Riken Keiki FP-300AGZS User manual

PT5E-0521
High Sensitivity Toxic Gas Monitor
FP-300AGZS
Operating Manual

- 1 - FP-300AGZS
Preface
Thank you for choosing our high sensitivity toxic gas monitor FP-300AGZS.
Please read and understand this operating manual thoroughly before use to operate the gas monitor
properly.
Note that the contents of this manual are subject to change without notice for product improvement. Also, any
copying or reproduction of this manual, in whole or in part, without permission is prohibited.
This manual uses following symbols to describe the degree of danger or damage caused by improper
handlings without adherence to instructions.
Definition of DANGER, WARNING, CAUTION, and NOTE
DANGER This message indicates that improper handling may cause serious damage on
life, health or assets.
W
ARNING This message indicates that improper handling may cause serious damage on
health or assets.
CAUTION This message indicates that improper handling may cause minor damage on
health or assets.
NOTE This message indicates advice on handling.

FP-300AGZS - 2 -
<Contents>
1 Outline of the Product .............................................................................................. 4
1-1. Overview ................................................................................................................. 4
1-2. Precautions ............................................................................................................. 5
2 Product Functions ................................................................................................... 8
2-1. List of accessories ................................................................................................... 8
2-2. Block diagram .......................................................................................................... 9
2-3. Outline drawing ....................................................................................................... 10
2-4. Part names .............................................................................................................. 11
2-4-1. Front panel .............................................................................................................. 11
2-4-2. Rear panel ............................................................................................................... 12
2-4-3. Operation panel ....................................................................................................... 13
3 How to Use .............................................................................................................. 14
3-1. Handling precautions for installation ........................................................................ 14
3-2. Tubing ..................................................................................................................... 15
3-3. Wiring ...................................................................................................................... 16
3-3-1. Precautions ............................................................................................................. 16
3-3-2. Terminal diagram ..................................................................................................... 16
3-4. Gas detection tape cassette .................................................................................... 17
3-4-1. Handling gas detection tape cassette ...................................................................... 17
3-4-2. Managing gas detection tape cassette .................................................................... 19
3-4-3. Returning gas detection tape cassette .................................................................... 19
4 How to Operate ....................................................................................................... 20
4-1. Preparation .............................................................................................................. 20
4-1-1. Check items ............................................................................................................. 20
4-1-2. Power input ............................................................................................................. 20
4-1-3. Power-on ................................................................................................................. 21
4-1-4. Attaching gas detection tape cassette ..................................................................... 21
4-1-5. Flow rate .................................................................................................................. 21
4-2. Operation ................................................................................................................. 22
4-3. Simple check of alarm setpoint ................................................................................ 23
5 Functions ................................................................................................................. 24
5-1. LCD display ............................................................................................................. 24
5-1-1. Display format ......................................................................................................... 24
5-1-2. Gas concentration display ....................................................................................... 25
5-2. Alarm function ......................................................................................................... 26
5-2-1. Gas alarm ................................................................................................................ 26
5-2-2. Alarm activation timing chart ................................................................................... 27
5-3. External output ........................................................................................................ 28
5-3-1. External output contact ............................................................................................ 28
5-3-2. External signal output (4 - 20 mA) ........................................................................... 30
5-3-3. External output operation ........................................................................................ 30
6 Maintenance ............................................................................................................ 31
6-1. Daily maintenance ................................................................................................... 31
6-2. Regular maintenance .............................................................................................. 31
6-3. How to replace gas detection tape cassette ............................................................ 31
6-4. Maintenance mode .................................................................................................. 32
6-4-1. Alarm test ................................................................................................................ 34
6-4-2. LCD contrast adjustment ......................................................................................... 35
6-5. List of recommended regular replacement parts ..................................................... 36

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7 Measures for Abnormalities ..................................................................................... 37
7-1. Self-diagnostic function ........................................................................................... 37
7-2. Causes and remedies for failure .............................................................................. 38
8 How to Stop Operation ............................................................................................ 39
9 Disposal of Products ................................................................................................ 40
10 Product Specifications ............................................................................................. 41
11 Detection Principle .................................................................................................. 43

1 Outline of the Product 1-1. Overview
FP-300AGZS - 4 -
1
Outline of the Product
1-1. Overview
Special material gases which are used in large quantities in semiconductor manufacturing process, are
highly toxic. Because leakage of these gases poses a danger to human body, Security Regulation for
General High-Pressure Gas requires facilities using these gases to install a gas detection and alarm
system.
A gas detector used for continuous monitoring of slight gas leakage from a gas cylinder room or production
line must be highly reliable and stable for a long time.
This gas monitor features highly reliable gas detection of low concentration gases and also long-term
stability by resetting (zero level) after a gas detection.
Main functions and features of the gas monitor are as follows:
 The gas monitor adopts a two-step alarm system consisting of precautionary alarm and main alarm.
 A cassette type gas detection tape can provide easier replacement.
 The specified performance of the gas monitor can be maintained by just replacing a cassette type gas
detection tape every other month.
 If the gas to be detected drawn by a pump makes contact with a gas detection tape, the tape will give a
color reaction according to the gas concentration. The rate of change in produced color (optical
reflectance change) before and after a gas contact is detected and converted into gas concentration.
 The gas monitor is little affected by interference gases like alcohol and hydrogen gas under its detection
principle.

1 Outline of the Product 1-2. Precautions
- 5 - FP-300AGZS
WARNING
Abnormal heat, smoke, sound or odor
In case any abnormality occurs during use, stop using the gas monitor immediately and turn the
power off. Continuing to use the gas monitor in such situations may cause electric shock or fire.
1-2. Precautions
CAUTION
Contact with edges of metal, etc.
Be very careful when you need to touch the edges of steel sheets, plastic parts, etc. for relocation or
other reasons.
WARNING
Shocks by dropping, etc.
Do not drop or give a shock by hitting, etc. to the gas monitor.
It may disturb the proper operation and gas detection of the gas monitor as it consists of precision
electronic parts.
WARNING
Use in locations with high temperature/humidity or dusty places
 Do not store or use the gas monitor in locations with high temperature/humidity or dusty places.
It may cause the gas monitor to malfunction, or electric shock or fire. Use the gas monitor within
the operating temperatures and humidities.
 When the gas monitor is exposed to large temperature difference, such as when moved from a
warm place to a cold place, condensation may be formed on the surface or inside the gas
monitor. Using the gas monitor in such condition cannot provide correct detection. It may also
result in failure. When the gas monitor is relocated, leave it in a new installation site for a few
hours to adjust it to the ambient temperature.
CAUTION
Use in unstable location
Do not install the gas monitor under unstable conditions, such as on an inclined surface, in a narrow
or vibrating area. It may cause the gas monitor to fall or topple during use, posing a risk of injury or
damage to the gas monitor.
WARNING
Connection of grounding wire
Connect the grounding wire to the grounding terminal to avoid a risk of electric shock.
Ignoring this may cause electric shock.

1 Outline of the Product 1-2. Precautions
FP-300AGZS - 6 -
WARNING
Power supply to be used
Make sure to use the gas monitor on the specified power voltage. Ignoring this may damage the gas
monitor or cause electric shock or fire.
WARNING
Overloaded electrical outlet
Avoid connecting many power plugs to the same electrical outlet which can cause overloading. Not
only does it pose a risk of fire, but it also affect other devices when the circuit breaker trips due to
overloading. Also, it makes the gas monitor vulnerable to noise from power source, thus causing
malfunction.
WARNING
Intrusion of foreign substances
Prevent metallic or flammable materials from entering inside of the gas monitor when replacing the
cassette, etc. Using the gas monitor with such material entered inside may cause malfunction,
electric shock or fire.
WARNING
Leaving object on gas monitor
For the tabletop type, do not place containers filled with water, such as vases and flower pots, or
small metallic objects like pins and clips on the gas monitor. Using the gas monitor with such object
entered inside may cause failure, electric shock or fire.
CAUTION
Use of gas detection tape cassette
 Store a gas detection tape cassette in the refrigerator without taking it out of the package. If it is
taken out of the package to store or left attached to the main unit of the gas monitor, the tape
may become discolored and unable to maintain the specified performance. After opening the
package, use the gas detection tape cassette as soon as possible.
 Indication accuracy cannot be guaranteed for those with expired storage period. Also, for safety
reasons, do not use such tape cassette.
 Since the special reagent is applied on the tape, do not touch it with bare hands. It does not
affect human body, but may cause deterioration of the detection performance or cut of the tape.
 The tape replacement cycle is 62 days under no-gas conditions. The replacement cycle is
shortened by detection of gas.
 The gas detection tape cassette is designed specifically for our gas monitors. Do not attempt to
install it to other devices. It may result in failure.
 When opening the package, slight discoloration may be seen depending on the tape type,
storage condition, etc., however, it does not affect the gas sensitivity.

1 Outline of the Product 1-2. Precautions
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CAUTION
Use after verifying that the reading on the flow rate indicator corresponds to the specified flow rate
(flow rate lamp lights in green)
If it does not correspond to the specified flow rate, gas detection cannot be performed properly.
Check if the flow rate is unstable or dropped.
WARNING
Condensation within tube
Condensation formed inside the tube causes clogging or gas adsorption, which may disturb
accurate gas detection. Thus, condensation must be avoided. In addition to the installation
environment, carefully monitor the temperature/humidity of the sampling point to prevent
condensation inside the tube. In particular, when detecting a gas which is dissolved into water and
corrodes contacted materials, such as a strong acid gas, the gas is undetectable and furthermore
may corrode internal parts. Please observe the operating restrictions.

2 Product Functions 2-1. List of accessories
FP-300AGZS - 8 -
2
Product Functions
2-1. List of accessories
The gas monitor is accompanied by the following accessories. Check these items when the gas monitor is
delivered.
 Gas detection tape cassette: 1
 Dust filter: 1
 Operating manual : 1

2 Product Functions 2-2. Block diagram
- 9 - FP-300AGZS
2-2. Block diagram
Tubing diagram
Flow
sensor
Pyrolyzer
heater
Filter
(Balston)
Sensor head
Electric block diagram
Sensor head
Light emitter
Light receiver
Preamplifier
Amplifier A/D conversion
I/O CPU
D/A conversion
LCD display
4 - 20 mA output
Status signal inputs
Flow sensor
Deck sensor
Fan
Others
Control signal outputs
Alarm contact output
Motor, heater, etc.
WARNING, ALARM,
Trouble