Zeiss SIGMA Series User manual

Instruction Manual
ZEISS SIGMA series
Field Emission Scanning Electron Microscope

ZEISS SIGMA series
Original Manual
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena
Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy Ltd
1030 Cambourne Business Park
CB23 6DW Cambridge
United Kingdom
Document Name: Instruction Manual ZEISS SIGMA series
Order Number: 352102-9344-006
Revision: 7
Language: en-US
Effective from: 11/2020
© 2021 Without the prior written consent of ZEISS, this document or any part of it must neither be translated nor reproduced or
transmitted in any form or by any means - including electronic or mechanic methods, by photocopying, recording or by any in-
formation or filing system. The right to make backup-copies for archiving purposes shall remain unaffected thereby. Any viola-
tions may be prosecuted as copyright infringements.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply that such names are
exempt from the relevant intellectual property laws and regulations and therefore free for general use. This shall also apply if
this is not specifically referred to. Software programs shall entirely remain the property of ZEISS. No program or subsequent up-
grade thereof may be disclosed to any third party, copied or reproduced in any other form without the prior written consent of
ZEISS, even if these copies or reproductions are destined for internal use at the customer's only, the only exception being one
single back-up copy for archiving purposes.
ZEISS reserves the right to make modifications to this document without notice.

ZEISS Table of Contents
Table of Contents
1 General Information........................................................................ 6
1.1 Text Conventions and Link Types ........................................................................ 6
1.2 Explanation on Warnings and Additional Information ......................................... 7
1.3 Further Applicable Documents ............................................................................ 8
1.4 Contact............................................................................................................... 8
2 Safety ............................................................................................. 10
2.1 Intended Use ...................................................................................................... 10
2.2 General Safety Information ................................................................................. 11
2.2.1 Safe Operation Conditions .................................................................... 11
2.2.2 Requirements for Personnel .................................................................. 11
2.2.3 Preventive Maintenance ........................................................................ 12
2.2.4 Safe Handling of Spare Parts ................................................................. 12
2.3 Prevention of Hazards ......................................................................................... 12
2.3.1 Biological Hazards................................................................................. 12
2.3.2 Burn Hazards ........................................................................................ 12
2.3.3 Chemical Hazards.................................................................................. 13
2.3.4 Electrical Hazards .................................................................................. 13
2.3.5 High Pressure Hazards........................................................................... 14
2.3.6 Magnetic Field Hazards ......................................................................... 14
2.3.7 Mechanical Hazards .............................................................................. 15
2.3.8 Radiation Hazards ................................................................................. 16
2.3.9 Suffocation Hazards .............................................................................. 17
2.4 Warning Labels and Lights .................................................................................. 18
2.4.1 Warning Labels ..................................................................................... 18
2.5 Safety Devices and Interlocks .............................................................................. 22
2.5.1 Protective Cover Panels ......................................................................... 23
2.5.2 Main Disconnect Device ........................................................................ 23
2.5.3 Circuit Breaker ...................................................................................... 24
2.5.4 Emergency Off (EMO) Option External................................................... 24
2.5.5 Vacuum Locking Device ........................................................................ 26
2.5.6 Interlock System of Optional Airlock...................................................... 27
2.5.7 Energy Isolating Devices........................................................................ 27
3 Product and Functional Description ................................................ 28
3.1 System Overview................................................................................................. 28
3.2 Main Components .............................................................................................. 30
3.2.1 Vacuum System .................................................................................... 30
3.2.2 Vacuum System Pressure Modes ........................................................... 31
3.2.3 Electron Optical Column | Gemini 1....................................................... 32
3.2.4 Gun Modes ........................................................................................... 34
3.2.5 Detectors .............................................................................................. 34
3.2.6 Specimen Stage | Sigma 300 ................................................................. 53
3.2.7 Specimen Stage | Sigma 500 ................................................................. 55
3.3 Optional Components and Accessories................................................................ 56
3.3.1 Optional Detectors................................................................................ 56
3.3.2 Dual Joystick ......................................................................................... 68
3.3.3 Control Panel ........................................................................................ 69
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 3

 Table of Contents ZEISS
3.4 Software Description........................................................................................... 71
3.4.1 SmartSEM User Interface....................................................................... 71
3.4.2 Graphical Control Elements ................................................................... 72
3.4.3 User Access Levels and User Privileges................................................... 73
3.4.4 SmartSEM Program Suite ...................................................................... 74
4 Installation...................................................................................... 76
5 Commissioning and First Operating Steps....................................... 77
5.1 Prerequisites for Commissioning and Operation .................................................. 78
5.2 Switching On the Microscope System.................................................................. 78
5.2.1 Energizing the Microscope .................................................................... 78
5.2.2 Starting the Microscope ........................................................................ 80
5.3 Starting the Software.......................................................................................... 81
5.3.1 Calling up the Help................................................................................ 81
5.3.2 Keyboard Shortcuts............................................................................... 82
5.4 Acquiring an Image............................................................................................. 83
5.4.1 Preparing the Specimen Holder ............................................................. 84
5.4.2 Loading the Specimen Chamber............................................................ 85
5.4.3 Locating the Specimen.......................................................................... 89
5.4.4 Switching on the Gun ........................................................................... 90
5.4.5 Switching on the EHT............................................................................ 90
5.4.6 Acquiring an Image............................................................................... 91
5.4.7 Optimizing the Image............................................................................ 93
5.4.8 Saving the Image .................................................................................. 96
5.5 Modifying Gun Parameters.................................................................................. 96
5.5.1 Selecting the Gun Mode........................................................................ 96
5.5.2 Measuring the Probe Current ................................................................ 97
5.5.3 Setting the Probe Current...................................................................... 98
5.5.4 Continuously Modifying the Probe Current (License: OPTIPROBE) .......... 98
5.5.5 Changing the Extractor Voltage ............................................................ 98
5.6 Finding Appropriate Detector Settings................................................................. 99
5.6.1 Selecting a Detector.............................................................................. 99
5.6.2 Setting up the InLens SE Detector ......................................................... 100
5.6.3 Setting up the InLensDuo Detector........................................................ 100
5.6.4 Setting up the SE Detector .................................................................... 101
5.6.5 Setting up the VPSE Detector ................................................................ 102
5.6.6 Setting up the C2D Detector ................................................................. 103
5.6.7 Setting up the aBSD1-LH Detector......................................................... 104
5.6.8 Setting up the HDAsB Detector ............................................................. 105
5.6.9 Setting up the Manually Insertable BSD Detector................................... 107
5.6.10 Setting up the YAG BSD Detector.......................................................... 108
5.6.11 Setting up the CL Detector.................................................................... 108
5.7 Working with Variable Pressure...........................................................................109
5.7.1 Changing to Standard VP Mode............................................................ 109
5.7.2 Returning to HV Mode .......................................................................... 110
5.8 Working with Optional Accessories.....................................................................110
5.8.1 Using the Optional Airlock .................................................................... 110
5.8.2 Using the Optional Plasma Cleaner........................................................ 118
5.8.3 Using the Optional Raman Spectroscopic Microscope ........................... 122
5.9 Shutting down the System ..................................................................................126
5.9.1 Finishing the Work Session.................................................................... 126
5.9.2 Closing the SmartSEM User Interface .................................................... 127
5.9.3 De-energizing the Microscope............................................................... 128
5.10 Performing an Emergency Shutdown ..................................................................129
4 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS Table of Contents
6 Care and Maintenance ....................................................................130
6.1 Safety During Cleaning and Maintenance............................................................130
6.2 Maintenance Schedule........................................................................................130
6.3 Maintenance Work .............................................................................................130
6.3.1 Change of Consumables and Chemicals ................................................ 130
6.3.2 Servicing the Pre-vacuum Pump ............................................................ 131
6.4 Care and Cleaning Work .....................................................................................131
6.4.1 Cleaning the Microscope....................................................................... 132
7 Troubleshooting .............................................................................133
7.1 Chamber.............................................................................................................134
7.1.1 Initializing the Stage.............................................................................. 134
7.1.2 Defining the Post Initialization Position of the Stage.............................. 135
7.1.3 Changing the Joystick TV Angle ............................................................ 135
7.1.4 Resetting the Touch Alarm .................................................................... 136
7.1.5 Checking the Water Flow and Temperature .......................................... 136
7.1.6 Replacing the Chamber Door Seal ......................................................... 137
7.2 Column...............................................................................................................138
7.2.1 Baking out the Gun Head...................................................................... 138
7.2.2 Calibrating OptiProbe............................................................................ 140
7.3 Power Circuit ......................................................................................................140
7.3.1 Checking the Position of the Circuit Breakers ........................................ 140
7.4 Detectors ............................................................................................................141
7.4.1 Lubricating the Rod............................................................................... 141
7.5 PC.......................................................................................................................142
7.5.1 Cleaning up the PC ............................................................................... 142
8 Decommissioning and Disposal.......................................................143
8.1 Decommissioning................................................................................................143
8.2 Transport and Storage ........................................................................................144
8.3 Disposal ..............................................................................................................146
8.4 Decontamination ................................................................................................146
9 Technical Data and Conformity.......................................................147
9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP..................147
9.2 Performance Data and Specifications | Sigma 500 and Sigma 500 VP..................151
9.3 Installation Requirements....................................................................................155
9.3.1 Layout and Connections........................................................................ 159
9.3.2 System Layout....................................................................................... 160
9.4 Applicable Standards and Regulations.................................................................161
10 Parts and Tools...............................................................................162
10.1 Tools and Accessories .........................................................................................162
Glossary ..........................................................................................163
Index...............................................................................................167
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 5

1 General Information | 1.1 Text Conventions and Link Types ZEISS
1 General Information
This Instruction Manual is considered to be part of the SEM workstation. Herein after referred to
as Microscope System.
This Instruction Manual contains basic steps and safety information that must be observed during
operation and maintenance. Therefore, it must be read by the operator prior to commissioning
and must always be available at the place of use of the Microscope System. This Instruction Man-
ual is a permanent part of the Microscope System and, if resold, must remain with the Microscope
System or be handed over to the new owner.
This manual contains the following chapters:
Chapter Content
General Information Explains the function and structure of this manual.
Safety Summarizes important safety details.
Product and Func-
tional Description
Describes the microscope and its main hardware components and
provides an overview of the user interface.
Installation Refers to the ZEISS service representatives.
Commissioning and
First Operating Steps
Contains information about starting the microscope and the software,
obtaining a first image, adjusting important parameters, and power-
ing down the microscope, also in emergency.
Care and Mainte-
nance
Informs you about preventive maintenance work and intervals and the
change of consumables.
Troubleshooting Describes common issues and how to resolve them.
Decommissioning
and Disposal
Summarizes notes on shutdown and disposal.
Technical Data and
Conformity
Lists hardware specifications as well as the manufacturer’s declaration
that the equipment is in conformity with all applicable European Di-
rectives.
Parts and Tools Lists consumables, spare parts, tools, and accessories.
Glossary Lists important technical terms.
Index Lists keywords to help you find relevant information quickly.
1.1 Text Conventions and Link Types
The following text conventions and link types are used:
Text convention Meaning
Click Start.
Press the STANDBY button.
Press [Enter] on the keyboard.
The names of controls and important infor-
mation are shown in bold letters.
Press <Ctrl+Alt+Del> Press several keys on the keyboard simultane-
ously.
Select Tools > Goto Control Panel > Air-
lock.
Follow a path in the software.
6 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 1 General Information | 1.2 Explanation on Warnings and Additional Information
Text convention Meaning
Text input Text to be entered by the user
Programming and Macros Anything typed in literally during program-
ming, including, for example, macro codes,
keywords, data types, method names, vari-
ables, class names, and interface names.
Tab.1: Text convention
Link type Meaning
See: Text Conventions and Link Types [
} 6].Link to further information for this topic.
https://www.zeiss.com/corporate/int/
home.html
Link to a website on the internet.
Tab.2: Link types
1.2 Explanation on Warnings and Additional Information
DANGER, WARNING, CAUTION, and NOTICE are standard signal words used to determine the lev-
els of hazards and risks of personal injury and property damage. Not only the safety instructions
and warnings in the Safety chapter are to be considered but also the safety instructions and
warnings in other chapters. Failure to comply with these instructions and warnings can result in
both personal injury and property damage and involve the loss of any claims for damages.
The following symbols and warnings indicating dangerous situations and hazards are used in this
document.
DANGER
Type and source of danger
DANGER indicates an imminently hazardous situation which, if not avoided, will result in death
or serious injury.
WARNING
Type and source of danger
WARNING indicates a potentially hazardous situation which, if not avoided, may result in
death or serious injury.
CAUTION
Type and source of danger
CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor
or moderate injury.
NOTICE
Type and source of danger
NOTICE indicates a potentially harmful situation which, if not avoided, may result in property
damage.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 7

1 General Information | 1.3 Further Applicable Documents ZEISS
Info
Provides additional information or explanations to help users better understand the contents
of this Instruction Manual.
1.3 Further Applicable Documents
Please take also note of the following documents:
Brochures and
Certificates
For Brochures, ISO certificates, CSA certificates and EU declarations of conformity ask your ZEISS
Sales & Service Partner.
Installation
Requirements
For more details on technical data, refer to the corresponding Installation Requirements.
Local and National
health and safety
regulations
Local and national health and safety regulations should be adhered to for the site and the use of
the Microscope System. Please consult with your ZEISS Sales & Service Partner in the event of
these regulations conflicting with the installation requirements of the Microscope System.
Safety data sheets Observe the enclosed safety data sheets. The instructions and guidelines given in the respective
safety data sheets must be complied with.
Software For more detailed information on how to use SmartSEM, please refer to its Online Help or ask
your ZEISS Sales & Service Partner.
System and 3rd
Party Components,
Accessories
The Microscope System can be configured in many ways. Information about the individual com-
ponents, enhancements and accessories can be obtained from your ZEISS Sales & Service Partner.
Also refer to the 3rd Party documentation of the manufacturer.
1.4 Contact
If you have any questions or problems, please contact your local ZEISS Sales & Service Partner or
one of the following addresses:
Headquarters
Phone: [phone]
Fax: [phone]
Email: [email protected]
Courses and training
Email: [email protected]
ZEISS Portal
The ZEISS Portal (https://portal.zeiss.com/) offers various services that simplify the daily work with
your ZEISS systems (machines and software). It is being constantly improved and extended to bet-
ter meet your needs and requirements.
ZEISS Sales & Service Partner
You can find a ZEISS Sales & Service Partner in your area under https://www.zeiss.de/mikroskopie/
website/forms/sales-and-service-contacts.html.
Service Germany
Phone: [phone]
8 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 1 General Information | 1.4 Contact
Fax: [phone]
Email: [email protected]
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 9

2 Safety | 2.1 Intended Use ZEISS
2 Safety
This chapter contains general requirements for safe working practices. Any person using the Mi-
croscope System or commissioned with installation or maintenance must read and observe these
general safety instructions. Knowledge on basic safety instructions and requirements is a precon-
dition for safe and fault-free operation. Operational safety of the supplied Microscope System is
only ensured if it is operated according to its intended use.
If any work is associated with residual risks, this is mentioned in the relevant parts of this docu-
ment in a specific note. When components must be handled with special caution, they are
marked with a warning label. These warnings must always be observed.
2.1 Intended Use
The microscope has been designed to generate an image or to analyze appropriate specimens,
which is achieved by scanning a focused electron beam across the specimen (SEM Imaging).
In addition to microscopic examination, the microscope also allows for the modification of appro-
priate specimens. For these purposes, the specimen is placed in the evacuated specimen chamber.
The microscope has been designed for the following applications:
§Imaging
Image generation and specimen analysis can be performed by means of a focused electron
beam that is scanned across the specimen.
This application allows for the analysis of surface structures and near-surface structures of ap-
propriate specimens.
§Analytics
Elemental analysis with optional EDS spectroscopy at the focused electron beam position.
Crystal structure and orientation with optional EBSD detectors.
Info
Not for therapeutic, treatment or medical diagnostic evidence.
Info
Not all products are available in every country. Contact your local ZEISS representative for
more information.
SmartSEM
Software
The SmartSEM software is intended for the operation of scanning electron microscopes (SEMs).
The SmartSEM software has to be run exclusively on a personal computer delivered by ZEISS. Any
other applications are not allowed.
Regarding the operation of the microscope, the following regulations must be met:
§Only operate the microscope according to the operating conditions after correct installation
by a ZEISS service representative.
§The microscope is only to be used by operators who have been trained by a ZEISS service rep-
resentative. Basic operator training and safety instructions will be provided within the scope
of the initial start-up by ZEISS. Make sure that everyone who operates the microscope only
performs the tasks for which he/she is trained.
§Operators of the microscope must not deviate from the instructions provided in this manual.
§Only perform preventive maintenance tasks described in this manual. All tasks of mainte-
nance, service, and repair not described in this manual have to be performed by an authorized
ZEISS service representative.
§The microscope is to be used in a laboratory environment for commercial and scientific pur-
poses only.
Using the microscope for any other purpose is not allowed and can be hazardous.
10 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 2 Safety | 2.2 General Safety Information
Improper use can easily lead to impairment of its function or even damage to the Microscope Sys-
tem. Damage caused by incorrect operation, negligence or unauthorized intervention, in particu-
lar by removing, modifying or replacing parts of the device, can not be held liable by the device
manufacturer. Third-party devices or components that are not expressly approved by ZEISS may
not be used.
2.2 General Safety Information
This Instruction Manual must be read before commissioning in order to ensure safe and uninter-
rupted operation. Pay particular attention to all listed safety notes. Make sure, that
§the operating personnel has read and understood this Instruction Manual, associated docu-
ments and particularly all safety regulations and instructions, and applies the same.
§the local and national safety and accident prevention regulations must be observed, as well as
the applicable laws and regulations in your country.
§this Instruction Manual is always available with/together with the Microscope System.
§the Microscope System is always in perfect condition.
§the Microscope System is secured against access by unauthorized persons.
§maintenance and repair work, remodeling, removal or replacement of components, as well as
any other intervention in the Microscope System not described in this Instruction Manual, may
only be carried out by the manufacturer ZEISS or persons expressly authorized by ZEISS to do
so.
2.2.1 Safe Operation Conditions
If the product safety labels are covered or worn or if any of the safety devices are not in proper
working condition, operation of the microscope can be hazardous.
§Periodically check the function of safety equipment and that all protective cover panels are in-
stalled.
§Always follow the instructions given on the safety labels.
§Inspect and clean the product safety labels to maintain good legibility.
2.2.2 Requirements for Personnel
Deviating from the instructions given in this manual and on the safety labels can be hazardous or
can lead to property damage.
§Do not operate the microscope until you have completely read and understood the entire user
documentation delivered with the microscope.
§Observe all safety labels on the microscope and within this manual.
§Only operate the microscope according to the operating conditions after correct installation
by a ZEISS service representative.
§Only ZEISS service representatives, who have specialized knowledge of radiation protection,
are permitted to service the microscope.
Operator Training
Within the scope of initial start-up, the ZEISS service representative will perform a basic operator
training. The basic operator training consists of fundamental operation procedures including
safety instructions. Besides, an introduction to basic maintenance tasks will be given for an ad-
vanced operator, who has to be an electrically skilled person. The training performed must be
documented appropriately.
Special application training is offered on request.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 11

2 Safety | 2.3 Prevention of Hazards ZEISS
2.2.3 Preventive Maintenance
Deviating from the maintenance and repair tasks described in this manual can be hazardous or
can lead to property damage:
§Only perform preventive maintenance and repair tasks described in this manual.
§All tasks of maintenance, service, and repair not described in this manual have to be per-
formed by an authorized ZEISS service representative.
§To maintain best performance of the microscope, it is essential to perform preventive mainte-
nance on a regular basis. Moreover, it is recommended that you conclude a service contract
with your local ZEISS service representative or organization.
2.2.4 Safe Handling of Spare Parts
Using spare parts that are not provided by ZEISS can be hazardous or can lead to property dam-
age:
§Only genuine parts supplied by ZEISS are to be used in servicing the microscope.
§Contact your ZEISS service representative for information regarding how to order spare parts.
§Unless authorized by ZEISS, all spare parts should be installed by a ZEISS service representa-
tive.
2.3 Prevention of Hazards
This section summarizes potential hazards and recommended safety precautions. Failure to follow
the safety instructions and instructions may result in personal injury and property damage.
2.3.1 Biological Hazards
WARNING
Biological hazards
Biological substances may pose a threat to the health of humans and other living organisms.
4Keep a logbook of the biological substances loaded into the microscope and show it to
the ZEISS service representatives before they perform any work on the microscope.
2.3.2 Burn Hazards
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4After the bakeout procedure, let surfaces cool down before working around the column.
4Only advanced operators are allowed to perform the bakeout procedure.
12 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 2 Safety | 2.3 Prevention of Hazards
2.3.3 Chemical Hazards
WARNING
Aggressive or toxic chemicals
Aggressive or toxic chemicals can cause chemical burns.
4When handling aggressive or toxic chemicals, wear suitable protective clothing, gloves,
and eye/face protection.
4Do not eat, drink, or smoke while handling toxic chemicals.
4Refer to local safety regulations.
4Read and follow the instructions in the material safety data sheet of the chemical. The ma-
terial safety data sheet can be obtained from the supplier of the chemicals.
CAUTION
Oil mist around the rotary pump
The rotary pump RV12 may emit oil mist especially at high gas load (e.g. door accidently
open). Inhaled oil mist is harmful to health.
4Regularly service the oil mist filter (refer to pump manual and material safety data sheets).
Recommended is the connection to an exhaust line.
NOTICE
Environmental risk due to disposal of aggressive or toxic chemicals
When disposing of aggressive or toxic chemicals, there is a threat of damage to the environ-
ment.
4When disposing of waste that has been generated during a service operation (e.g. used ro-
tary pump oil), comply with all national and local safety and environmental protection reg-
ulations.
2.3.4 Electrical Hazards
WARNING
Hazardous voltage inside the microscope
High voltages are present inside the microscope. Contact may cause burn or electrical shock.
4Do not remove any parts.
4Only authorized ZEISS service representatives are allowed to service the microscope.
4Do not try to service the microscope yourself.
4Disconnect power before opening.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 13

2 Safety | 2.3 Prevention of Hazards ZEISS
WARNING
High leakage current
High leakage currents are present in the microscope. Contact may cause burn or electrical
shock.
4Ensure proper grounding. For more information, refer to the Installation Requirements
document.
4Do not operate the microscope without the separate ground connection.
WARNING
Residual voltage at the mains plug
After unplugging the mains plug residual voltage is present at the pins of the plug which may
cause electrical shock.
4After unplugging the mains plug wait at least 5 s before touching the pins of the mains
plug.
2.3.5 High Pressure Hazards
WARNING
High pressure in gas cylinders
Gas cylinders containing for example nitrogen or compressed air have a high internal pressure
of approximately 200bar. If not properly handled, the contained gas can abruptly escape and
cause the gas cylinder to move in an uncontrollable manner.
4Observe all safety labels on the gas cylinders and all safety instructions given by the gas
cylinder manufacturer.
4Always operate gas cylinders in an upright position and secure them so they will not tip
over.
4Before transporting gas cylinders, place protective caps on them.
2.3.6 Magnetic Field Hazards
WARNING
Malfunction of medical devices near ion getter pumps
Magnetic fields present at the ion getter pumps may disturb the function of medical devices.
The magnetic fields are also present if the microscope is switched off.
If you wear medical implants that are susceptible to magnetic fields (e.g. cardiac pacemakers),
do the following:
4Keep a distance of at least 30cm from the ion getter pumps.
4Follow the safety instructions provided by the pump manufacturer.
14 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 2 Safety | 2.3 Prevention of Hazards
2.3.7 Mechanical Hazards
WARNING
Crushing hazard when lowering the microscope
The microscope and its components are heavy. When the load is lowered during transport and
positioning, body parts can be crushed.
4Maintain a safe distance.
4Do not walk or place your hands or feet under the load while it is being lowered.
4Wear safety shoes and gloves.
CAUTION
Crushing hazard when moving ancillary equipment
The microscope and its components are heavy. When the load is lowered during transport and
positioning, body parts can be crushed.
Ancillary equipment associated with the microscope is very heavy. When the chiller, the rotary
pump(s), or the vibration block is moved, body parts can be crushed.
4Take care when moving ancillary equipment.
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4Always close the chamber door before moving the specimen stage.
4To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
CAUTION
Closing the chamber door
Fingers can be pinched when closing the chamber door.
4Use the door handle to close the chamber door.
4Ensure not to get your fingers caught in the chamber door gap.
CAUTION
Fingers between isolated table and plinth
Fingers can be crushed in the gap between isolated table and plinth. The gap varies during op-
eration and while the air feet are adjusted.
4Do not place your fingers between isolated table and plinth.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 15

2 Safety | 2.3 Prevention of Hazards ZEISS
NOTICE
Short working distance
When opening the chamber door, the microscope or specimen can be damaged if the speci-
men stage is at a short working distance. If a BSD detector is inserted, it can be damaged as
well.
4Always retract any retractable detectors before opening the chamber door.
4Always move the specimen stage to a long working distance before opening the chamber
door.
NOTICE
Contamination caused by fingerprints
Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping
times.
4Always wear lint-free gloves when touching the specimen, specimen holder, or stage.
2.3.8 Radiation Hazards
CAUTION
Laser radiation class 1M
If the optional Raman Spectrometer is installed, then diffuse laser reflection may be visible
when the chamber door is open.
4Do not view directly with optical instruments into the laser reflection.
WARNING
Radiation hazard due to X-rays
X-rays are generated inside the microscope during operation. This is unavoidable because elec-
trons are accelerated by voltages up to 30kV.
4Do not remove any parts around the column and chamber that are essential for radiation
protection.
4Use genuine ZEISS parts exclusively.
4Ensure that all local safety and X-ray protection regulations are met.
4Only authorized ZEISS service representatives are allowed to service the microscope.
The microscope is equipped with several radiation protection devices, which, under regular oper-
ating conditions, ensure that the microscope operates in accordance with the German X-ray pro-
tection regulation (RöV), the German radiation protection regulation (StrSchV) as well as with the
EC Directive 2013/59/EURATOM.
In the EU, the operation of the microscope is permission-free as the following requirements are
fulfilled:
§The acceleration voltage is limited to 30 kV.
§The local dose rate at a distance of 0.1 m from the accessible surface of the microscope does
not exceed 1 μSv/h.
§A respective label is attached to the microscope.
Outside the EU, the user of the microscope has to comply with the local regulations of the coun-
try where the microscope is operated.
16 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 2 Safety | 2.3 Prevention of Hazards
Contact Radiation
Protection
For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss
AG, 73447 Oberkochen, Germany
phone: [phone]
2.3.9 Suffocation Hazards
WARNING
Suffocation hazard due to lack of oxygen
Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange. Inhal-
ing nitrogen may cause unconsciousness.
4During specimen exchange, keep the chamber door open as short as possible.
4Do not inhale the air from within the specimen chamber.
4Ensure that the area around the microscope is sufficiently vented.
4If you begin to experience symptoms of asphyxia (for example: rapid breathing, loss of
mental alertness and/or muscular coordination, depression of sensations, emotional insta-
bility, fatigue) leave the room immediately and inform the facility’s safety officer.
Concerning the hazards of nitrogen installations and associated safety precautions refer to the
current version of the guideline IGC Doc 44/18: Hazards of Oxygen-Deficient Atmospheres, pub-
lished by EIGA (European Industrial Gases Association).
To download the document:
1. Go to EIGA homepage www.eiga.eu.
2. Select Publications > EIGA Documents.
3. From the list, select Doc. 44/18.
4. Click Download.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 17

2 Safety | 2.4 Warning Labels and Lights ZEISS
2.4 Warning Labels and Lights
All locations that may pose specific hazards are marked with additional warning labels (pic-
tograms) on the Microscope System. These warning labels indicate potential hazards and form
part of this Instruction Manual. They are to be kept in clean and easily legible condition. Damaged
or illegible warning labels must be replaced immediately. Always observe all warning labels on the
complete Microscope System.
2.4.1 Warning Labels
Appropriate safety labels on the microscope warn operators of hazards. Each safety label is af-
fixed close to the point where a particular hazard exists. Several labels also provide legal informa-
tion.
Front Side of
Microscope
2
1
3
4
5
1
2
4
5
3
18 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

ZEISS 2 Safety | 2.4 Warning Labels and Lights
Rear Side of
Microscope
6
7
Rear Side of Plinth
8
9
10
11
13
12
CEE Connector
14
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 19

2 Safety | 2.4 Warning Labels and Lights ZEISS
The safety labels always need to be attached to the correct spots at the microscope. If a safety la-
bel is lost or unreadable, it needs to be reordered via the following reorder numbers:
Position and Figure of the Safety La-
bel
Description
1
At the front of the chamber door. Only present if the optional Raman Spectrometer
is installed.
Laser Radiation
Class 1M laser product
Do not view directly with optical instruments.
Diffuse laser reflection possible when chamber
door is open.
Reorder no. 344700-0033-000-15en
2
At the front of the chamber door.
347800-0007-000
Nitrogen Hazard
WARNING
Danger of suffocation
Ensure area around
instrument is sufficiently
ventilated
Nitrogen Hazard
Danger of suffocation
Ensure area around instrument is sufficiently ven-
tilated
Reorder no. 347800-0007-000
3
At the front of the chamber door.
CAUTION
Risk ofinjury
347800-0033-000-02en
Fingers could be trapped.
Always close the chamber door
before you move the stage.
Risk of injury
Fingers could be trapped. Always close the cham-
ber door before you move the stage.
Reorder no. 347800-0033-000-02en
4
At the front of the chamber door.
Risk ofdamage
CAUTION
347800-0033-000-04en
The FESEM or specimen could be
damaged if specimen stage is at a
short working distance.
Move the specimen stage to a long
working distance before opening
the chamber door.
Risk of damage
The FESEM or specimen could be damaged if
specimen stage is at a short working distance.
Move the specimen stage to a long working dis-
tance before opening the chamber door.
Reorder no. 347800-0033-000-04en
5
At the front of the plinth
Avoid injury
CAUTION
347800-0033-000-01en
Make sure you have read and
understood the instruction
manual before operating this
product.
Avoid injury
Make sure you have read and understood the in-
struction manual before operating this product.
Reorder no. 347800-0033-000-01en
6
At the rear of the microscope
347800-0018-000
Interaction with metallic objects
may produce Pinch Hazards.
Persons with Medical Implants
KEEP BACK 12 inches.
Magnetic Field
CAUTION
Magnetic Field
Interaction with metallic objects may produce
Pinch Hazards.
Persons with Medical Implants KEEP BACK 12
inches.
Reorder no. 347800-0018-000
20 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006