Ulvac VD151 User manual

YK08-0028-DI-002-08
INSTRUCTION MANUAL
OIL SEALED ROTARY VACUUM PUMP
ＶＤ１５１
ＶＤ２０１
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp

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0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is exactly
what you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the
product in safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations
relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and
region you use the product. Consequently you shall be requested to attend general safety lectures
officially effective in the area, such as electrical safety, Cargo handling safety and so on. Note that
any person not attended such lectures shall be restricted from handling the product. Operators shall
need to attend such kind of training and have special knowledge, skill and title regarding the
electricity, machinery, cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together
did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to
guarantee performance and safety in such cases above. Any modification of the product by the user
is out of the scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before
installing or removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of the
shipment but shall not survive eternally. Any of the parts cannot, under any application supposed
under socially-accepted idea, help but inevitably deteriorate its performance and get easily result in
causing trouble of the product. You are kindly requested consequently to take your application
situation into consideration and help yourself to implement the protective maintenance so as to
avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble
due to wear and/or failure of the part and bring reducing the occurrence of the downtime caused by
the product trouble and fire as well as a risk of affecting the another process.
We would like to ask u again to establish the protective maintenance plan as well as conduct the
part replacement and overhaul in accordance with such a plan.
Please do not hesitate to contact our sales office or agency closest to you or the Components
Division if you had any question or unclear on the use.

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CAUTION
Any part of this Instruction Manual shall be in no manner reproduced for
the third party without our approval.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
If the user makes a mistake in handling, it indicates an imminent
possibility that
the user is subject to death or heavy injury.
WARNING
If the user makes a mistake in handling, it indicates a possibility that
the user is subject to death or heavy injury.
CAUTION
If the user makes a mistake in handling, it indicates a possibility
that the user is subject to moderate injury or it leads to significant
damage of the machine. It indicates a possibility that damage of the
machine is caused and the normal operation is impaired.
IMPORTANT
[IMPORTANT] description shall be given where there is particular
information
to notice for the operation or maintenance work of the product.
Training for the electrical safety is required as there is a risk of
electrical shock.
Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.

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0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be
restricted on the use of the product.
Use of this product and this Instruction Manual.
DANGER
Please read this Instruction Manual before starting installation,
operation check or maintenance of this product to use it in long term.
You are requested to fully understand the safety precautions,
specifications and operation methods of the product.
DANGER
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from
the Pump unit if it was exhausted by the vacuum pump.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by the
vacuum pump.
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas
was sucked in the vacuum pump. Pay attention to execute maintenance
work.
WARNING
We would be obliged to refrain from handling and/or executing
maintenance of the product if the detail of used hazardous substance
was not disclosed or the product has exhausted such substance that the
detoxification process is hardly conducted.

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iv
WARNING
You are kindly requested to acknowledge that specifications and/or
price of the product and description of the Instruction Manual are
subject to change without prior notice for improvement.
Any change shall update the version number at the top right of the
Instruction Manual cover and issue the revised version.
WARNING
This Instruction Manual shall absolutely need to be delivered to the last
user that uses the product.
WARNING
To export
this product abroad, you have to clear the examination in
accordance with the Foreign Exchange law, Foreign Trade law and
relevant decree, ordinance and order.
Please feel free to contact our sales office or agency closest to you or
our Components Division.

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Installation and storage
WARNING
1) When taking out the product from the box and lifting up the pump,
guide to use the cargo-handling equipment such as a crane utilizing
the eyebolt located at the upper part of the pump and to transfer lifting
it up. Confirm that there is no abnormality before using the eyebolts.
2) Only the technically entitled person should be in charge of conducting
the unloading operation and operating the unloading machinery.
3) There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You
are strictly restricted to enter beneath the Pump.
4) Since you may get injury due to an anchor being used in the box,
guide the worker to wear the leather gloves and to use the appropriate
tool.
Transfer
WARNING
Pump Weight
VD151：29kg
VD201：34.5kg
When you carry a pump, you have a risk of giving damage to your back.
Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it and run the Pallet truck for its
transfer.

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Countermeasure to the earthquake
WARNING
There is a risk that the Pump lays down or slides and breaks peripheral
units if it was not correctly fixed. Be sure to give allowances to the
vacuum piping and electric cables so that they absorber vibrations to
prevent them from breaking and/or dismantling.
Inlet piping <Mounting>
WARNING
Check and ensure that any of hazardous energy is blocked before
starting the operation.
Power Supply wiring <Mounting>
WARNING
1) Check and ensure that any of hazardous energy is blocked before
starting
the operation.
2) Entitled staff should conduct the wiring operation. Erroneous wiring
work might cause a fire.
3) Conduct the wiring operation correctly in compliance with laws and
rules concerning the safety (e.g. Fire Defense Law, Electric Equipment
Technology standard, Internal line cord) in the country and region you
use the product.
4) Ensure to have a correct grounding.
5) You are recommended further to install a dedicated Leak breaker. You
have a risk of getting electrical shock in case of failure or electric
leakage.
6) It is imperative to put the Overload protection device. Otherwise it
would cause the motor burn out and/or fire.

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Operation
WARNING
Do not run the Pump on blocking the exhaust outlet or putting any
device that might hamper gas passage onto the outlet. There is a risk
that the pressure inside the Vacuum pump rises up to cause break or oil
leak of the casing or Oil level gauge resulting in overload of the motor.
This product is not made as the withstand pressure structure. Ensured
pressure value of the Pump shall be 0.03MPaG (0.3kg/cm2G) (Gauge
pressure).
WARNING
Do not operate the Pump in hazardous area (where there is a risk of
creating hazardous atmosphere by explosive gas). It might cause injury
and/or fire.
WARNING
1) Be sure to t
urn OFF the Power Supply to execute check and repair.
You have a risk of getting electrical shock or injury by accidental
sudden move.
2) Person other than Repair technician should not be in charge of
dismantling, repairing or remodeling the product.
3) You have a risk of getting injured or electrical shock by a fire or
erroneous move.
4) Do not touch the Motor, vacuum pump or piping during the pump
operation and just after stopped it while the pump unit keeps high
temperature. You have a risk of getting burned.
5) Should you found any malfunction or error, just turn OFF the Power
Supply to prevent accident and ask the agency or closest Service
Center for check and repair.

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viii
CAUTION
1) Do not attempt to put your hand or article in the opening of the motor;
you have a risk of getting electrical shock, injury or casing a fire.
2) Do not touch any rotary section such as the motor, main spindle or
spindle joint during operation of the Vacuum pump; it shall bring in
injuries.
3) Strictly refrain from putting any combustible substance in and around
1m of the motor and Vacuum pump; there is a risk of getting a fire.
4) Do not put a wall or obstacle in and around 0.1m of the air outlet of the
motor (Motor edge face). You have a risk of getting burned or fire
caused by over heat.
Power Supply wiring <Dismantling>
WARNING
Be sure to cut off the electricity before starting install or dismantling
operation.
Inlet piping <Dismantling>
WARNING
1) Take off the piping following the Install Manual of the system.
2) The Inlet piping remains very hot wile after having stopped the Pump.
Be sure to take it off after the Pump has sufficiently cooled down.
3) Make airtight completely the Pump exhaust outlet with a blank flange.
Transfer
WARNING
Pump Weight
ＶＤ１５１：29kg
ＶＤ２０１：34.5kg
When you carry a pump, you have a risk of giving damage to your back.
Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it and run the Pallet truck for its
transfer.

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0.4 Types and Descriptions of Warning Labels Displayed on This Machine and
Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・You may get an electric shock in the area around a portion
with this warning label. Before maintenance or wiring, be sure
to turn off the primary power supply.
・Be sure to close the lid of the terminal box before operating
this unit. Never open it during operation.
3
During operation or for a while after operation stops, do not
touch the unit as each portion is at a very high temperature. - If
a human body touches the unit, it may get burned.
4
・This product is not made as the withstand pressure structure.
Ensured pressure value of the Pump shall be 0.03MPaG
(0.3kg/cm2G) (Gauge pressure).
・Do not run the Pump on blocking the Exhaust outlet or putting
any device that might hamper gas passage onto the outlet.
There is a risk that the pressure inside the vacuum pump rises
up to cause break the casing or Oil level gauge resulting in
overload of the motor.
・Following gases cannot be evacuated because these gases
may cause the
pump inner pressure to increase due to internal combustion.
1) explosive gas
2) flammable gas
3) gas which increases the susceptibility of substances to burn.
Long term storage of the Vacuum pump without operation
might possibly cause trouble in operation caused by rust if you
kept the Pump long time without operating it, ask a closest
Service Center for the check.
Indoor Use Only
Mount at least 100mm from side walls.
5
Before wiring, please confirm the power-supply voltage you
use.
Please confirm the power-supply voltage you'll use and change
crossline in the terminal box.
Refer to “3.5 Electrical Connection”.

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6
INLET
7
OUTLET

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Fig. 1 Warning Label
VD151
VD201

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0.5 Acceptance and Storage of The Pump
0.5.1 Unpacking/Acceptance of The Pump
WARNING
1) When taking out the product from the box and lifting up the pump,
guide to use the cargo-handling equipment such as a crane utilizing
the eyebolt located at the upper part of the pump and to transfer lifting
it up. Confirm that there is no abnormality before using the eyebolts.
2) Only the technically entitled person should be in charge of conducting
the unloading operation and operating the unloading machinery.
3) There is a risk that the Pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You
are strictly restricted to enter beneath the Pump.
4) Since you may get injury due to an anchor being used in the box,
guide the worker to wear the leather gloves and to use the appropriate
tool.
Upon delivery of the product, check first that the delivered is exactly what you have ordered
and there is no break or damage through transport or the like. Claim after use of the product
might be resolved with a charge.
Although we pay full attention on shipping, you are kindly requested to check the following
upon unpacked the product.
IMPORTANT
1) Whether the delivered is exactly the one you have ordered.
2) Whether accessories (Pump oil for one lubrication, optional parts) are
attached or not.
3) Whether there is no break or damage through transport or not.
4) Whether any bolt or nut got loose or taken off through transport or
not.
Should you found any trouble, please do not hesitate to contact our
Sales division or your agency.

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0.5.2 Transfer
WARNING
Pump Weight
VD151：29kg
VD201：34.5kg
When you carry a pump, you have a risk of giving damage to your back.
Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it and run the Pallet truck for its
transfer.
0.5.3 Ambient Condition for Storage, Install and Operation
As precise clearances are provided with this machine, be sure to fulfill the following for its
storage, install and operation;
(1) Ambient temperature and humidity for storage : -10°C to 60°C, less than 95%RH
(no freeze, no condensation)
(2) Ambient temperature and humidity for operation : 4°C to 40°C, less than 80%RH
(no condensation).However, “ULVOIL
R-42” shall be used for 4-10 °C operation
and “ULVOIL R-72” shall be used for
10-40 °C
operation.
(3) Height (for both storage and operation) : Lower than el. 1,000m.
(4) External vibration (for both storage and operation) : Vibration acceleration less than
114dB (0.5G)
(5) Miscellaneous (for both storage and operation) :
a. There shall be no corrosion behavior or explosive gas.
b. There shall be no freeze or dew formation.
c. There shall be no dust.
d. It shall be in house.
e. Another pump shall not be put on the Pump.
The Pump shall not be laid down nor put touching its motor edge face or oil gauge edge
face with the ground.
f. There shall be no direct sun beam.
g. Heat source shall be put away from the Pump.

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CAUTION
Do not give the Pump a shock or lay it down. It might impair the Pump
operation.
The rubber leg is attached to the base.In installing, set the pump in horizontal position, and
place it so that there is no rattle.
0.6 Protective Device
The pump is equipped with a three-phase 200V～240V (50/60 Hz) / 380V～460V (50/60 Hz)
motor.
This motor is not equipped with the protective device. Put an overload protective device to
connect through the motor with the Power Supply. It is imperative to put the overload protective
device under direction of the Electrical Installation Technical Standard (1965, Department of
Trade and Industry decree No. 61). Refer to “3.5 Electric connection” to select the overload
protective device. It is recommended to put together another protective device such as a leakage
breaker.
CAUTION
It is imperative to put the Overload protection device. Otherwise it
would cause the motor burn out and/or fire.

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Contents-1
Table of Contents
0. Before Using This Product .......................................................................................................................i
0.1 Safety Symbol Marks.....................................................................................................................ii
0.2 Meanings of Safety Symbol Marks ................................................................................................ii
0.3 Safety Precautions........................................................................................................................iii
0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions
.........................................................................................................................................................ix
0.5 Acceptance and Storage of The Pump........................................................................................xii
0.5.1 Unpacking/Acceptance of The Pump...........................................................................................xii
0.5.2 Transfer........................................................................................................................................ xiii
0.5.3 Ambient Condition for Storage, Install and Operation................................................................. xiii
0.6 Protective Device........................................................................................................................xiv
1. For Your Safety Use ............................................................................................................................... 1
1.1 This Product Intrinsic Hazardous Nature and Safety Measures .................................................. 1
1.1.1 Danger Leakage of dangerous gas and dangerous materials ......................................... 1
1.1.2 Warning Transfer of heavy material.................................................................................. 1
1.1.3 Warning Electric shock...................................................................................................... 2
1.1.4 Warning Explosion ............................................................................................................ 2
1.1.5 Caution High temperature................................................................................................. 2
1.2 Chemical Material Safety Data Sheet（MSDS）............................................................................ 3
2. Pump Outline.......................................................................................................................................... 4
2.1 Characteristics .............................................................................................................................. 4
2.2 Performance Specifications.......................................................................................................... 5
3. Mounting................................................................................................................................................. 8
3.1 Installation..................................................................................................................................... 8
3.2 Lubrication .................................................................................................................................... 8
3.3 Air Suction Piping........................................................................................................................ 10
3.4 Exhaust Connection.....................................................................................................................11
3.5 Electrical Connection .................................................................................................................. 12
4. Operation.............................................................................................................................................. 17
4.1 Caution on Operation.................................................................................................................. 17
4.2 Operation Start............................................................................................................................ 19
4.3 Operation Stop............................................................................................................................ 21
4.4 Gas Ballast Function................................................................................................................... 22
The............................................................................................................................................................ 23
4.5 Vacuum Pump Oil For cold district ............................................................................................. 23
4.6 Oil mist trap (Optional)................................................................................................................ 24
5. Pump Performance .............................................................................................................................. 26
5.1 Ultimate Pressure ....................................................................................................................... 26
5.2 Exhaust Speed............................................................................................................................ 26

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Contents-2
5.3 Required Motive Energy ............................................................................................................. 28
6. Maintenance and Check ...................................................................................................................... 29
6.1 Maintenance ............................................................................................................................... 29
6.2 Regular Check ............................................................................................................................ 29
6.2.1 Pump Oil Level Check................................................................................................................. 30
6.2.2 Vacuum Pump Oil Check............................................................................................................. 30
6.2.3 Oil Leak Check ............................................................................................................................ 33
6.2.4 Checking The Gas Ballast Function............................................................................................ 33
6.2.5 Checking The Metal Mesh at The Suction Inlet .......................................................................... 33
6.2.6 Checking The Noise and Abnormal Vibration ............................................................................. 33
6.2.7 Checking The Coupling and Spider............................................................................................. 33
6.2.8 Checking The Oil Mist Trap ......................................................................................................... 34
6.2.9 Checking the drain valve ............................................................................................................. 35
6.3 Checkup after storage for a long period ..................................................................................... 35
6.4 Overhaul...................................................................................................................................... 35
6.5 Trouble check list ........................................................................................................................ 36
7. Disposal................................................................................................................................................ 42
8. Product Warranty.................................................................................................................................. 43
8.1 Warrantable Items....................................................................................................................... 43
8.2 Duration of guarantee ................................................................................................................. 43
8.3 Warrantee scope......................................................................................................................... 43
8.4 Response procedure .................................................................................................................. 43
8.5 Disclaimer ................................................................................................................................... 44
8.6 Others ......................................................................................................................................... 44
9. Main Displacement Parts ..................................................................................................................... 45
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER

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Contents-3
Tables and Illustrations
Table. 1 Performance specifications .......................................................................................................... 5
Table. 2 Electric capacity of the motor overload protector....................................................................... 13
Table. 3 Specification of the temperature sensor (PTO).......................................................................... 16
Table. 4 Recommended replacement cycle of the vacuum pump oil ...................................................... 30
Table. 5 Trouble check list........................................................................................................................ 36
Table. 6 Main displacement parts list (VD151)......................................................................................... 45
Table. 7 Main displacement parts list (VD201)......................................................................................... 46
Fig. 1 Warning Label ..................................................................................................................................xi
Fig. 2 VD151 Dimensional drawing............................................................................................................ 6
Fig. 3 VD201 Dimensional drawing............................................................................................................ 7
Fig. 4 Lubrication and oil level indication ................................................................................................... 9
Fig. 5 Connection to vacuum chamber (example)................................................................................... 10
Fig. 6 Terminal box internal wiring diagram ............................................................................................. 14
Fig. 7 Electrical wiring diagram ................................................................................................................ 14
Fig. 8 To use Oil mist trap “Model TMX-1” for “VD151 or VD201”........................................................... 25
Fig. 9 When having mounted oil mist trap and adapter ........................................................................... 25
Fig. 10 Show the relationship between the suction pressure and pumping speed - MODEL
VD151/VD201........................................................................................................................................... 27
Fig. 11 Replacement of coupling spider................................................................................................... 34

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1. For Your Safety Use
1.1 This Product Intrinsic Hazardous Nature and Safety Measures
Before operating or checking this machine, thoroughly read this paragraph, and after fully
understanding about latent danger and on how to avoid danger, perform the work.
1.1.1 Danger Leakage of dangerous gas and dangerous materials
Factors Avoidance methods and measures
Leakage of poisonous and
combustible gas
Do not exhaust any hazardous gas such astoxic
and combustible.
Getting injured on touching any
toxic pump oil, pump,
generated material or sucked
substance at the occasion of
check or disposal.
1) When you check the pump, please wear a brace
that supports the toxic substances that exhaust
the pump.
2) To overhaul or dispose, ask the special agency
to do the detoxification process.
3) Ask the disposal agency licensed by
theadministration for disposal.
1.1.2 Warning Transfer of heavy material
Factors Avoidance methods and measures
Getting injured on transferring
the pump.
Pump weight
ＶＤ１５１： 29kg
ＶＤ２０１： 34.5kg
1) Only technically entitled person should be
incharge of loading/unloading and operating
machines.
2) There is a risk that the Pump might drop orlay
down when attempted unreasonable operation
or machinery setup was not sufficient. You are
strictly restricted from entering beneath the
Pump.

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1.1.3 Warning Electric shock
Factors Avoidance methods and measures
Getting electrical shock on
touching the current-carrying
part of the motor.
1) Be sure to cut the electricity to do electrical
connection. Never fail to take the grounding.
2) Ensure to close the cover of motor terminal
box and never open it during operation.
3) Be sure to cut the electricity to do checking or
installation.
4) Never attempt to put in the hand or bar into the
opening of the Motor.
Motor terminal mount gets burnt
Tighten close the terminal. Check the tightening
once a month.(Refer to “3.5 Electrical
connection”)
1.1.4 Warning Explosion
Factors Avoidance methods and measures
Pressure inside the pump rises
up and the pump explodes.
Ensured pressure value of the Pump is
0.03MPaG (0.3kg/ cm2G) (Gauge
pressure).Check the Exhaust side pressure of the
pump. If it was over 0.03 MPaG(0.3 kg/cm2
G)(Gauge pressure) take away anything in and
around the exhaust outlet that hampers gas
passage. If you used the Oil mist trap, replace it
so that it does not hamper the gas passage.
1.1.5 Caution High temperature
Factors Avoidance methods and measures
Getting burnt on touching the
high temperature part.
1) The Pump gets high temperature during
operation.Apply an appropriate protection to avoid
to touch the surface as necessary.
2) As the surface temperature is high, you have a
risk of getting burnt by accidentally touching it
with the hand or the like. Refrain from touching
the pump during operation. Wait until the
temperature sufficiently cools down after having
stopped the pump to conduct check or something.
3) Do not touch the Pump unit or the Motor when
operating the Gas ballast valve.