Ulvac PRC-003A User manual

YO99-0874-DI-002-18
Instruction Manual
Mechanical Booster Pump
Model
PRC-003A
PRC-006A
PRC-012A
PRC-018A
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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i
0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is exactly what
you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the product in
safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations relating to
the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you use the
product. Consequently you shall be requested to attend general safety lectures officially effective in the
area, such as electrical safety, Cargo handling safety and so on. Note that any person not attended such
lectures shall be restricted from handling the product. Operators shall need to attend such kind of training
and have special knowledge, skill and title regarding the electricity, machinery, cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together did not
conform to same regulations or the product itself was modified. ULVAC shall be not liable to guarantee
performance and safety in such cases above. Any modification of the product by the user is out of the
scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before installing or
removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of the shipment
but shall not survive eternally. Any of the parts cannot, under any application supposed under
socially-accepted idea, help but inevitably deteriorate its performance and get easily result in causing
trouble of the product. You are kindly requested consequently to take your application situation into
consideration and help yourself to implement the protective maintenance so as to avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble due to
wear and/or failure of the part and bring reducing the occurrence of the downtime caused by the product
trouble and fire as well as a risk of affecting the another process.
Please do not hesitate to contact our sales office or agency closest to you or the Components Division if
you had any question or unclear on the use.

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0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear items to
observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
If the user makes a mistake in handling, it indicates an imminent possibility
that the user is subject to death or heavy injury.
DANGER
If the user makes a mistake in handling, it indicates a possibility that the user
is subject to death or heavy injury.
WARNING
If the user makes a mistake in handling, it indicates a possibility
that the user is subject to moderate injury or it leads to significant damage of
the machine. It indicates a possibility that damage of the machine is caused
and the normal operation is impaired.
CAUTION
[IMPORTANT] description shall be given where there is particular information
to notice for the operation or maintenance work of the product.
IMPORTANT
Training for the electrical safety is required as there is a risk of electrical
shock.
Check and ensure that the pump is sufficiently cooled down as this section
keeps high temperature after having stopped the pump.

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iii
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be restricted on
the use of the product.
Use of this product and this Instruction Manual.
Please read this Instruction Manual before starting installation, operation
check or maintenance of this product to use it in long term. You are requested
to fully understand the safety precautions, specifications and operation
methods of the product.
DANGER
Use of the toxic, combustible or combustion susceptible gas and substance
other than inactive gas is not allowed as there is a risk of causing fire or
explosion inside the Pump unit if it was exhausted by the vacuum pump.
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas was
sucked in the vacuum pump. Pay attention to execute maintenance work.
DANGER
We would be obliged to refrain from handling and/or executing maintenance of
the product if the detail of used hazardous substance was not disclosed or the
product has exhausted such substance that the detoxification process is
hardly conducted.
WARNING
You are kindly requested to acknowledge that specifications and/or price of
the product and description of the Instruction Manual are subject to change
without prior notice for improvement.
Any change shall update the version number at the top right of the Instruction
Manual cover and issue the revised version.
WARNING
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from the
Pump unit if it was exhausted by the vacuum pump.
DANGER

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Installation and storage
This Instruction Manual shall absolutely need to be delivered to the last user
that uses the product.
WARNING
To export this product abroad, you have to clear the examination in
accordance with the Foreign Exchange law, Foreign Trade law and relevant
decree, ordinance and order.
Please feel free to contact our sales office or agency closest to you or our
Components Division.
WARNING
Any part of this Instruction Manual shall be in no manner reproduced for the
third party without our approval.
CAUTION
(1) This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
(2) Give the instruction them further to use the unloading machinery such as
crane to take out the product of the wooded frame, lift it up with its top
eyebolt and transfer it on lifting. Check the eyebolt whether it has no error
before use.
(3) Only the technically entitled person should be in charge of conducting the
unloading operation and operating the unloading machinery.
(4) There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You are
strictly restricted to enter beneath the Pump.
(5) Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
WARNING

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Transfer
Countermeasure to the earthquake
Inlet piping <Mounting>
Coolant piping <Mounting>
Power Supply wiring <Mounting>
You have a risk of giving damage to your back as the load larger than safety
standard shall be required to transfer the product.
Be sure to use the loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its
transfer.
WAR
NING
There is a risk that the Pump lays down or slides and breaks peripheral units if
it was not correctly fixed. Be sure to give allowances to the vacuum piping,
cooling piping, and electric cables so that they absorber vibrations to prevent
them from breaking and/or dismantling.
WARNING
●Check and ensure that any of hazardous energy is blocked before starting
the operation.
WARNING
●Check and ensure that any of hazardous energy is blocked before starting
the operation.
WARNING
●Check and ensure that any of hazardous energy is blocked before starting
the operation.
●Entitled staff should conduct the wiring operation. Erroneous wiring work
might cause a fire.
●Conduct the wiring operation correctly in compliance with laws and rules
concerning the safety (e.g. Fire Defense Law, Electric Equipment
Technology standard, Internal line cord) in the country and region you use
the product.
●Ensure to have a correct grounding.
●You are recommended further to install a dedicated Leak breaker. You have
a risk of getting electrical shock in case of failure or electric leakage.
●It is imperative to put the Overload protection device. Otherwise it would
cause the motor burn out and/or fire.
Voltage drop calculation：
√3 ×wire resistance (Ω/ km) ×Wiring length (m) ×motor rated current (A) ×10-3
※motor rated current, refer to "Table 3 Performance specifications "
WARNING

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vi
Operation
●Do not run the Pump on blocking the exhaust outlet or putting any device
that might hamper gas passage onto the outlet. There is a risk that the
pressure inside the Vacuum pump rises up to cause break or oil leak of the
casing or Oil level gauge resulting in overload of the motor.
●This product is not made as the withstand pressure structure. Ensured
pressure value of the Pump shall be 0.03MPa (0.3kgf/cm2) (Gauge
pressure).
WARNING
●Do not operate the Pump in hazardous area (where there is a risk of creating
hazardous atmosphere by explosive gas). It might cause injury and/or fire.
WARNING
●Be sure to turn OFF the Power Supply to execute check and repair. You have
a risk of getting electrical shock or injury by accidental sudden move.
●Person other than Repair technician should not be in charge of dismantling,
repairing or remodeling the product.
●You have a risk of getting injured or electrical shock by a fire or erroneous
move.
●Do not touch the Motor, vacuum pump or piping during the pump operation
and just after stopped it while the pump unit keeps high temperature. You
have a risk of getting burned.
●Should you found any malfunction or error, just turn OFF the Power Supply
to prevent accident and ask the agency or closest Service Center for check
and repair.
WARNING
●Do not attempt to put your hand or article in the opening of the motor; you
have a risk of getting electrical shock, injury or casing a fire.
●Do not touch any rotary section such as the main spindle during operation
of the Vacuum pump; it shall bring in injuries.
●Strictly refrain from putting any combustible substance in and around 1m of
the motor and Vacuum pump; there is a risk of getting a fire.
CAUTION
●Ensure to flow the Coolant during operation. Required Coolant volumes hall
be;
▪Coolant volume PRC-003A: 2.0 L/min or more
PRC-006A: 2.0 L/min or more
PRC-012A: 3.0 L/min or more
PRC-018A: 3.0 L/min or more
▪Outlet/inlet differential pressure: 0.1MPa (Gauge pressure) or more
▪Coolant temperature: 5°C ~ 30°C
CAUTION

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The water included little impurities (ex. Industrial Water) is recommended for
cooling water.
Depending on the water quality, the inside wall of cooling water tube is covered
with water scale (CaCO3etc.) and cooling water flow rate may be decreased.
Cooling water tube is corroded by Chlorine ion (Cl-) and cooling water leak may
be caused. In case of using pure water, cooling water leak may be caused by
metal component dissolution, too.
In these cases, the repair service may be for a fee.
［Reference］Standard Water Quality of Industrial Water
Establishment: Japan Industrial Water Association
Power Supply wiring <Dismantling>
Coolant piping <Dismantling>
Inlet piping <Dismantling>
●Be sure to cut off the electricity before starting install or dismantling
operation.
WARNING
●Should you remove the Coolant joint immediately after having stopped the
Pump, there is a risk that the coolant remained inside the Pump comes to a
boil and jets out. Keep flowing the Coolant as far as the Pump temperature
cools down.
●The Pump is and remains very hot during and while after having stopped
operation. You have a risk of getting burned if a part of the body touched it.
Keep flowing the Coolant as far as the Pump temperature cools down.
●Use a flow meter (HWFM: for example Flow sight) applicable to visually
check the Coolant supply source that no water is flowing.
WARNING
●Take off the piping following the Install Manual of the system.
●The Inlet piping remains very hot wile after having stopped the Pump. Be
sure to take it off after the Pump has sufficiently cooled down.
●Make airtight completely the Pump exhaust outlet with a blank flange.
WARNING
CAUTION

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Transfer
0.4 Types and Descriptions of Warning Labels Displayed on This
Machine and Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・You may get an electric shock in the area around a portion
with this warning label. Before maintenance or wiring, be sure
to turn off the primary power supply.
・Be sure to close the lid of the terminal box before operating
this unit. Never open it during operation.
3
During operation or for a while after operation stops, do not
touch the unit as each portion is at a very high temperature. -
If a human body touches the unit, it may get burned.
You have a risk of giving damage to your back as the load larger than safety
standard shall be required to transfer the product.
Be sure to use the loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its
transfer.
WARNING

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Fig. 1 Warning Label
PRC-003A
PRC-006A
PRC-012A
PRC-018A

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0.5 Acceptance and Storage of The Pump
0.5.1 Unpacking/Acceptance of The Pump
Upon delivery of the product, check first that the delivered is exactly what you have ordered and there
is no break or damage through transport or the like. Claim after use of the product might be resolved
with a charge.
Although we pay full attention on shipping, you are kindly requested to check the following upon
unpacked the product.
Table. 1 standard accessories
Part name Specification Quantity Remarks
Oil one time portion
ULVOIL R-42
1 set
For the consumed amount, refer to the specification table.
Quick Start Manual
Japanese
／
English
1 copy －
※Fluorine oil is not included in the shipment in the case of selected fluorine oil. If fluorine oil is required, it
must be ordered separately.
(1) Whether the delivered is exactly the one you have ordered.
(2) Whether accessories (Pump oil for one lubrication, optional parts) are
attached or not.
(3) Whether there is no break or damage through transport or not.
(4) Whether any bolt or nut got loose or taken off through transport or not.
Should you found any trouble, please do not hesitate to contact our Sales
division or your agency.
IMPORTANT
(1) This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
(2) Give the instruction them further to use the unloading machinery such as
crane to take out the product of the wooded frame, lift it up with its top
eyebolt and transfer it on lifting. Check the eyebolt whether it has no error
before use.
(3) Only the technically entitled person should be in charge of conducting the
unloading operation and operating the unloading machinery.
(4) There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You are
strictly restricted to enter beneath the Pump.
(5) Advise the dismantling agent to wear leather gloves and use appropriate
tools such as pinch bar as they have a risk of cutting the hand by nail or
chip.
WARNING

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0.5.2 Transfer
0.5.3 Ambient Condition for Storage, Install and Operation
As precise clearances are provided with this machine, be sure to fulfill the following for its storage,
install and operation;
(1) Ambient temperature and humidity for storage : -30°C to 60°C, less than 95%RH
(2) Ambient temperature and humidity for operation : 10°C to 40°C, less than 80%RH
(3) Height (for both storage and operation) : Lower than el. 1,000m.
(4) External vibration (for both storage and operation) : Vibration acceleration less than114dB
(0.5G)
(5) Miscellaneous (for both storage and operation) :
a. There shall be no corrosion behavior or explosive gas.
b. There shall be no freeze or dew formation.
c. There shall be no dust.
d. It shall be in house.
e. Another pump shall not be put on the Pump.
f. The Pump shall not be laid down nor put touching its motor edge face or oil gauge edge face
with the ground.
g. There shall be no direct sun beam.
h. Heat source shall be put away from the Pump.
Fix the Pump on tightening bolts the mount to install it. Be sure to use the anti-vibration rubber bumper
so as to insulate the mount.
Do not give the Pump a shock or lay it down. It might impair the Pump
operation.
CAUTION
You have a risk of giving damage to your back as the load larger than safety
standard shall be required to transfer the product.
Be sure to use the loading machinery (such as mobile crane) to lift up the
Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its
transfer.
WARNING

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0.6 Protective Device
This machine is equipped with the Three-phase AC200V 50/60Hz, AC220V 60Hz motor.
This motor is not equipped with the protective device. Put an overload protective device to connect
through the motor with the Power Supply. It is imperative to put the overload protective device under
direction of the Electrical Installation Technical Standard (1965, Department of Trade and Industry decree
No. 61). Refer to “3.6 Electric connection” to select the overload protective device. It is recommended to
put together another protective device such as a leakage breaker.
Be sure to put an overload protective device. Otherwise it would cause a burn
out and/or fire of the motor.
CAUTION

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Contents-1
Table of Contents
0. Before Using This Product ..................................................................................................................i
0.1 Safety Symbol Marks....................................................................................................................ii
0.2 Meanings of Safety Symbol Marks...............................................................................................ii
0.3 Safety Precautions.......................................................................................................................iii
0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions
...................................................................................................................................................... viii
0.5 Acceptance and Storage of The Pump.........................................................................................x
0.5.1 Unpacking/Acceptance of The Pump.....................................................................................x
0.5.2 Transfer .................................................................................................................................xi
0.5.3 Ambient Condition for Storage, Install and Operation...........................................................xi
0.6 Protective Device........................................................................................................................xii
1. For Your Safety Use .......................................................................................................................... 1
1.1 This Product Intrinsic Hazardous Nature and Safety Measures ................................................. 1
1.1.1 Danger Leakage of dangerous gas and dangerous materials ................................. 1
1.1.2 Warning Transfer of heavy material.......................................................................... 1
1.1.3 Warning Electric shock ............................................................................................. 2
1.1.4 Warning Explosion.................................................................................................... 2
1.1.5 Caution High temperature ........................................................................................ 3
1.1.6 Caution Leakage of hot coolant................................................................................ 3
1.2 Chemical Material Safety Data Sheet（SDS）.............................................................................. 4
2. Pump Outline..................................................................................................................................... 5
2.1 Total configuration........................................................................................................................ 5
2.2 Performance Specifications......................................................................................................... 6
2.3 System Flow ................................................................................................................................ 7
2.4 Dimensional drawing ................................................................................................................... 8
2.5 Pump Performance.................................................................................................................... 12
2.5.1 Ultimate pressure ................................................................................................................ 12
2.5.2 Pumping speed ................................................................................................................... 12
2.5.3 Power consumption............................................................................................................. 14
2.6 Designing Pumping System ...................................................................................................... 15
2.7 Automatic Operation .................................................................................................................. 16
2.8 Setting of Motor Controller (Atmospheric Pressure Actuating Type.With the inverter. ) ........... 17
3. Mounting.......................................................................................................................................... 18
3.1 Storage/ Installation ................................................................................................................... 18
3.2 Installation.................................................................................................................................. 18
3.3 Lubrication ................................................................................................................................. 19
3.3.1 Lubrication to the Lubrication chamber. .............................................................................. 19
3.4 InletportPiping/ Outlet port Piping.............................................................................................. 21
3.4.1 Inlet port Piping....................................................................................................................... 21
3.4.2 Outlet port Piping.................................................................................................................... 22
3.5 Water Piping .............................................................................................................................. 24
3.6 Electrical Connection................................................................................................................. 26

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Contents-2
4. Operation ..................................................................................................................................... 28
4.1 Test run ...................................................................................................................................... 28
4.2 Operation ................................................................................................................................... 30
4.2.1 Exhaust start........................................................................................................................ 30
4.2.2 Exhaust stop........................................................................................................................ 30
5. Option .............................................................................................................................................. 32
5.1 Special motors.......................................................................................................................... 32
5.2 Inlet and outlet flange ............................................................................................................. 32
5.3 Oil type .................................................................................................................................... 32
5.4 Motor control equipment ......................................................................................................... 32
5.4.1 Setting of Motor Controller (Atmospheric Pressure Actuating Type) .................................. 33
5.5 Separate Evacuation of Lubricating Chamber .......................................................................... 37
5.5.1 Preparation .......................................................................................................................... 38
5.5.2 Water Piping, Electrical Connection and Lubrication.......................................................... 38
5.5.3 Checking lubricating oil level............................................................................................... 38
5.5.4 Pumping .............................................................................................................................. 38
5.5.5 Checking rotational direction............................................................................................... 38
5.5.6 Operation............................................................................................................................. 39
5.5.7 Pumping start operation ...................................................................................................... 39
5.5.8 Shutdown operation ............................................................................................................ 39
5.6 Optional attachment figure ........................................................................................................ 40
6. Maintenance and Check.................................................................................................................. 44
6.1 Maintenance .............................................................................................................................. 44
6.2 Inspection Items......................................................................................................................... 45
6.3 Checkup after storage for a long period.................................................................................... 47
6.4 Overhaul .................................................................................................................................... 47
6.5Troubleshooting .......................................................................................................................... 48
7. Removal / transport......................................................................................................................... 50
7.1 Operation procedure.................................................................................................................. 50
8. Disposal........................................................................................................................................... 51
9. Warranty Clauses ............................................................................................................................ 52
9.1 Warrantable Items...................................................................................................................... 52
9.2 Duration of guarantee................................................................................................................ 52
9.3 Warrantee scope........................................................................................................................ 52
9.4 Response procedure ................................................................................................................. 52
9.5 Disclaimer .................................................................................................................................. 53
9.6 Others ........................................................................................................................................ 53
10. Main Displacement Parts .............................................................................................................. 54
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER

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Contents-3
Table of Contents
Fig. 1 Warning Label ......................................................................................................................ix
Fig. 2 Location of vacuum pump in host device............................................................................. 7
Fig. 3 PRC-003A Dimensional drawing.......................................................................................... 8
Fig. 4 PRC-006A Dimensional drawing.......................................................................................... 9
Fig. 5 PRC-012A Dimensional drawing........................................................................................ 10
Fig. 6 PRC-018A Dimensional drawing.........................................................................................11
Fig. 7 Pumping Speed（PRC-003A/006A）................................................................................ 13
Fig. 8 Pumping Speed（PRC-012A/018A）................................................................................ 13
Fig. 9 Evacuation by mechanical booster pump (example)......................................................... 15
Fig. 10 Oil level gauge.................................................................................................................. 19
Fig. 11 Gear rotation direction ...................................................................................................... 29
Fig. 12 Separate evacuation of lubricating chamber ................................................................... 37
Fig. 13 Separate evacuation of lubricating chamber (example) .................................................. 37
Fig. 14 PRC-003A Optional attachment figure ........................................................................ 40
Fig. 15 PRC-006A Optional attachment figure ........................................................................ 41
Fig. 16 PRC-012A Optional attachment figure ........................................................................ 42
Fig. 17 PRC-018A Optional attachment figure ........................................................................ 43
Table. 1 standard accessories.........................................................................................................x
Table. 2 Details model list............................................................................................................... 5
Table. 3 Performance specifications .............................................................................................. 6
Table. 4 Oil level gauge ................................................................................................................ 19
Table. 5 Electrical connection....................................................................................................... 26
Table. 6 Rated current value of the PRC series standard motor ................................................. 26
Table. 7 Parameter setting: Mitsubishi FR-E520 series............................................................... 34
Table. 8 Parameter setting: Mitsubishi FR-F520J series ............................................................. 35
Table. 9 Parameter setting: Mitsubishi FR-D720 series............................................................... 36
Table. 10 Optional parts................................................................................................................ 37
Table. 11 Maintenance list ............................................................................................................ 45
Table. 12 Troubleshooting ............................................................................................................ 48
Table. 13 PRC-003A Main displacement parts list ....................................................................... 54
Table. 14 PRC-006A Main displacement parts list ....................................................................... 55
Table. 15 PRC-012A Main displacement parts list ....................................................................... 56
Table. 16 PRC-018A Main displacement parts list ....................................................................... 57

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1
1. For Your Safety Use
1.1 This Product Intrinsic Hazardous Nature and Safety Measures
Before operating or checking this machine, thoroughly read this paragraph, and after fully
understanding about latent danger and on how to avoid danger, perform the work.
1.1.1 Danger Leakage of dangerous gas and dangerous materials
Factors Avoidance methods and measures
Leakage of poisonous and
combustible gas.
Getting injured on touching any
toxic pump oil, pump, generated
material or sucked substance at the
occasion of check or disposal.
Do not exhaust any hazardous gas such as toxic
and combustible.
(1) To overhaul or dispose, ask the special
agency to do the detoxification process.
(2) Ask the disposal agency licensed by the
administration for disposal.
1.1.2 Warning Transfer of heavy material
Factors Avoidance methods and measures
Getting injured on transferring the
pump.
Pump weight
PRC-003A : 51 kg
PRC-006A : 86 kg
PRC-012A : 118 kg
PRC-018A : 150 kg
(1) Only technically entitled person should be in
charge of loading/unloading and operating
machines.
(2) There is a risk that the Pump might drop or lay
down when attempted unreasonable operation
or machinery setup was not sufficient. You are
strictly restricted from entering beneath the
Pump.

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1.1.3 Warning Electric shock
Factors Avoidance methods and measures
Getting electrical shock on touching
the current-carrying part of the
motor.
(1) Be sure to cut the electricity to do electrical
connection. Never fail to take the grounding.
(2) Ensure to close the cover of motor terminal
box and never open it during operation.
(3) Be sure to cut the electricity to do checking or
installation.
(4) Never attempt to put in the hand or bar into the
opening of the Motor.
Motor terminal mount gets burnt.
Tighten close the terminal. Check the tightening
once a month.
(Refer to “3.6 Electrical Connection”)
1.1.4 Warning Explosion
Factors Avoidance methods and measures
Pressure inside the pump rises up
and the pump explodes.
Ensured pressure value of the Pump is 0.03MPaG
(0.3 kg/ cm2G) (Gauge pressure).
Check the Exhaust side pressure of the pump. If it
was over 0.03 MPaG (0.3 kg/cm2G) (Gauge
pressure) take away anything in and around the
exhaust outlet that hampers gas passage. If you
used the Oil mist trap, replace or clean it so that it
does not hamper the gas passage.

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1.1.5 Caution High temperature
Factors Avoidance methods and measures
Getting burnt on touching the high
temperature part.
(1) The Pump gets high temperature during
operation.
(2) As the surface temperature is high, you have a
risk of getting burnt by accidentally touching it
with the hand or the like. Refrain from touching
the pump during operation. Wait until the
temperature sufficiently cools down after
having stopped the pump to conduct check or
something.
1.1.6 Caution Leakage of hot coolant
Factors Avoidance methods and measures
Kept operating without supplying
the Coolant. Boiled hot vapor jet out
the Coolant outlet.
(1) Put a Flow meter in the line to set the interlock
so that the Pump stops when Coolant was
blocked out.
(2) If you kept operating without supplying the
water, immediately stop the Pump and keep
away from it.
(3) Stop the Pump and ensure that the Pump
temperature got cooled down to take out the
Pump and check it.

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1.2 Chemical Material Safety Data Sheet（SDS）
SDS is posted as referential to ensure safe operation of the hazardous and/or
toxic chemical material. Any person in charge of operating the Pump oil shall
be requested to be responsible to cause means appropriate to actual
operation of the machine referring to it. Note that the SDS itself shall be never
a safety certificate in any manner.
CAUTION
Chemical material used for this Pump;
(1) ULVOIL R-42(Mineral oil)
Standard oil for our products is either ULVOIL R-42 its combined use is not
allowed.
The Chemical Material Safety Data Sheet introduces the chemical material
potential to use or touch on operating this machine. Please contact our
Sales division if you are in need.
Read it with attention to acknowledge the toxic characteristics described
on the SDS.
Please contact us separately if you want to use any chemical material
(Vacuum pump oil) other than described on the
IMPORTANT