
HEC-OM-P008
Table of Contents
1
Table of Contents
Chapter 1 Safety Instructions ...............................................................1-1
1.1 Dangers, Warnings, and Cautions Used in This Manual........................................1-1
1.1.1 Hazard Levels........................................................................................................................ 1-1
1.1.2 Definitions of “Serious injury” and “Minor injury” ................................................................... 1-2
1.1.3 Symbols ................................................................................................................................. 1-2
1.2 Warning labels and Caution label.............................................................................1-4
1.2.1 Location of Warning label and Caution label ......................................................................... 1-4
1.3 Location of Model No. label ......................................................................................1-4
1.4 Safety Measures.........................................................................................................1-5
1.4.1 Precautions............................................................................................................................ 1-5
1.4.2 Protective Equipment............................................................................................................. 1-6
1.4.3 Long-term Storage ................................................................................................................. 1-6
1.4.4 Disposing of Product.............................................................................................................. 1-7
1.5 Precaution for running (safety interlock) ................................................................1-7
Chapter 2 Description and Function of Each Part ..............................2-1
2.1 Description of Thermo Electric Bath........................................................................2-1
2.2 Description of detail functions .................................................................................2-2
2.2.1 High/Low Temp. Alarm Function............................................................................................ 2-2
2.2.2 Offset Function....................................................................................................................... 2-2
2.2.3 Set Value Memory (EEPROM back-up) ................................................................................ 2-3
2.2.4 Alarm Stop Function .............................................................................................................. 2-3
2.2.5 Controller Alarm ..................................................................................................................... 2-4
2.2.6 Serial Communication Function............................................................................................. 2-4
Chapter 3 Transporting and Installation ..............................................3-1
3.1 Transporting...............................................................................................................3-1
3.2 Installation..................................................................................................................3-2
3.2.1 Installation Conditions............................................................................................................ 3-2
3.2.2 Installation in Clean Room..................................................................................................... 3-3
3.2.3 Pollution Degree .................................................................................................................... 3-3
3.2.4 Ventilation requirement .......................................................................................................... 3-4
3.3 Wiring..........................................................................................................................3-5
3.3.1 Power Source Specification................................................................................................... 3-5
3.3.2 Power Supply Cable and Connector ..................................................................................... 3-5
3.3.3 Grounding .............................................................................................................................. 3-6
3.3.4 Alarm output and Communication Connectors...................................................................... 3-6
3.4 Bath Liquid .................................................................................................................3-7
3.4.1 Preparation of Bath Liquid ..................................................................................................... 3-7
3.4.2 Filling Bath Liquid .................................................................................................................. 3-8