Ulvac UTM2300 Series User manual

Model
UTM2300 Series
YK17-0012-102-00 (263-43466)
INSTRUCTION MANUAL
Turbo Molecular Pump
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.

This page is intentionally left blank.

i
Introduction
Thank you for choosing the ULVAC Turbo Molecular Pump.
Please read the instruction manual carefully before using turbo molecular pump, and save the
instruction manual for future reference.
Copyrights and Disclaimers
This document is copyrighted by ULVAC, Inc. Please refrain from reproducing or copying part or
all of this document without permission from ULVAC.
In an effort to improve the product, this document may be revised in the future without notice.
Every effort has been made to prepare an accurate and complete manual, but if an error or
omission should be discovered, revisions might not be possible immediately.
ULVAC does not take responsibility for any effects that may result from the use of this manual.
Copyright 2017 ULVAC, Inc.All rights reserved.
©

ii
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
WARNING
CAUTION
NOTICE
WARNING
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by ULVAC may do service of
products.
WARNING
Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper, or cause injury by
electrical shock.
WARNING
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injury or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injury or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.

iii
WARNING
Do not operate the turbo molecular pump until safety is confirmed.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・Fix the pump to host equipment according to Section 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
WARNING
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
WARNING
Do not remove or do maintenance the turbo molecular pump, before safety has been
confirmed.
・Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by ULVAC. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular
pump with an inert gas and/or apparel are recommended when the turbo molecular pump has
been used in applications that required the use of corrosive, reactive, stimulative, or toxic
gasses.
・Please take an adequate safety precaution based on the result of risk assessment of
explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.
・Please execute the maintenance task of the turbo molecular pump after shutting power off by
following proper procedure and confirming that the rotor has stopped completely.
WARNING
If the equipment is used in a manner not specified by the manufacturer, the protection provided
by the equipment may be impaired.

iv
CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere.
CAUTION
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.
CAUTION
The standard power input voltage is 200 to 240 VAC ± 10 %. Connection to the incorrect input
voltage can cause damage to the equipment. Supply the power via a circuit breaker (rating 15 A).
Please provide PE (Protective Earth) connection to the terminal of a "PE" marked wire in final
application. Please provide PE (Protective Earth) connection to the chassis of pump in final
application.

v
CAUTION
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
In the case of the specifications with the water valve, drain the water from water pipe during
pump power on and water valve open.
After the water drained, shut water pipe by the cap which is attached at shipment.
CAUTION
This turbo molecular pump has the integrated power supply.
Do not separate the power supply from the pump, or the pump cannot be operated even if the
power supply is connected again.
CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
○ Operating Precautions
(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
(2) Protect the pump from any and all types of impact during operation. Impacts can also be
transmitted via the flange, so be careful of impacts near the pump as well.
(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces
electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo
molecular pumping system ((1) pump, (2) cables, etc).
(4) This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
(6) Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or
fluorine.
(7) When using the variable speed function to change the pump rotation rate, use a rotation
rate that does not cause resonance with other devices installed at the site.
(8) Be careful to prevent a rapid pressure rise or air rush during operation.

vi
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.

vii
○Explanation of Label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) Pump Securement Label
If the pump is not secured properly, it could
become detached and cause injury or damage to
surrounding equipment. Be sure to secure the
pump according to Section 5.1.2 "Installation of
the Pump".
(3) Remove Label
Do not remove cover, or else it may cause some
changes inside and it is failed.
(4) Cable Label
Be sure to use specified cable for this power
supply. If not, it may cause connector be broken
and power supply itself failed.
(5) Heavy Equipment Label
Be sure to lift by two or more people or use the
lifter or the crane etc. when lifting because this
product is a heavy lift.
(6) SECURITY Seal
This label certificates that the product was made
or maintained by ULVAC or by ULVAC authorized
facility. In case "this label is removed" or "there is
a mark showing once this label has been
removed", ULVAC warranty shall not be applied to
the product.
(7) Name Plate

viii
○Location of Label

Table of contents
ix
Table of contents
Introduction
Copyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i
Precautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
○ Operating Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
○Explanation of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
○Location of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viii
Table of contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix
Section 1 OUTLINE AND DESCRIPTIONS
1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.2 Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1 Outside Drawing of Pump Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.2 Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.3 Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.4 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.5 Document List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Section 2 IDENTIFICATION AND FUNCTION
2.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.2 Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.3 External I/F Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Section 3 CONSTRUCTION AND PRINCIPLE
3.1 Pump Construction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.2 Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . 12
3.3 Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Table of contents
x
Section 4 SPECIFICATIONS
4.1 Standard Specifications for Pump Unit. . . . . . . . . . . . . . . . . . 18
4.2 The Maximum Allowable Flow Rate . . . . . . . . . . . . . . . . . . . . 21
4.3 Standards Fulfilled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Section 5 INSTALLATION
5.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.1.1 Pump Mounting Direction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.1.2 Installation of the Pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.1.2.1 Instruction and Lifting Method. . . . . . . . . . . . . . . . . . . . . . . . . . . 27
5.1.2.2 Installation of Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . 28
5.1.3 Example of Piping Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
5.1.3.1 Connection of Exhaust Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
5.1.3.2 Connection of Cooling Water Line . . . . . . . . . . . . . . . . . . . . . . . 31
5.2 Connection of Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . 32
5.3 Preparation for Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
5.4 Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.5 Notes on Transportation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Section 6 OPERATION
6.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
6.1.1 Introduction : Operation Modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
6.2 Startup Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
6.2.1 Start-up Preparation Sequence in LOCAL Mode . . . . . . . . . . . . . . . . 40
6.2.2 Start-up Preparation Sequence in REMOTE-control Connector. . . . . 40
6.2.3 Start-up Preparation Sequence in Other Communication Means. . . . 41
6.3 Start-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.3.1 Start-up Sequence in LOCAL Mode . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.3.2 Start-up Sequence in REMOTE-control Connector . . . . . . . . . . . . . . 42
6.3.3 Start-up Sequence in Other Communication Means. . . . . . . . . . . . . . 42
6.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
6.4.1 Preparations Prior to Shutting Down Operation . . . . . . . . . . . . . . . . . 43
6.4.2 Shutting Down Sequence in LOCAL Mode . . . . . . . . . . . . . . . . . . . . . 44
6.4.3 Shutting Down Sequence in REMOTE-control Connector . . . . . . . . . 44
6.4.4 Shutting Down Sequence in Other Communication Means . . . . . . . . 44

Table of contents
xi
6.5 Variable Speed Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.5.1 Outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.5.2 Operation from Start-up to Low Speed Rotation. . . . . . . . . . . . . . . . . 46
6.5.2.1 REMOTE Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
6.5.2.2 Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
6.5.3 Operation from Rated Speed Rotation to Low Speed Rotation . . . . . 47
6.5.3.1 Remote Control Startup Procedure . . . . . . . . . . . . . . . . . . . . . . 47
6.5.3.2 Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation . . . . . 48
6.5.4.1 REMOTE Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
6.5.4.2 Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
6.6 Software Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
6.7 Remote-control Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . 51
6.7.1 Specification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
6.7.2 Pin Assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
6.7.3 Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
6.8 Communication Specifications. . . . . . . . . . . . . . . . . . . . . . . . 54
6.8.1 RS-232C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.8.1.1 Transfer Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.8.1.2 Connector Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.8.1.3 CABLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.8.2 RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.8.2.1 Transfer Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.8.2.2 Connector Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.8.2.3 CABLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.8.3 Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1 Recommended Maintenance Intervals . . . . . . . . . . . . . . . . . 62
8.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . 63
8.3 Touch-down Bearing Replacement . . . . . . . . . . . . . . . . . . . . 63
8.4 Check of the Rotor Blades . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
8.5 Power Supply Unit Parts Replacement . . . . . . . . . . . . . . . . . 64
8.6 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . 65

Table of contents
xii
Section 9 TROUBLESHOOTING
9.1 Vacuum Pressure Rise. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
9.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . 70
9.3 Nothing Happens After an Operation is Made . . . . . . . . . . . . 71
9.4 Power Failures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
9.4.1 Power Failure Counter-operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
9.5 Alarm Detection Capabilities . . . . . . . . . . . . . . . . . . . . . . . . . 74
9.5.1 Movement in Alarm Detection Capabilities (ALARM) . . . . . . . . . . . . . 74
9.5.2 Movement in Alarm Detection Capabilities (WARNING). . . . . . . . . . . 74
9.5.3 Reset Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Section 10 WARRANTY CLAUSES
○ Warranty Clauses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
○ Warranty Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
○ Duration of Guarantee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
○ Warrantee Scope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
○ Response Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
○ Disclaimer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
○ Others. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

1
1OUTLINE AND
DESCRIPTIONS
1.1 Outline
1.2 Descriptions
1.2.1 Outside Drawing of Pump Unit
1.2.2 Power Cable
1.2.3 Standard Accessories
1.2.4 Option
1.2.5 Document List

SECTION 1 OUTLINE AND DESCRIPTIONS
2
11.1 Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications ; Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・Pump Unit with Integrated Controller 1
・ Power Cable 1
・Standard Accessories 1 Set

1.2 Descriptions
3
1
1.2 Descriptions
1.2.1 Outside Drawing of Pump Unit
Fig.1-1 UTM2300 Series
Description Inlet flange A B C D ΦE ΦF n-Φd
UTM2300A-MI-AVWX
UTM2300A-MI-BVWX VG250 229 286 376 22.5 Φ320 Φ350 12-Φ13
UTM2300A-MI-AFWX
UTM2300A-MI-BFWX ISO250F 229 286 376 17.6 Φ310 Φ335 12-Φ11

SECTION 1 OUTLINE AND DESCRIPTIONS
4
11.2.2 Power Cable
One of followings.
1.2.3 Standard Accessories
Description Notes
1 AC CABLE, 5 MT
2 AC CABLE, 10 MT
3 AC CABLE, 15 MT
4 AC CABLE, 20 MT
5 AC CONNECTOR SET
・Connector
・Clamp
・Core
・Assembling procedure
Description Qty Note
1 Gasket (inlet flange) 1 VG250 : O-ring gasket
ISO250F : Not included
2 Bolt set (inlet flange) ―VG250 : Not included
ISO250F : Not included
3 Dust cap (outlet flange) 1 KF40
4 Remote-control connector 1 D-sub 37 pin male
5 Serial-control connector 1 D-sub 9 pin female
6 Important safety instructions 1 English and Japanese
7 Instruction manual CD-ROM 1

1.2 Descriptions
5
1
1.2.4 Option
Please select if necessary.
Instruction Manual
Gas Purge Adaptor
1.2.5 Document List
Document lists that relates to this product are as follows.
Description Note
1 Instruction manual for UTM2300 series Booklet English
2Instruction manual for Serial communication (for UTM2300/3400
series) Booklet English
Joint Orifice size Description
1 KF10 (Clamp / Centering with O-ring) Φ0.5 mm GP ADAPTOR, 0.5 KF10
2 KF10 (Dust cap) Φ0.5 mm GP ADAPTOR 0.5, KF DUST CAP
3 UJR 6.35 (Male) Φ0.5 mm GP ADAPTOR, 0.5 UJR
4 SWAGELOK Φ6.35 Φ0.5 mm GP ADAPTOR, 0.5 SWG
5 4-VCR (Female) Φ0.5 mm GP ADAPTOR, 0.5 VCR
Component
1Instruction manual for UTM2300 series (This manual)
(Including in instruction manual CD-ROM.)
2 Instruction manual for Serial communication (for UTM2300/3400 series)
3 Important safety instructions for UTM2300 series

6
1
1.2 Descriptions
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