Riken Keiki FP-300AGZS User manual

PT5E-0521
High Sensitivity Toxic Gas Monitor
FP-300AGZS
Operating Manual

- 1 - FP-300AGZS
Preface
Thank you for choosing our high sensitivity toxic gas monitor FP-300AGZS.
Please read and understand this operating manual thoroughly before use to operate the gas monitor
properly.
Note that the contents of this manual are subject to change without notice for product improvement. Also, any
copying or reproduction of this manual, in whole or in part, without permission is prohibited.
This manual uses following symbols to describe the degree of danger or damage caused by improper
handlings without adherence to instructions.
Definition of DANGER, WARNING, CAUTION, and NOTE
DANGER This message indicates that improper handling may cause serious damage on
life, health or assets.
W
ARNING This message indicates that improper handling may cause serious damage on
health or assets.
CAUTION This message indicates that improper handling may cause minor damage on
health or assets.
NOTE This message indicates advice on handling.

FP-300AGZS - 2 -
<Contents>
1 Outline of the Product .............................................................................................. 4
1-1. Overview ................................................................................................................. 4
1-2. Precautions ............................................................................................................. 5
2 Product Functions ................................................................................................... 8
2-1. List of accessories ................................................................................................... 8
2-2. Block diagram .......................................................................................................... 9
2-3. Outline drawing ....................................................................................................... 10
2-4. Part names .............................................................................................................. 11
2-4-1. Front panel .............................................................................................................. 11
2-4-2. Rear panel ............................................................................................................... 12
2-4-3. Operation panel ....................................................................................................... 13
3 How to Use .............................................................................................................. 14
3-1. Handling precautions for installation ........................................................................ 14
3-2. Tubing ..................................................................................................................... 15
3-3. Wiring ...................................................................................................................... 16
3-3-1. Precautions ............................................................................................................. 16
3-3-2. Terminal diagram ..................................................................................................... 16
3-4. Gas detection tape cassette .................................................................................... 17
3-4-1. Handling gas detection tape cassette ...................................................................... 17
3-4-2. Managing gas detection tape cassette .................................................................... 19
3-4-3. Returning gas detection tape cassette .................................................................... 19
4 How to Operate ....................................................................................................... 20
4-1. Preparation .............................................................................................................. 20
4-1-1. Check items ............................................................................................................. 20
4-1-2. Power input ............................................................................................................. 20
4-1-3. Power-on ................................................................................................................. 21
4-1-4. Attaching gas detection tape cassette ..................................................................... 21
4-1-5. Flow rate .................................................................................................................. 21
4-2. Operation ................................................................................................................. 22
4-3. Simple check of alarm setpoint ................................................................................ 23
5 Functions ................................................................................................................. 24
5-1. LCD display ............................................................................................................. 24
5-1-1. Display format ......................................................................................................... 24
5-1-2. Gas concentration display ....................................................................................... 25
5-2. Alarm function ......................................................................................................... 26
5-2-1. Gas alarm ................................................................................................................ 26
5-2-2. Alarm activation timing chart ................................................................................... 27
5-3. External output ........................................................................................................ 28
5-3-1. External output contact ............................................................................................ 28
5-3-2. External signal output (4 - 20 mA) ........................................................................... 30
5-3-3. External output operation ........................................................................................ 30
6 Maintenance ............................................................................................................ 31
6-1. Daily maintenance ................................................................................................... 31
6-2. Regular maintenance .............................................................................................. 31
6-3. How to replace gas detection tape cassette ............................................................ 31
6-4. Maintenance mode .................................................................................................. 32
6-4-1. Alarm test ................................................................................................................ 34
6-4-2. LCD contrast adjustment ......................................................................................... 35
6-5. List of recommended regular replacement parts ..................................................... 36

- 3 - FP-300AGZS
7 Measures for Abnormalities ..................................................................................... 37
7-1. Self-diagnostic function ........................................................................................... 37
7-2. Causes and remedies for failure .............................................................................. 38
8 How to Stop Operation ............................................................................................ 39
9 Disposal of Products ................................................................................................ 40
10 Product Specifications ............................................................................................. 41
11 Detection Principle .................................................................................................. 43

1 Outline of the Product 1-1. Overview
FP-300AGZS - 4 -
1
Outline of the Product
1-1. Overview
Special material gases which are used in large quantities in semiconductor manufacturing process, are
highly toxic. Because leakage of these gases poses a danger to human body, Security Regulation for
General High-Pressure Gas requires facilities using these gases to install a gas detection and alarm
system.
A gas detector used for continuous monitoring of slight gas leakage from a gas cylinder room or production
line must be highly reliable and stable for a long time.
This gas monitor features highly reliable gas detection of low concentration gases and also long-term
stability by resetting (zero level) after a gas detection.
Main functions and features of the gas monitor are as follows:
 The gas monitor adopts a two-step alarm system consisting of precautionary alarm and main alarm.
 A cassette type gas detection tape can provide easier replacement.
 The specified performance of the gas monitor can be maintained by just replacing a cassette type gas
detection tape every other month.
 If the gas to be detected drawn by a pump makes contact with a gas detection tape, the tape will give a
color reaction according to the gas concentration. The rate of change in produced color (optical
reflectance change) before and after a gas contact is detected and converted into gas concentration.
 The gas monitor is little affected by interference gases like alcohol and hydrogen gas under its detection
principle.

1 Outline of the Product 1-2. Precautions
- 5 - FP-300AGZS
WARNING
Abnormal heat, smoke, sound or odor
In case any abnormality occurs during use, stop using the gas monitor immediately and turn the
power off. Continuing to use the gas monitor in such situations may cause electric shock or fire.
1-2. Precautions
CAUTION
Contact with edges of metal, etc.
Be very careful when you need to touch the edges of steel sheets, plastic parts, etc. for relocation or
other reasons.
WARNING
Shocks by dropping, etc.
Do not drop or give a shock by hitting, etc. to the gas monitor.
It may disturb the proper operation and gas detection of the gas monitor as it consists of precision
electronic parts.
WARNING
Use in locations with high temperature/humidity or dusty places
 Do not store or use the gas monitor in locations with high temperature/humidity or dusty places.
It may cause the gas monitor to malfunction, or electric shock or fire. Use the gas monitor within
the operating temperatures and humidities.
 When the gas monitor is exposed to large temperature difference, such as when moved from a
warm place to a cold place, condensation may be formed on the surface or inside the gas
monitor. Using the gas monitor in such condition cannot provide correct detection. It may also
result in failure. When the gas monitor is relocated, leave it in a new installation site for a few
hours to adjust it to the ambient temperature.
CAUTION
Use in unstable location
Do not install the gas monitor under unstable conditions, such as on an inclined surface, in a narrow
or vibrating area. It may cause the gas monitor to fall or topple during use, posing a risk of injury or
damage to the gas monitor.
WARNING
Connection of grounding wire
Connect the grounding wire to the grounding terminal to avoid a risk of electric shock.
Ignoring this may cause electric shock.

1 Outline of the Product 1-2. Precautions
FP-300AGZS - 6 -
WARNING
Power supply to be used
Make sure to use the gas monitor on the specified power voltage. Ignoring this may damage the gas
monitor or cause electric shock or fire.
WARNING
Overloaded electrical outlet
Avoid connecting many power plugs to the same electrical outlet which can cause overloading. Not
only does it pose a risk of fire, but it also affect other devices when the circuit breaker trips due to
overloading. Also, it makes the gas monitor vulnerable to noise from power source, thus causing
malfunction.
WARNING
Intrusion of foreign substances
Prevent metallic or flammable materials from entering inside of the gas monitor when replacing the
cassette, etc. Using the gas monitor with such material entered inside may cause malfunction,
electric shock or fire.
WARNING
Leaving object on gas monitor
For the tabletop type, do not place containers filled with water, such as vases and flower pots, or
small metallic objects like pins and clips on the gas monitor. Using the gas monitor with such object
entered inside may cause failure, electric shock or fire.
CAUTION
Use of gas detection tape cassette
 Store a gas detection tape cassette in the refrigerator without taking it out of the package. If it is
taken out of the package to store or left attached to the main unit of the gas monitor, the tape
may become discolored and unable to maintain the specified performance. After opening the
package, use the gas detection tape cassette as soon as possible.
 Indication accuracy cannot be guaranteed for those with expired storage period. Also, for safety
reasons, do not use such tape cassette.
 Since the special reagent is applied on the tape, do not touch it with bare hands. It does not
affect human body, but may cause deterioration of the detection performance or cut of the tape.
 The tape replacement cycle is 62 days under no-gas conditions. The replacement cycle is
shortened by detection of gas.
 The gas detection tape cassette is designed specifically for our gas monitors. Do not attempt to
install it to other devices. It may result in failure.
 When opening the package, slight discoloration may be seen depending on the tape type,
storage condition, etc., however, it does not affect the gas sensitivity.

1 Outline of the Product 1-2. Precautions
- 7 - FP-300AGZS
CAUTION
Use after verifying that the reading on the flow rate indicator corresponds to the specified flow rate
(flow rate lamp lights in green)
If it does not correspond to the specified flow rate, gas detection cannot be performed properly.
Check if the flow rate is unstable or dropped.
WARNING
Condensation within tube
Condensation formed inside the tube causes clogging or gas adsorption, which may disturb
accurate gas detection. Thus, condensation must be avoided. In addition to the installation
environment, carefully monitor the temperature/humidity of the sampling point to prevent
condensation inside the tube. In particular, when detecting a gas which is dissolved into water and
corrodes contacted materials, such as a strong acid gas, the gas is undetectable and furthermore
may corrode internal parts. Please observe the operating restrictions.

2 Product Functions 2-1. List of accessories
FP-300AGZS - 8 -
2
Product Functions
2-1. List of accessories
The gas monitor is accompanied by the following accessories. Check these items when the gas monitor is
delivered.
 Gas detection tape cassette: 1
 Dust filter: 1
 Operating manual : 1

2 Product Functions 2-2. Block diagram
- 9 - FP-300AGZS
2-2. Block diagram
Tubing diagram
Flow
sensor
Pyrolyzer
heater
Filter
(Balston)
Sensor head
Electric block diagram
Sensor head
Light emitter
Light receiver
Preamplifier
Amplifier A/D conversion
I/O CPU
D/A conversion
LCD display
4 - 20 mA output
Status signal inputs
Flow sensor
Deck sensor
Fan
Others
Control signal outputs
Alarm contact output
Motor, heater, etc.
WARNING, ALARM,
Trouble

2 Product Functions 2-3. Outline drawing
FP-300AGZS - 10 -
2-3. Outline drawing
Tape cassette housing
Tape cassette
Required dimension for tape removal
Required
dimension
for tape
removal
Display Operation area
Required dimension
for maintenance
Rubber foot (four)

2 Product Functions 2-4. Part names
- 11 - FP-300AGZS
2-4. Part names
2-4-1. Front panel
(1) Operation panel: Provide various operations and display. See "2-4-3. Operation panel".
(2) Cassette tray: Hold a gas detection tape cassette.
(2)
(1)

2 Product Functions 2-4. Part names
FP-300AGZS - 12 -
2-4-2. Rear panel
(3) POWER switch: Turn ON/OFF the power.
(4) Terminal plate for external connection: See “3-3-2. Terminal diagram”.
(5) GAS IN half-union: Connect an O.D Φ 6 mm Teflon tube.
(6) GAS OUT half-union: Connect an O.D Φ 6 mm Teflon tube.
(7) Fuse: 3A x 2 pcs
(8) Fan
(6) (5) (8)
(7)
(3)
(4)

2 Product Functions 2-4. Part names
- 13 - FP-300AGZS
2-4-3. Operation panel
(9) POWER/TROUBLE lamp: Green lamp
Lights up continuously in normal condition (gas detection state) and
blink when a trouble occurs.
(10) WARNING lamp: Yellow lamp
(Precautionary alarm) Goes out in normal condition.
Blinks or lights up when alarm is triggered.
(11) ALARM lamp: Red lamp
(Main alarm) Goes out in normal condition.
Blinks or lights up when alarm is triggered.
(12) FLOW lamp: Green/orange/red lamp
Normal flow rate: Lights in green continuously
Unstable flow rate: Lights in orange continuously.
Flow rate dropped: Lights in red continuously.
(13) Buzzer: Main alarm: Continuous sound (continuous beep)
Precautionary alarm: Intermittent sound (beep, beep)
Switch operation: Single short sound (blip)
(14) MODE switch: When pressed and held over three seconds in gas detection state, the
maintenance mode which provides alarm test, etc. is entered.
(15)  (UP) switch:  Increases the flow rate when pressed in gas detection state.
(When the flow rate auto-adjustment is OFF)
 When pressed in maintenance state, the mode selection becomes
available.
(16)  (DOWN) switch:  Decreases the flow rate when pressed in gas detection state.
(When the flow rate auto-adjustment is OFF)
 When pressed in maintenance state, the mode selection becomes
available.
(17) BZ STOP switch: When pressed after alarm is triggered, buzzer sound stops and the
alarm lamps ((10), (11)) change from blinking to lighting up
continuously.
(18) LAMP RESET switch:  When pressed after pressing the buzzer stop switch ((17)) during
an alarm activation, the alarm lamps ((10), (11)) go out with the gas
concentration settles below the alarm setpoint and the external
output contact is deactivated.
 When pressed while more than one trouble occurs on the gas
monitor, details of the troubles can be checked in turn. (See
“7-1. self-diagnostic function”.)
 When pressed in gas detection state, an alarm setpoint will be
displayed on LCD ((20)).
(19) EJECT switch: Pressing and holding this switch for about two seconds opens the
cassette tray on the front side of the main unit for removing/attaching a
gas detection tape cassette.
(20) LCD: Displays various comments including detection gas concentration.
(10) (11) (15) (14) (17) (18) (12) (9)
(13)
(20) (16) (19)

3 How to Use 3-1. Handling precautions for installation
FP-300AGZS - 14 -
CAUTION
Do not hold the cassette tray to lift or carry the gas monitor. It may damage the cassette tray and
cause the gas monitor to fall, resulting in breakage or injury.
3
How to Use
3-1. Handling precautions for installation
(1) Hold the handle on the top to lift or carry the gas monitor.
(2) For the gas monitor, select an installation site easily accessible and viewable during an alarm activation
and comfortable for gas detection tape cassette replacement, flow adjustment and maintenance work.
(3) Do not install the gas monitor in the following locations. Ignoring this may result in failure or accident.
 Places exposed to direct sunlight
 Dusty or dump places
 Places exposed to direct wind
 Places with frequent vibrations
 On unstable or inclined surfaces
 Outdoors or places exposed to water
WARNING
Do not place containers filled with water, such as vases and flower pots, or small metallic objects
like pins and clips on the gas monitor. Using the gas monitor with such object entered inside may
cause failure, electric shock or fire.
WARNING
 Do not store or use the gas monitor in locations with high temperature/humidity or dusty places.
It may cause the gas monitor to malfunction, or electric shock or fire.
 When the gas monitor is exposed to large temperature difference, such as when moved from a
cold place to a warm place, condensation may be formed on the surface or inside of the gas
monitor. Using the gas monitor in such condition cannot provide correct detection. It may also
result in failure.
When the gas monitor is relocated, leave it in a new installation site for a few hours to adjust it to
the ambient temperature.

3 How to Use 3-2. Tubing
- 15 - FP-300AGZS
(4) The gas monitor consists of precision electronic parts. Install it on a level surface in a safe place, with
care not to drop or hit it against something.
(5) Avoid noise from a large-capacity transformer, motor or driving power source, or devices generating
high voltage.
(6) To prevent malfunction caused by radio disturbance, a transceiver or mobile phone should be used at
least 1 m away from the gas monitor.
3-2. Tubing
(1) For both In and OUT, the tube must be no longer than 20 m.
(2) Use an O.D Φ 6 mm Teflon tube.
(3) The tube from GAS OUT must be connected to the specified exhaust duct.
(4) Attach the provided filter to GAS IN before connecting a tube.
CAUTION
Do not install the gas monitor under unstable conditions, such as on an inclined surface, in a narrow
or vibrating area. It may cause the gas monitor to fall or topple during use, posing a risk of injury or
damage to the gas monitor.
WARNING
Do not drop or give a shock by hitting, etc. to the gas monitor. It may disturb the proper operation
and gas detection of the gas monitor as it consists of precision electronic parts.
CAUTION
 For adsorptive gases, the appropriate tube length varies depending on the degree of adsorption.
 For more information about adsorptive property of gases and tube length, please contact RIKEN
KEIKI.

3 How to Use 3-3. Wiring
FP-300AGZS - 16 -
3-3. Wiring
3-3-1. Precautions
(1) Use a shielded cable (CVVS cable, etc.) for signal cables like current output to minimize the influence
of noise.
(2) Turn the power switch OFF ( side) before wiring. If wiring is performed with the power switch turned
on, the gas monitor may be damaged by short circuit, etc.
3-3-2. Terminal diagram
[1] Precautionary alarm (WARNING) output ............ No-voltage contact ("c" contact)
[2] Main alarm (ALARM) output ............................... No-voltage contact ("c" contact)
[3] Fault alarm (TROUBLE) ..................................... No-voltage contact ("c" contact)
[4] Current output (4 - 20 mA) .................................. Pay attention to the polarity.
Concentrations between 0 and F.S. are output to the linear.
0: 4 mA
F.S.： 20 mA
Trouble: 0.5 mA
Initial clear: 2.5 mA
Maintenance: 2.5 mA
Gas concentrations over F.S. can be output up to 22 mA.
[5] Power input ......................................................... 100 - 240 VAC
Each alarm contact is rated at 125 VAC 0.5 A. Depending on the load to be connected, a protective part like
spark killer may be required to maintain the performance.
Layout of external connection terminal plate
Current output
(4-20 mA)
[4]
(Not used)
Precautionary alarm
(WARNING)
[1]
Main alarm
(ALARM)
[2]
Fault alarm
(TROUBLE)
[3]
Power input
(100 - 240 VAC)
[5]

3 How to Use 3-4. Gas detection tape cassette
- 17 - FP-300AGZS
3-4. Gas detection tape cassette
The gas detection tape cassette (FC type) is designed specifically for the gas monitor.
Understand the following information thoroughly before use.
3-4-1. Handling gas detection tape cassette
Since the special reagent is applied on the detection tape, do not touch it with bare hands. It does not harm
human body, but may cause deterioration of the detection performance or cut of the tape.
The gas detection tape cassette should be used within two months. Indication accuracy of the detection
tape after two months from opening the package cannot be guaranteed. For safety reasons, do not use
such detection tape.
NOTE
Specify the start date of using a gas detection tape cassette.
Make sure to record the start date of use since it helps to remember the timing of detection tape
replacement.
The detection tape varies depending on the detectable gas. Check for the specified model of the detection
tape before use.
Gas detection cannot be performed with a detection tape of inappropriate model.
The appropriate model of detection tape is displayed on LCD while the cassette tray is opened.
CAUTION
Do not touch the detection tape.
WARNING
Do not use a gas detection tape cassette that has passed its expiration date.
Record here
Record the start date of use.
CAUTION
Use the gas detection tape cassette of the specified model.
CAUTION
Check the display on the gas monitor every day to replace the gas detection tape cassette without
fail.

3 How to Use 3-4. Gas detection tape cassette
FP-300AGZS - 18 -
 The replacement cycle of gas detection tape cassette is 62 days under no-gas conditions. The
replacement cycle is shortened by detection of gas because tape feed is executed.
Also, removing/attaching the gas detection tape cassette unnecessarily or turning ON/OFF the power
consumes the tape, resulting in shortened replacement cycle. If possible, use a new gas detection tape
cassette and use it up.
 Note that if the gas detection tape cassette is repeatedly removed and attached unnecessarily, the
indication of remaining amount becomes inaccurate.
 When the indication of remaining days for the detection tape becomes two days, the message
"CHANGE TAPE" is displayed on LCD, and the POWER/TROUBLE lamp blinks to prompt the operator
to replace the detection tape. When the detection tape is used up completely, "TAPE END" is displayed.
Since gas detection cannot be performed, replace the detection tape promptly.
 See "6-3 How to replace gas detection tape cassette" when attaching the gas detection tape cassette to
the main unit.
The gas detection tape cassette (FC type) is designed specifically for the gas monitor.
Do not attach it to other devices. Also, do not rewind and use the gas detection tape cassette.
When you turn the tape winding part with your hand to make the tape tight or for other reasons, be careful
not to apply excessive force or stretch the tape too much. The detection tape may be cut. In principle, the
tape winding part should not be turned.
CAUTION
Do not insert the gas detection tape cassette into devices other than the specified gas monitor.
CAUTION
Do not apply excessive force to the detection tape.
CAUTION
When opening the package, slight discoloration may be seen depending on the detection tape type,
storage condition, etc., however, it does not affect the gas sensitivity.

3 How to Use 3-4. Gas detection tape cassette
- 19 - FP-300AGZS
3-4-2. Managing gas detection tape cassette
The detection tape is extremely delicate. Inappropriate management impairs the detection tape
performance and disturbs accurate gas detection. Understand the following instructions for management
thoroughly before storing the detection tape.
Even though a gas detection tape cassette, which has been taken out of the package, is returned in the
package and stored in the refrigerator, do not use it after two months. The detection tape may be
deteriorated and unable to maintain the specified performance.
 Attach and use up the gas detection tape cassette within the storage period specified on the package.
The detection tape with expired storage period may be deteriorated and unable to maintain the specified
performance.
 If it is taken out of the package to store or left attached to the main unit of the gas monitor inadvertently
or for storage purpose, the detection tape may become discolored and unable to maintain the specified
performance. Therefore, after opening the package, use it as soon as possible.
3-4-3. Returning gas detection tape cassette
Please return the used tape with case to us. We dispose it properly at our end.
CAUTION
Store a gas detection tape cassette in the refrigerator without taking it out of the package. Be careful
not to put it in the freezer.
CAUTION
Once a gas detection tape cassette is taken out of the package, do not store it.
CAUTION
Use the gas detection tape cassette within the specified storage period.