Ulvac ULK-10A User manual

SK00- 4802-DC-002-01
No.090317
Heater Replacement Procedure
Oil Diffusion Pump
Model
ULK-10A
ULK-14A
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/

SK00- 4802-DC-002-01
No.090317
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Preface
We thank you very much for purchasing our product.
This manual describes the rules of the description of this pump heater
replacement procedure and information for carrying out replacement according to
this manual.
Read this manual first.
• Worker’s requirements
• Before replacement of the heater
• Names of components of the pump
Worker’s requirements
This pump may be disassembled, reassembled and installed only by a person
experienced in disassembly and reassembly of high vacuum pumps.
If you are not experienced in disassembly and reassembly of high vacuum pumps,
contact your local ULVAC service station.
Before replacement of the heater
Disassembly of a pump used for exhausting toxic gas or active gas can be
dangerous. If a pump was used for exhausting such type of gas, seal it completely
simultaneously with removing the pump from the system and request a
professional for disassembly and cleaning.
Before starting heater replacement, prepare necessary parts and tools (refer to the
list of tools to use, list of major parts and list of replacement parts). Also replace
gaskets, which are subject to aging and may be easily damaged during
disassembly.

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Contents
Preface ..............................................................................................................................i
Worker’s requirements............................................................................................i
Before replacement of the heater ......................................................................i
1. Parts used ........................................................................................................... 1
1.1. Table of Major Parts..................................................................................1
1.2. Table of Replacement Parts ...................................................................1
1.3. Bolts used ......................................................................................................2
1.4. Miscellaneous...............................................................................................2
2. Tools to use .........................................................................................................3
2.1. Table of Working Tools .............................................................................3
3. Removing the Heater....................................................................................4
4. Installing the Heater ....................................................................................6

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1. Parts used
1.1. Table of Major Parts
No. Description Quantity Check
１． Heater 1 pc.

2.1 Boiler cover (with terminal box) 1 pc. 
2.2 Boiler cover 1 pc. 
3 Heater (terminal) cover 1 pc. 
4 Heat-resistant heat shrinkable tube
15mm ID ×40mm
2 pcs. 
5 Glass wool tube 5mm-dia. ×185mm
long (for heater lead wire)
1 pc. 
6 Glass wool tube 10mm-dia. ×45mm
long (for heater terminal)
2 pcs. 
7 Glass fiber tape 0.18 mm thick ×13
mm wide ×300 mm
long

8 Heater lead 2 pcs. 
9 Heat-transfer-cement 120 g 
1.2. Table of Replacement Parts
No. Description Quantity Check
1 Heater (see Note) 1 pc. 
2 Heat-resistant heat shrinkable tube
15mm ID ×40mm
2 pcs. 
3 Heat-transfer-cement 120 g 
Note : Use a heater with the wattage and voltage inscribed on the rating
plate.

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1.3. Bolts used
No. Description Quantity Check
For fixing heater (SUS304)
1 Allen screw M6 ×25 4 pcs. 
2 Hexagon nut M6 7 pcs. 
3 Spring washer M6 7 pcs. 
4 Plain washer M6 11 pcs. 
For heater terminal (SUS304)
5 Hexagon nut M4 2 pcs 
6 Spring washer M4 2 pcs. 
7 Plain washer M4 4 pcs. 
For fixing the boiler cover (SUS304)
8 Cross-recessed head machine screw
M5 ×10
4 pcs. 
9 Cross-recessed head machine screw
M5 ×15
1 pc. 
10 Spring washer M5 5 pcs. 
11 Plain washer M5 5 pcs. 
For fixing heater terminal cover
12 Cross-recessed head machine screw
M5 ×10
2 pcs 
13 Spring washer M5 2 pcs. 
14 Plain washer M5 2 pcs. 
1.4. Miscellaneous
Quantity or size
No. Description ULK-10A ULK-14A Check
1 Working fluid ULVOIL
D-11 or D-31 800 cc 1,500 cc 
2 Intake port gasket
(NBR or FPM)
8 mm ×8 mm
×275 mm ID
8 mm ×8 mm
×380 mm ID 
3 Exhaust port gasket
(NBR or FPM) 4 mm wide ×99 mm ID 
4 Molybdenum disulfide
(Dow Corning MOLKOT,etc) Appropriate amount 

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2. Tools to use
2.1. Table of Working Tools
No. Photo Description No. Photo Description
1
Torque wrench
5 Nxm 7
Heat-resistant
gloves
2
Spanner
10: 2 pcs.
5 : 1 pc.
8
Protective gloves
3
Philips
screwdriver 9
Box 10 mm
4
Shockless
hammer 10
Spatula
5
Scraper 11
Pliers
(or cutting pliers)
6 Wire brush

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3. Removing the Heater
Power Supply wiring <Dismantling>
Cooling water piping＜Detaching＞
Intake port and exhaust port piping<Dismantling>
Transfer
●Be sure to cut off the electricity before starting install or dismantling
operation.
WARNING
●Should you remove the Coolant joint immediately after having
stopped the Pump, there is a risk that the coolant remained inside
the Pump comes to a boil and jets out. Keep flowing the Coolant
as far as the Pump temperature cools down.
●The Pump is and remains very hot during and while after having
stopped operation. You have a risk of getting burned if a part of the
body touched it.
Keep flowing the Coolant as far as the Pump temperature cools down.
●Use a flow meter (HWFM: for example Flow sight) applicable to
visually check the Coolant supply source that no water is flowing.
WARNING
●Take off the piping following the Install Manual of the system.
●Make airtight completely the Pump exhaust outlet with a blank
flange.
WARNING
●You have a risk of giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
●Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it with Jack and run the
Pallet truck for its transfer.
WARNING

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(1) Move the pump to a place suited to working.
(2) Before removing the heater, make sure on a surface
thermometer or the like that the working fluid
temperature has lowered to near ambient temperature.
(3) Drain working fluid and remove the jet.
For the disassembly and reassembly of the jet, refer to the instruction manual.
(4) Protect the flange surface with a closing flange or the like so that the intake
port and exhaust port are not damaged when the pump is turned upside down.
Here, see to it that the pump interior is not closed.
(5) Turn the pump upside down to set the boiler cover side in the up position.
(6) Remove all connecting terminals of the heater connection in the terminal box.
(7) Remove the heater terminal cover to remove the heater leads.
(8) Remove the screws that fix the boiler cover to remove the boiler cover.
(9) Remove the bolts and nuts that are used to fix the heater to remove the heater.
If the heater and pump are fixed with heat-transfer-cement, lightly strike
them with a shock-absorbing hammer.
(10) Wear protective gloves and remove heat-transfer-cement from the heater
installed surface and the pump using a scraper or wire brush.
This completes removal of the heater.

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Disassemble the heater in decreasing order of the numbers in the figure below.
For reassembly, reverse the order.
Fig.Removing the heater
4. Installing the Heater
(1) Take care against electric shock and burn.
Energize the heater with 100V power to preheat it to
90°C.
Check the temperature on a surface thermometer.
(2) Take 120 grams of heat-transfer-cement and apply
it to the surface on which the heater is installed on
the pump side.
Here, apply a uniform coat of heat-transfer-cement about 1 cm inside the
end.

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(3) Take care against electric shock and burn.
Wearing heat-resistant gloves, install the heater that has been preheated to
90°C.
Turn off the power before installing the heater.
Place the heater in a position where it is at approximate middle of the oil
filling/draining port and fix the bolts and nuts.
Apply a coat of molybdenum disulfide to bolts and nuts against scuffing.
(4) Wear heat-resisting gloves and tighten the bolts and nuts for fixing the
heater.
The tightening torque is 10 Nxm.
①First, tighten the 3 bolts and nuts inside with a uniform torque of 10
Nxm.
②Then tighten the 4 bolts on the outside with a uniform torque of 10 Nxm.
③Retighten the 3 bolts inside with increased torque of 10 Nxm.
④ Finally, retighten the 3 bolts outside with increased torque of 10 Nxm.
(5) Take care against electric shock and burn
Energize the heater with 100V power to heat it up to 170°C.
Here, check the temperature on the surface thermometer.
(6) Take care against electric shock and burn
Heat-transfer-cement will gush out from the 3
nuts inside and heater outer periphery during
heating to 170°C. Remove the thermo-element
while taking care against burn.
(7) Turn off the power when the heater has cooled
down to 170°C and wait until the heater temperature comes down to
ambient.

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(8) Temporarily install the boiler cover when the heater temperature has come
down to ambient.
(9) Adjust the boiler cover and heater terminal positions.
Adjust the heater terminal position so that it is at the center of the hole of
the boiler cover. To adjust the heater terminal position, insert a pipe into the
heater terminal and move it
Heater terminal adjustment
(10) With the boiler cover being assembled temporarily, make sure with a 500V
Megger that the insulation resistance between the boiler cover and heater
terminal is 10 MΩor more.
If not, the heater terminal and the boiler cover may be in contact with each
other.
(11) Remove the boiler cover that has been installed
temporarily.
Wrap glass fiber tape around each of the two heater
terminals.
(12) Cover the heater terminals with glass wool tubes.
(13) The side on which the solderless terminal of
the heater lead is bent is the heater side.

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(14) Attach the bent heater lead to the heater terminal
using a spring washer, plain washer and nut so that
it is upside (reverse to the oil filling/draining port)
when the heater lead is attached.
(15) Insert the heat-resistant thermal shrinkage tube into the heater terminal.
Here, insert the heat-resistant thermal shrinkage tube into the glass wool
tube installed by step (11) above.
(16) Bring the heat-resistant
shrinkage tube into intimate
contact with the lead with
the hot gun, as shown in
the photo below.
To terminal block
Heat-resistant thermal
shrinkage tube
Heater terminal
Plane washer
Nut
Heater terminal Heat-resistant thermal
shrinkage tube
Spring washer
Plane washer
Nut
Heater lead
Glass wool tube
Terminal box

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(17) Install the boiler cover in position.
Here, install the boiler cover in such way that the heater terminal is at the
center of the hole in the boiler cover.
(18) Make sure that the insulation resistance between the heater terminal and
the boiler cover is 10 MΩor more on a 500V Megger.
If not, there is a possibility of the heater terminal not being correctly
installed. In that event, install the heater terminal correctly.
(19) Bind the 2 heater leads with a glass wool tube.
(20) Connect the heater lead to the terminal block.
(21) Restore the pump to the original state.
This completes heater replacement.
Before starting the pump, reassemble the jet (refer to the operation manual
for the reassembling procedure) and feed lubricating fluid.