Ulvac GLD-051 User manual

No.17200-2-02-8
Instruction Manual
for
Direct-Drive Oil Sealed Rotary Vacuum Pump
Model
GLD-051
GLS-051
Before using the product, be sure to read this manual.
Keep this manual in a place where it can be referred to at any time
and look after it carefully.
The contents of this instruction manual are subject to change
without prior notice due to improvements in performance and the
functions of the product.
ULVAC KIKO,Inc.

- 01 -
0. Introduction
0.1 Before using the vacuum pump
Thank you for purchasing our vacuum pump (hereinafter called “pump”). When you have received
the pump, check that the delivered pump is as per your order and that it has not been damaged in
transportation, etc.
In order to use the pump for as long as possible, read this instruction manual
thoroughly before performing installation, operation, inspection and
maintenance, and sufficiently understand the cautions for safety, the
specifications and operation methods of the pump.
No part of this instruction manual may be copied for use by a third party
without our permission.
Warning
Note

- 02 -
0.2 Safety symbols
In this instruction manual and on warning labels attached to the pump, the following symbols
are used so that matters which must be strictly adhered to can be readily understood.
These symbols are divided as shown below.
When mishandled, there is an imminent danger of the operator suffering a fatal
accident or serious injury.
When mishandled, there is a possibility of the operator suffering a fatal
accident or serious injury.
When mishandled, there is a possibility of the operator suffering an injury
(light or medium injury) or of damage occurring to property.
When mishandled, there is a possibility of the pump being damaged or
malfunctioning.
Caution
Note
Warning
Danger

- 03 -
0.3 Cautions for safety
When toxic or flammable gases are exhausted from the pump, they m a y l e a k n o t
only from the pump outlet but also from the pump unit itself. Take proper
measures suitable for the type of gas.
After the pump has been used for exhausting toxic gasses, not only the pump
itself but also vacuum pump oil (hereinafter called “pump oil”) get toxic.
Keep this in mind when performing the maintenance.
Never allow people other than repair engineers to disassemble or repair the
pump. Failure to do so may result in ignition or malfunction, leading to injury
or electric shock.
Before performing inspection or repair, always turn off the power switch.
Failure to do so may result in electric shock or the unexpected start of the
pump, leading to injury.
Connect the earth wire correctly. It is recommended that a dedicated earth
leakage breaker should be installed. If the earth wire is not connected, there
is a possibility of electric shock occurring in the case of a malfunction
or electrical leakage.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas.
Otherwise, the internal pump pressure increases causing the pump to explode,
the oil level gauge to protrude or the motor to be overloaded.
This pump is not resistant to pressure. The internal pump pressure is limited
to 0.03 MPa (gauge pressure).
Warning
Danger
Danger
Warning
Warning
Warning

- 04 -
Do not use the pump in an explosive atmosphere. Failure to do so will result
in injury or fire.
Do not insert fingers or objects into the opening of the motor. Doing so may
result in electric shock, injury, or fire.
Never touch the rotating section of the motor, shaft or coupling while the
pump is in operation. Failure to do so will result in injury.
Never place combustible materials around the motor or pump. There is a risk
of fire.
Also, do not place objects which block ventilation around the motor. Abnormal
heat generation may result in burns or fire.
Do not touch the motor while the pump is in operation or when the pump is
still hot immediately after it stops. Touching it will result in burns.
Arrange wires correctly in accordance with the “Electrical Equipment
Technical Standard” and “Wiring Regulations.” Incorrect wiring may result
in fire.
If the pump ceases operation or malfunctions, turn off the power switch
immediately to prevent accidents, and ask the company from which you purchased
the pump or the manufacturer for inspection and repair.
Do not operate the pump without adding pump oil. If it is operated in an
oil-less condition, the pump will be damaged.
Caution
Warning
Caution
Caution
Caution
Caution
Note
Caution

- 05 -
0.4 Acceptance and storage of the pump
0.4.1 Acceptance of the pump
Although the pump is delivered with great care, check the following after unpacking.
①The delivered pump is in accordance with your request.
②The specified accessories (enough pump oil to use the pump once; optional equipment) have
been provided.
③No parts have been damaged in transportation.
④Neither screws nor nuts have become loose nor were lost in transportation.
If there are any problems, contact the company from which you purchased the pump or the sales
department of the manufacturer.
0.4.2 Environmental conditions for storage, installation and operation
Since this pump is precisely engineered, ensure that the following conditions be satisfied during
storage, installation and operation.
①Ambient temperature, relative humidity: 7°C ~ 40°C, 85% RH or less
②Height above sea level during storage and installation: 1,000 m or less
③Other conditions for storage and operation
a) Free from corrosive and explosive gases
b) No condensation
c) Dust-free environment
d) Indoors
e) Do not place pumps on top of each other or place a pump on its side.
f) Not subject to direct sunlight
g) Far from heat sources
h) When you keep it for a long period of time, put pump oil into a pump and seal a inlet
port with a cap.
i) Don't keep it, where moisture is attracted.
Do not subject the pump to shocks or place the pump on its side. Doing so
may damage the pump.
0.5 Protective device
The pump is provided with a single-phase 100V (50/60Hz) motor.
An overload protector (manually reset thermal protector) is incorporated.
The use of another protective device (such as an earth leakage breaker) in addition to the
overload protector is recommended.
Use the pump only at the rated voltage. Use at other than the rated voltage
will interfere with correct operation of the overload protector, and result
in the motor burning out, or fire.
Note
Note

Contents - 1
Contents
0. Introduction ·························· 01
0.1 Before using the vacuum pump ·························· 01
0.2 Safety symbols ·························· 02
0.3 Cautions for safety ·························· 03
0.4 Acceptance and storage of the pump ·························· 05
0.4.1 Acceptance of the pump ·························· 05
0.4.2 Environmental conditions for storage, installation and operation ·· 05
0.5 Protective device ·························· 05
1. For Safe Operation ·························· 1
1.1 Hazards peculiar to the pump and safety measures ······················· 1
1.1.1 Danger Leakage of hazardous gases and substances ············ 1
1.1.2 Warning Electric shock ·························· 1
1.1.3 Warning Explosion ·························· 2
1.1.4 Caution High temperature ·························· 2
1.2 Safety Data Sheet (SDS) ·························· 2
2. Outline of the Pump ·························· 3
2.1 Specification ·························· 3
2.2 Dimensional drawing ·························· 4
3. Installation ·························· 5
3.1 Installation ·························· 5
3.2 Lubrication ·························· 5
3.3 Vacuum piping ·························· 6
3.4 Electric wiring ·························· 7
3.5 Fluctuation in the power voltage and frequency ························· 7
4. Operation ·························· 9
4.1 Cautions for operation ·························· 9
4.2 Start of operation ·························· 10
4.3 Stopping the operation ·························· 10
4.4 Operation in cold climates ·························· 11
4.5 Backflow preventer ·························· 11
4.6 Gas ballast valve ·························· 12
4.7 Installation of the oil mist trap (Option) ·························· 13
4.8 Restriction on operation when the oil mist trap is installed ·········· 13

Contents - 2
5. Pump Performance ·························· 14
5.1 Ultimate pressure ·························· 14
5.2 Pumping speed ·························· 14
5.3 Power requirement ·························· 14
6. Maintenance, Inspection and Repair ·························· 16
6.1 Maintenance ·························· 16
6.2 Periodic inspection ·························· 16
6.3 Replacement of the pump oil ·························· 18
6.4 Replacement of the coupling spider ·························· 20
6.5 Trouble check list ·························· 21
7. Disposal ·························· 23
8. Maintenance parts ·························· 24
8.1 Maintenance parts list ·························· 24
8.2 Disassembly drawing ·························· 26
Warranty
Safety Data Sheet (SDS)
Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)
Contact address of sales and service departments

Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of GLD-051 oil sealed rotary vacuum pump ········· 4
Fig. 2 Dimensional drawing of GLS-051 oil sealed rotary vacuum pump ········· 4
Fig. 3 Lubrication of the oil sealed rotary vacuum pump ······················ 5
Fig. 4 Basic piping diagram to the vacuum chamber ·························· 6
Fig. 5 Change region of the voltage and frequency ·························· 7
Fig. 6 Pumping speed curve ·························· 15
Fig. 7 Characteristics of Motor power ·························· 15
Fig. 8 Replacement of the coupling spider ·························· 20
Fig. 9 Disassembly drawing of GLD-051 oil sealed rotary vacuum pump ········· 26
Fig. 10 Disassembly drawing of GLS-051 oil sealed rotary vacuum pump ········· 27
Table 1 Specification ·························· 3
Table 2 Periodic inspection table ·························· 17
Table 3 Trouble check list ·························· 21
Table 4 GLD-051 Maintenance parts list ·························· 24
Table 5 GLS-051 Maintenance parts list ·························· 25
Attached table: Safety Data Sheet for Vacuum Pump Oil SMR-100

-1-
1. For Safe Operation
1.1 Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully understand potential
hazards and prevention methods.
1.1.1 Danger Leakage of hazardous gases and substances
Cause Prevention method and measures
Leakage of toxic and
flammable gases
⇒Dilute hazardous gases to a safe concentration before they
enter the pump inlet.
Injury due to touching toxic
pump oil in the pump or
harmful substances attached
to the pump during
inspection or disposal
⇒ ① Wear protective equipment suitable for toxic substances
when carrying out inspection.
②Before overhauling and disposing of the pump, ask a
waste disposal specialist to make it safe.
③Ask an authorized waste disposal specialist to carry out
disposal.
1.1.2 Warning Electric shock
Cause Prevention method and measures
The energized part of the
motor was touched.
⇒ ① When connecting electric wires, always turn off the
power and be sure to connect the earth wire.
②When inspecting and transferring the pump, always turn
off the power.
③Never insert hands, fingers, or thin objects through the
motor opening.