x
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x
719 SpdSwPt2 Rotation speed switchpoint 2 1 RW % 5 97 20 x
720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x
721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x
730 PrsSwPt 1 Pressure switchpoint 1 10 RW hPa x
732 PrsSwPt 2 Pressure switchpoint 2 10 RW hPa x
739 PrsSn1Name Name sensor 1 4R
740 Pressure 1 Pressure value 1 10 RW hPa x
742 PrsCorrPi 1 Correction factor 1 2 RW x
749 PrsSn2Name Name sensor 2 4R
750 Pressure 2 Pressure value 2 10 RW hPa x
752 PrsCorrPi 2 Correction factor 2 2 RW x
777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x
791 SlgWrnThrs Sealing gas warning threshold 1 RW sccm 5 200 15 x
797 RS485Adr RS-485 device address 1 RW 1 255 1 x
1. depending on the pump type