Shimadzu iMLayer User manual

ZEBV-5088C
Matrix Vapor Deposition System
iMLayer
Pre-Installation Requirements
（InstallationPreparations/Confirmation）

ZEBV-5088C
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Notice
(1) All rights are reserved, including those to reproduce this manual or parts thereof in any form without
permission in writing from Shimadzu Corporation.
Copyright 2018 Shimadzu Corporation
(2) Information in this manual is subject to change without notice and does not represent a commitment on
the part of the vendor.
(3) Any errors or omissions which may have occurred in this manual despite the utmost care taken in its
production will be corrected as soon as possible, although not necessarily immediately after detection.

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Contents
1. INTRODUCTION ·····················································3
2. INSTALLATION CONDITIONS ···································4
2.1Carry-in route ..............................................................................4
2.2Exampleinstallation ...................................................................5
2.3Wiring andPiping .......................................................................7
2.4AmbientRequirements ..............................................................7
2.5RequiredPowerSupply .............................................................8
3. Customer pre-check list ....................................................10

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1. Introduction
These Pre-Installation Requirements describe the requirement to facilitate installation of the iMLayer. To
keep the instrument stable, please make prior arrangement in accordance with these requirements. They
can also be used for routine maintenance. This instrument consists of a main unit used for vapor
deposition of the matrix, a deposition power supply used to supply power to the boat for vapor deposit, and
a vacuum pump used to evacuate the inside the chamber of iMLayer.

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2. Installation Conditions
Be sure to read the installation precautions described below to keep the instrument stable. Also, follow the
precautions given in the Safety Precautions of the instruction manual that came with the instrument.
2.1 Carrying-in
The instrument can be carried on a hand truck. Check the following points so that delivery can be carried
out without problems.
1) Check that there is no step the passage.
2) When lifting the iMLayer, be sure to wear non-slip gloves and to work by more than two persons.

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2.2 Example Installation (dimensions indicated in mm)
Frontview
Topview
Fig.1Typical LayoutUsing aTypical Draft chamber.
650（開口）
610
230
510
（980）
1
2
4
3
5
416
150
壁
430
(1000)
150 296
150
450
305
390
660（庫内有効奥行）
382
100
650(opening)
Wall
660(inside depthof thefumehood)

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Teble.1DimensionsandWeight
Item
Item name
Dimensions(mm)
Weight(kg)
number
Width
Depth
Height
1
MainiMLayerunit
416
450
610
80
2
DepositionPowersupply(EVC)
296
390
230
28
3
Rotarypump
163
431
230
30
4
Draftchamber（typical）*
-
-
-
-
5
Table(forreference)
300
500
750
‐
*The opening needs to be 650mm or more.
Projection is not included in the dimensions.
In the example installation given in Fig. 1, iMLayer is installed on the existing draft chamber, and
the deposition power supply and the rotary pump are placed on the table which has been prepared
separately. The specifications required for the table is as follows.
Width : 500mm or more
Depth : 300mm or more
Height : 750mm or more
Load limit : 40kg or more (Each step)
Distance between iMLayer and deposition power supply must be within approx. 2.8 m.
Distance between iMLayer and rotary pump must be within approx. 2 m.
The specifications required for the draft chamber is as follows. See also Fig 1 Example Installation.
Inside depth of the draft chamber : 660mm or more
Inside width of the draft chamber : 1000mm ore more
Height of opening (front glass) : 650mm ore more
Load limit (Inside floor) : 100kg ore more
Minimum local exhaust air velocity : 1m/s ore more
A certain amount of space is required around the iMLayer for installation and maintenance. The
space required is as follows. See also Fig 1 Example Installation.
Space behind the iMlayer : 150mm or more
Space to right of the iMlayer : 430mm or more
Space to left of the iMlayer : 150mm or more
Space in front of the iMLayer : 305mm or more
Space behind the deposition power supply : 100mm or more
Space to right and left of the deposition power supply : 100mm or more
Place rotary pump on a firm floor surface or on a low working surface at a distance where it can be
connected to the iMLayer by attached piping. (Extending piping to a distance greater than this will
prevent assurance of unit performance.) The rotary pump will be placed on the side of or under the
draft chamber on which iMLayer is installed. When placing the rotary pump on the side of the draft
chamber, for wiring and piping, ensure a distance of 150 mm or more between the side of the rotary
pump and the side of the draft chamber.

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2.3 Wiring and Piping
Connection of power supply, cables, etc. of the iMLayer, is shown in Fig 2.
Fig2iMLayercableconnection
Table2cableconnectioninformation
Item
number
Description
Length(m)
1
Powersupplycable(Tothedepositionpowersupply)
2.8
2
Interfacecable
2.8
3
RS-422/485cable
2.8
4
Depositionboattemperaturesignalcable
2.8
5
HeatercableNo1(Red)
2.8
6
HeatercableNo1(Blue)
2.8
7
ACcable
2.5
8
RP powersupplycable
2.0
9
RPevacuationhose
3
10
RPsuctionhose
3
2.4 Ambient Requirements
To ensure safe use of the product, sufficient consideration must be given to preparing its installation
environment
Temperature : 18 to 28°C
Humidity : 40 to 70% (with no condensation)
Draft chamber : Prepare a draft chamber or equivalent exhaust equipment in the room the
instrument is installed. Failure to do so may cause dispersion of the matrix when
opening the equipment to the air after vapor deposition. Also wear safety gear
during the process.
12
3
4
5
6
7
8
9
To power supply
To evacuation duct
10

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Safety gear Some matrices used contain toxic materials. Wear safety glasses, face shield,
protective gloves, mask and protective clothing such as a white coat during the
process. Use a Dustproof / Gasproof mask to prevent inhaling the matrix dust.
Exhaust Be sure to discharge the evacuation gases from the rotary pump into a duct system
such as a draft chamber.
Other Be sure to read “Safety Instructions” of the instruction manual before using this
instrument.
2.5 Required Power Supply
For safety reasons use a power supply equipped with a ground fault interrupter.
The iMLayer uses 100 VAC, 15A, 50/60 Hz (single phase). Avoid sharing power source with other
equipment.
To avoid electric shock, ensure grounding at power supply ground terminal has a resistance of 100 ohm
or less.
To assure performance, keep voltage fluctuation within ±10% and frequency stability within ±1 Hz.
In the country where power supply voltage is not AC100V, use a step-down transformer on the AC100V
power-supply line. Refer Fig.4 to install the step-down transformer.
Ifpowersuppliesoftheabovespecificationsarenotavailable,alterationstoroompowersupplycapacity
willbenecessary.
<Step-downtransformer>
Partnumber
Description
Remarks
225-25315-41
STEP-DOWNTRANSFORMER1.5KVA
The Step- down transformer and
cablesareincluded.
(Pleaseprepareaplug.)
*Thenumber 225-25315 -41 referstotheShimadzuCorporationpartnumber
Fig 3Configurationof AC100Vpower supplycable terminal

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Fig 4Howtoinstallthestep-downtransformer,TBX-1.5KVA
OUT IN
Blue(N)
240V
230V
220V
200V
0
100V
0
a
b
P
S
Brown(L)
Yellow/Green(E)
Blue(N)
Brown(L)
Black
Earth Terminal
(Inside)
To iMScope AC100V in
To power supply
Earth Terminal
(Outside)
225-25316
STEP-DOWN TRNASFORMER 1.5K
225-25317-41
CABLE ASSY, IMSCOPE PS1
225-25319-41
CABLE ASSY, IMSCOPE PS3
225-25318-41
CABLE ASSY, IMSCOPE PS2
225-25320-41
CABLE ASSY, IMSCOPE EARTH To protective earth
Connects to either 240V, 230,V 220V, or 200V
terminal according to power supply voltage
iMLayer

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Customer pre-check list
(YYYY) (MM) (DD)
The sheets on the following pages are a checklist for each of the installation conditions that have been described
in this document. Please fill out the checklist yourself and pass it on to the appropriate personnel at Shimadzu.
Customer：
Address：
TEL：
FAX：
CheckedbyShimadzu
Name：

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Item
Condition
Required itme
（* refers to Shimadzu
part number ）
Check
1. Carry-in route
・The instrument must be movable in the
building.
・There is no step in the passage.
□
2.
Installation
room
Temperature
18 to 28°C
□
Humidity
40 to 70% (with no condensation)
□
Installation space
Space for iMLayer
Load limit
Table for
deposition power
supply
・W D H
1000 mm ×905 mm ×610 mm
・Ability to withstand weight loads
adequately. (80kg)
・The table must be wide enough so that
the equipment can be placed according
to the example installation.
・Table for deposition
power supply
□
Facilities
・Evacuation
・Draft chamber
・Draft chamber or equivalent exhaust
equipment is required
・Requires meeting the following
specifications.
Inside depth of the draft chamber
: 660mm or more
Inside width of the draft chamber
: 1000mm ore more
Height of opening (front glass)
: 650mm ore more
Load limit (Inside floor)
: 100kg ore more
Minimum local exhaust air velocity
: 1m/s ore more
・Draft chamber
□
Power
supply
Power supply
fluctuation
(guaranteed
performance)
・Voltage fluctuation
・Frequency fluctuation
・Within ±10% of voltage rating
・50/60Hz, ±1 Hz
□
Power capacity
・For iMLayer
・Ground (ground
resistor)
・AC100V 15A 50/60Hz (single phase)
* Avoid sharing power source with other
equipment.
・Less than 100 ohms
(Depending onthe situation)
・Transformer on the
AC100V power-supply
line for oversea use.
STEP-DOWN
TRANSFORMER
1.5KVA
P/N 225-25315-41*
・Plug for Step-down
transformer.
・100 VAC extension cable
(For oversea use, prepare
what is appropriate based
on the local power supply
condition
□
Terminal
・For iMLayer
・AC100V：2.5m
□