Ulvac DA-60D User manual

No. 20111-2-01-21
DIAPHRAGM DRY VACUUM PUMP
INSTRUCTION MANUAL
MODEL DA-60D
MODEL DA-120S
Prior to use
For safe and efficient use of this pump, please read this manual
carefully before operation.
After reading the manual, keep it in your file for future reference.
Specifications in this manual are subject to change without notice
due to future improvement.
ULVAC KIKO,Inc.

Contents
Pages with a shaded background are those which contain items related to safety.
Before Using the Equipment......................................................................................................... ０１
Checks When Opening Packaging ................................................................................................ ０２
Using the Pump Safely.................................................................................................................. ０３
・Safety icons.......................................................................................................................... ０３
・Cautions for Safety in Use .................................................................................................. ０４
1.Product Outline ..............................................................................................................................１
1.1 Purpose of Use and Prohibitions....................................................................................１
1.2 Specifications..................................................................................................................１
1.3 Thermal Protector ..........................................................................................................１
2.Dimensions .....................................................................................................................................２
3.Installation and Storage.................................................................................................................３
3.1 Cautions for Installation and Storage ...........................................................................３
3.2 Environmental Conditions for Installation, Storage, and Operation ...........................３
3.3 Location ..........................................................................................................................３
3.4 Electric wiring................................................................................................................３
3.5 Fluctuations in the power voltage and frequency .........................................................４
3.6 Checking Operation After Installation..........................................................................５
3.7 Piping .............................................................................................................................５
3.8 Storage............................................................................................................................５
4.Cautions for Operation...................................................................................................................６
4.1 Cautions for Operation...................................................................................................６
4.2 Operation of the Thermal Protector ..............................................................................６
4.3 Starting in Cold Weather...............................................................................................６
5.Pump Performance .........................................................................................................................７
5.1 Pressure Achieved..........................................................................................................７
5.2 Evacuation Rate .............................................................................................................７
5.3 Power Requirements ......................................................................................................７
6.Maintenance, Inspection, and Repair ............................................................................................８
6.1. Cautions for Maintenance, Inspection, and Repair.......................................................８
6.2 Maintenance...................................................................................................................８
6.3 Regular Inspections........................................................................................................８
6.4 Replacing and Cleaning Consumables ...................................................................... １０
6.5 Troubleshooting List .................................................................................................. １９
7.In Conclusion.............................................................................................................................. ２０
・Warranty ............................................................................................................................. ２０
・Usage Status Check Sheet
・Product information, service bases, and contact information

Figures and Tables
Fig.2.1 DA-60D Dimensions..............................................................................................................２
Fig.2.2 DA-120S Dimensions ............................................................................................................２
Fig.3.1 Change region of the voltage and frequency ........................................................................４
Fig.3.2 Example of Piping Used When Evacuating a Vessel ...........................................................５
Table 1.1 Product Specifications (50/60 Hz) ....................................................................................１
Table 2 Protector Specifications ......................................................................................................６
Table 6.1 Consumables List ..............................................................................................................９
Table 6.2 Locations for Maintenance and Inspection.......................................................................９
Table 6.3 Troubleshooting List ..................................................................................................... １９

０１
Before Using the Equipment
Thank you for purchasing this product. Your custom is very much appreciated.
This pump is designed solely for vacuum discharge, and may malfunction or cause accidents if
not handled appropriately. Read the manual thoroughly, and pay due attention to inspections,
maintenance, and safety.
Personnel Handling the Equipment
Only persons who have read this manual thoroughly, and have sufficient understanding
of safety, pump specifications, and method of operation, may operate this pump.
Read the Manual Thoroughly
Read the manual thoroughly in order to use the equipment correctly. Read the section
on Safe Use particularly closely.
Keep This Manual in a Safe Place
After reading this manual, be sure to keep it in a safe place which is readily accessible
to others needing to use it.
Copying This Manual Is Prohibited
No part of this manual may be copied for use by a third party without the express
permission of the manufacturer.
Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this pump.
Safety During Repair
Please provide a full description of the circumstances of use (particularly the use of
dangerous materials) for the safety of repair personnel when requesting the
manufacturer for repairs to the pump. Your request for repair of may be refused if
these circumstances are unclear.

０２
Checks When Opening Packaging
Check the following after opening the packaging.
(1) Is the product as you requested?
(2) Are the accessories and necessary parts included?
Standard accessories
・User’s manual -------------------- ×1
・Inlet and outlet caps (fitted to inlet and outlet) -------------------- ×2
・Power plug adapter ※100V only (attached to power cord) ---- ×1
(3) Is the pump damaged in any way?
(4) Are any external screws or inlet and outlet pipes loose? Are any components missing?
Contact your agent or the sales division of the manufacturer if there are any problems with the
pump.
Do not hold or push the tube at the top of the pump while removing it from the
packaging.
Damage to the tube may affect performance of the pump.
!
Note
DA-60D
DA-120S
Tube
ｄD

０３
High Temperature
Electric Shock
Using the Pump Safely
To ensure that the pump is handled correctly, read this section thoroughly before use.
This manual and the warning labels on the pump include safety icons as an aid to
understanding safety requirements.
These safety icons warn the operator and others of possible dangers and damage and should
always be followed.
・Safety icons
The meanings of the safety icons are as follows.
Incorrect handling of the equipment is very likely to result in death or serious injury to
the operator.
Incorrect handling of the equipment may result in death or serious injury to the
operator.
Incorrect handling of the equipment may result in light or medium injuries to the
operator or damage to the equipment.
Incorrect handling of the equipment may result in damage to the equipment and
hinder its correct operation.
The surface of some parts of the part reach temperature of more than 60℃during
operation. Do not touch. It may lead to burns.
Turn off the main power supply before performing electrical work or wiring.
It may lead to electric shocks.
!
Danger
!
Warning
!
Caution
!
Note

０４
・Cautions for Safety in Use
Applications
(1) This pump is not designed to be explosion-proof, and should therefore not be used to
discharge explosive gases.
(2) In addition to discharge of gas via the outlet, gas may also leak from other parts of the
pump, and it should therefore not be used with toxic gases. If toxic gas is discharged for
any reason it is important to note that the interior of the pump will be contaminated by
the gas, requiring appropriate caution during maintenance.
Maintenance and Repair
(3) When requesting the manufacturer’s service division to dismantle and repair the pump,
always note the gas which the pump has been used with on the Usage Check Sheet. Note
that if it has been used to discharge toxic gas for any reason it will be contaminated.
Please be aware that use with some gases will preclude dismantling and repair.
Installation
(1) Do not use the pump in an explosive atmosphere. Such use may result in injury and fire.
(2) Ensure that there are no inflammable materials such as solvents in the vicinity when
using the pump.
(3) Ensure that the motor is freely ventilated to prevent overheating which may result in
fire or burns.
Power Supply
(4) Always remove the power cord from the wall socket before checking or repairing the
pump. Failure to do so may result in electric shock, or the pump suddenly starting and
causing injury.
(5) Ensure that the relevant wiring is in accordance with technical standards for electrical
equipment and wiring regulations. Incorrect wiring may result in fire.
(6) Remove the power cord from the wall socket before connecting any wiring. Connecting
wiring with the power on may result in electric shock.
(7) Always ensure that the pump is correctly earthed. A dedicated earth leakage breaker is
recommended. Failure to earth the pump correctly may result in electric shock if a fault
or earth leakage occurs.
(8) Use the pump only at the rated voltage. Use at other than the rated voltage will
interfere with operation of the overload protection device, and this may result in the
motor burning out, or fire.
(9) Do not damage, modify, pull the power cord, or place objects on it. Damage to the cord
may result in electric shock or fire.
(10)Always fully insert the power cord into the socket. Partial insertion may result in electric
shock.
(11)Remove the cord from the socket while holding the plug. Failure to do so may result in
electric shock.
(12)Touching the power cord with wet hands may result in electric shock.
(13)Touching electrical wiring etc while inserting the power plug may result in electric
shock.
!
Danger
!
Warning

０５
Operation
(14)This pump is not designed to be explosion-proof. When using the pump, ensure that
there are no inflammable materials such as solvents, or explosive gases, in the vicinity.
Use under such conditions may result in injury or fire.
(15)Inserting fingers or objects into the motor inlet may result in electric shock, injury, or
fire.
(16)Operating the pump with the discharge outlet blocked, or with a device which prevents
passage of gas to the discharge outlet, may result in rupture of the pump. The internal
pressure of the pump rises and the pump body may rupture and the motor become
overloaded.
This pump is not designed to be pressure-resistant. The internal pressure of the pump is
limited to 0.03 MPa (gauge pressure).
Maintenance and Repair
(17)The pump should be dismantled or repaired only by a repair technician trained by the
manufacturer.
(18)To prevent ingestion of microscopic particles resulting from wear of components, use a
dust mask and gloves when replacing diaphragms, valves, and O rings.
Installation
(1) To prevent back injuries, always use at least two people when lifting and moving the
pump.
(2) Microscopic particles resulting from wear of components are discharged from the outlet
and contaminate the room. If necessary, connect a pipe from the discharge outlet to the
outside of the building.
(3) The fine clearances used in this pump require that the following conditions be satisfied
during storage, installation, and operation.
1. Ambient temperature of 7~40°C and maximum relative humidity of 85% during
operation.
2. Other conditions for storage and operation.
a) Level floor of sufficient strength.
b) No condensation
c) Dust-free environment
d) Well ventilated
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
!
Warning
!
Caution

０６
Operation
(4) Touching rotating components (eg motor, main shaft, axial joints, cooling fan) while the
pump is in operation may result in injury.
(5) The overload protector operates when the pump becomes excessively hot. Touching it in
this condition may result in burns.
(6) Touching the motor while the pump is in operation or while it is still hot immediately
after having been switched off may result in burns.
(7) Do not insert fingers or objects into, or peer into, the inlet or outlet during operation.
Maintenance and Repair
(8) If the pump ceases operation, turn power OFF (set switch to O) immediately to prevent
accidents, remove the power cord from the wall outlet, and contact your dealer or the
manufacturer for inspection and repair.
(9) Leave the pump for at least 30 minutes until it has cooled, and begin operation again.
Touching the pump immediately after it has stopped may result in burns.
!
Caution

０７
Installation
(1) The pump may malfunction if it is subjected to shocks or tipped over on its side.
(2) Do not hold or push the tube at the top of the pump (see below). Damage to the tube may
affect performance of the pump.
Applications
(3) This pump is not designed to be corrosion-proof. Use it only with clean air at normal
temperature, or with gases of equivalent characteristics.
(4) This pump is designed solely for vacuum extraction. Operation for long periods at
near-atmospheric pressures may result in a malfunction.
(5) In addition to discharge of gas via the outlet, gas may also leak from other parts of the
pump, and it should therefore not be used with toxic gases. If toxic gas is discharged for
any reason it is important to note that the interior of the pump will be contaminated by
the gas, requiring appropriate caution during maintenance.
(6) Entry of corrosive gases, organic solvents, fluids, or gases able to be condensed (eg.
steam) may result in damage to the pump and prevent normal operation.
(7) Entry of gases containing dust and particles may prevent normal operation of the pump.
Operation
(8) Use the pump within an ambient temperature range of 7～40°C. Use at high ambient
temperatures will dramatically reduce the life of the pump.
(9) Back pressure at the outlet while the pump is starting may overload the motor.
(10)The thermal protector operates when the pump reaches a very high temperature.
Touching the pump in this condition may result in burns.
Maintenance and Repair
(11)The fine clearances used in this pump require skill in its assembly. If a repair technician
is unavailable, replacement of all consumables should be left to the manufacturer’s
service division.
!
Note
DA-120S
DA-60D
Tube

１
1.Product Outline
1.1 Purpose of Use and Prohibitions
This product is a dry vacuum pump which employs reciprocating motion of a rubber
diaphragm for vacuum discharge.
Observe the following prohibitions to ensure normal operation of the pump.
Prohibitions
(1) This pump employs only vacuum operation, and must not be pressurized.
(2) Do not re-sell, repair, or modify this pump without the approval of the
manufacturer.
(3) This pump is not designed to be corrosion-proof. Use it only with clean air at
normal temperature, or gases of equivalent characteristics.
(4) Do not attempt to discharge gases containing particles, dust, water, or corrosive
gases.
(5) Do not operate the pump for long periods at near-atmospheric pressure.
1.2 Specifications
Table 1.1 Product Specifications (50/60 Hz)
Model
DA-60D
DA-120S
Pumping Speed
50Hz
60L/min
120L/min
60Hz
72L/min
144L/min
Ultimate Pressure
3.32×103 Pa
13.3×103Pa
Motor
single phase, 200 W, 4P, capacitor operation
Rated Current
100V
5.0/5.0 A
115V
4.6/4.6 A
200V
2.5/2.5 A
220V
2.4/2.4 A
Revolution
1423/1707 r/min
Weight
19 kg
Suction/Exhaust Pipe
14mm-OD 9mm-ID (G3/8)
Operating Ambient Temperature
7°C to 40°C
Outside dimensions (mm)
156(W) 358(L) 238(H)
162(W) 358(L) 238(H)
1.3 Thermal Protector
1) This pump is fitted with thermal protector for overload protection.
100V,200V,115V : manual reset thermal protector
220V : automatic reset thermal protector
This device shuts off the motor power supply circuit automatically to prevent burn-out
if the motor temperature rises due to a pump fault which prevents rotation.
2) It is recommended that additional protective devices (e.g. earth leakage breaker, motor
breaker) be fitted.
!
Warning
!
Note

２
See Warning (8), P04
See Caution (5), P06
2.Dimensions
!
Warning
!
Caution
Fig.2.2 DA-120S Dimensions
Fig.2.1 DA-60D Dimensions
※When motor specifications are
115V,200V,220V, a cable
termination is “loose end”.
※When motor specification is
220V, the manual reset type
thermal protector is not attached.
※When motor specifications are
115V,200V,220V, a cable
termination is “loose end”.
※When motor specification is
220V, the manual reset type
thermal protector is not attached.

３
3.Installation and Storage
3.1 Cautions for Installation and Storage
See Warning
(1)(2)(3)(5)(6)(7)(8)(9)(10)(11)(12)(13), P04
See Caution (1)(2)(3), P05
See Note (1)(2), P07
3.2 Environmental Conditions for Installation, Storage, and Operation
The fine clearances used in this pump require that the following conditions be satisfied
during storage, installation, and operation.
1. Ambient temperature of 7~40°C and maximum relative humidity of 85% during
operation.
2. Other conditions (during storage and operation).
a) Level floor of sufficient strength.
b) No condensation
c) Dust-free environment
d) Well ventilated
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
3.3 Location
The pump should be installed level in a location with minimal dust and humidity. This
location should be selected in consideration of ease of installation and removal, inspection,
and cleaning.
Particular attention should be paid to ambient temperature when fitting the pump to
equipment. Use anti-vibration rubbers to isolate the pump from vibrations in the
equipment. See 3.2 Environmental Conditions for Installation, Storage, and Operation for
details.
3.4 Electric wiring
1) We recommend end-user to equip protection device such as earth leakage breaker motor
breaker on electric wiring to prevent from motor burnout which may occur by
overcurrent.
2) This pump is equipped with power cord and plug with ground wire. Wiring and
grounding construction should be done subject to the laws of each area this pump is
used.
!
Warning
!
Caution
!
Note

４
3.5 Fluctuations in the power voltage and frequency
Standard: Rotation electricity machine general rules
JIS C 4034-1:1999，JEC-2137-2000
To the voltage change and frequency change in Domain A, in main rated values, it
operates continuously, and can be used practically convenient, and to the voltage change
and frequency change in Domain B, it shall operate with main rated values and shall be
used practically convenient.
However, operation with "it is convenient and safe is maintained on "practical use, it
means not resulting in the grade which shortens a life remarkably, and the characteristic,
a temperature rise, etc. do not apply correspondingly in the state of rating. Moreover,
main rating shows rated torque (N･m).
Fig. 3.1 Change region of the voltage and frequency

５
3.6 Checking Operation After Installation
1) Remove the rubber caps from the inlet and outlet.
2) Check that the pump switch is OFF (set to O), and connect the power supply.
Note:Ensure that the power cord is sufficient for the rated voltage and current.
Note:Extension cords should be 3-wire, with lead wires having a cross-sectional area of
at least 1.0 mm2.
3) Turn the switch ON (set to l) and check that gas is being drawn into the inlet.
4) When this check is complete, turn the power switch OFF (set to O) to stop the pump.
3.7 Piping
1) Install piping carefully to prevent leaks.
2) Piping connected to the inlet should be at least 10 mm inside diameter.
3) Ensure that piping connected to the outlet does not cause back pressure. Maximum
back pressure is 0.03 MPa (gauge pressure).
4) In case of selecting the inlet pipe and exhaust pipe that are not from our products,
please select the exhaust pipe that has same or larger inner diameter length with the
inlet pipe.
5) When evacuating a vessel, ensure that a shut-off valve is placed between the pump
inlet pipe and the vessel (see Fig.3.1).
Fig.3.2 Example of Piping Used When Evacuating a Vessel
3.8 Storage
Turn the switch OFF (set to O), remove the power plug from the outlet, place the rubber
caps over the inlet and outlet, and store the pump in an area of low humidity.
Vacuum pump
Filter
Leak valve
Shut-off valve
Vessel

６
4.Cautions for Operation
4.1 Cautions for Operation
See Danger (1)(2), P04
See Warning (8)(14)(15)(16), P04, 05
See Caution (4)(6)(7), P06
See Note (3)(4)(5)(6)(7)(8)(9)(10), P07
4.2 Operation of the Thermal Protector
1) When the thermal protector operates, switch the pump power supply OFF (set to O),
remove the power cord from the outlet, and contact the manufacturer. Note that the
motor will be very hot and should not be touched.
2) Once the cause of the fault has been removed, wait until the motor cools and restart
operation. Table.2 Protector Specifications
Temperature characteristic
Current characteristic
Operation
temp (℃)
Return temp
(℃)
Operating
time
Non-operating
characteristic
Operating
characteristic
100V
110-140
-10
7-25
at 25℃12A
65℃
5.4A
65℃
7.3A
115V
110-140
-10
7-25
at 25℃10A
60℃
4.9A
60℃
6.6A
200V
115-135
-10
5-20
at 25℃7A
60℃
2.8A
60℃
3.8A
220V
120-130
64-94
―
―
―
See Caution (5), P06
4.3 Starting in Cold Weather
Cold weather will increase the viscosity of bearing grease and harden diaphragms,
resulting in the pump being difficult to start. Follow the procedure below in such
conditions.
1) Turn the switch ON/OFF 2~3 times with the inlet open to atmosphere until the pump
starts. If the pump still does not start, raise the ambient temperature to beyond 7°C.
2) With the inlet open to atmosphere, run the pump for a few minutes to warm it.
3) Commence normal operation once the pump has warmed.
!
Warning
!
Caution
!
Note
!
Danger
!
Caution

７
5.Pump Performance
5.1 Pressure Achieved
The term “pressure achieved” as employed in the catalogue and in this manual is defined
as “the minimum pressure obtained by the pump without introduction of gas from the
pump inlet .
Note that the indicator values for pressure may differ between types of vacuum gauges.
Pressure achieved in practice, occasionally becomes higher than that noted in the
catalogue for the following reasons.
(1)The fact that the vacuum gauge is mounted a distance from the pump, the steam
generated by water droplets and rust etc on the inside walls of the pump and piping,
and a variety of gases present in the system result in increased pressure.
(2)Leaks into the vacuum system introduce other gases, resulting in increased pressure.
5.2 Evacuation Rate
The rate of evacuation for the pump varies with the type of gas entering the inlet, and its
pressure. The maximum rate of evacuation is reached when air is introduced, and
decreases slightly as pressure is reduced.
The resistance of the piping system increases with small bore piping which extends over
long distances, and this reduces the rate of evacuation.
The declared rate of evacuation for this pump is the maximum value achieved with dry
air.
5.3 Power Requirements
The power required to drive the pump is the total of the work required to overcome the
rotational resistance of the pump (mechanical work), and the work required to compress
the air (compression work), and is at a maximum at an inlet pressure of 4.0 x 104 ~8.0 x
104Pa. At pressures below this range the compression work is considerably reduced and
power is expended in mechanical work.

８
6.Maintenance, Inspection, and Repair
6.1. Cautions for Maintenance, Inspection, and Repair
See Danger (3), P04
See Warning (4)(17)(18), P04, 05
See Caution (8)(9), P06
See Note (11), P07
Maintenance and repair by the customer’s repair technician is limited to the following
procedures. Do not undertake other repairs, or make modifications other than the
standard options supplied by the manufacturer.
1) Cleaning filters
2) Replacing diaphragms
3) Replacing valves
4) Replacing O rings
6.2 Maintenance
The following checks are required at least once every three days during operation.
(1)Check for abnormal noises.
(2)Check for abnormal heating of the pump.
(3)Check that gas is discharged normally.
If a problem is found, take the measures described in 6.5 Troubleshooting List.
6.3 Regular Inspections
Inspect consumables after the first 6000 hours of operation, and replace and clean in
accordance with the Replacement and Cleaning Guide on the following page. Refer to 6.4
Replacing and Cleaning Consumables for procedures.
Request replacement by the manufacturer’s service division if a repair technician is not
available.
!
Danger
!
Warning
!
Caution
!
Note

９
<Consumables List>
Table 6.1 Consumables List(DA-60D,120S)
Description
Qty
Material
Life expectancy
Diaphragm
2 pcs
EPDM
6,000～8,000 hrs
Suction/exhaust valve
16 pcs
SUS
6,000～8,000 hrs
Pump head cover gasket
2 pcs
NBR
6,000～8,000 hrs
Air filter
2 pcs
Urethane foam
6,000～8,000 hrs
O-ring（S-14）
2 pcs
NBR
6,000～8,000 hrs
Bearing
1 set
–
Approx. 15,000 hrs
Note that the average life for a component varies with the conditions of use.
Always follow 4.1 Cautions for Operation, and remember that life is extended by running
the pump at minimal load (running the pump at minimal load is operation at the achieved
pressure (inlet closed)).
Bearings are replaced by the manufacturer’s service division.
<Replacement and Cleaning Guide>
Replace or clean components if performance is reduced or the following symptoms become
apparent.
Air Filters : Replace if dirty, hard, or stuffed.
Pump head cover gasket : Replace if hard, cracked, or
stretched.
Diaphragms :Replace if rubber is deformed, hard, or cracked.
Valves :Replace if deformed, hard, or cracked.
O rings :Replace if hard, cracked, or stretched.
Bearings :Request manufacturer for repair if abnormal noises, or abnormal motor
vibration, is noted.
<Locations for Maintenance and Inspection>
Table 6.2 Locations for Maintenance and Inspection
Operating hours
Location
Check
Checking method
Diaphragm
Deformation,
crack and hardening
Visual check
6,000 hrs
Suction/exhaust
valve
Deformation
and crack
Visual check
Pump head cover
gasket
Damage and leak
Visual check
Air filter
Dirt, clogged
and hardening
Visual check
O-ring
Damage and leak
Visual check
Bearing
Unusual sound
Auditory check

１０
6.4 Replacing and Cleaning Consumables
See Caution (9), P06
①The pump becomes very hot after operation. After stopping the pump, leave it
for 30 minutes to cool, and replace and clean components only after it has
cooled to a safe temperature.
②Use a dust mask and gloves when replacing diaphragms and valves to prevent
ingestion of fine particles in the air produced by wear of components.
③Always use gloves to prevent injury when replacing diaphragms.
!
Caution