Zeiss MMZ M User manual

MMZ M
Coordinate measuring machine
Operating Instructions
(Translation of the original operating instructions)

Read before commencement!
–Please read these operating instructions before using the ZEISS prod-
uct.
–For your own safety, always keep all relevant accompanying docu-
ments ready to hand.
The dissemination or reproduction of this document, even in extracts, is
not permitted unless we have expressly granted permission in writing.
Violations shall result in claims for damages.
© ZEISS. All rights reserved.
This manual is subject to change, and the ZEISS product described as
well as the components therein are subject to technical modifications.
All product names are registered trademarks or trademarks of the re-
spective owners.
Contact
Carl Zeiss Industrielle Messtechnik GmbH
Carl-Zeiss-Strasse 22
73447 Oberkochen, Germany
MMZ M
Operating Instructions
2021-10-05
61211-1270302

Table of contents 1
61211-1270302 MMZ M 1
Table of contents
Preface
Information about this document........................................ Preface 1
Configuration of safety instructions .................................... Preface 2
Markup elements ................................................................ Preface 4
Chapter 1 Introduction
General specifications ...................................................................1-2
Scope of delivery....................................................................................................1-2
Information on the properties of the materials used ...............................................1-2
CE marking ............................................................................................................1-2
Standards and regulations......................................................................................1-3
Separate document................................................................................................1-4
Warranty .......................................................................................1-5
Chapter 2 Safety
Intended use .................................................................................2-2
Warranty ...............................................................................................................2-2
CMM ....................................................................................................................2-2
Probing system ......................................................................................................2-3
Changer rack .........................................................................................................2-4
Rotary table ...........................................................................................................2-4
Safe operation of the CMM ..........................................................2-6
Operator requirements...........................................................................................2-6
Defining a competent specialist..............................................................................2-6
Requirements for safe use ......................................................................................2-7
Requirements for automatic measuring runs...........................................................2-8
Basic safety instructions..........................................................................................2-9

2 Table of contents
261211-1270302 MMZ M
General precautions .............................................................................................2-11
Safety on the CMM .....................................................................2-13
Safety symbols on the CMM ................................................................................2-13
Safety devices ......................................................................................................2-13
Light barrier .........................................................................................................2-17
Checking the safety devices ........................................................2-22
What you should know!.......................................................................................2-22
Check by the operator .........................................................................................2-22
Check by a specialist ............................................................................................2-26
Chapter 3 Description
Identification of a CMM ................................................................3-2
Design of the CMM ......................................................................3-3
Components and functions............................................................3-4
Bridge....................................................................................................................3-4
Version and measuring range.................................................................................3-4
Coordinate axes .....................................................................................................3-5
Reference standard ...............................................................................................3-6
Service unit and oil pump.......................................................................................3-7
MSR changer rack ..................................................................................................3-8
Control and operation .................................................................3-10
Control cabinet ....................................................................................................3-10
Control elements on the controller cabinet...........................................................3-11
Operation ............................................................................................................3-14
Probing system............................................................................3-18
Types of probing systems .....................................................................................3-18
Contact probing systems......................................................................................3-18
Optical probing systems .......................................................................................3-20

Table of contents 3
61211-1270302 MMZ M 3
Chapter 4 Technical data
CMM .............................................................................................4-2
Note ......................................................................................................................4-2
General data ..........................................................................................................4-2
Characteristic values of the coordinate measuring machine ....................................4-2
Electrical data ........................................................................................................4-2
Amount of heat generated.....................................................................................4-3
Compressed air ......................................................................................................4-3
Travel speed...........................................................................................................4-3
Environmental conditions.......................................................................................4-4
Chapter 5 Transport and installation
Notes.............................................................................................5-2
Transport ......................................................................................5-3
To be observed on delivery.....................................................................................5-3
Transport conditions ..............................................................................................5-3
Installation ....................................................................................5-4
Choosing the installation site..................................................................................5-4
Installation requirements........................................................................................5-4
Chapter 6 Start-up
Preparations for start-up...............................................................6-2
Before you start! ....................................................................................................6-2
Connecting the power supply ................................................................................6-2
Connecting the compressed air supply ...................................................................6-2
Setting up the changer rack ...................................................................................6-3
Visual check and check list .....................................................................................6-3
Starting the CMM..........................................................................6-5
Safety measures and notes.....................................................................................6-5
CMM starting sequence .........................................................................................6-6

4 Table of contents
461211-1270302 MMZ M
Mounting / changing the probe.....................................................6-8
What you should know!.........................................................................................6-8
Fastening the probe holder and the probe .............................................................6-8
Replacing a probe with an articulating system ......................................................6-10
Preparing the stylus system.........................................................6-12
Setting up the workpiece ............................................................6-13
Safety instructions................................................................................................6-13
Precautionary measures .......................................................................................6-14
Lowering the workpiece onto the measuring plate...............................................6-15
Positioning the workpiece ....................................................................................6-15
Clamping the workpiece ......................................................................................6-16
Start-up checklist ........................................................................6-17
Chapter 7 Measuring operation
What you should know! ................................................................7-2
Measuring software ...............................................................................................7-2
Operating mode ....................................................................................................7-2
Coordinate systems................................................................................................7-2
Probing and scanning ............................................................................................7-3
Tips for effective operation.....................................................................................7-3
Automatic stylus system change.............................................................................7-4
Safety during the measuring operation .........................................7-5
Safety instructions..................................................................................................7-5
Precautions ............................................................................................................7-7
Preparation for measuring operation ............................................7-9
Prerequisites for a precise measuring run................................................................7-9
Homing run ...........................................................................................................7-9
Stylus system qualification....................................................................................7-11
Temperature compensation .................................................................................7-17
Probing the workpiece ................................................................7-20

Table of contents 5
61211-1270302 MMZ M 5
How to ensure correct measurement ...................................................................7-20
Probing procedure ...............................................................................................7-20
Evaluation of the measuring results ............................................7-23
Limit values for deviations ....................................................................................7-23
Causes of scattering and measurement errors ......................................................7-23
Terminating the measuring operation .........................................7-25
What you should know!.......................................................................................7-25
Shutting down the CMM .....................................................................................7-25
Chapter 8 Errors and faults
Errors occurring prior to the measuring operation ........................8-2
Malfunctions during measuring operations...................................8-3
Special measures...........................................................................8-5
After a collision ......................................................................................................8-5
CMM in end positions............................................................................................8-7
Service features.............................................................................8-8
Support..................................................................................................................8-8
Teleservice .............................................................................................................8-8
Chapter 9 Maintenance and care
Maintenance .................................................................................9-2
Lubrication ....................................................................................9-4
Care...............................................................................................9-5
What you should know!........................................................................................9-5
Safety instructions..................................................................................................9-6
Measures of precaution .........................................................................................9-6
Overview ...............................................................................................................9-7
Care measures .......................................................................................................9-8
Inspection measures.............................................................................................9-11

6 Table of contents
661211-1270302 MMZ M
Chapter 10 Shutdown and disposal
Shutdown....................................................................................10-2
Disposal.......................................................................................10-3
Package ...............................................................................................................10-3
CMM ...................................................................................................................10-3
Glossary
Alphabetic index

Preface 1
Preface
Information about this document
The MMZ M coordinate measuring machine (CMM) is described in these
operating instructions. These operating instructions apply to all types of
the MMZ M series.
These operating instructions address operators and users of the coordi-
nate measuring machine.
61211-1270302 MMZ M 1

2 Preface
Configuration of safety instructions
261211-1270302 MMZ M
Configuration of safety instructions
Safety instructions indicate a personal health hazard. We distinguish
three different levels: Danger, warning and caution. All three safety in-
structions are marked with the same warning symbol. The designation
of the safety instruction is shown beside the symbol. The safety instruc-
tions used are described below.
Configuration of a safety instruction
A safety instruction may have the following components:
–Warning symbol and designation of the safety instruction (signal
word): Danger, warning or caution.
–Source and cause of the danger
–Consequences for the user due to non-observance of the safety in-
struction
–Required measures to be taken by the user to avoid possible conse-
quences
–A measure may cause an intermediate result.
–At the end of all measures, a final result may be caused.
Personal health hazard
DANGER
A »danger« indicates an imminent risk to life and limb.
Non-observance of this safety instruction when the described risk oc-
curs causes death or serious injuries.
Example: Electric shock due to high electric voltage.
WARNING
A »warning« indicates a possible risk to life and limb.
Non-observance of this safety instruction when the described risk oc-
curs may cause death or serious injuries.
Example: Risk of severe crushing of the body caused by heavy loads.
CAUTION
A »caution« indicates a personal health hazard.
Non-observance of this safety instruction when the described risk oc-
curs may cause slight to moderate injuries.
Example: Risk of minor crushing of the limbs caused by small loads.

Preface 3
Configuration of safety instructions
61211-1270302 MMZ M 3
Risk of material damage
If there is no personal health hazard, but the CMM or components may
get damaged, this is pointed out by the following notice.
This symbol refers to possible damage to the CMM.
Non-observance of this safety instruction when the event occurs may
cause damage to the CMM or one of its components.
Example: Collision of the ram with a workpiece.

4 Preface
Markup elements
461211-1270302 MMZ M
Markup elements
Text may be displayed differently in this document. Examples and the
meaning of the representation type are described below:
Example Meaning
not Words to be emphasized are represented in italics.
The italic print is sometimes used to mark a subheading, e.g. Exam-
ples:
Main switch Any reference to control elements in the text is highlighted typograph-
ically.
Tolerance field Designation of parts of software windows.
Cancel Marking of buttons
RETURN Keys of the keyboard are represented as small capitals.
"InstallShield Wizard com-
pleted"
Software messages
File " Open Representation of menu items
Code Source code
...\CALYPSO\protocol\prot-
form
File and directories
CALYPSO Product name
ZEISS Company name
CAUTION!The measur-
ing table must be clean.
Safety instructions embedded in the text.
Note:Pay attention to the
correct orientation of the
qualification marks.
Note embedded in the text.
[1] Representation of position numbers in texts

1
61211-1270302 MMZ M 1-1
Introduction
This chapter contains:
General specifications ..................................................................................1-2
Warranty .....................................................................................................1-5
Introduction

General specifications
1-2 61211-1270302 MMZ M
General specifications
Scope of delivery
The standard version of the MMZ M coordinate measuring machine
comprises the following components:
–Coordinate measuring machine (CMM)
–Control unit
–Control console (standard version)
–Computer with peripheral devices
–Software, e.g. CALYPSO
–Documents
–Probing system
–Master stylus
–Reference sphere - for qualifying styli
–Temperature sensor – for measuring the workpiece temperature
Information on the properties of the
materials used
Treated surfaces
Due to the treatment process, treated surfaces may show irregularities in
color. These irregularities do not constitute a defect authorizing a com-
plaint. The promised measuring accuracy of the coordinate measuring
machine will not be affected by the irregularities.
CE marking
EC declaration of conformity as defined by EC
Machinery Directive 2006/42/EC Appendix II No. 1A
We hereby declare that, due to its design and construction, the version
of the machine named below which we placed on the market complies
with the requirements set out in EC Directive 2006/42/EC and in the ad-
ditional EC directives listed below.
If modifications are made to the machinery without our prior approval,
this declaration will no longer be valid.

General specifications
61211-1270302 MMZ M 1-3
Designation of the ma-
chine:
Coordinate measuring machine
CMM type: MMZ M
Additional EU directives: –EMC Directive (2014/30/EU)
–RoHS Directive (2011/65/EU)
Applied harmonized stan-
dards, in particular:
–EN 60204-1
–EN 61326-1 Table 2, Class A
–EN 61010-1
–EN ISO 12100
–EN 63000
The product bears the CE marking on its type plate.
Standards and regulations
The CMM has been designed, manufactured and tested according to
the following standards and regulations:
Regulations
–DGUV regulation 3:
Accident prevention regulations - electrical systems and equipment
Standards
–EN (IEC) 61010-1:
Safety requirements for electrical equipment for measurement, con-
trol and laboratory use
–GB 4793.1
Safety requirements for electrical equipment for measurement, con-
trol and laboratory use
–EN (IEC) 60204-1:
Safety of machinery. Electrical equipment of machines
–EN ISO 12100:
Safety of machinery. General principles for design. Risk assessment
and minimization
–EN (IEC) 61326-1:
EMC - Interference immunity; table 2, interference emission, Class A

General specifications
1-4 61211-1270302 MMZ M
–GB 4824
Industrial, scientific and medical (ISM) radio frequency equipment -
Electromagnetic disturbance characteristics - Limits and methods
–EN (IEC) 60825-1:
Safety of laser devices
–CAN/CSA-C22.2 No 61010-1-12:
Safety requirements for Electrical Equipment for measurement, con-
trol and laboratory use.
–UL 61010-1 3rd Ed.:
Standard for Electrical Equipment for Laboratory use.
–EN (IEC) 62471:
Photobiological safety of lamps and lamp systems.
Separate document
Components for which separate documents are available are referred to
in these operating instructions.
The following documents are delivered with each CMM:
–BP26SE control console
–Sensors (information on probing systems)
Optional :
–LineScan
Documentation on data medium
The above documents and others are also contained on the supplied
data medium.

Warranty
61211-1270302 MMZ M 1-5
Warranty
Notes
–The specifications and statements in the German operating instruc-
tions are prevalent and binding for translations into other languages.
–All rights pertaining to changes in the coordinate measuring machine
and its options, the software packages and the pertaining docu-
ments reserved.
–All rights reserved, especially in cases of granting a patent or register-
ing a utility model.
The warranty does not cover the following:
–incidentals
–wearing parts.
Exclusion of warranty
The manufacturer cannot be held liable.....
–for actions contrary to the instructions given in this manual,
–for actions contrary to the instructions given in the separate »Installa-
tion site requirements« brochure,
–in case of alteration of the coordinate measuring machine version
delivered by us,
–if maintenance work is not carried out by personnel specially trained
at ZEISS,
–if measures for care are not taken by the operator or user according
to the specified measures,
–if no original spare parts are used for maintenance and repair work,
–if the necessary maintenance work and measures for care are not
carried out according to the technical documentation.
Any information regarding maintenance work and measures for care, in-
cidentals and wearing parts is specified in separate publications.

Warranty
1-6 61211-1270302 MMZ M

2
61211-1270302 MMZ M 2-1
Safety
This chapter contains:
Intended use................................................................................................2-2
Safe operation of the CMM ........................................................................2-6
Safety on the CMM....................................................................................2-13
Checking the safety devices .......................................................................2-22
Safety

Intended use
2-2 61211-1270302 MMZ M
Intended use
Warranty
The coordinate measuring machine (CMM) may be used only for its in-
tended purpose. The operator is liable for any damage incurred during
any reasonably foreseeable misuse.
CMM
The CMM can be used to determine the geometric sizes of workpieces.
The workpieces may be made of metal or plastic. Geometric sizes are
width, length, height as well as the diameter and depth of bores, for ex-
ample. The position of bores is calculated from the measuring data. Fur-
thermore, the form of workpieces can be determined by means of a spe-
cial software.
NOTE
The CMM may be used only for determining geometric parameters of
workpieces. The CMM must not be used for any purposes other than
those listed below.
Only workpieces and objects required for measurement may be placed
on the measuring plate.
Functions of the CMM:
–Workpiece probing in six directions (±X, ±Y, ±Z).
The CMM can be moved in the axes X, Y and Z. Probing is per-
formed by means of a probing system. For measurement, the work-
pieces must be fastened on measuring plate or devices.
–The measuring plate and devices have the following functions:
–Holding and securing one or more workpieces
–Holding and securing qualification tools
–Holding and securing a changer rack (optional)
–Holding and securing a rotary table (optional)
–Fastening of the workpieces, installation of changer racks, quali-
fication tools and rotary table by use of the threaded holes pro-
vided in the measuring plate.
–Moving workpieces by means of the rotary table.